Patent
US 10,145,812CAPACITIVE HUMIDITY SENSOR WITH GRAPHENE ELECTRODE
Abdelkader Aliane
US
Copyright © 2026 Matter42. All rights reserved.
Patent
Atlas literature
Patent
US 10,145,812Patent drawings and their descriptions. Click a drawing to enlarge it.
Figure 5 illustrates, by means of curves C 1, C 2, C3, C4, C 5, results of 5 measurements made by means of a humidity sensor comprising a graphene-based electrode. In this example, the detection of the moisture at the graphene-dielectric interface occurs in particular at low frequency. The …
Figure 6 gives an example of a capacitance-variation curve as a function 10 of time for a sensor used according to the invention having an operating frequency of around 100 Hz. An example of a method for producing a humidity sensor of the capacitive type according to the invention will now be given …
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
Claims 1-21. Canceled
Canceled
A humidity sensor comprising, on a support: a first electrode disposed on a surface of the support; a region of dielectric material disposed on a surface of the first electrode,, the region of dielectric material being impermeable to moisture; and, a second electrode comprising a layer of conductive material and disposed on a surface of the region of dielectric material, the second electrode having a permeability to moisture greater than a permeability to moisture of the region of dielectric material, wherein the first electrode is in direct contact with the region of the dielectric material, and wherein the first electrode, the region of dielectric material, and the second electrode form a capacitor having a capacitance that varies based on a level of moisture at an interface between the second electrode and the region of dielectric material. Currently amended
The humidity sensor according to claim 22, wherein the region of dielectric material is nonporous or comprises pores with a maximum dimension of 4 nm and/or a maximum porosity ratio of less than 8 %. Previously presented
The humidity sensor according to claim 22, wherein the dielectric material is hydrophobic. Previously presented
The humidity sensor according to claim 22, wherein the second electrode is covered with a perforated hydrophobic protective layer. Currently amended
A device for measuring or detecting moisture, comprising the humidity sensor according to claim 22. Previously presented
A device for measuring or detecting temperature, comprising the humidity sensor according to claim 22. Previously presented
Canceled
A humidity sensor comprising, on a support: a first electrode disposed on a surface of the support; a region of dielectric material disposed on a surface of the first electrode,, the region of dielectric material being impermeable to moisture; and, a second electrode comprising a layer of conductive material and disposed on a surface of the region of dielectric material, the second electrode having a permeability to moisture greater than a permeability to moisture of the region of dielectric material, wherein the second electrode is a graphene electrode, and wherein the first electrode, the region of dielectric material, and the second electrode form a capacitor having a capacitance that varies based on a level of moisture at an interface between the second electrode and the region of dielectric material. Currently amended
A humidity sensor comprising, on a support: a first electrode disposed on a surface of the support; a region of dielectric material disposed on a surface of the first electrode,, the region of dielectric material being impermeable to moisture; and, a second electrode comprising a layer of conductive material and disposed on a surface of the region of dielectric material, the second electrode having a permeability to moisture greater than a permeability to moisture of the region of dielectric material, wherein holes pass through the second electrode, and wherein the first electrode, the region of dielectric material, and the second electrode form a capacitor having a capacitance that varies based on a level of moisture at an interface between the second electrode and the region of dielectric material. Currently amended
The humidity sensor according to claim 27, wherein at least one hole among the holes also passes through the region of dielectric material and reveals the first electrode. Previously presented
The humidity sensor according to claim 27, comprising in alternation holes revealing the first electrode and holes revealing the second electrode. Previously presented
Layer stacks claimed or described, ordered top of device to substrate.
capacitive humidity sensor
capacitive humidity sensor with graphene second electrode
Materials described outside the worked examples.
dielectric material (impermeable to moisture)
conductive material (moisture-permeable second electrode)
Patent
Atlas literature
Patent
US 10,145,812Patent drawings and their descriptions. Click a drawing to enlarge it.
Figure 5 illustrates, by means of curves C 1, C 2, C3, C4, C 5, results of 5 measurements made by means of a humidity sensor comprising a graphene-based electrode. In this example, the detection of the moisture at the graphene-dielectric interface occurs in particular at low frequency. The …
Figure 6 gives an example of a capacitance-variation curve as a function 10 of time for a sensor used according to the invention having an operating frequency of around 100 Hz. An example of a method for producing a humidity sensor of the capacitive type according to the invention will now be given …
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
Claims 1-21. Canceled
Canceled
A humidity sensor comprising, on a support: a first electrode disposed on a surface of the support; a region of dielectric material disposed on a surface of the first electrode,, the region of dielectric material being impermeable to moisture; and, a second electrode comprising a layer of conductive material and disposed on a surface of the region of dielectric material, the second electrode having a permeability to moisture greater than a permeability to moisture of the region of dielectric material, wherein the first electrode is in direct contact with the region of the dielectric material, and wherein the first electrode, the region of dielectric material, and the second electrode form a capacitor having a capacitance that varies based on a level of moisture at an interface between the second electrode and the region of dielectric material. Currently amended
The humidity sensor according to claim 22, wherein the region of dielectric material is nonporous or comprises pores with a maximum dimension of 4 nm and/or a maximum porosity ratio of less than 8 %. Previously presented
The humidity sensor according to claim 22, wherein the dielectric material is hydrophobic. Previously presented
The humidity sensor according to claim 22, wherein the second electrode is covered with a perforated hydrophobic protective layer. Currently amended
A device for measuring or detecting moisture, comprising the humidity sensor according to claim 22. Previously presented
A device for measuring or detecting temperature, comprising the humidity sensor according to claim 22. Previously presented
Canceled
A humidity sensor comprising, on a support: a first electrode disposed on a surface of the support; a region of dielectric material disposed on a surface of the first electrode,, the region of dielectric material being impermeable to moisture; and, a second electrode comprising a layer of conductive material and disposed on a surface of the region of dielectric material, the second electrode having a permeability to moisture greater than a permeability to moisture of the region of dielectric material, wherein the second electrode is a graphene electrode, and wherein the first electrode, the region of dielectric material, and the second electrode form a capacitor having a capacitance that varies based on a level of moisture at an interface between the second electrode and the region of dielectric material. Currently amended
A humidity sensor comprising, on a support: a first electrode disposed on a surface of the support; a region of dielectric material disposed on a surface of the first electrode,, the region of dielectric material being impermeable to moisture; and, a second electrode comprising a layer of conductive material and disposed on a surface of the region of dielectric material, the second electrode having a permeability to moisture greater than a permeability to moisture of the region of dielectric material, wherein holes pass through the second electrode, and wherein the first electrode, the region of dielectric material, and the second electrode form a capacitor having a capacitance that varies based on a level of moisture at an interface between the second electrode and the region of dielectric material. Currently amended
The humidity sensor according to claim 27, wherein at least one hole among the holes also passes through the region of dielectric material and reveals the first electrode. Previously presented
The humidity sensor according to claim 27, comprising in alternation holes revealing the first electrode and holes revealing the second electrode. Previously presented
Layer stacks claimed or described, ordered top of device to substrate.
capacitive humidity sensor
capacitive humidity sensor with graphene second electrode
Materials described outside the worked examples.
dielectric material (impermeable to moisture)
conductive material (moisture-permeable second electrode)
Patent
Atlas literature
Patent
US 10,145,812Patent drawings and their descriptions. Click a drawing to enlarge it.
Figure 5 illustrates, by means of curves C 1, C 2, C3, C4, C 5, results of 5 measurements made by means of a humidity sensor comprising a graphene-based electrode. In this example, the detection of the moisture at the graphene-dielectric interface occurs in particular at low frequency. The …
Figure 6 gives an example of a capacitance-variation curve as a function 10 of time for a sensor used according to the invention having an operating frequency of around 100 Hz. An example of a method for producing a humidity sensor of the capacitive type according to the invention will now be given …
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
Claims 1-21. Canceled
Canceled
A humidity sensor comprising, on a support: a first electrode disposed on a surface of the support; a region of dielectric material disposed on a surface of the first electrode,, the region of dielectric material being impermeable to moisture; and, a second electrode comprising a layer of conductive material and disposed on a surface of the region of dielectric material, the second electrode having a permeability to moisture greater than a permeability to moisture of the region of dielectric material, wherein the first electrode is in direct contact with the region of the dielectric material, and wherein the first electrode, the region of dielectric material, and the second electrode form a capacitor having a capacitance that varies based on a level of moisture at an interface between the second electrode and the region of dielectric material. Currently amended
The humidity sensor according to claim 22, wherein the region of dielectric material is nonporous or comprises pores with a maximum dimension of 4 nm and/or a maximum porosity ratio of less than 8 %. Previously presented
The humidity sensor according to claim 22, wherein the dielectric material is hydrophobic. Previously presented
The humidity sensor according to claim 22, wherein the second electrode is covered with a perforated hydrophobic protective layer. Currently amended
A device for measuring or detecting moisture, comprising the humidity sensor according to claim 22. Previously presented
A device for measuring or detecting temperature, comprising the humidity sensor according to claim 22. Previously presented
Canceled
A humidity sensor comprising, on a support: a first electrode disposed on a surface of the support; a region of dielectric material disposed on a surface of the first electrode,, the region of dielectric material being impermeable to moisture; and, a second electrode comprising a layer of conductive material and disposed on a surface of the region of dielectric material, the second electrode having a permeability to moisture greater than a permeability to moisture of the region of dielectric material, wherein the second electrode is a graphene electrode, and wherein the first electrode, the region of dielectric material, and the second electrode form a capacitor having a capacitance that varies based on a level of moisture at an interface between the second electrode and the region of dielectric material. Currently amended
A humidity sensor comprising, on a support: a first electrode disposed on a surface of the support; a region of dielectric material disposed on a surface of the first electrode,, the region of dielectric material being impermeable to moisture; and, a second electrode comprising a layer of conductive material and disposed on a surface of the region of dielectric material, the second electrode having a permeability to moisture greater than a permeability to moisture of the region of dielectric material, wherein holes pass through the second electrode, and wherein the first electrode, the region of dielectric material, and the second electrode form a capacitor having a capacitance that varies based on a level of moisture at an interface between the second electrode and the region of dielectric material. Currently amended
The humidity sensor according to claim 27, wherein at least one hole among the holes also passes through the region of dielectric material and reveals the first electrode. Previously presented
The humidity sensor according to claim 27, comprising in alternation holes revealing the first electrode and holes revealing the second electrode. Previously presented
Layer stacks claimed or described, ordered top of device to substrate.
capacitive humidity sensor
capacitive humidity sensor with graphene second electrode
Materials described outside the worked examples.
dielectric material (impermeable to moisture)
conductive material (moisture-permeable second electrode)
Patent
Atlas literature
Patent
US 10,145,812Patent drawings and their descriptions. Click a drawing to enlarge it.
Figure 5 illustrates, by means of curves C 1, C 2, C3, C4, C 5, results of 5 measurements made by means of a humidity sensor comprising a graphene-based electrode. In this example, the detection of the moisture at the graphene-dielectric interface occurs in particular at low frequency. The …
Figure 6 gives an example of a capacitance-variation curve as a function 10 of time for a sensor used according to the invention having an operating frequency of around 100 Hz. An example of a method for producing a humidity sensor of the capacitive type according to the invention will now be given …
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
Claims 1-21. Canceled
Canceled
A humidity sensor comprising, on a support: a first electrode disposed on a surface of the support; a region of dielectric material disposed on a surface of the first electrode,, the region of dielectric material being impermeable to moisture; and, a second electrode comprising a layer of conductive material and disposed on a surface of the region of dielectric material, the second electrode having a permeability to moisture greater than a permeability to moisture of the region of dielectric material, wherein the first electrode is in direct contact with the region of the dielectric material, and wherein the first electrode, the region of dielectric material, and the second electrode form a capacitor having a capacitance that varies based on a level of moisture at an interface between the second electrode and the region of dielectric material. Currently amended
The humidity sensor according to claim 22, wherein the region of dielectric material is nonporous or comprises pores with a maximum dimension of 4 nm and/or a maximum porosity ratio of less than 8 %. Previously presented
The humidity sensor according to claim 22, wherein the dielectric material is hydrophobic. Previously presented
The humidity sensor according to claim 22, wherein the second electrode is covered with a perforated hydrophobic protective layer. Currently amended
A device for measuring or detecting moisture, comprising the humidity sensor according to claim 22. Previously presented
A device for measuring or detecting temperature, comprising the humidity sensor according to claim 22. Previously presented
Canceled
A humidity sensor comprising, on a support: a first electrode disposed on a surface of the support; a region of dielectric material disposed on a surface of the first electrode,, the region of dielectric material being impermeable to moisture; and, a second electrode comprising a layer of conductive material and disposed on a surface of the region of dielectric material, the second electrode having a permeability to moisture greater than a permeability to moisture of the region of dielectric material, wherein the second electrode is a graphene electrode, and wherein the first electrode, the region of dielectric material, and the second electrode form a capacitor having a capacitance that varies based on a level of moisture at an interface between the second electrode and the region of dielectric material. Currently amended
A humidity sensor comprising, on a support: a first electrode disposed on a surface of the support; a region of dielectric material disposed on a surface of the first electrode,, the region of dielectric material being impermeable to moisture; and, a second electrode comprising a layer of conductive material and disposed on a surface of the region of dielectric material, the second electrode having a permeability to moisture greater than a permeability to moisture of the region of dielectric material, wherein holes pass through the second electrode, and wherein the first electrode, the region of dielectric material, and the second electrode form a capacitor having a capacitance that varies based on a level of moisture at an interface between the second electrode and the region of dielectric material. Currently amended
The humidity sensor according to claim 27, wherein at least one hole among the holes also passes through the region of dielectric material and reveals the first electrode. Previously presented
The humidity sensor according to claim 27, comprising in alternation holes revealing the first electrode and holes revealing the second electrode. Previously presented
Layer stacks claimed or described, ordered top of device to substrate.
capacitive humidity sensor
capacitive humidity sensor with graphene second electrode
Materials described outside the worked examples.
dielectric material (impermeable to moisture)
conductive material (moisture-permeable second electrode)
capacitive humidity sensor with perforated second electrode
graphene
hydrophilic self-assembled monolayer
perforated hydrophobic protective layer
graphene comprising particles of metal
capacitive humidity sensor with perforated second electrode
graphene
hydrophilic self-assembled monolayer
perforated hydrophobic protective layer
graphene comprising particles of metal
capacitive humidity sensor with perforated second electrode
graphene
hydrophilic self-assembled monolayer
perforated hydrophobic protective layer
graphene comprising particles of metal
capacitive humidity sensor with perforated second electrode
graphene
hydrophilic self-assembled monolayer
perforated hydrophobic protective layer
graphene comprising particles of metal