Patent
US 9,455,105A CARBON NANOTUBE OR GRAPHENE BASED PRESSURE SWITCH
ADAM HURST
US
Copyright © 2026 Matter42. All rights reserved.
Patent
Atlas literature
Patent
US 9,455,105Patent drawings and their descriptions. Click a drawing to enlarge it.
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A pressure switch assembly, comprising: a semiconductor substrate; a cavity defined within the semiconductor substrate having a cross-sectional area and a depth; a bottom conductor disposed within the bottom of the cavity, wherein the bottom conductor has a top surface; a conductive membrane disposed above the cavity, wherein the conductive membrane has a bottom surface, and wherein the conductive membrane is configured to deflect toward the top surface of the bottom conductor upon an applied fluid pressure; an insulating layer disposed between the bottom surface of the conductive membrane and the top surface of the bottom conductor; and a switching element, wherein the switching element is configured to activate upon sufficient deflection of the conductive membrane toward the top surface of the bottom conductor such that electron tunneling through the insulating layer produces sufficient electrical communication between the conductive membrane and the bottom conductor to activate the switching element.
The pressure switch assembly of claim 1, wherein the conductive membrane is made from carbon nanotubes.
The pressure switch assembly of claim 1, wherein the conductive membrane is made from graphene.
The pressure switch assembly of claim 1, further comprising an insulating layer disposed on the surface of the semiconductor substrate.
The pressure switch assembly of claim 1, wherein the insulating layer disposed between the bottom surface of the conductive membrane and the top surface of the bottom conductor is elastic.
The pressure switch assembly of claim 1, wherein the insulating layer disposed between the bottom surface of the conductive membrane and the top surface of the bottom conductor is sufficiently thin to allow electron tunneling between the conductive membrane and the bottom conductor.
The pressure switch assembly of claim 1, further comprising an isolation diaphragm encapsulating the conductive membrane.
The pressure switch assembly of claim 1, wherein the cavity has a shape that is substantially rectangular.
The pressure switch assembly of claim 1, wherein the cavity has a shape that is substantially circular. Page 3 of 11 KULITE₁₇₉ 28184249v2
A method of indicating whether a fluid pressure exerted by a medium is above a certain threshold pressure comprising: applying the fluid pressure to a conductive membrane suspended across a cavity, wherein the cavity has a geometry and a cavity bottom having a top surface, and wherein the fluid pressure causes the conductive membrane to deflect toward the top surface of the cavity bottom; creating an electrical potential difference between the conductive membrane and the cavity bottom; and upon the conductive membrane sufficiently deflecting toward the top surface of the cavity bottom such that sufficient current flows between the conductive membrane and the cavity bottom, activating a load, wherein a substantial increase in current sufficient to activate the load indicates the fluid pressure is above the threshold pressure.
The method of claim 15, wherein the substantial increase in the current is an exponential increase.
The method of claim 15, further comprising reversing a polarity of the electrical potential difference to counteract van der Waals' forces between the conductive membrane and the cavity bottom.
The method of claim 15, wherein applying the fluid pressure to a conductive membrane further comprises physically isolating the conductive membrane from the medium.
The method of claim 15, further comprising setting the threshold pressure by adjusting a distance between the conductive membrane and the cavity bottom. Page 4 of 11 KULITE₁₇₉ 28184249v2
A method of manufacturing a pressure switch comprising: canceled
Layer stacks claimed or described, ordered top of device to substrate.
pressure switch assembly
Materials described outside the worked examples.
semiconductor substrate
silicon
Si
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
Young's modulus of carbon nanotubes and graphene | 1 TPa | carbon nanotubes |
Patent
Atlas literature
Patent
US 9,455,105Patent drawings and their descriptions. Click a drawing to enlarge it.
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A pressure switch assembly, comprising: a semiconductor substrate; a cavity defined within the semiconductor substrate having a cross-sectional area and a depth; a bottom conductor disposed within the bottom of the cavity, wherein the bottom conductor has a top surface; a conductive membrane disposed above the cavity, wherein the conductive membrane has a bottom surface, and wherein the conductive membrane is configured to deflect toward the top surface of the bottom conductor upon an applied fluid pressure; an insulating layer disposed between the bottom surface of the conductive membrane and the top surface of the bottom conductor; and a switching element, wherein the switching element is configured to activate upon sufficient deflection of the conductive membrane toward the top surface of the bottom conductor such that electron tunneling through the insulating layer produces sufficient electrical communication between the conductive membrane and the bottom conductor to activate the switching element.
The pressure switch assembly of claim 1, wherein the conductive membrane is made from carbon nanotubes.
The pressure switch assembly of claim 1, wherein the conductive membrane is made from graphene.
The pressure switch assembly of claim 1, further comprising an insulating layer disposed on the surface of the semiconductor substrate.
The pressure switch assembly of claim 1, wherein the insulating layer disposed between the bottom surface of the conductive membrane and the top surface of the bottom conductor is elastic.
The pressure switch assembly of claim 1, wherein the insulating layer disposed between the bottom surface of the conductive membrane and the top surface of the bottom conductor is sufficiently thin to allow electron tunneling between the conductive membrane and the bottom conductor.
The pressure switch assembly of claim 1, further comprising an isolation diaphragm encapsulating the conductive membrane.
The pressure switch assembly of claim 1, wherein the cavity has a shape that is substantially rectangular.
The pressure switch assembly of claim 1, wherein the cavity has a shape that is substantially circular. Page 3 of 11 KULITE₁₇₉ 28184249v2
A method of indicating whether a fluid pressure exerted by a medium is above a certain threshold pressure comprising: applying the fluid pressure to a conductive membrane suspended across a cavity, wherein the cavity has a geometry and a cavity bottom having a top surface, and wherein the fluid pressure causes the conductive membrane to deflect toward the top surface of the cavity bottom; creating an electrical potential difference between the conductive membrane and the cavity bottom; and upon the conductive membrane sufficiently deflecting toward the top surface of the cavity bottom such that sufficient current flows between the conductive membrane and the cavity bottom, activating a load, wherein a substantial increase in current sufficient to activate the load indicates the fluid pressure is above the threshold pressure.
The method of claim 15, wherein the substantial increase in the current is an exponential increase.
The method of claim 15, further comprising reversing a polarity of the electrical potential difference to counteract van der Waals' forces between the conductive membrane and the cavity bottom.
The method of claim 15, wherein applying the fluid pressure to a conductive membrane further comprises physically isolating the conductive membrane from the medium.
The method of claim 15, further comprising setting the threshold pressure by adjusting a distance between the conductive membrane and the cavity bottom. Page 4 of 11 KULITE₁₇₉ 28184249v2
A method of manufacturing a pressure switch comprising: canceled
Layer stacks claimed or described, ordered top of device to substrate.
pressure switch assembly
Materials described outside the worked examples.
semiconductor substrate
silicon
Si
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
Young's modulus of carbon nanotubes and graphene | 1 TPa | carbon nanotubes |
Patent
Atlas literature
Patent
US 9,455,105Patent drawings and their descriptions. Click a drawing to enlarge it.
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A pressure switch assembly, comprising: a semiconductor substrate; a cavity defined within the semiconductor substrate having a cross-sectional area and a depth; a bottom conductor disposed within the bottom of the cavity, wherein the bottom conductor has a top surface; a conductive membrane disposed above the cavity, wherein the conductive membrane has a bottom surface, and wherein the conductive membrane is configured to deflect toward the top surface of the bottom conductor upon an applied fluid pressure; an insulating layer disposed between the bottom surface of the conductive membrane and the top surface of the bottom conductor; and a switching element, wherein the switching element is configured to activate upon sufficient deflection of the conductive membrane toward the top surface of the bottom conductor such that electron tunneling through the insulating layer produces sufficient electrical communication between the conductive membrane and the bottom conductor to activate the switching element.
The pressure switch assembly of claim 1, wherein the conductive membrane is made from carbon nanotubes.
The pressure switch assembly of claim 1, wherein the conductive membrane is made from graphene.
The pressure switch assembly of claim 1, further comprising an insulating layer disposed on the surface of the semiconductor substrate.
The pressure switch assembly of claim 1, wherein the insulating layer disposed between the bottom surface of the conductive membrane and the top surface of the bottom conductor is elastic.
The pressure switch assembly of claim 1, wherein the insulating layer disposed between the bottom surface of the conductive membrane and the top surface of the bottom conductor is sufficiently thin to allow electron tunneling between the conductive membrane and the bottom conductor.
The pressure switch assembly of claim 1, further comprising an isolation diaphragm encapsulating the conductive membrane.
The pressure switch assembly of claim 1, wherein the cavity has a shape that is substantially rectangular.
The pressure switch assembly of claim 1, wherein the cavity has a shape that is substantially circular. Page 3 of 11 KULITE₁₇₉ 28184249v2
A method of indicating whether a fluid pressure exerted by a medium is above a certain threshold pressure comprising: applying the fluid pressure to a conductive membrane suspended across a cavity, wherein the cavity has a geometry and a cavity bottom having a top surface, and wherein the fluid pressure causes the conductive membrane to deflect toward the top surface of the cavity bottom; creating an electrical potential difference between the conductive membrane and the cavity bottom; and upon the conductive membrane sufficiently deflecting toward the top surface of the cavity bottom such that sufficient current flows between the conductive membrane and the cavity bottom, activating a load, wherein a substantial increase in current sufficient to activate the load indicates the fluid pressure is above the threshold pressure.
The method of claim 15, wherein the substantial increase in the current is an exponential increase.
The method of claim 15, further comprising reversing a polarity of the electrical potential difference to counteract van der Waals' forces between the conductive membrane and the cavity bottom.
The method of claim 15, wherein applying the fluid pressure to a conductive membrane further comprises physically isolating the conductive membrane from the medium.
The method of claim 15, further comprising setting the threshold pressure by adjusting a distance between the conductive membrane and the cavity bottom. Page 4 of 11 KULITE₁₇₉ 28184249v2
A method of manufacturing a pressure switch comprising: canceled
Layer stacks claimed or described, ordered top of device to substrate.
pressure switch assembly
Materials described outside the worked examples.
semiconductor substrate
silicon
Si
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
Young's modulus of carbon nanotubes and graphene | 1 TPa | carbon nanotubes |
Patent
Atlas literature
Patent
US 9,455,105Patent drawings and their descriptions. Click a drawing to enlarge it.
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A pressure switch assembly, comprising: a semiconductor substrate; a cavity defined within the semiconductor substrate having a cross-sectional area and a depth; a bottom conductor disposed within the bottom of the cavity, wherein the bottom conductor has a top surface; a conductive membrane disposed above the cavity, wherein the conductive membrane has a bottom surface, and wherein the conductive membrane is configured to deflect toward the top surface of the bottom conductor upon an applied fluid pressure; an insulating layer disposed between the bottom surface of the conductive membrane and the top surface of the bottom conductor; and a switching element, wherein the switching element is configured to activate upon sufficient deflection of the conductive membrane toward the top surface of the bottom conductor such that electron tunneling through the insulating layer produces sufficient electrical communication between the conductive membrane and the bottom conductor to activate the switching element.
The pressure switch assembly of claim 1, wherein the conductive membrane is made from carbon nanotubes.
The pressure switch assembly of claim 1, wherein the conductive membrane is made from graphene.
The pressure switch assembly of claim 1, further comprising an insulating layer disposed on the surface of the semiconductor substrate.
The pressure switch assembly of claim 1, wherein the insulating layer disposed between the bottom surface of the conductive membrane and the top surface of the bottom conductor is elastic.
The pressure switch assembly of claim 1, wherein the insulating layer disposed between the bottom surface of the conductive membrane and the top surface of the bottom conductor is sufficiently thin to allow electron tunneling between the conductive membrane and the bottom conductor.
The pressure switch assembly of claim 1, further comprising an isolation diaphragm encapsulating the conductive membrane.
The pressure switch assembly of claim 1, wherein the cavity has a shape that is substantially rectangular.
The pressure switch assembly of claim 1, wherein the cavity has a shape that is substantially circular. Page 3 of 11 KULITE₁₇₉ 28184249v2
A method of indicating whether a fluid pressure exerted by a medium is above a certain threshold pressure comprising: applying the fluid pressure to a conductive membrane suspended across a cavity, wherein the cavity has a geometry and a cavity bottom having a top surface, and wherein the fluid pressure causes the conductive membrane to deflect toward the top surface of the cavity bottom; creating an electrical potential difference between the conductive membrane and the cavity bottom; and upon the conductive membrane sufficiently deflecting toward the top surface of the cavity bottom such that sufficient current flows between the conductive membrane and the cavity bottom, activating a load, wherein a substantial increase in current sufficient to activate the load indicates the fluid pressure is above the threshold pressure.
The method of claim 15, wherein the substantial increase in the current is an exponential increase.
The method of claim 15, further comprising reversing a polarity of the electrical potential difference to counteract van der Waals' forces between the conductive membrane and the cavity bottom.
The method of claim 15, wherein applying the fluid pressure to a conductive membrane further comprises physically isolating the conductive membrane from the medium.
The method of claim 15, further comprising setting the threshold pressure by adjusting a distance between the conductive membrane and the cavity bottom. Page 4 of 11 KULITE₁₇₉ 28184249v2
A method of manufacturing a pressure switch comprising: canceled
Layer stacks claimed or described, ordered top of device to substrate.
pressure switch assembly
Materials described outside the worked examples.
semiconductor substrate
silicon
Si
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
Young's modulus of carbon nanotubes and graphene | 1 TPa | carbon nanotubes |
carbon nanotubes
graphene
elastic insulating layer
parylene
metal isolation diaphragm
incompressible liquid
oil
strain at breakage for carbon nanotubes and graphene | 25 % | carbon nanotubesgraphene |
carbon nanotubes
graphene
elastic insulating layer
parylene
metal isolation diaphragm
incompressible liquid
oil
strain at breakage for carbon nanotubes and graphene | 25 % | carbon nanotubesgraphene |
carbon nanotubes
graphene
elastic insulating layer
parylene
metal isolation diaphragm
incompressible liquid
oil
strain at breakage for carbon nanotubes and graphene | 25 % | carbon nanotubesgraphene |
carbon nanotubes
graphene
elastic insulating layer
parylene
metal isolation diaphragm
incompressible liquid
oil
strain at breakage for carbon nanotubes and graphene | 25 % | carbon nanotubesgraphene |