Patent
US 9,617,159Raman Id Ig Ratio | — | reduced graphene oxide |
Layer Count | 10 layers | reduced graphene oxide |
Fet Sheet Resistance | — | reduced graphene oxide |
Coating Thickness | — | reduced graphene oxide |
Flow Rate | 100–500 sccm | — |
Duration | 10–120 minute | — |
Duration | 10–60 minutes | — |
Duration | 1–10 minutes | — |
Duration | 10–120 minutes | — |
Thickness | 2–100 nm | — |
— | ≤ 1.4 eV | — |
Temperature | ≤ 3 k | — |
Raman Id Ig Ratio | — | reduced graphene oxide |
Layer Count | 10 layers | reduced graphene oxide |
Fet Sheet Resistance | — | reduced graphene oxide |
Coating Thickness | — | reduced graphene oxide |
Flow Rate | 100–500 sccm | — |
Duration | 10–120 minute | — |
Duration | 10–60 minutes | — |
Duration | 1–10 minutes | — |
Duration | 10–120 minutes | — |
Thickness | 2–100 nm | — |
— | ≤ 1.4 eV | — |
Temperature | ≤ 3 k | — |
Raman Id Ig Ratio | — | reduced graphene oxide |
Layer Count | 10 layers | reduced graphene oxide |
Fet Sheet Resistance | — | reduced graphene oxide |
Coating Thickness | — | reduced graphene oxide |
Flow Rate | 100–500 sccm | — |
Duration | 10–120 minute | — |
Duration | 10–60 minutes | — |
Duration | 1–10 minutes | — |
Duration | 10–120 minutes | — |
Thickness | 2–100 nm | — |
— | ≤ 1.4 eV | — |
Temperature | ≤ 3 k | — |
Raman Id Ig Ratio | — | reduced graphene oxide |
Layer Count | 10 layers | reduced graphene oxide |
Fet Sheet Resistance | — | reduced graphene oxide |
Coating Thickness | — | reduced graphene oxide |
Flow Rate | 100–500 sccm | — |
Duration | 10–120 minute | — |
Duration | 10–60 minutes | — |
Duration | 1–10 minutes | — |
Duration | 10–120 minutes | — |
Thickness | 2–100 nm | — |
— | ≤ 1.4 eV | — |
Temperature | ≤ 3 k | — |