Patent
US 10,325,812Patent
Atlas literature
Patent
US 10,325,812Patent drawings and their descriptions. Click a drawing to enlarge it.
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A FinFET device, comprising: a fin formed in a semiconductor substrate, said semiconductor substrate comprising a first semiconductor material; a gate structure positioned above a portion of said fin; source and drain regions positioned on opposite sides of said gate structure; a silicon-carbide (SiC) semiconductor material positioned above said fin in said source region and said drain region, wherein said silicon-carbide (SiC) semiconductor material is different from said first semiconductor material; a graphene contact positioned on and in direct physical contact with said silicon- carbide (SiC) se m iconductor m aterial in each of said source region and said drain region; and first and second contact structures that are conductively coupled to said graphene contacts in said source region and said drain region, respectively.
The FinFET device of claim 1, wherein said first silicon-carbide (SiC) semiconductor material comprises one of 3C-SiC, a carbon-doped silicon, a hydrogen-rich carbon-doped silicon, an amorphous silicon-carbide, and a polycrystalline silicon-carbide.
The FinFET device of claim 1, further comprising a second semiconductor material positioned between said fin and said silicon-carbide (SiC) semiconductor material, wherein said second semiconductor material is different from said first semiconductor material, and wherein said silic o n-carbide (SiC) semic o nduct o r material is p o siti o ned o n and in direct physical contact with said second semic o nduct o r material.
4. The FinFET device of claim 1, wherein said fin is made entirely of said first semiconductor material.
The FinFET device of claim 1, wherein a lower portion of said fin comprises said first semic o nduct o r material and an upper portion of said fin comprises a third semic o nduct o r material that is different fro m said fi rst semic o nduct o r material.
8. The FinFET device of claim 1, wherein said gate structure is a replacement gate structure for said FinFET device.
The integrated circuit product of claim 1 5, wherein said first and sec o nd f ins are made entirely of said fi rst semiconductor material.
The integrated circuit pr o duct of claim 1 5, wherein a lower p o rti o n of each of said fi rst and sec o nd fi ns is m ade of said fi rst semic o nduct or m aterial and an upper portion of each of said first and sec o nd fins is made of a fourth semic o nduct o r materia l that is different fro m said first semic o nduct o r material.
A FinFET device, comprising: a fin f o rmed in a semic o nduct o r substrate, said semic o nduct o r substrate comprising a fi rst semic o nduct o r material; a gate structure p o siti o ned above a portion o f said fin; so urce and drain regions p o siti o ned on o pposite sides of said gate structure; a sec o nd se mico nduct o r material p o siti o ned above said fi n in said s o urce regi o n and said drain regi o n, wherein said sec o nd semic o nduct o r material is different fro m said first semic o nduct o r material; a silicon-carbide (SiC) semiconductor material positioned above said fin in said so urce reg io n and sa i d dra in reg io n, wherein sa i d s ilico n-carbide (S iC) semic o nduct o r material is different fro m said first semic o nduct o r material; a graphene contact positioned on and in direct physical contact with said silicon- carbide (SiC) semiconductor material in each of said source region and said drain region; and first and second contact structures that are conductively coupled to said graphene contacts in said s o urce regi o n and said drain regi o n, respectively.
The FinFET device of claim 9, wherein said silicon-carbide (SiC) semiconductor material is positioned o n and in direct physical contact with said second semiconductor material in said source and drain regions.
1 1. The FinFET device of claim 9, wherein said FinFET device is a PMOS FinFET device and said second semiconductor material comprises silicon germanium SVG 15950291.04-11-2018.JFV₈₇G₈₆RXEAPX1.CLM.3.20.311.2351.525.2397.svg 0.153 0.713 Chemistry Black and white where x ranges from approximately 0.1 to approximately 0. 9).
1 2. The FinFET device of claim 9, wherein said fi n is made entirely of said first semic o nduct o r materia l.
The FinFET device of claim 9, wherein a lower p o rti o n of said fin comprises said first semic o nduct o r material and an upper p o rti o n of said fi n comprises a third semic o nduct o r materia l that is different fro m said first semic o nduct o r material.
An integrated circuit product, comprising a first fin of a PM O S FinFET device formed in a semiconductor substrate, said semiconductor substrate comprising a f ir st semiconductor material; a first gate structure of said PMOS FinFET device p o siti o ned above a p o rti o n of said fi rst fin; first source and drain regions of said PMOS FinFET device p o siti o ned o n opposite sides of said first gate structure; a second fin of an N M OS FinFET device formed in said semiconductor substrate; a second gate structure o f said NMOS FinFET device p o siti o ned above a p o rti o n of said second fin; second source and drain regions of said NMOS FinFET device positioned on opposite sides of said second gate structure; a second semiconductor material positioned on said first fin in said first source and drain regions of said PMOS Fin F ET device, wherein said second semic o nduct o r material is different fro m said first semic o nduct o r material; a third semic o nduct o r material p o siti o ned o n said second fi n in said second source and drain regions of said NMOS FinFET device, wherein said third semiconductor material is different fro m said first and sec o nd semiconductor materials; a silicon-carbide (SiC) semiconductor material positioned o n and in direct physical contact with said sec o nd semiconductor material in said first source and drain regions of said P M OS FinFET device and on and in direct physical contact wi th sa i d th ir d sem ico nduct or m ater i al in sa i d sec o nd source and drain reg ions of said NMOS FinFET device, said silicon-carbide (SiC) semiconductor material being different from said first semiconductor material; a graphene contact positioned on and in direct physical contact with said silicon- carbide (SiC) semiconductor material in each of said first source and drain regions of said PM O S FinFET device and in said second source and drain regions of said NMOS FinFET device; and a plurality of contact structures, wherein each of said plurality of contact structures is conductively coupled to a respective one of said graphene contacts.
The integrated circuit product of claim 15, wherein said second semiconductor material c ompri ses s ilicon g erman i um (S SVG 15950291.04-11-2018.JFV₈₇G₈₆RXEAPX1.CLM.5.19.1173.2027.1339.2073.svg 0.153 0.553 Chemistry Black and white where x ranges fro m approximately 0. 1 to approximately 0.9).
20. The integrated circuit pr o duct of cla im 19, wherein sa i d fourth se mico nduct or material comprises one of silicon germanium (S SVG 15950291.04-11-2018.JFV₈₇G₈₆RXEAPX1.CLM.6.9.1339.945.1504.991.svg 0.153 0.55 Chemistry
Layer stacks claimed or described, ordered top of device to substrate.
FinFET device with SiC epi and graphene contacts (no intermediate epi layer)
FinFET device with intermediate epi layer, SiC epi, and graphene contacts
Materials described outside the worked examples.
first semiconductor material (substrate)
silicon-carbide (SiC) semiconductor material
SiC
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
Thickness | 2–4 nm | — |
Temperature |
Patent
Atlas literature
Patent
US 10,325,812Patent drawings and their descriptions. Click a drawing to enlarge it.
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A FinFET device, comprising: a fin formed in a semiconductor substrate, said semiconductor substrate comprising a first semiconductor material; a gate structure positioned above a portion of said fin; source and drain regions positioned on opposite sides of said gate structure; a silicon-carbide (SiC) semiconductor material positioned above said fin in said source region and said drain region, wherein said silicon-carbide (SiC) semiconductor material is different from said first semiconductor material; a graphene contact positioned on and in direct physical contact with said silicon- carbide (SiC) se m iconductor m aterial in each of said source region and said drain region; and first and second contact structures that are conductively coupled to said graphene contacts in said source region and said drain region, respectively.
The FinFET device of claim 1, wherein said first silicon-carbide (SiC) semiconductor material comprises one of 3C-SiC, a carbon-doped silicon, a hydrogen-rich carbon-doped silicon, an amorphous silicon-carbide, and a polycrystalline silicon-carbide.
The FinFET device of claim 1, further comprising a second semiconductor material positioned between said fin and said silicon-carbide (SiC) semiconductor material, wherein said second semiconductor material is different from said first semiconductor material, and wherein said silic o n-carbide (SiC) semic o nduct o r material is p o siti o ned o n and in direct physical contact with said second semic o nduct o r material.
4. The FinFET device of claim 1, wherein said fin is made entirely of said first semiconductor material.
The FinFET device of claim 1, wherein a lower portion of said fin comprises said first semic o nduct o r material and an upper portion of said fin comprises a third semic o nduct o r material that is different fro m said fi rst semic o nduct o r material.
8. The FinFET device of claim 1, wherein said gate structure is a replacement gate structure for said FinFET device.
The integrated circuit product of claim 1 5, wherein said first and sec o nd f ins are made entirely of said fi rst semiconductor material.
The integrated circuit pr o duct of claim 1 5, wherein a lower p o rti o n of each of said fi rst and sec o nd fi ns is m ade of said fi rst semic o nduct or m aterial and an upper portion of each of said first and sec o nd fins is made of a fourth semic o nduct o r materia l that is different fro m said first semic o nduct o r material.
A FinFET device, comprising: a fin f o rmed in a semic o nduct o r substrate, said semic o nduct o r substrate comprising a fi rst semic o nduct o r material; a gate structure p o siti o ned above a portion o f said fin; so urce and drain regions p o siti o ned on o pposite sides of said gate structure; a sec o nd se mico nduct o r material p o siti o ned above said fi n in said s o urce regi o n and said drain regi o n, wherein said sec o nd semic o nduct o r material is different fro m said first semic o nduct o r material; a silicon-carbide (SiC) semiconductor material positioned above said fin in said so urce reg io n and sa i d dra in reg io n, wherein sa i d s ilico n-carbide (S iC) semic o nduct o r material is different fro m said first semic o nduct o r material; a graphene contact positioned on and in direct physical contact with said silicon- carbide (SiC) semiconductor material in each of said source region and said drain region; and first and second contact structures that are conductively coupled to said graphene contacts in said s o urce regi o n and said drain regi o n, respectively.
The FinFET device of claim 9, wherein said silicon-carbide (SiC) semiconductor material is positioned o n and in direct physical contact with said second semiconductor material in said source and drain regions.
1 1. The FinFET device of claim 9, wherein said FinFET device is a PMOS FinFET device and said second semiconductor material comprises silicon germanium SVG 15950291.04-11-2018.JFV₈₇G₈₆RXEAPX1.CLM.3.20.311.2351.525.2397.svg 0.153 0.713 Chemistry Black and white where x ranges from approximately 0.1 to approximately 0. 9).
1 2. The FinFET device of claim 9, wherein said fi n is made entirely of said first semic o nduct o r materia l.
The FinFET device of claim 9, wherein a lower p o rti o n of said fin comprises said first semic o nduct o r material and an upper p o rti o n of said fi n comprises a third semic o nduct o r materia l that is different fro m said first semic o nduct o r material.
An integrated circuit product, comprising a first fin of a PM O S FinFET device formed in a semiconductor substrate, said semiconductor substrate comprising a f ir st semiconductor material; a first gate structure of said PMOS FinFET device p o siti o ned above a p o rti o n of said fi rst fin; first source and drain regions of said PMOS FinFET device p o siti o ned o n opposite sides of said first gate structure; a second fin of an N M OS FinFET device formed in said semiconductor substrate; a second gate structure o f said NMOS FinFET device p o siti o ned above a p o rti o n of said second fin; second source and drain regions of said NMOS FinFET device positioned on opposite sides of said second gate structure; a second semiconductor material positioned on said first fin in said first source and drain regions of said PMOS Fin F ET device, wherein said second semic o nduct o r material is different fro m said first semic o nduct o r material; a third semic o nduct o r material p o siti o ned o n said second fi n in said second source and drain regions of said NMOS FinFET device, wherein said third semiconductor material is different fro m said first and sec o nd semiconductor materials; a silicon-carbide (SiC) semiconductor material positioned o n and in direct physical contact with said sec o nd semiconductor material in said first source and drain regions of said P M OS FinFET device and on and in direct physical contact wi th sa i d th ir d sem ico nduct or m ater i al in sa i d sec o nd source and drain reg ions of said NMOS FinFET device, said silicon-carbide (SiC) semiconductor material being different from said first semiconductor material; a graphene contact positioned on and in direct physical contact with said silicon- carbide (SiC) semiconductor material in each of said first source and drain regions of said PM O S FinFET device and in said second source and drain regions of said NMOS FinFET device; and a plurality of contact structures, wherein each of said plurality of contact structures is conductively coupled to a respective one of said graphene contacts.
The integrated circuit product of claim 15, wherein said second semiconductor material c ompri ses s ilicon g erman i um (S SVG 15950291.04-11-2018.JFV₈₇G₈₆RXEAPX1.CLM.5.19.1173.2027.1339.2073.svg 0.153 0.553 Chemistry Black and white where x ranges fro m approximately 0. 1 to approximately 0.9).
20. The integrated circuit pr o duct of cla im 19, wherein sa i d fourth se mico nduct or material comprises one of silicon germanium (S SVG 15950291.04-11-2018.JFV₈₇G₈₆RXEAPX1.CLM.6.9.1339.945.1504.991.svg 0.153 0.55 Chemistry
Layer stacks claimed or described, ordered top of device to substrate.
FinFET device with SiC epi and graphene contacts (no intermediate epi layer)
FinFET device with intermediate epi layer, SiC epi, and graphene contacts
Materials described outside the worked examples.
first semiconductor material (substrate)
silicon-carbide (SiC) semiconductor material
SiC
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
Thickness | 2–4 nm | — |
Temperature |
Patent
Atlas literature
Patent
US 10,325,812Patent drawings and their descriptions. Click a drawing to enlarge it.
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A FinFET device, comprising: a fin formed in a semiconductor substrate, said semiconductor substrate comprising a first semiconductor material; a gate structure positioned above a portion of said fin; source and drain regions positioned on opposite sides of said gate structure; a silicon-carbide (SiC) semiconductor material positioned above said fin in said source region and said drain region, wherein said silicon-carbide (SiC) semiconductor material is different from said first semiconductor material; a graphene contact positioned on and in direct physical contact with said silicon- carbide (SiC) se m iconductor m aterial in each of said source region and said drain region; and first and second contact structures that are conductively coupled to said graphene contacts in said source region and said drain region, respectively.
The FinFET device of claim 1, wherein said first silicon-carbide (SiC) semiconductor material comprises one of 3C-SiC, a carbon-doped silicon, a hydrogen-rich carbon-doped silicon, an amorphous silicon-carbide, and a polycrystalline silicon-carbide.
The FinFET device of claim 1, further comprising a second semiconductor material positioned between said fin and said silicon-carbide (SiC) semiconductor material, wherein said second semiconductor material is different from said first semiconductor material, and wherein said silic o n-carbide (SiC) semic o nduct o r material is p o siti o ned o n and in direct physical contact with said second semic o nduct o r material.
4. The FinFET device of claim 1, wherein said fin is made entirely of said first semiconductor material.
The FinFET device of claim 1, wherein a lower portion of said fin comprises said first semic o nduct o r material and an upper portion of said fin comprises a third semic o nduct o r material that is different fro m said fi rst semic o nduct o r material.
8. The FinFET device of claim 1, wherein said gate structure is a replacement gate structure for said FinFET device.
The integrated circuit product of claim 1 5, wherein said first and sec o nd f ins are made entirely of said fi rst semiconductor material.
The integrated circuit pr o duct of claim 1 5, wherein a lower p o rti o n of each of said fi rst and sec o nd fi ns is m ade of said fi rst semic o nduct or m aterial and an upper portion of each of said first and sec o nd fins is made of a fourth semic o nduct o r materia l that is different fro m said first semic o nduct o r material.
A FinFET device, comprising: a fin f o rmed in a semic o nduct o r substrate, said semic o nduct o r substrate comprising a fi rst semic o nduct o r material; a gate structure p o siti o ned above a portion o f said fin; so urce and drain regions p o siti o ned on o pposite sides of said gate structure; a sec o nd se mico nduct o r material p o siti o ned above said fi n in said s o urce regi o n and said drain regi o n, wherein said sec o nd semic o nduct o r material is different fro m said first semic o nduct o r material; a silicon-carbide (SiC) semiconductor material positioned above said fin in said so urce reg io n and sa i d dra in reg io n, wherein sa i d s ilico n-carbide (S iC) semic o nduct o r material is different fro m said first semic o nduct o r material; a graphene contact positioned on and in direct physical contact with said silicon- carbide (SiC) semiconductor material in each of said source region and said drain region; and first and second contact structures that are conductively coupled to said graphene contacts in said s o urce regi o n and said drain regi o n, respectively.
The FinFET device of claim 9, wherein said silicon-carbide (SiC) semiconductor material is positioned o n and in direct physical contact with said second semiconductor material in said source and drain regions.
1 1. The FinFET device of claim 9, wherein said FinFET device is a PMOS FinFET device and said second semiconductor material comprises silicon germanium SVG 15950291.04-11-2018.JFV₈₇G₈₆RXEAPX1.CLM.3.20.311.2351.525.2397.svg 0.153 0.713 Chemistry Black and white where x ranges from approximately 0.1 to approximately 0. 9).
1 2. The FinFET device of claim 9, wherein said fi n is made entirely of said first semic o nduct o r materia l.
The FinFET device of claim 9, wherein a lower p o rti o n of said fin comprises said first semic o nduct o r material and an upper p o rti o n of said fi n comprises a third semic o nduct o r materia l that is different fro m said first semic o nduct o r material.
An integrated circuit product, comprising a first fin of a PM O S FinFET device formed in a semiconductor substrate, said semiconductor substrate comprising a f ir st semiconductor material; a first gate structure of said PMOS FinFET device p o siti o ned above a p o rti o n of said fi rst fin; first source and drain regions of said PMOS FinFET device p o siti o ned o n opposite sides of said first gate structure; a second fin of an N M OS FinFET device formed in said semiconductor substrate; a second gate structure o f said NMOS FinFET device p o siti o ned above a p o rti o n of said second fin; second source and drain regions of said NMOS FinFET device positioned on opposite sides of said second gate structure; a second semiconductor material positioned on said first fin in said first source and drain regions of said PMOS Fin F ET device, wherein said second semic o nduct o r material is different fro m said first semic o nduct o r material; a third semic o nduct o r material p o siti o ned o n said second fi n in said second source and drain regions of said NMOS FinFET device, wherein said third semiconductor material is different fro m said first and sec o nd semiconductor materials; a silicon-carbide (SiC) semiconductor material positioned o n and in direct physical contact with said sec o nd semiconductor material in said first source and drain regions of said P M OS FinFET device and on and in direct physical contact wi th sa i d th ir d sem ico nduct or m ater i al in sa i d sec o nd source and drain reg ions of said NMOS FinFET device, said silicon-carbide (SiC) semiconductor material being different from said first semiconductor material; a graphene contact positioned on and in direct physical contact with said silicon- carbide (SiC) semiconductor material in each of said first source and drain regions of said PM O S FinFET device and in said second source and drain regions of said NMOS FinFET device; and a plurality of contact structures, wherein each of said plurality of contact structures is conductively coupled to a respective one of said graphene contacts.
The integrated circuit product of claim 15, wherein said second semiconductor material c ompri ses s ilicon g erman i um (S SVG 15950291.04-11-2018.JFV₈₇G₈₆RXEAPX1.CLM.5.19.1173.2027.1339.2073.svg 0.153 0.553 Chemistry Black and white where x ranges fro m approximately 0. 1 to approximately 0.9).
20. The integrated circuit pr o duct of cla im 19, wherein sa i d fourth se mico nduct or material comprises one of silicon germanium (S SVG 15950291.04-11-2018.JFV₈₇G₈₆RXEAPX1.CLM.6.9.1339.945.1504.991.svg 0.153 0.55 Chemistry
Layer stacks claimed or described, ordered top of device to substrate.
FinFET device with SiC epi and graphene contacts (no intermediate epi layer)
FinFET device with intermediate epi layer, SiC epi, and graphene contacts
Materials described outside the worked examples.
first semiconductor material (substrate)
silicon-carbide (SiC) semiconductor material
SiC
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
Thickness | 2–4 nm | — |
Temperature |
Patent
Atlas literature
Patent
US 10,325,812Patent drawings and their descriptions. Click a drawing to enlarge it.
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A FinFET device, comprising: a fin formed in a semiconductor substrate, said semiconductor substrate comprising a first semiconductor material; a gate structure positioned above a portion of said fin; source and drain regions positioned on opposite sides of said gate structure; a silicon-carbide (SiC) semiconductor material positioned above said fin in said source region and said drain region, wherein said silicon-carbide (SiC) semiconductor material is different from said first semiconductor material; a graphene contact positioned on and in direct physical contact with said silicon- carbide (SiC) se m iconductor m aterial in each of said source region and said drain region; and first and second contact structures that are conductively coupled to said graphene contacts in said source region and said drain region, respectively.
The FinFET device of claim 1, wherein said first silicon-carbide (SiC) semiconductor material comprises one of 3C-SiC, a carbon-doped silicon, a hydrogen-rich carbon-doped silicon, an amorphous silicon-carbide, and a polycrystalline silicon-carbide.
The FinFET device of claim 1, further comprising a second semiconductor material positioned between said fin and said silicon-carbide (SiC) semiconductor material, wherein said second semiconductor material is different from said first semiconductor material, and wherein said silic o n-carbide (SiC) semic o nduct o r material is p o siti o ned o n and in direct physical contact with said second semic o nduct o r material.
4. The FinFET device of claim 1, wherein said fin is made entirely of said first semiconductor material.
The FinFET device of claim 1, wherein a lower portion of said fin comprises said first semic o nduct o r material and an upper portion of said fin comprises a third semic o nduct o r material that is different fro m said fi rst semic o nduct o r material.
8. The FinFET device of claim 1, wherein said gate structure is a replacement gate structure for said FinFET device.
The integrated circuit product of claim 1 5, wherein said first and sec o nd f ins are made entirely of said fi rst semiconductor material.
The integrated circuit pr o duct of claim 1 5, wherein a lower p o rti o n of each of said fi rst and sec o nd fi ns is m ade of said fi rst semic o nduct or m aterial and an upper portion of each of said first and sec o nd fins is made of a fourth semic o nduct o r materia l that is different fro m said first semic o nduct o r material.
A FinFET device, comprising: a fin f o rmed in a semic o nduct o r substrate, said semic o nduct o r substrate comprising a fi rst semic o nduct o r material; a gate structure p o siti o ned above a portion o f said fin; so urce and drain regions p o siti o ned on o pposite sides of said gate structure; a sec o nd se mico nduct o r material p o siti o ned above said fi n in said s o urce regi o n and said drain regi o n, wherein said sec o nd semic o nduct o r material is different fro m said first semic o nduct o r material; a silicon-carbide (SiC) semiconductor material positioned above said fin in said so urce reg io n and sa i d dra in reg io n, wherein sa i d s ilico n-carbide (S iC) semic o nduct o r material is different fro m said first semic o nduct o r material; a graphene contact positioned on and in direct physical contact with said silicon- carbide (SiC) semiconductor material in each of said source region and said drain region; and first and second contact structures that are conductively coupled to said graphene contacts in said s o urce regi o n and said drain regi o n, respectively.
The FinFET device of claim 9, wherein said silicon-carbide (SiC) semiconductor material is positioned o n and in direct physical contact with said second semiconductor material in said source and drain regions.
1 1. The FinFET device of claim 9, wherein said FinFET device is a PMOS FinFET device and said second semiconductor material comprises silicon germanium SVG 15950291.04-11-2018.JFV₈₇G₈₆RXEAPX1.CLM.3.20.311.2351.525.2397.svg 0.153 0.713 Chemistry Black and white where x ranges from approximately 0.1 to approximately 0. 9).
1 2. The FinFET device of claim 9, wherein said fi n is made entirely of said first semic o nduct o r materia l.
The FinFET device of claim 9, wherein a lower p o rti o n of said fin comprises said first semic o nduct o r material and an upper p o rti o n of said fi n comprises a third semic o nduct o r materia l that is different fro m said first semic o nduct o r material.
An integrated circuit product, comprising a first fin of a PM O S FinFET device formed in a semiconductor substrate, said semiconductor substrate comprising a f ir st semiconductor material; a first gate structure of said PMOS FinFET device p o siti o ned above a p o rti o n of said fi rst fin; first source and drain regions of said PMOS FinFET device p o siti o ned o n opposite sides of said first gate structure; a second fin of an N M OS FinFET device formed in said semiconductor substrate; a second gate structure o f said NMOS FinFET device p o siti o ned above a p o rti o n of said second fin; second source and drain regions of said NMOS FinFET device positioned on opposite sides of said second gate structure; a second semiconductor material positioned on said first fin in said first source and drain regions of said PMOS Fin F ET device, wherein said second semic o nduct o r material is different fro m said first semic o nduct o r material; a third semic o nduct o r material p o siti o ned o n said second fi n in said second source and drain regions of said NMOS FinFET device, wherein said third semiconductor material is different fro m said first and sec o nd semiconductor materials; a silicon-carbide (SiC) semiconductor material positioned o n and in direct physical contact with said sec o nd semiconductor material in said first source and drain regions of said P M OS FinFET device and on and in direct physical contact wi th sa i d th ir d sem ico nduct or m ater i al in sa i d sec o nd source and drain reg ions of said NMOS FinFET device, said silicon-carbide (SiC) semiconductor material being different from said first semiconductor material; a graphene contact positioned on and in direct physical contact with said silicon- carbide (SiC) semiconductor material in each of said first source and drain regions of said PM O S FinFET device and in said second source and drain regions of said NMOS FinFET device; and a plurality of contact structures, wherein each of said plurality of contact structures is conductively coupled to a respective one of said graphene contacts.
The integrated circuit product of claim 15, wherein said second semiconductor material c ompri ses s ilicon g erman i um (S SVG 15950291.04-11-2018.JFV₈₇G₈₆RXEAPX1.CLM.5.19.1173.2027.1339.2073.svg 0.153 0.553 Chemistry Black and white where x ranges fro m approximately 0. 1 to approximately 0.9).
20. The integrated circuit pr o duct of cla im 19, wherein sa i d fourth se mico nduct or material comprises one of silicon germanium (S SVG 15950291.04-11-2018.JFV₈₇G₈₆RXEAPX1.CLM.6.9.1339.945.1504.991.svg 0.153 0.55 Chemistry
Layer stacks claimed or described, ordered top of device to substrate.
FinFET device with SiC epi and graphene contacts (no intermediate epi layer)
FinFET device with intermediate epi layer, SiC epi, and graphene contacts
Materials described outside the worked examples.
first semiconductor material (substrate)
silicon-carbide (SiC) semiconductor material
SiC
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
Thickness | 2–4 nm | — |
Temperature |
CMOS integrated circuit product with PMOS and NMOS FinFET devices with SiC epi and graphene contacts
graphene contact
3C-SiC
carbon-doped silicon
hydrogen-rich carbon-doped silicon
amorphous silicon-carbide
polycrystalline silicon-carbide
second semiconductor material (epi, PMOS source/drain)
third semiconductor material (upper fin/NMOS source/drain)
silicon germanium (SiGe, x=0.1–0.9)
Si(1-x)Ge(x)
III-V semiconductor material
fourth semiconductor material (upper fin, CMOS product)
| — |
Duration | 1–5 minutes | — |
Thickness | 0–40 nm | — |
CMOS integrated circuit product with PMOS and NMOS FinFET devices with SiC epi and graphene contacts
graphene contact
3C-SiC
carbon-doped silicon
hydrogen-rich carbon-doped silicon
amorphous silicon-carbide
polycrystalline silicon-carbide
second semiconductor material (epi, PMOS source/drain)
third semiconductor material (upper fin/NMOS source/drain)
silicon germanium (SiGe, x=0.1–0.9)
Si(1-x)Ge(x)
III-V semiconductor material
fourth semiconductor material (upper fin, CMOS product)
| — |
Duration | 1–5 minutes | — |
Thickness | 0–40 nm | — |
CMOS integrated circuit product with PMOS and NMOS FinFET devices with SiC epi and graphene contacts
graphene contact
3C-SiC
carbon-doped silicon
hydrogen-rich carbon-doped silicon
amorphous silicon-carbide
polycrystalline silicon-carbide
second semiconductor material (epi, PMOS source/drain)
third semiconductor material (upper fin/NMOS source/drain)
silicon germanium (SiGe, x=0.1–0.9)
Si(1-x)Ge(x)
III-V semiconductor material
fourth semiconductor material (upper fin, CMOS product)
| — |
Duration | 1–5 minutes | — |
Thickness | 0–40 nm | — |
CMOS integrated circuit product with PMOS and NMOS FinFET devices with SiC epi and graphene contacts
graphene contact
3C-SiC
carbon-doped silicon
hydrogen-rich carbon-doped silicon
amorphous silicon-carbide
polycrystalline silicon-carbide
second semiconductor material (epi, PMOS source/drain)
third semiconductor material (upper fin/NMOS source/drain)
silicon germanium (SiGe, x=0.1–0.9)
Si(1-x)Ge(x)
III-V semiconductor material
fourth semiconductor material (upper fin, CMOS product)
| — |
Duration | 1–5 minutes | — |
Thickness | 0–40 nm | — |
