Patent
US 8,409,450GRAPHENE-BASED STRUCTURE, METHOD OF SUSPENDING GRAPHENE MEMBRANE, AND METHOD OF DEPOSITING MATERIAL ONTO GRAPHENE MEMBRANE
Alexander K. Zettl, Jannik C. Meyer
US
Copyright © 2026 Matter42. All rights reserved.
Patent
Atlas literature
Patent
US 8,409,450Patent drawings and their descriptions. Click a drawing to enlarge it.
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
Attorney Docket No. IB-2501 AMENDMENTS TO THE CLAIMS 1. A method of suspending [[a]] graphene membrane-aress-a gap-m on a pre-fabricated support structure comprising: attaching the graphene to a substrate; placing the pre-fabricated support structure having a gap on the gr a phene; immersing the pre-fabricated support structure and the gr a phene in a solvent; evaporating the solvent to attach the pre-fabricated support structure to the grap hene; and separating the graphene and the pre-fabricated support structure from the substrate, leaving w hieh-leaves the graphene membrian e suspended aeress4he-gap-m on the pre- fabricated support structure.
The method of claim 1 further comprising separating the graphene from bulk graphite prior to attaching the graphene to the substrate.
The method of claim 1 wherein attaching the graphene to the substrate comprises attaching the graphene to a sacrificial surface of the substrate.
The method of claim 1 wherein separating the graphene and the pre-fabricated-support structure from the substrate comprises placing a solvent adjacent to an edge of the pre-fabricated support structure, and wherein the solvent whieh expands beneath the pre-fabricated support structure and the graphene a n d which causes the pre- fabricated support structure with the graphene membran e suspended on it aer ess -the- gap to r elease separate from the substrate.
The method of claim 1 wherei attaching there fabicated A method comprising: attaching g raphene to a substrate; applying an adhesive to a surface of [[the]] a pre-fabricated support structure; and bringing the adhesive into contact with the graphene; and separating the gr a phene and the pre-fabricated support structure from the substrate, leaving the gr a phene suspended on the pre-fabricated support structure.
The method of claim 1 further comprising heating the pre- fabricated support structure ha vin g including the graphene me mbr ane suspended across the gap after separating the pre-fabricated support structure and the graphene membran e from the substrate.
The method of claim 1 wherein the pre-fabricated support structure comprises a transmission electron microscopy TE M grid.
The method of claim 1 wherein [[:]] the pre-fabricated support structure comprises a plurality of gaps, [[;]] and wherein separating the graphene and the pre-fabricated support structure from the substrate leaves the graphene membrane suspended across at least two of the gaps i n on the pre-fabricated support structure.
3.
The method of claim 8 wherein the etch solution comprises an organic solvent.
The method of claim 9 wherein the organic solvent is selected from the group consisting of acetone and methylpyrrolidone.
Layer stacks claimed or described, ordered top of device to substrate.
suspended graphene membrane on pre-fabricated support structure
graphene membrane on TEM grid
graphene-based structure with patterned deposited material
Materials described outside the worked examples.
graphene
C
solvent
Additional fabrication and treatment steps described in the patent.
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
pattern feature dimension on graphene membrane | 2.5 nm | C |
Patent
Atlas literature
Patent
US 8,409,450Patent drawings and their descriptions. Click a drawing to enlarge it.
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
Attorney Docket No. IB-2501 AMENDMENTS TO THE CLAIMS 1. A method of suspending [[a]] graphene membrane-aress-a gap-m on a pre-fabricated support structure comprising: attaching the graphene to a substrate; placing the pre-fabricated support structure having a gap on the gr a phene; immersing the pre-fabricated support structure and the gr a phene in a solvent; evaporating the solvent to attach the pre-fabricated support structure to the grap hene; and separating the graphene and the pre-fabricated support structure from the substrate, leaving w hieh-leaves the graphene membrian e suspended aeress4he-gap-m on the pre- fabricated support structure.
The method of claim 1 further comprising separating the graphene from bulk graphite prior to attaching the graphene to the substrate.
The method of claim 1 wherein attaching the graphene to the substrate comprises attaching the graphene to a sacrificial surface of the substrate.
The method of claim 1 wherein separating the graphene and the pre-fabricated-support structure from the substrate comprises placing a solvent adjacent to an edge of the pre-fabricated support structure, and wherein the solvent whieh expands beneath the pre-fabricated support structure and the graphene a n d which causes the pre- fabricated support structure with the graphene membran e suspended on it aer ess -the- gap to r elease separate from the substrate.
The method of claim 1 wherei attaching there fabicated A method comprising: attaching g raphene to a substrate; applying an adhesive to a surface of [[the]] a pre-fabricated support structure; and bringing the adhesive into contact with the graphene; and separating the gr a phene and the pre-fabricated support structure from the substrate, leaving the gr a phene suspended on the pre-fabricated support structure.
The method of claim 1 further comprising heating the pre- fabricated support structure ha vin g including the graphene me mbr ane suspended across the gap after separating the pre-fabricated support structure and the graphene membran e from the substrate.
The method of claim 1 wherein the pre-fabricated support structure comprises a transmission electron microscopy TE M grid.
The method of claim 1 wherein [[:]] the pre-fabricated support structure comprises a plurality of gaps, [[;]] and wherein separating the graphene and the pre-fabricated support structure from the substrate leaves the graphene membrane suspended across at least two of the gaps i n on the pre-fabricated support structure.
3.
The method of claim 8 wherein the etch solution comprises an organic solvent.
The method of claim 9 wherein the organic solvent is selected from the group consisting of acetone and methylpyrrolidone.
Layer stacks claimed or described, ordered top of device to substrate.
suspended graphene membrane on pre-fabricated support structure
graphene membrane on TEM grid
graphene-based structure with patterned deposited material
Materials described outside the worked examples.
graphene
C
solvent
Additional fabrication and treatment steps described in the patent.
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
pattern feature dimension on graphene membrane | 2.5 nm | C |
Patent
Atlas literature
Patent
US 8,409,450Patent drawings and their descriptions. Click a drawing to enlarge it.
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
Attorney Docket No. IB-2501 AMENDMENTS TO THE CLAIMS 1. A method of suspending [[a]] graphene membrane-aress-a gap-m on a pre-fabricated support structure comprising: attaching the graphene to a substrate; placing the pre-fabricated support structure having a gap on the gr a phene; immersing the pre-fabricated support structure and the gr a phene in a solvent; evaporating the solvent to attach the pre-fabricated support structure to the grap hene; and separating the graphene and the pre-fabricated support structure from the substrate, leaving w hieh-leaves the graphene membrian e suspended aeress4he-gap-m on the pre- fabricated support structure.
The method of claim 1 further comprising separating the graphene from bulk graphite prior to attaching the graphene to the substrate.
The method of claim 1 wherein attaching the graphene to the substrate comprises attaching the graphene to a sacrificial surface of the substrate.
The method of claim 1 wherein separating the graphene and the pre-fabricated-support structure from the substrate comprises placing a solvent adjacent to an edge of the pre-fabricated support structure, and wherein the solvent whieh expands beneath the pre-fabricated support structure and the graphene a n d which causes the pre- fabricated support structure with the graphene membran e suspended on it aer ess -the- gap to r elease separate from the substrate.
The method of claim 1 wherei attaching there fabicated A method comprising: attaching g raphene to a substrate; applying an adhesive to a surface of [[the]] a pre-fabricated support structure; and bringing the adhesive into contact with the graphene; and separating the gr a phene and the pre-fabricated support structure from the substrate, leaving the gr a phene suspended on the pre-fabricated support structure.
The method of claim 1 further comprising heating the pre- fabricated support structure ha vin g including the graphene me mbr ane suspended across the gap after separating the pre-fabricated support structure and the graphene membran e from the substrate.
The method of claim 1 wherein the pre-fabricated support structure comprises a transmission electron microscopy TE M grid.
The method of claim 1 wherein [[:]] the pre-fabricated support structure comprises a plurality of gaps, [[;]] and wherein separating the graphene and the pre-fabricated support structure from the substrate leaves the graphene membrane suspended across at least two of the gaps i n on the pre-fabricated support structure.
3.
The method of claim 8 wherein the etch solution comprises an organic solvent.
The method of claim 9 wherein the organic solvent is selected from the group consisting of acetone and methylpyrrolidone.
Layer stacks claimed or described, ordered top of device to substrate.
suspended graphene membrane on pre-fabricated support structure
graphene membrane on TEM grid
graphene-based structure with patterned deposited material
Materials described outside the worked examples.
graphene
C
solvent
Additional fabrication and treatment steps described in the patent.
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
pattern feature dimension on graphene membrane | 2.5 nm | C |
Patent
Atlas literature
Patent
US 8,409,450Patent drawings and their descriptions. Click a drawing to enlarge it.
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
Attorney Docket No. IB-2501 AMENDMENTS TO THE CLAIMS 1. A method of suspending [[a]] graphene membrane-aress-a gap-m on a pre-fabricated support structure comprising: attaching the graphene to a substrate; placing the pre-fabricated support structure having a gap on the gr a phene; immersing the pre-fabricated support structure and the gr a phene in a solvent; evaporating the solvent to attach the pre-fabricated support structure to the grap hene; and separating the graphene and the pre-fabricated support structure from the substrate, leaving w hieh-leaves the graphene membrian e suspended aeress4he-gap-m on the pre- fabricated support structure.
The method of claim 1 further comprising separating the graphene from bulk graphite prior to attaching the graphene to the substrate.
The method of claim 1 wherein attaching the graphene to the substrate comprises attaching the graphene to a sacrificial surface of the substrate.
The method of claim 1 wherein separating the graphene and the pre-fabricated-support structure from the substrate comprises placing a solvent adjacent to an edge of the pre-fabricated support structure, and wherein the solvent whieh expands beneath the pre-fabricated support structure and the graphene a n d which causes the pre- fabricated support structure with the graphene membran e suspended on it aer ess -the- gap to r elease separate from the substrate.
The method of claim 1 wherei attaching there fabicated A method comprising: attaching g raphene to a substrate; applying an adhesive to a surface of [[the]] a pre-fabricated support structure; and bringing the adhesive into contact with the graphene; and separating the gr a phene and the pre-fabricated support structure from the substrate, leaving the gr a phene suspended on the pre-fabricated support structure.
The method of claim 1 further comprising heating the pre- fabricated support structure ha vin g including the graphene me mbr ane suspended across the gap after separating the pre-fabricated support structure and the graphene membran e from the substrate.
The method of claim 1 wherein the pre-fabricated support structure comprises a transmission electron microscopy TE M grid.
The method of claim 1 wherein [[:]] the pre-fabricated support structure comprises a plurality of gaps, [[;]] and wherein separating the graphene and the pre-fabricated support structure from the substrate leaves the graphene membrane suspended across at least two of the gaps i n on the pre-fabricated support structure.
3.
The method of claim 8 wherein the etch solution comprises an organic solvent.
The method of claim 9 wherein the organic solvent is selected from the group consisting of acetone and methylpyrrolidone.
Layer stacks claimed or described, ordered top of device to substrate.
suspended graphene membrane on pre-fabricated support structure
graphene membrane on TEM grid
graphene-based structure with patterned deposited material
Materials described outside the worked examples.
graphene
C
solvent
Additional fabrication and treatment steps described in the patent.
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
pattern feature dimension on graphene membrane | 2.5 nm | C |
silicon dioxide
SiO₂
potassium hydroxide
KOH
acetone
C₃H₆O
methylpyrrolidone
polymethyl methacrylate
| 10–30 nm |
| — |
Thickness | ≤ 2.5 nm | — |
silicon dioxide
SiO₂
potassium hydroxide
KOH
acetone
C₃H₆O
methylpyrrolidone
polymethyl methacrylate
| 10–30 nm |
| — |
Thickness | ≤ 2.5 nm | — |
silicon dioxide
SiO₂
potassium hydroxide
KOH
acetone
C₃H₆O
methylpyrrolidone
polymethyl methacrylate
| 10–30 nm |
| — |
Thickness | ≤ 2.5 nm | — |
silicon dioxide
SiO₂
potassium hydroxide
KOH
acetone
C₃H₆O
methylpyrrolidone
polymethyl methacrylate
| 10–30 nm |
| — |
Thickness | ≤ 2.5 nm | — |