Patent
US 9,786,405FORMING PATTERNED GRAPHENE LAYERS
Ali Afzali-Ardakani
US
Copyright © 2026 Matter42. All rights reserved.
Patent
Atlas literature
Patent
US 9,786,405Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1 is a diagram illustrating an example of a 15 non-functionalized graphene nanomesh (GNM) 102, according to an embodiment of the present invention.
FIG. 2 is a diagram illustrating a passivated and doped graphene nanomesh 202, with dopant moiety 205 and p a ssivating moieties 210 that may be formed from …
FIG. 3 is a diagram illustrating a functionalized graphene nanomesh 302, with functionalizing moieties 305 (shown both end-on and in 20 plan view) that may be …
FIG. 4 is a diagram illustrating the "under" technique for forming a patterned graphene layer, according to an embodiment of the present invention. By way of …
FIG. 5 is a diagram illustrating the "over" technique for forming a patterned 10 graphene layer, according to an embodiment of the present invention. By way of …
FIG. 6 is a diagram illustrating two examples of patterned metal templates that may be used and reused to form patterned graphene layers, according to an …
FIG. 7 example, illustrated step 712 includes applying graphene to the template. Illustrated step 714 includes patterning the graphene via a localized reaction …
FIG. 8 example, illustrated step 812 includes applying patterned metal template 610 to the graphene layer. I llustrated step 814 includes patterning the …
FIG. 9 is a flow diagram illustrating techniques for forming a patterned graphene layer on a substrate (for example, an insulating substrate), according to an …
FIG. 10 is a flow diagram illustrating techniques for forming a patterned graphene layer on a substrate, according to an embodiment of the present invention. 20 …
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A graphene nanomesh structure on a substrate, wherein the graphene nanomesh structure provides carrier mobility for electronic devices, comprising: a heat-for m ed graphene nanomesh structure disposed on top of the substrate, wherein the heat-formed graphene nanomesh structure comprises a pattern of graphene on the substrate, and wherein the pattern is established as a result of removal of a temporary and removable patterned structure of nanoparticles of a carbide-forming metal or metal-containing alloy from the substrate, wherein each of the nanooarticles is coated with a bifunctional aroun, wherein a first end of the bifunctional arouo forms a covalent bond with the nanoparticle, and wherein a second end of the bifunctional a rou has a functionality to form an electrostatic or covalent bond with the substrate.
The structure of claim 1, wherein the substrate comprises an insulating substrate.
The structure of claim 1, wherein the substrate includes an insulating overlayer.
The structure of claim 1, wherein the at least one temporary and removable patterned structure of a carbide-forming metal or metal-containing alloy is self- assembled.
The structure of claim 1, wherein the at least one temporary and removable patterned structure of a carbide-f o rming metal or metal-containing a ll oy is patterned lithographically by deposition or etching through a mask.
10. The structure of claim 1, wherein the at least o ne temporary and rem o vable patterned structure of a carbide-f o rming metal or metal-containing all o y comprises material selected from a group containing Ni, Fe, Co, P t, and an all o y of a combination thereof.
(P reviously P resented) The structure of claim 1 5, wherein self-assembly of the at least one temporary and removable patterned structure of a carbide-f o rming metal or metal- co ntaining all o y comprises deposition of multiple preformed carbide-f o rming o r metal-containing alloy nan o particles from solution.
(O riginal) The structure of claim 1 8, wherein the film of a carbide-f o rming or metal-containing all o y layer comprises a film in a range of approximately one nan o meter to approximately 30 nanometers.
A patterned graphene structure o n a substrate, wherein the patterned graphene structure provides carrier mobility f o r electronic devices, comprising: a heat-f o rmed patterned graphene layer disposed o n top of the substrate, wherein the heat- fo rmed patterned graphene layer comprises a patte rn of graphene o n the substrate, and wherein the 3 Attorney Docket No. YOR₉₂₀₁₁₀₆₇₆US₂ Confirmation No. 7831 pattern is established as a result of removal of a temporary and removable patterned structure of nanoparticles of a carbide-forming metal or metal-containing alloy from the substrate, wherein each of the nanovarticles is coated with a bifunctional group, wherein a first end of the bifunctional aroun forms a covalent bond with the nanovarticle, and wherein a second end of the bifunctional aroun has a functionality to form an electrostatic or covalent bond with the substrate.
The structure of claim 11, wherein the substrate comprises a Cu- co ntaining layer positioned under the layer of graphene.
The structure of claim 11, wherein the substrate comprises an insulating substrate.
The structure of claim 11, wherein the substrate includes an insulating o verlayer.
15. The structure of claim 11, wherein the at least one temporary and removable patterned structure of a carbide-forming metal o r metal-containing all o y is self- assembled.
(Previously P resented) The structure of claim 11, wherein the at least one temporary and removable patterned structure of a carbide-f o rming metal or metal-containing alloy comprises material selected from a group containing Ni, Fe, Co, P t, and an all o y of a combination thereof.
Layer stacks claimed or described, ordered top of device to substrate.
graphene nanomesh structure
patterned graphene structure
Materials described outside the worked examples.
graphene
carbide-forming metal or metal-containing alloy nanoparticles
Additional fabrication and treatment steps described in the patent.
Patent
Atlas literature
Patent
US 9,786,405Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1 is a diagram illustrating an example of a 15 non-functionalized graphene nanomesh (GNM) 102, according to an embodiment of the present invention.
FIG. 2 is a diagram illustrating a passivated and doped graphene nanomesh 202, with dopant moiety 205 and p a ssivating moieties 210 that may be formed from …
FIG. 3 is a diagram illustrating a functionalized graphene nanomesh 302, with functionalizing moieties 305 (shown both end-on and in 20 plan view) that may be …
FIG. 4 is a diagram illustrating the "under" technique for forming a patterned graphene layer, according to an embodiment of the present invention. By way of …
FIG. 5 is a diagram illustrating the "over" technique for forming a patterned 10 graphene layer, according to an embodiment of the present invention. By way of …
FIG. 6 is a diagram illustrating two examples of patterned metal templates that may be used and reused to form patterned graphene layers, according to an …
FIG. 7 example, illustrated step 712 includes applying graphene to the template. Illustrated step 714 includes patterning the graphene via a localized reaction …
FIG. 8 example, illustrated step 812 includes applying patterned metal template 610 to the graphene layer. I llustrated step 814 includes patterning the …
FIG. 9 is a flow diagram illustrating techniques for forming a patterned graphene layer on a substrate (for example, an insulating substrate), according to an …
FIG. 10 is a flow diagram illustrating techniques for forming a patterned graphene layer on a substrate, according to an embodiment of the present invention. 20 …
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A graphene nanomesh structure on a substrate, wherein the graphene nanomesh structure provides carrier mobility for electronic devices, comprising: a heat-for m ed graphene nanomesh structure disposed on top of the substrate, wherein the heat-formed graphene nanomesh structure comprises a pattern of graphene on the substrate, and wherein the pattern is established as a result of removal of a temporary and removable patterned structure of nanoparticles of a carbide-forming metal or metal-containing alloy from the substrate, wherein each of the nanooarticles is coated with a bifunctional aroun, wherein a first end of the bifunctional arouo forms a covalent bond with the nanoparticle, and wherein a second end of the bifunctional a rou has a functionality to form an electrostatic or covalent bond with the substrate.
The structure of claim 1, wherein the substrate comprises an insulating substrate.
The structure of claim 1, wherein the substrate includes an insulating overlayer.
The structure of claim 1, wherein the at least one temporary and removable patterned structure of a carbide-forming metal or metal-containing alloy is self- assembled.
The structure of claim 1, wherein the at least one temporary and removable patterned structure of a carbide-f o rming metal or metal-containing a ll oy is patterned lithographically by deposition or etching through a mask.
10. The structure of claim 1, wherein the at least o ne temporary and rem o vable patterned structure of a carbide-f o rming metal or metal-containing all o y comprises material selected from a group containing Ni, Fe, Co, P t, and an all o y of a combination thereof.
(P reviously P resented) The structure of claim 1 5, wherein self-assembly of the at least one temporary and removable patterned structure of a carbide-f o rming metal or metal- co ntaining all o y comprises deposition of multiple preformed carbide-f o rming o r metal-containing alloy nan o particles from solution.
(O riginal) The structure of claim 1 8, wherein the film of a carbide-f o rming or metal-containing all o y layer comprises a film in a range of approximately one nan o meter to approximately 30 nanometers.
A patterned graphene structure o n a substrate, wherein the patterned graphene structure provides carrier mobility f o r electronic devices, comprising: a heat-f o rmed patterned graphene layer disposed o n top of the substrate, wherein the heat- fo rmed patterned graphene layer comprises a patte rn of graphene o n the substrate, and wherein the 3 Attorney Docket No. YOR₉₂₀₁₁₀₆₇₆US₂ Confirmation No. 7831 pattern is established as a result of removal of a temporary and removable patterned structure of nanoparticles of a carbide-forming metal or metal-containing alloy from the substrate, wherein each of the nanovarticles is coated with a bifunctional group, wherein a first end of the bifunctional aroun forms a covalent bond with the nanovarticle, and wherein a second end of the bifunctional aroun has a functionality to form an electrostatic or covalent bond with the substrate.
The structure of claim 11, wherein the substrate comprises a Cu- co ntaining layer positioned under the layer of graphene.
The structure of claim 11, wherein the substrate comprises an insulating substrate.
The structure of claim 11, wherein the substrate includes an insulating o verlayer.
15. The structure of claim 11, wherein the at least one temporary and removable patterned structure of a carbide-forming metal o r metal-containing all o y is self- assembled.
(Previously P resented) The structure of claim 11, wherein the at least one temporary and removable patterned structure of a carbide-f o rming metal or metal-containing alloy comprises material selected from a group containing Ni, Fe, Co, P t, and an all o y of a combination thereof.
Layer stacks claimed or described, ordered top of device to substrate.
graphene nanomesh structure
patterned graphene structure
Materials described outside the worked examples.
graphene
carbide-forming metal or metal-containing alloy nanoparticles
Additional fabrication and treatment steps described in the patent.
Patent
Atlas literature
Patent
US 9,786,405Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1 is a diagram illustrating an example of a 15 non-functionalized graphene nanomesh (GNM) 102, according to an embodiment of the present invention.
FIG. 2 is a diagram illustrating a passivated and doped graphene nanomesh 202, with dopant moiety 205 and p a ssivating moieties 210 that may be formed from …
FIG. 3 is a diagram illustrating a functionalized graphene nanomesh 302, with functionalizing moieties 305 (shown both end-on and in 20 plan view) that may be …
FIG. 4 is a diagram illustrating the "under" technique for forming a patterned graphene layer, according to an embodiment of the present invention. By way of …
FIG. 5 is a diagram illustrating the "over" technique for forming a patterned 10 graphene layer, according to an embodiment of the present invention. By way of …
FIG. 6 is a diagram illustrating two examples of patterned metal templates that may be used and reused to form patterned graphene layers, according to an …
FIG. 7 example, illustrated step 712 includes applying graphene to the template. Illustrated step 714 includes patterning the graphene via a localized reaction …
FIG. 8 example, illustrated step 812 includes applying patterned metal template 610 to the graphene layer. I llustrated step 814 includes patterning the …
FIG. 9 is a flow diagram illustrating techniques for forming a patterned graphene layer on a substrate (for example, an insulating substrate), according to an …
FIG. 10 is a flow diagram illustrating techniques for forming a patterned graphene layer on a substrate, according to an embodiment of the present invention. 20 …
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A graphene nanomesh structure on a substrate, wherein the graphene nanomesh structure provides carrier mobility for electronic devices, comprising: a heat-for m ed graphene nanomesh structure disposed on top of the substrate, wherein the heat-formed graphene nanomesh structure comprises a pattern of graphene on the substrate, and wherein the pattern is established as a result of removal of a temporary and removable patterned structure of nanoparticles of a carbide-forming metal or metal-containing alloy from the substrate, wherein each of the nanooarticles is coated with a bifunctional aroun, wherein a first end of the bifunctional arouo forms a covalent bond with the nanoparticle, and wherein a second end of the bifunctional a rou has a functionality to form an electrostatic or covalent bond with the substrate.
The structure of claim 1, wherein the substrate comprises an insulating substrate.
The structure of claim 1, wherein the substrate includes an insulating overlayer.
The structure of claim 1, wherein the at least one temporary and removable patterned structure of a carbide-forming metal or metal-containing alloy is self- assembled.
The structure of claim 1, wherein the at least one temporary and removable patterned structure of a carbide-f o rming metal or metal-containing a ll oy is patterned lithographically by deposition or etching through a mask.
10. The structure of claim 1, wherein the at least o ne temporary and rem o vable patterned structure of a carbide-f o rming metal or metal-containing all o y comprises material selected from a group containing Ni, Fe, Co, P t, and an all o y of a combination thereof.
(P reviously P resented) The structure of claim 1 5, wherein self-assembly of the at least one temporary and removable patterned structure of a carbide-f o rming metal or metal- co ntaining all o y comprises deposition of multiple preformed carbide-f o rming o r metal-containing alloy nan o particles from solution.
(O riginal) The structure of claim 1 8, wherein the film of a carbide-f o rming or metal-containing all o y layer comprises a film in a range of approximately one nan o meter to approximately 30 nanometers.
A patterned graphene structure o n a substrate, wherein the patterned graphene structure provides carrier mobility f o r electronic devices, comprising: a heat-f o rmed patterned graphene layer disposed o n top of the substrate, wherein the heat- fo rmed patterned graphene layer comprises a patte rn of graphene o n the substrate, and wherein the 3 Attorney Docket No. YOR₉₂₀₁₁₀₆₇₆US₂ Confirmation No. 7831 pattern is established as a result of removal of a temporary and removable patterned structure of nanoparticles of a carbide-forming metal or metal-containing alloy from the substrate, wherein each of the nanovarticles is coated with a bifunctional group, wherein a first end of the bifunctional aroun forms a covalent bond with the nanovarticle, and wherein a second end of the bifunctional aroun has a functionality to form an electrostatic or covalent bond with the substrate.
The structure of claim 11, wherein the substrate comprises a Cu- co ntaining layer positioned under the layer of graphene.
The structure of claim 11, wherein the substrate comprises an insulating substrate.
The structure of claim 11, wherein the substrate includes an insulating o verlayer.
15. The structure of claim 11, wherein the at least one temporary and removable patterned structure of a carbide-forming metal o r metal-containing all o y is self- assembled.
(Previously P resented) The structure of claim 11, wherein the at least one temporary and removable patterned structure of a carbide-f o rming metal or metal-containing alloy comprises material selected from a group containing Ni, Fe, Co, P t, and an all o y of a combination thereof.
Layer stacks claimed or described, ordered top of device to substrate.
graphene nanomesh structure
patterned graphene structure
Materials described outside the worked examples.
graphene
carbide-forming metal or metal-containing alloy nanoparticles
Additional fabrication and treatment steps described in the patent.
Patent
Atlas literature
Patent
US 9,786,405Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1 is a diagram illustrating an example of a 15 non-functionalized graphene nanomesh (GNM) 102, according to an embodiment of the present invention.
FIG. 2 is a diagram illustrating a passivated and doped graphene nanomesh 202, with dopant moiety 205 and p a ssivating moieties 210 that may be formed from …
FIG. 3 is a diagram illustrating a functionalized graphene nanomesh 302, with functionalizing moieties 305 (shown both end-on and in 20 plan view) that may be …
FIG. 4 is a diagram illustrating the "under" technique for forming a patterned graphene layer, according to an embodiment of the present invention. By way of …
FIG. 5 is a diagram illustrating the "over" technique for forming a patterned 10 graphene layer, according to an embodiment of the present invention. By way of …
FIG. 6 is a diagram illustrating two examples of patterned metal templates that may be used and reused to form patterned graphene layers, according to an …
FIG. 7 example, illustrated step 712 includes applying graphene to the template. Illustrated step 714 includes patterning the graphene via a localized reaction …
FIG. 8 example, illustrated step 812 includes applying patterned metal template 610 to the graphene layer. I llustrated step 814 includes patterning the …
FIG. 9 is a flow diagram illustrating techniques for forming a patterned graphene layer on a substrate (for example, an insulating substrate), according to an …
FIG. 10 is a flow diagram illustrating techniques for forming a patterned graphene layer on a substrate, according to an embodiment of the present invention. 20 …
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A graphene nanomesh structure on a substrate, wherein the graphene nanomesh structure provides carrier mobility for electronic devices, comprising: a heat-for m ed graphene nanomesh structure disposed on top of the substrate, wherein the heat-formed graphene nanomesh structure comprises a pattern of graphene on the substrate, and wherein the pattern is established as a result of removal of a temporary and removable patterned structure of nanoparticles of a carbide-forming metal or metal-containing alloy from the substrate, wherein each of the nanooarticles is coated with a bifunctional aroun, wherein a first end of the bifunctional arouo forms a covalent bond with the nanoparticle, and wherein a second end of the bifunctional a rou has a functionality to form an electrostatic or covalent bond with the substrate.
The structure of claim 1, wherein the substrate comprises an insulating substrate.
The structure of claim 1, wherein the substrate includes an insulating overlayer.
The structure of claim 1, wherein the at least one temporary and removable patterned structure of a carbide-forming metal or metal-containing alloy is self- assembled.
The structure of claim 1, wherein the at least one temporary and removable patterned structure of a carbide-f o rming metal or metal-containing a ll oy is patterned lithographically by deposition or etching through a mask.
10. The structure of claim 1, wherein the at least o ne temporary and rem o vable patterned structure of a carbide-f o rming metal or metal-containing all o y comprises material selected from a group containing Ni, Fe, Co, P t, and an all o y of a combination thereof.
(P reviously P resented) The structure of claim 1 5, wherein self-assembly of the at least one temporary and removable patterned structure of a carbide-f o rming metal or metal- co ntaining all o y comprises deposition of multiple preformed carbide-f o rming o r metal-containing alloy nan o particles from solution.
(O riginal) The structure of claim 1 8, wherein the film of a carbide-f o rming or metal-containing all o y layer comprises a film in a range of approximately one nan o meter to approximately 30 nanometers.
A patterned graphene structure o n a substrate, wherein the patterned graphene structure provides carrier mobility f o r electronic devices, comprising: a heat-f o rmed patterned graphene layer disposed o n top of the substrate, wherein the heat- fo rmed patterned graphene layer comprises a patte rn of graphene o n the substrate, and wherein the 3 Attorney Docket No. YOR₉₂₀₁₁₀₆₇₆US₂ Confirmation No. 7831 pattern is established as a result of removal of a temporary and removable patterned structure of nanoparticles of a carbide-forming metal or metal-containing alloy from the substrate, wherein each of the nanovarticles is coated with a bifunctional group, wherein a first end of the bifunctional aroun forms a covalent bond with the nanovarticle, and wherein a second end of the bifunctional aroun has a functionality to form an electrostatic or covalent bond with the substrate.
The structure of claim 11, wherein the substrate comprises a Cu- co ntaining layer positioned under the layer of graphene.
The structure of claim 11, wherein the substrate comprises an insulating substrate.
The structure of claim 11, wherein the substrate includes an insulating o verlayer.
15. The structure of claim 11, wherein the at least one temporary and removable patterned structure of a carbide-forming metal o r metal-containing all o y is self- assembled.
(Previously P resented) The structure of claim 11, wherein the at least one temporary and removable patterned structure of a carbide-f o rming metal or metal-containing alloy comprises material selected from a group containing Ni, Fe, Co, P t, and an all o y of a combination thereof.
Layer stacks claimed or described, ordered top of device to substrate.
graphene nanomesh structure
patterned graphene structure
Materials described outside the worked examples.
graphene
carbide-forming metal or metal-containing alloy nanoparticles
Additional fabrication and treatment steps described in the patent.
bifunctional group coating on nanoparticles
insulating substrate
Ni
Fe
Co
Pt
Cu-containing layer
bifunctional group coating on nanoparticles
insulating substrate
Ni
Fe
Co
Pt
Cu-containing layer
bifunctional group coating on nanoparticles
insulating substrate
Ni
Fe
Co
Pt
Cu-containing layer
bifunctional group coating on nanoparticles
insulating substrate
Ni
Fe
Co
Pt
Cu-containing layer