Patent
US 9,548,435lithium niobate
LiNbO₃
lithium tantalate
LiTaO₃
LiIO₃
barium strontium titanate
BaxSr(1-x)TiO₃
lead zirconate titanate
Pb(ZrxTi(1-x))O₃
gold contacts
Au
chromium adhesion layer
Cr
| — |
Temperature | 10–300 K | — |
Thickness | 1–50 nm | — |
Thickness | 10–1000 nm | — |
Thickness | 1–20 nm | — |
Temperature | 170–180 K | — |
Temperature | ≤ 300 K | — |
Temperature | ≥ 1 K | — |
lithium niobate
LiNbO₃
lithium tantalate
LiTaO₃
LiIO₃
barium strontium titanate
BaxSr(1-x)TiO₃
lead zirconate titanate
Pb(ZrxTi(1-x))O₃
gold contacts
Au
chromium adhesion layer
Cr
| — |
Temperature | 10–300 K | — |
Thickness | 1–50 nm | — |
Thickness | 10–1000 nm | — |
Thickness | 1–20 nm | — |
Temperature | 170–180 K | — |
Temperature | ≤ 300 K | — |
Temperature | ≥ 1 K | — |
lithium niobate
LiNbO₃
lithium tantalate
LiTaO₃
LiIO₃
barium strontium titanate
BaxSr(1-x)TiO₃
lead zirconate titanate
Pb(ZrxTi(1-x))O₃
gold contacts
Au
chromium adhesion layer
Cr
| — |
Temperature | 10–300 K | — |
Thickness | 1–50 nm | — |
Thickness | 10–1000 nm | — |
Thickness | 1–20 nm | — |
Temperature | 170–180 K | — |
Temperature | ≤ 300 K | — |
Temperature | ≥ 1 K | — |
lithium niobate
LiNbO₃
lithium tantalate
LiTaO₃
LiIO₃
barium strontium titanate
BaxSr(1-x)TiO₃
lead zirconate titanate
Pb(ZrxTi(1-x))O₃
gold contacts
Au
chromium adhesion layer
Cr
| — |
Temperature | 10–300 K | — |
Thickness | 1–50 nm | — |
Thickness | 10–1000 nm | — |
Thickness | 1–20 nm | — |
Temperature | 170–180 K | — |
Temperature | ≤ 300 K | — |
Temperature | ≥ 1 K | — |