Patent
US 10,425,742ELECTROSTATIC GRAPHENE SPEAKER
Qin Zhou, Alexander Zettl
US
Copyright © 2026 Matter42. All rights reserved.
Patent
Atlas literature
Patent
US 10,425,742Patent drawings and their descriptions. Click a drawing to enlarge it.
Figure 1 A shows an example of a cross-sectional schematic illustration of an electrostatically driven graphene speaker (EDGS).
Figure 1B shows an example of a graphene membrane suspended in a frame.
Figure 2 shows an example of a method of use of a device including a graphene membrane.
Figure 3A-3C show examples of the frequency response of various miniature audio speakers.
Figure 4 shows the vibration velocity of a graphene diaphragm in the EDGS versus frequency, measured by Laser Doppler Velocimetry (LDV).
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A device comprising: a graphene membrane having a diameter o 1 about 5 millim ete rs to 9 millim ete rs: a first electrode proximate a first side o F the g raphene membrane, the f irst electrode being electrically conductive and having a first oxide layer disposed thereon; and a second electrode proximate a second side o f the graphene membrane. the second electrode being electrically conductive and having a second oxide layer disposed thereon, the graphene membrane being suspended bet we en the f i rst ele ctrod e and the second ele ctrod e, where in the d e vic e is a loudsp eaker. Currently amended
(Ori g inal) The d e vic e of claim 1, where in the g raphene membrane is about 20 nanometers to 40 nanometers thick. Original
(Original) The d e vic e of claim 1. wh ere in the first ele ctrod e and the second ele ctrod e define open regions having a d imension o l' about 200 microns to 300 microns. Original
1 1. The device of claim 1, wherein the fir st ele ctrod e and the second electrode include silicon wa fe rs. Original
(Pre v iously presented) The de v ice o f claim 1. w her e in the device is con fi gured to generate a broad band respons e at least from 20 Hz to 20 kHz. Previously presented
The device o f claim 1, w her e in the de ice is con f igured to generate a relative sound pressure level of at least 40 dB at least from 20 Hz to 20 kHz. Previously presented
The device o f claim 1, w her e in the device is con f igured to gene rat e a useful respons e across the e ntir e human audible frequency range. Previously presented
The device of'clam 1. F urther comprisin g: a first f rame disposed on the first side of ' the graphene me mbran e; and a second f ram e disposed on the second side o f the graphene me mbran e, the f irst fr ame and the second frame both including substantially circular open r e gions that define a substantially circular portion of lthe graphene membrane. Original
The d e vic e of claim 2. w herein the f irst f r ame and the second frame ar e about 60 microns to 180 microns thick. Original
The device of claim 2, where in the f irst ele ctrod e is in contact w ith the first f rame, wherein the f irst ele ctrod e is spaced a f irst distance of about 60 microns to 180 microns f rom the f irst side o f the circular portion of the graphene membrane. wher e in the second ele ctrod e is in contact with the second frame, and wherein the second ele ctrod e is spaced a second distance o f about 60 microns to 180 microns from the second side o f the circu lar portion of the g raph ene membrane. Original
The device of claim 2, wherein the first fr ame and the second [rame are a uni tary body. Original
Canceled
(Ori g inal) The device of ec laim 1. f urther comprisin g: a w ire in electrical contact w ith the g raphene membrane. Original
(Previously p resented) The device of claim 7, wherein the wire is a gold wire with a diameter of ab ou t 10 microns to 30 microns. Previously presented
Canceled
A method comprising: (a) providing a d e vic e including: a grap hene membrane; a f i rst electrode proximate a first side of the graph e ne me mbra ne, the first e lectrod e being electrically conductive and having a f i rst oxide layer disposed thereon: and a second electrode proximate a second si de of the graphen e me mbran e. the second electrode being electrically conductive and h aving a second oxi de layer disposed thereon. the g raph e ne membrane being suspended between the first electrode and the second electrode: (b) biasin g the graphene membrane w ith a direct current voltag e: and (c) biasing the f i rst electrode and the second electrode w ith an input signal, causing the graphene mem bra ne to move and generate an audible sound; wx herein the d ev ice is con fig ured to gene rate a broad band response at least f rom 20 Hz to 2 0 kHz in st ep (c). Currently amended
(Or ig inal) The method of claim 13, wherein the input signal is generated f rom an audio sig nal. Original
(Ori gz inal) The method of claim 13, w here in the direct current volta g e is about 50 volts to 150 volts.
The method of claim 13, wherein an amplitude of the in pu t signal is about 0 volts to volts. Original
(Ori g inal) The method of claim 13. wherein in Operation (c). the fi rst electrode and the second e lectrod e are biased at opposite polarities. Original
(Ori g inal) The method of claim 13, wherein the device further comprises: a xv ire in electrical contact with the graphene membrane. Original
The method o f claim 13. wherein the device is configured to generate a relative sound pressure level o f at least 40 dB at least f r om 20 Hz to 20 k Hz in ste p (c). Previously presented
(Previously presente d) The method o f claim 13. wherein the device is confi g ured to generate a usef u l response across the entire human audible freque ncy ra nge. Previously presented
18. The method of clai m 13. w her e in the device further comprises: a first frame disposed on the first side of the graphen e mem brane; and a second frame disposed on the second side of the g rap hene membrane, the first fr ame and the second fr ame both i ncluding substantially circular open regions that define a substantially circular portion of the g raphene me m brane. Original
(Ori g inal) The method of clai m 13, wherein the grap henc membrane is about 20 nano me ters to 40 nano me ters thick. Original
21-32. Not entered
Canceled
An electrostatic audio loudspeaker comprisin g: a g rap hene membrane: a first e le ctrode proximate a first side o f the graphene membrane, the f irst e le ctrode being electrically conductive and having a f i rst oxide layer disposed thereon; and a second electrode proximate a second side o f the graph e ne membrane. the second electrode b ein g electrically conductive and having a second oxide layer disposed thereon, the graphenc membrane being suspended between the first ele ctrod e and the second electrode s vk her e in the electrostatic audio loudspeaker is con f igured to generate a r e lat Ve sound pressure level o f at least 40 d B at least f rom 20 Hz to 20 kHz. Currently amended
The electrostatic audio loudspeaker o f claim 39. wherein the g rap hene membrane is a monolay e r graphene membrane. Previously presented
The electrostatic audio loudspeaker o f claim 39. wherein the grap hene membrane is about 20 nano me ters to 40 nanom ete rs thick. Previously presented
The electrostatic audio loudspeaker of ' claim 39,[[,]] wherein the ele ctrostatic audio loudsp eake r is confi gure d to g ene rat e a broad band respons e at least f rom 20 Hz to 20 kHz. Currently amended
The electrostatic audio loudspeaker o f claim 39. wherein the electrostatic audio loudspeak e r is conf i gured to generate a us eF ul response across the entire human audible f requency range. Previously presented
(New) The ele ctrostatic audio loudspeaker o F claim 39, wherein the grap hene me mbran e is a multilay e r graphene me mbran e. New
(Cancelled) Canceled
Layer stacks claimed or described, ordered top of device to substrate.
electrostatic graphene loudspeaker (device)
electrostatic audio loudspeaker
Materials described outside the worked examples.
graphene membrane
oxide layer on electrode
gold wire
Au
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
graphene membrane thickness (claimed range) | 20–40 nm | graphene membrane |
graphene membrane diameter (claimed range) | 5–9 mm |
Patent
Atlas literature
Patent
US 10,425,742Patent drawings and their descriptions. Click a drawing to enlarge it.
Figure 1 A shows an example of a cross-sectional schematic illustration of an electrostatically driven graphene speaker (EDGS).
Figure 1B shows an example of a graphene membrane suspended in a frame.
Figure 2 shows an example of a method of use of a device including a graphene membrane.
Figure 3A-3C show examples of the frequency response of various miniature audio speakers.
Figure 4 shows the vibration velocity of a graphene diaphragm in the EDGS versus frequency, measured by Laser Doppler Velocimetry (LDV).
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A device comprising: a graphene membrane having a diameter o 1 about 5 millim ete rs to 9 millim ete rs: a first electrode proximate a first side o F the g raphene membrane, the f irst electrode being electrically conductive and having a first oxide layer disposed thereon; and a second electrode proximate a second side o f the graphene membrane. the second electrode being electrically conductive and having a second oxide layer disposed thereon, the graphene membrane being suspended bet we en the f i rst ele ctrod e and the second ele ctrod e, where in the d e vic e is a loudsp eaker. Currently amended
(Ori g inal) The d e vic e of claim 1, where in the g raphene membrane is about 20 nanometers to 40 nanometers thick. Original
(Original) The d e vic e of claim 1. wh ere in the first ele ctrod e and the second ele ctrod e define open regions having a d imension o l' about 200 microns to 300 microns. Original
1 1. The device of claim 1, wherein the fir st ele ctrod e and the second electrode include silicon wa fe rs. Original
(Pre v iously presented) The de v ice o f claim 1. w her e in the device is con fi gured to generate a broad band respons e at least from 20 Hz to 20 kHz. Previously presented
The device o f claim 1, w her e in the de ice is con f igured to generate a relative sound pressure level of at least 40 dB at least from 20 Hz to 20 kHz. Previously presented
The device o f claim 1, w her e in the device is con f igured to gene rat e a useful respons e across the e ntir e human audible frequency range. Previously presented
The device of'clam 1. F urther comprisin g: a first f rame disposed on the first side of ' the graphene me mbran e; and a second f ram e disposed on the second side o f the graphene me mbran e, the f irst fr ame and the second frame both including substantially circular open r e gions that define a substantially circular portion of lthe graphene membrane. Original
The d e vic e of claim 2. w herein the f irst f r ame and the second frame ar e about 60 microns to 180 microns thick. Original
The device of claim 2, where in the f irst ele ctrod e is in contact w ith the first f rame, wherein the f irst ele ctrod e is spaced a f irst distance of about 60 microns to 180 microns f rom the f irst side o f the circular portion of the graphene membrane. wher e in the second ele ctrod e is in contact with the second frame, and wherein the second ele ctrod e is spaced a second distance o f about 60 microns to 180 microns from the second side o f the circu lar portion of the g raph ene membrane. Original
The device of claim 2, wherein the first fr ame and the second [rame are a uni tary body. Original
Canceled
(Ori g inal) The device of ec laim 1. f urther comprisin g: a w ire in electrical contact w ith the g raphene membrane. Original
(Previously p resented) The device of claim 7, wherein the wire is a gold wire with a diameter of ab ou t 10 microns to 30 microns. Previously presented
Canceled
A method comprising: (a) providing a d e vic e including: a grap hene membrane; a f i rst electrode proximate a first side of the graph e ne me mbra ne, the first e lectrod e being electrically conductive and having a f i rst oxide layer disposed thereon: and a second electrode proximate a second si de of the graphen e me mbran e. the second electrode being electrically conductive and h aving a second oxi de layer disposed thereon. the g raph e ne membrane being suspended between the first electrode and the second electrode: (b) biasin g the graphene membrane w ith a direct current voltag e: and (c) biasing the f i rst electrode and the second electrode w ith an input signal, causing the graphene mem bra ne to move and generate an audible sound; wx herein the d ev ice is con fig ured to gene rate a broad band response at least f rom 20 Hz to 2 0 kHz in st ep (c). Currently amended
(Or ig inal) The method of claim 13, wherein the input signal is generated f rom an audio sig nal. Original
(Ori gz inal) The method of claim 13, w here in the direct current volta g e is about 50 volts to 150 volts.
The method of claim 13, wherein an amplitude of the in pu t signal is about 0 volts to volts. Original
(Ori g inal) The method of claim 13. wherein in Operation (c). the fi rst electrode and the second e lectrod e are biased at opposite polarities. Original
(Ori g inal) The method of claim 13, wherein the device further comprises: a xv ire in electrical contact with the graphene membrane. Original
The method o f claim 13. wherein the device is configured to generate a relative sound pressure level o f at least 40 dB at least f r om 20 Hz to 20 k Hz in ste p (c). Previously presented
(Previously presente d) The method o f claim 13. wherein the device is confi g ured to generate a usef u l response across the entire human audible freque ncy ra nge. Previously presented
18. The method of clai m 13. w her e in the device further comprises: a first frame disposed on the first side of the graphen e mem brane; and a second frame disposed on the second side of the g rap hene membrane, the first fr ame and the second fr ame both i ncluding substantially circular open regions that define a substantially circular portion of the g raphene me m brane. Original
(Ori g inal) The method of clai m 13, wherein the grap henc membrane is about 20 nano me ters to 40 nano me ters thick. Original
21-32. Not entered
Canceled
An electrostatic audio loudspeaker comprisin g: a g rap hene membrane: a first e le ctrode proximate a first side o f the graphene membrane, the f irst e le ctrode being electrically conductive and having a f i rst oxide layer disposed thereon; and a second electrode proximate a second side o f the graph e ne membrane. the second electrode b ein g electrically conductive and having a second oxide layer disposed thereon, the graphenc membrane being suspended between the first ele ctrod e and the second electrode s vk her e in the electrostatic audio loudspeaker is con f igured to generate a r e lat Ve sound pressure level o f at least 40 d B at least f rom 20 Hz to 20 kHz. Currently amended
The electrostatic audio loudspeaker o f claim 39. wherein the g rap hene membrane is a monolay e r graphene membrane. Previously presented
The electrostatic audio loudspeaker o f claim 39. wherein the grap hene membrane is about 20 nano me ters to 40 nanom ete rs thick. Previously presented
The electrostatic audio loudspeaker of ' claim 39,[[,]] wherein the ele ctrostatic audio loudsp eake r is confi gure d to g ene rat e a broad band respons e at least f rom 20 Hz to 20 kHz. Currently amended
The electrostatic audio loudspeaker o f claim 39. wherein the electrostatic audio loudspeak e r is conf i gured to generate a us eF ul response across the entire human audible f requency range. Previously presented
(New) The ele ctrostatic audio loudspeaker o F claim 39, wherein the grap hene me mbran e is a multilay e r graphene me mbran e. New
(Cancelled) Canceled
Layer stacks claimed or described, ordered top of device to substrate.
electrostatic graphene loudspeaker (device)
electrostatic audio loudspeaker
Materials described outside the worked examples.
graphene membrane
oxide layer on electrode
gold wire
Au
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
graphene membrane thickness (claimed range) | 20–40 nm | graphene membrane |
graphene membrane diameter (claimed range) | 5–9 mm |
Patent
Atlas literature
Patent
US 10,425,742Patent drawings and their descriptions. Click a drawing to enlarge it.
Figure 1 A shows an example of a cross-sectional schematic illustration of an electrostatically driven graphene speaker (EDGS).
Figure 1B shows an example of a graphene membrane suspended in a frame.
Figure 2 shows an example of a method of use of a device including a graphene membrane.
Figure 3A-3C show examples of the frequency response of various miniature audio speakers.
Figure 4 shows the vibration velocity of a graphene diaphragm in the EDGS versus frequency, measured by Laser Doppler Velocimetry (LDV).
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A device comprising: a graphene membrane having a diameter o 1 about 5 millim ete rs to 9 millim ete rs: a first electrode proximate a first side o F the g raphene membrane, the f irst electrode being electrically conductive and having a first oxide layer disposed thereon; and a second electrode proximate a second side o f the graphene membrane. the second electrode being electrically conductive and having a second oxide layer disposed thereon, the graphene membrane being suspended bet we en the f i rst ele ctrod e and the second ele ctrod e, where in the d e vic e is a loudsp eaker. Currently amended
(Ori g inal) The d e vic e of claim 1, where in the g raphene membrane is about 20 nanometers to 40 nanometers thick. Original
(Original) The d e vic e of claim 1. wh ere in the first ele ctrod e and the second ele ctrod e define open regions having a d imension o l' about 200 microns to 300 microns. Original
1 1. The device of claim 1, wherein the fir st ele ctrod e and the second electrode include silicon wa fe rs. Original
(Pre v iously presented) The de v ice o f claim 1. w her e in the device is con fi gured to generate a broad band respons e at least from 20 Hz to 20 kHz. Previously presented
The device o f claim 1, w her e in the de ice is con f igured to generate a relative sound pressure level of at least 40 dB at least from 20 Hz to 20 kHz. Previously presented
The device o f claim 1, w her e in the device is con f igured to gene rat e a useful respons e across the e ntir e human audible frequency range. Previously presented
The device of'clam 1. F urther comprisin g: a first f rame disposed on the first side of ' the graphene me mbran e; and a second f ram e disposed on the second side o f the graphene me mbran e, the f irst fr ame and the second frame both including substantially circular open r e gions that define a substantially circular portion of lthe graphene membrane. Original
The d e vic e of claim 2. w herein the f irst f r ame and the second frame ar e about 60 microns to 180 microns thick. Original
The device of claim 2, where in the f irst ele ctrod e is in contact w ith the first f rame, wherein the f irst ele ctrod e is spaced a f irst distance of about 60 microns to 180 microns f rom the f irst side o f the circular portion of the graphene membrane. wher e in the second ele ctrod e is in contact with the second frame, and wherein the second ele ctrod e is spaced a second distance o f about 60 microns to 180 microns from the second side o f the circu lar portion of the g raph ene membrane. Original
The device of claim 2, wherein the first fr ame and the second [rame are a uni tary body. Original
Canceled
(Ori g inal) The device of ec laim 1. f urther comprisin g: a w ire in electrical contact w ith the g raphene membrane. Original
(Previously p resented) The device of claim 7, wherein the wire is a gold wire with a diameter of ab ou t 10 microns to 30 microns. Previously presented
Canceled
A method comprising: (a) providing a d e vic e including: a grap hene membrane; a f i rst electrode proximate a first side of the graph e ne me mbra ne, the first e lectrod e being electrically conductive and having a f i rst oxide layer disposed thereon: and a second electrode proximate a second si de of the graphen e me mbran e. the second electrode being electrically conductive and h aving a second oxi de layer disposed thereon. the g raph e ne membrane being suspended between the first electrode and the second electrode: (b) biasin g the graphene membrane w ith a direct current voltag e: and (c) biasing the f i rst electrode and the second electrode w ith an input signal, causing the graphene mem bra ne to move and generate an audible sound; wx herein the d ev ice is con fig ured to gene rate a broad band response at least f rom 20 Hz to 2 0 kHz in st ep (c). Currently amended
(Or ig inal) The method of claim 13, wherein the input signal is generated f rom an audio sig nal. Original
(Ori gz inal) The method of claim 13, w here in the direct current volta g e is about 50 volts to 150 volts.
The method of claim 13, wherein an amplitude of the in pu t signal is about 0 volts to volts. Original
(Ori g inal) The method of claim 13. wherein in Operation (c). the fi rst electrode and the second e lectrod e are biased at opposite polarities. Original
(Ori g inal) The method of claim 13, wherein the device further comprises: a xv ire in electrical contact with the graphene membrane. Original
The method o f claim 13. wherein the device is configured to generate a relative sound pressure level o f at least 40 dB at least f r om 20 Hz to 20 k Hz in ste p (c). Previously presented
(Previously presente d) The method o f claim 13. wherein the device is confi g ured to generate a usef u l response across the entire human audible freque ncy ra nge. Previously presented
18. The method of clai m 13. w her e in the device further comprises: a first frame disposed on the first side of the graphen e mem brane; and a second frame disposed on the second side of the g rap hene membrane, the first fr ame and the second fr ame both i ncluding substantially circular open regions that define a substantially circular portion of the g raphene me m brane. Original
(Ori g inal) The method of clai m 13, wherein the grap henc membrane is about 20 nano me ters to 40 nano me ters thick. Original
21-32. Not entered
Canceled
An electrostatic audio loudspeaker comprisin g: a g rap hene membrane: a first e le ctrode proximate a first side o f the graphene membrane, the f irst e le ctrode being electrically conductive and having a f i rst oxide layer disposed thereon; and a second electrode proximate a second side o f the graph e ne membrane. the second electrode b ein g electrically conductive and having a second oxide layer disposed thereon, the graphenc membrane being suspended between the first ele ctrod e and the second electrode s vk her e in the electrostatic audio loudspeaker is con f igured to generate a r e lat Ve sound pressure level o f at least 40 d B at least f rom 20 Hz to 20 kHz. Currently amended
The electrostatic audio loudspeaker o f claim 39. wherein the g rap hene membrane is a monolay e r graphene membrane. Previously presented
The electrostatic audio loudspeaker o f claim 39. wherein the grap hene membrane is about 20 nano me ters to 40 nanom ete rs thick. Previously presented
The electrostatic audio loudspeaker of ' claim 39,[[,]] wherein the ele ctrostatic audio loudsp eake r is confi gure d to g ene rat e a broad band respons e at least f rom 20 Hz to 20 kHz. Currently amended
The electrostatic audio loudspeaker o f claim 39. wherein the electrostatic audio loudspeak e r is conf i gured to generate a us eF ul response across the entire human audible f requency range. Previously presented
(New) The ele ctrostatic audio loudspeaker o F claim 39, wherein the grap hene me mbran e is a multilay e r graphene me mbran e. New
(Cancelled) Canceled
Layer stacks claimed or described, ordered top of device to substrate.
electrostatic graphene loudspeaker (device)
electrostatic audio loudspeaker
Materials described outside the worked examples.
graphene membrane
oxide layer on electrode
gold wire
Au
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
graphene membrane thickness (claimed range) | 20–40 nm | graphene membrane |
graphene membrane diameter (claimed range) | 5–9 mm |
Patent
Atlas literature
Patent
US 10,425,742Patent drawings and their descriptions. Click a drawing to enlarge it.
Figure 1 A shows an example of a cross-sectional schematic illustration of an electrostatically driven graphene speaker (EDGS).
Figure 1B shows an example of a graphene membrane suspended in a frame.
Figure 2 shows an example of a method of use of a device including a graphene membrane.
Figure 3A-3C show examples of the frequency response of various miniature audio speakers.
Figure 4 shows the vibration velocity of a graphene diaphragm in the EDGS versus frequency, measured by Laser Doppler Velocimetry (LDV).
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A device comprising: a graphene membrane having a diameter o 1 about 5 millim ete rs to 9 millim ete rs: a first electrode proximate a first side o F the g raphene membrane, the f irst electrode being electrically conductive and having a first oxide layer disposed thereon; and a second electrode proximate a second side o f the graphene membrane. the second electrode being electrically conductive and having a second oxide layer disposed thereon, the graphene membrane being suspended bet we en the f i rst ele ctrod e and the second ele ctrod e, where in the d e vic e is a loudsp eaker. Currently amended
(Ori g inal) The d e vic e of claim 1, where in the g raphene membrane is about 20 nanometers to 40 nanometers thick. Original
(Original) The d e vic e of claim 1. wh ere in the first ele ctrod e and the second ele ctrod e define open regions having a d imension o l' about 200 microns to 300 microns. Original
1 1. The device of claim 1, wherein the fir st ele ctrod e and the second electrode include silicon wa fe rs. Original
(Pre v iously presented) The de v ice o f claim 1. w her e in the device is con fi gured to generate a broad band respons e at least from 20 Hz to 20 kHz. Previously presented
The device o f claim 1, w her e in the de ice is con f igured to generate a relative sound pressure level of at least 40 dB at least from 20 Hz to 20 kHz. Previously presented
The device o f claim 1, w her e in the device is con f igured to gene rat e a useful respons e across the e ntir e human audible frequency range. Previously presented
The device of'clam 1. F urther comprisin g: a first f rame disposed on the first side of ' the graphene me mbran e; and a second f ram e disposed on the second side o f the graphene me mbran e, the f irst fr ame and the second frame both including substantially circular open r e gions that define a substantially circular portion of lthe graphene membrane. Original
The d e vic e of claim 2. w herein the f irst f r ame and the second frame ar e about 60 microns to 180 microns thick. Original
The device of claim 2, where in the f irst ele ctrod e is in contact w ith the first f rame, wherein the f irst ele ctrod e is spaced a f irst distance of about 60 microns to 180 microns f rom the f irst side o f the circular portion of the graphene membrane. wher e in the second ele ctrod e is in contact with the second frame, and wherein the second ele ctrod e is spaced a second distance o f about 60 microns to 180 microns from the second side o f the circu lar portion of the g raph ene membrane. Original
The device of claim 2, wherein the first fr ame and the second [rame are a uni tary body. Original
Canceled
(Ori g inal) The device of ec laim 1. f urther comprisin g: a w ire in electrical contact w ith the g raphene membrane. Original
(Previously p resented) The device of claim 7, wherein the wire is a gold wire with a diameter of ab ou t 10 microns to 30 microns. Previously presented
Canceled
A method comprising: (a) providing a d e vic e including: a grap hene membrane; a f i rst electrode proximate a first side of the graph e ne me mbra ne, the first e lectrod e being electrically conductive and having a f i rst oxide layer disposed thereon: and a second electrode proximate a second si de of the graphen e me mbran e. the second electrode being electrically conductive and h aving a second oxi de layer disposed thereon. the g raph e ne membrane being suspended between the first electrode and the second electrode: (b) biasin g the graphene membrane w ith a direct current voltag e: and (c) biasing the f i rst electrode and the second electrode w ith an input signal, causing the graphene mem bra ne to move and generate an audible sound; wx herein the d ev ice is con fig ured to gene rate a broad band response at least f rom 20 Hz to 2 0 kHz in st ep (c). Currently amended
(Or ig inal) The method of claim 13, wherein the input signal is generated f rom an audio sig nal. Original
(Ori gz inal) The method of claim 13, w here in the direct current volta g e is about 50 volts to 150 volts.
The method of claim 13, wherein an amplitude of the in pu t signal is about 0 volts to volts. Original
(Ori g inal) The method of claim 13. wherein in Operation (c). the fi rst electrode and the second e lectrod e are biased at opposite polarities. Original
(Ori g inal) The method of claim 13, wherein the device further comprises: a xv ire in electrical contact with the graphene membrane. Original
The method o f claim 13. wherein the device is configured to generate a relative sound pressure level o f at least 40 dB at least f r om 20 Hz to 20 k Hz in ste p (c). Previously presented
(Previously presente d) The method o f claim 13. wherein the device is confi g ured to generate a usef u l response across the entire human audible freque ncy ra nge. Previously presented
18. The method of clai m 13. w her e in the device further comprises: a first frame disposed on the first side of the graphen e mem brane; and a second frame disposed on the second side of the g rap hene membrane, the first fr ame and the second fr ame both i ncluding substantially circular open regions that define a substantially circular portion of the g raphene me m brane. Original
(Ori g inal) The method of clai m 13, wherein the grap henc membrane is about 20 nano me ters to 40 nano me ters thick. Original
21-32. Not entered
Canceled
An electrostatic audio loudspeaker comprisin g: a g rap hene membrane: a first e le ctrode proximate a first side o f the graphene membrane, the f irst e le ctrode being electrically conductive and having a f i rst oxide layer disposed thereon; and a second electrode proximate a second side o f the graph e ne membrane. the second electrode b ein g electrically conductive and having a second oxide layer disposed thereon, the graphenc membrane being suspended between the first ele ctrod e and the second electrode s vk her e in the electrostatic audio loudspeaker is con f igured to generate a r e lat Ve sound pressure level o f at least 40 d B at least f rom 20 Hz to 20 kHz. Currently amended
The electrostatic audio loudspeaker o f claim 39. wherein the g rap hene membrane is a monolay e r graphene membrane. Previously presented
The electrostatic audio loudspeaker o f claim 39. wherein the grap hene membrane is about 20 nano me ters to 40 nanom ete rs thick. Previously presented
The electrostatic audio loudspeaker of ' claim 39,[[,]] wherein the ele ctrostatic audio loudsp eake r is confi gure d to g ene rat e a broad band respons e at least f rom 20 Hz to 20 kHz. Currently amended
The electrostatic audio loudspeaker o f claim 39. wherein the electrostatic audio loudspeak e r is conf i gured to generate a us eF ul response across the entire human audible f requency range. Previously presented
(New) The ele ctrostatic audio loudspeaker o F claim 39, wherein the grap hene me mbran e is a multilay e r graphene me mbran e. New
(Cancelled) Canceled
Layer stacks claimed or described, ordered top of device to substrate.
electrostatic graphene loudspeaker (device)
electrostatic audio loudspeaker
Materials described outside the worked examples.
graphene membrane
oxide layer on electrode
gold wire
Au
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
graphene membrane thickness (claimed range) | 20–40 nm | graphene membrane |
graphene membrane diameter (claimed range) | 5–9 mm |
silicon wafer
Si
monolayer graphene membrane
multilayer graphene membrane
electrode open region dimension (claimed range) | 200–300 um | — |
first and second frame thickness (claimed range) | 60–180 um | — |
electrode spacing from graphene membrane (claimed range) | 60–180 um | — |
gold wire diameter (claimed range) | 10–30 um | Au |
DC bias voltage on graphene membrane (claimed range) | 50–150 V | graphene membrane |
input signal amplitude (claimed range) | 0–15 V | — |
relative sound pressure level at least 40 dB from 20 Hz to 20 kHz (claimed) | ≥ 40 dB | graphene membrane |
Thickness | 120–360 µm | — |
Thickness | 3–11 mm | — |
Thickness | 10–30 µm | — |
Thickness | 200–300 µm | — |
Thickness | 425–625 µm | — |
Thickness | 400–600 nm | — |
Thickness | 030-03 microns. | — |
Thickness | 60–180 µm | — |
silicon wafer
Si
monolayer graphene membrane
multilayer graphene membrane
electrode open region dimension (claimed range) | 200–300 um | — |
first and second frame thickness (claimed range) | 60–180 um | — |
electrode spacing from graphene membrane (claimed range) | 60–180 um | — |
gold wire diameter (claimed range) | 10–30 um | Au |
DC bias voltage on graphene membrane (claimed range) | 50–150 V | graphene membrane |
input signal amplitude (claimed range) | 0–15 V | — |
relative sound pressure level at least 40 dB from 20 Hz to 20 kHz (claimed) | ≥ 40 dB | graphene membrane |
Thickness | 120–360 µm | — |
Thickness | 3–11 mm | — |
Thickness | 10–30 µm | — |
Thickness | 200–300 µm | — |
Thickness | 425–625 µm | — |
Thickness | 400–600 nm | — |
Thickness | 030-03 microns. | — |
Thickness | 60–180 µm | — |
silicon wafer
Si
monolayer graphene membrane
multilayer graphene membrane
electrode open region dimension (claimed range) | 200–300 um | — |
first and second frame thickness (claimed range) | 60–180 um | — |
electrode spacing from graphene membrane (claimed range) | 60–180 um | — |
gold wire diameter (claimed range) | 10–30 um | Au |
DC bias voltage on graphene membrane (claimed range) | 50–150 V | graphene membrane |
input signal amplitude (claimed range) | 0–15 V | — |
relative sound pressure level at least 40 dB from 20 Hz to 20 kHz (claimed) | ≥ 40 dB | graphene membrane |
Thickness | 120–360 µm | — |
Thickness | 3–11 mm | — |
Thickness | 10–30 µm | — |
Thickness | 200–300 µm | — |
Thickness | 425–625 µm | — |
Thickness | 400–600 nm | — |
Thickness | 030-03 microns. | — |
Thickness | 60–180 µm | — |
silicon wafer
Si
monolayer graphene membrane
multilayer graphene membrane
electrode open region dimension (claimed range) | 200–300 um | — |
first and second frame thickness (claimed range) | 60–180 um | — |
electrode spacing from graphene membrane (claimed range) | 60–180 um | — |
gold wire diameter (claimed range) | 10–30 um | Au |
DC bias voltage on graphene membrane (claimed range) | 50–150 V | graphene membrane |
input signal amplitude (claimed range) | 0–15 V | — |
relative sound pressure level at least 40 dB from 20 Hz to 20 kHz (claimed) | ≥ 40 dB | graphene membrane |
Thickness | 120–360 µm | — |
Thickness | 3–11 mm | — |
Thickness | 10–30 µm | — |
Thickness | 200–300 µm | — |
Thickness | 425–625 µm | — |
Thickness | 400–600 nm | — |
Thickness | 030-03 microns. | — |
Thickness | 60–180 µm | — |