Patent
US 9,159,615GRAPHENE INTERCONNECTION AND METHOD OF MANUFACTURING THE SAME
Tatsuro Saito
US
Copyright © 2026 Matter42. All rights reserved.
Patent
Atlas literature
Patent
US 9,159,615Patent drawings and their descriptions. Click a drawing to enlarge it.
FIGS. 1l A and 11 B are sectional views showing the manufacturing steps of the graphene interconnection according to the third embodiment.
FIG. 2B. That is, an interconnection 20 layer insulating film 13 is formed on a first contact layer 100. Then, as shown in
FIG. 3A, the interconnection layer 15 insulating film 13 is coated with a resist (not shown), and a lithography step is performed. After that, interconnection …
FIG. 4A of the first embodiment. That is, a catalyst underlying film 14 and catalyst 15 film 15 outside interconnection trenches 30 are recessed, so the upper …
FIG. 5 A, when forming the graphene layers 16 of the interconnection layer 200, a graphene byproduct 50 is formed on the interconnection layer 5 insulating film …
FIG. 6 B, a graphene layer 16 including up to about 100 graphene sheets is formed on the catalyst film 15 in each interconnection trench 30. 5 Since the …
FIG. 7, the sacrificial film 51 outside the interconnection trenches 30 is removed by wet etching. At the same time, the graphene byproduct 15 50 formed on the …
FIGS. 8 A and 8B are sectional views showing the structure of a graphene interconnection according to 25 the second embodiment;
FIGS. 9A and 9B are sectional views showing the manufacturing steps of the graphene interconnection-4-according to the second embodiment;
FIG. 10 is a sectional view showing the structure of a graphene interconnection according to the third e mbodiment; and 5
FIG. 11 A, the upper portion of 15 each catalyst film 15 is removed by CMP. Conse q uently, the upper surface of the catalyst film 15 becomes lower than the …
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
Application No. 13/216,435 Docket No.: 1242236-0073 US Amendment dated After Notice of Allowance of AMENDMENTS TO THE CLAIMS 1. A graphene interconnection comprising: an insulating film including an interconnection trench; a catalyst underlying film formed on both side surfaces and the bottom surface of the interconnection trench; a catalyst film formed on the catalyst underlying film in the interconnection trench and filling at least a portion of the interconnection trench; and a graphene layer formed on the catalyst film in the interconnection trench, and including graphene sheets stacked in a direction perpendicularly to a bottom surface of the interconnection trench, wherein the graphene layer has an upper surface higher than an upper surface of the interconnection trench, and a lower surface lower than the upper surface of the interconnection trench, an end portion of a lower portion of the graphene layer is directly contact with the catalyst underlying film, and among the graphene sheets forming the graphene layer, end portions of not less than two graphene sheets are directly contact with the catalyst underlying film.
The interconnection of claim 1, wherein the catalyst underlying film includes one of Ta, Ti, and Ru.
The interconnection of claim 1, wherein the plurality of graphene sheets comprise between two and 100 graphene sheets.
The interconnection of claim 1, wherein the catalyst film comprises a continuous film.
The interconnection of claim 1, wherein the catalyst film comprises one of a film of a metal selected from the group consisting of Co, Ni, Fe, Ru, and Cu, a film of an alloy containing at least one of Co, Ni, Fe, Ru, and Cu, and a film of a carbide of any of Co, Ni, Fe, Ru, and Cu.
The interconnection of claim 1, wherein the graphene layer has a line shape in a plan view.
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2 Application No. 13/216,435 Docket No.: 1242236-0073 US Amendment dated After Notice of Allowance of canceled
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3 Application No. 13/216,435 Docket No.: 1242236-0073 US Amendment dated After Notice of Allowance of canceled
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A graphene interconnection comprising: an insulating film including an interconnection trench; a catalyst underlying film formed on both side surfaces and the bottom surface of the interconnection trench, a catalyst film formed on the catalyst underlying film in the interconnection trench and filling at least a portion of the interconnection trench; and a graphene layer formed on the catalyst film in the interconnection trench, the graphene layer being a form of a plate, and the graphene layer including graphene sheets stacked in a first direction the first direction perpendicularly to a bottom surface of the interconnection trench, wherein the graphene layer has an upper surface higher than an upper surface of the interconnection trench, and a lower surface lower than the upper surface of the interconnection trench, and 4 Application No. 13/216,435 Docket No.: 1242236-0073 US Amendment dated After Notice of Allowance of an end portion of a lower portion of the graphene layer is directly contact with the catalyst underlying film.
The interconnection of claim 21, wherein the graphene sheets are stacked only in the first direction.
The interconnection of claim 21, wherein end portions of not less than two graphene sheets and an end portion of the catalyst film are on a same plane.
(Cu rr ently Amended) A graphene interconnection comprising: an insulating film including an interconnection a trench; a catalyst underlying film formed on both side surfaces and the bottom surface of the interconnection trench; a catalyst film formed on the catalyst underlying film in the interconnection trench and filling at least a portion of the interconnection trench; and a graphene layer formed on the catalyst film in the interconnection trench, and including graphene sheets stacked in a direction perpendicularly non-parallel to a bottom surface of the interconnection trench, wherein the graphene layer has an upper surface higher than an upper surface of the interconnection trench, and a lower surface lower than the upper surface of the interconnection trench, side end portions of a lower portion of the graphene layer is directly in contact with the catalyst underlying film.
The interconnection of claim 24, wherein the graphene layer has an upper surface higher than an upper surface of the trench.
The interconnection of claim 24, wherein side end portions of a lower portion of the graphene layer is directly contact with the catalyst underlying film.
The interconnection of claim 24, wherein among the graphene sheets forming the graphene layer, end portions of not less than two graphene sheets are directly contact with the catalyst underlying film.
The interconnection of claim 24, wherein the catalyst underlying film includes one of Ta, Ti, and Ru.
The interconnection of claim 24, wherein the graphene sheets comprise between two and 100 graphene sheets.
The interconnection of claim 24, wherein the catalyst film comprises a continuous film.
The interconnection of claim 24, wherein the catalyst film comprises one of a film of a metal selected from the group consisting of Co, Ni, Fe, Ru, and Cu, a film of an alloy containing at least one of Co, Ni, Fe, Ru, and Cu, and a film of a carbide of any of Co, Ni, Fe, Ru, and Cu.
The interconnection of claim 24, wherein end portions of not less than two graphene sheets and an end portion of the catalyst film are on a same plane. 7
Layer stacks claimed or described, ordered top of device to substrate.
graphene interconnection (claim 1)
graphene interconnection (claim 21, plate form)
Materials described outside the worked examples.
catalyst underlying film
catalyst film
graphene layer
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
catalyst film minimum thickness for continuous film | 0.5 nm | catalyst film |
catalyst underlying film thickness |
Patent
Atlas literature
Patent
US 9,159,615Patent drawings and their descriptions. Click a drawing to enlarge it.
FIGS. 1l A and 11 B are sectional views showing the manufacturing steps of the graphene interconnection according to the third embodiment.
FIG. 2B. That is, an interconnection 20 layer insulating film 13 is formed on a first contact layer 100. Then, as shown in
FIG. 3A, the interconnection layer 15 insulating film 13 is coated with a resist (not shown), and a lithography step is performed. After that, interconnection …
FIG. 4A of the first embodiment. That is, a catalyst underlying film 14 and catalyst 15 film 15 outside interconnection trenches 30 are recessed, so the upper …
FIG. 5 A, when forming the graphene layers 16 of the interconnection layer 200, a graphene byproduct 50 is formed on the interconnection layer 5 insulating film …
FIG. 6 B, a graphene layer 16 including up to about 100 graphene sheets is formed on the catalyst film 15 in each interconnection trench 30. 5 Since the …
FIG. 7, the sacrificial film 51 outside the interconnection trenches 30 is removed by wet etching. At the same time, the graphene byproduct 15 50 formed on the …
FIGS. 8 A and 8B are sectional views showing the structure of a graphene interconnection according to 25 the second embodiment;
FIGS. 9A and 9B are sectional views showing the manufacturing steps of the graphene interconnection-4-according to the second embodiment;
FIG. 10 is a sectional view showing the structure of a graphene interconnection according to the third e mbodiment; and 5
FIG. 11 A, the upper portion of 15 each catalyst film 15 is removed by CMP. Conse q uently, the upper surface of the catalyst film 15 becomes lower than the …
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
Application No. 13/216,435 Docket No.: 1242236-0073 US Amendment dated After Notice of Allowance of AMENDMENTS TO THE CLAIMS 1. A graphene interconnection comprising: an insulating film including an interconnection trench; a catalyst underlying film formed on both side surfaces and the bottom surface of the interconnection trench; a catalyst film formed on the catalyst underlying film in the interconnection trench and filling at least a portion of the interconnection trench; and a graphene layer formed on the catalyst film in the interconnection trench, and including graphene sheets stacked in a direction perpendicularly to a bottom surface of the interconnection trench, wherein the graphene layer has an upper surface higher than an upper surface of the interconnection trench, and a lower surface lower than the upper surface of the interconnection trench, an end portion of a lower portion of the graphene layer is directly contact with the catalyst underlying film, and among the graphene sheets forming the graphene layer, end portions of not less than two graphene sheets are directly contact with the catalyst underlying film.
The interconnection of claim 1, wherein the catalyst underlying film includes one of Ta, Ti, and Ru.
The interconnection of claim 1, wherein the plurality of graphene sheets comprise between two and 100 graphene sheets.
The interconnection of claim 1, wherein the catalyst film comprises a continuous film.
The interconnection of claim 1, wherein the catalyst film comprises one of a film of a metal selected from the group consisting of Co, Ni, Fe, Ru, and Cu, a film of an alloy containing at least one of Co, Ni, Fe, Ru, and Cu, and a film of a carbide of any of Co, Ni, Fe, Ru, and Cu.
The interconnection of claim 1, wherein the graphene layer has a line shape in a plan view.
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2 Application No. 13/216,435 Docket No.: 1242236-0073 US Amendment dated After Notice of Allowance of canceled
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3 Application No. 13/216,435 Docket No.: 1242236-0073 US Amendment dated After Notice of Allowance of canceled
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A graphene interconnection comprising: an insulating film including an interconnection trench; a catalyst underlying film formed on both side surfaces and the bottom surface of the interconnection trench, a catalyst film formed on the catalyst underlying film in the interconnection trench and filling at least a portion of the interconnection trench; and a graphene layer formed on the catalyst film in the interconnection trench, the graphene layer being a form of a plate, and the graphene layer including graphene sheets stacked in a first direction the first direction perpendicularly to a bottom surface of the interconnection trench, wherein the graphene layer has an upper surface higher than an upper surface of the interconnection trench, and a lower surface lower than the upper surface of the interconnection trench, and 4 Application No. 13/216,435 Docket No.: 1242236-0073 US Amendment dated After Notice of Allowance of an end portion of a lower portion of the graphene layer is directly contact with the catalyst underlying film.
The interconnection of claim 21, wherein the graphene sheets are stacked only in the first direction.
The interconnection of claim 21, wherein end portions of not less than two graphene sheets and an end portion of the catalyst film are on a same plane.
(Cu rr ently Amended) A graphene interconnection comprising: an insulating film including an interconnection a trench; a catalyst underlying film formed on both side surfaces and the bottom surface of the interconnection trench; a catalyst film formed on the catalyst underlying film in the interconnection trench and filling at least a portion of the interconnection trench; and a graphene layer formed on the catalyst film in the interconnection trench, and including graphene sheets stacked in a direction perpendicularly non-parallel to a bottom surface of the interconnection trench, wherein the graphene layer has an upper surface higher than an upper surface of the interconnection trench, and a lower surface lower than the upper surface of the interconnection trench, side end portions of a lower portion of the graphene layer is directly in contact with the catalyst underlying film.
The interconnection of claim 24, wherein the graphene layer has an upper surface higher than an upper surface of the trench.
The interconnection of claim 24, wherein side end portions of a lower portion of the graphene layer is directly contact with the catalyst underlying film.
The interconnection of claim 24, wherein among the graphene sheets forming the graphene layer, end portions of not less than two graphene sheets are directly contact with the catalyst underlying film.
The interconnection of claim 24, wherein the catalyst underlying film includes one of Ta, Ti, and Ru.
The interconnection of claim 24, wherein the graphene sheets comprise between two and 100 graphene sheets.
The interconnection of claim 24, wherein the catalyst film comprises a continuous film.
The interconnection of claim 24, wherein the catalyst film comprises one of a film of a metal selected from the group consisting of Co, Ni, Fe, Ru, and Cu, a film of an alloy containing at least one of Co, Ni, Fe, Ru, and Cu, and a film of a carbide of any of Co, Ni, Fe, Ru, and Cu.
The interconnection of claim 24, wherein end portions of not less than two graphene sheets and an end portion of the catalyst film are on a same plane. 7
Layer stacks claimed or described, ordered top of device to substrate.
graphene interconnection (claim 1)
graphene interconnection (claim 21, plate form)
Materials described outside the worked examples.
catalyst underlying film
catalyst film
graphene layer
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
catalyst film minimum thickness for continuous film | 0.5 nm | catalyst film |
catalyst underlying film thickness |
Patent
Atlas literature
Patent
US 9,159,615Patent drawings and their descriptions. Click a drawing to enlarge it.
FIGS. 1l A and 11 B are sectional views showing the manufacturing steps of the graphene interconnection according to the third embodiment.
FIG. 2B. That is, an interconnection 20 layer insulating film 13 is formed on a first contact layer 100. Then, as shown in
FIG. 3A, the interconnection layer 15 insulating film 13 is coated with a resist (not shown), and a lithography step is performed. After that, interconnection …
FIG. 4A of the first embodiment. That is, a catalyst underlying film 14 and catalyst 15 film 15 outside interconnection trenches 30 are recessed, so the upper …
FIG. 5 A, when forming the graphene layers 16 of the interconnection layer 200, a graphene byproduct 50 is formed on the interconnection layer 5 insulating film …
FIG. 6 B, a graphene layer 16 including up to about 100 graphene sheets is formed on the catalyst film 15 in each interconnection trench 30. 5 Since the …
FIG. 7, the sacrificial film 51 outside the interconnection trenches 30 is removed by wet etching. At the same time, the graphene byproduct 15 50 formed on the …
FIGS. 8 A and 8B are sectional views showing the structure of a graphene interconnection according to 25 the second embodiment;
FIGS. 9A and 9B are sectional views showing the manufacturing steps of the graphene interconnection-4-according to the second embodiment;
FIG. 10 is a sectional view showing the structure of a graphene interconnection according to the third e mbodiment; and 5
FIG. 11 A, the upper portion of 15 each catalyst film 15 is removed by CMP. Conse q uently, the upper surface of the catalyst film 15 becomes lower than the …
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
Application No. 13/216,435 Docket No.: 1242236-0073 US Amendment dated After Notice of Allowance of AMENDMENTS TO THE CLAIMS 1. A graphene interconnection comprising: an insulating film including an interconnection trench; a catalyst underlying film formed on both side surfaces and the bottom surface of the interconnection trench; a catalyst film formed on the catalyst underlying film in the interconnection trench and filling at least a portion of the interconnection trench; and a graphene layer formed on the catalyst film in the interconnection trench, and including graphene sheets stacked in a direction perpendicularly to a bottom surface of the interconnection trench, wherein the graphene layer has an upper surface higher than an upper surface of the interconnection trench, and a lower surface lower than the upper surface of the interconnection trench, an end portion of a lower portion of the graphene layer is directly contact with the catalyst underlying film, and among the graphene sheets forming the graphene layer, end portions of not less than two graphene sheets are directly contact with the catalyst underlying film.
The interconnection of claim 1, wherein the catalyst underlying film includes one of Ta, Ti, and Ru.
The interconnection of claim 1, wherein the plurality of graphene sheets comprise between two and 100 graphene sheets.
The interconnection of claim 1, wherein the catalyst film comprises a continuous film.
The interconnection of claim 1, wherein the catalyst film comprises one of a film of a metal selected from the group consisting of Co, Ni, Fe, Ru, and Cu, a film of an alloy containing at least one of Co, Ni, Fe, Ru, and Cu, and a film of a carbide of any of Co, Ni, Fe, Ru, and Cu.
The interconnection of claim 1, wherein the graphene layer has a line shape in a plan view.
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2 Application No. 13/216,435 Docket No.: 1242236-0073 US Amendment dated After Notice of Allowance of canceled
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3 Application No. 13/216,435 Docket No.: 1242236-0073 US Amendment dated After Notice of Allowance of canceled
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A graphene interconnection comprising: an insulating film including an interconnection trench; a catalyst underlying film formed on both side surfaces and the bottom surface of the interconnection trench, a catalyst film formed on the catalyst underlying film in the interconnection trench and filling at least a portion of the interconnection trench; and a graphene layer formed on the catalyst film in the interconnection trench, the graphene layer being a form of a plate, and the graphene layer including graphene sheets stacked in a first direction the first direction perpendicularly to a bottom surface of the interconnection trench, wherein the graphene layer has an upper surface higher than an upper surface of the interconnection trench, and a lower surface lower than the upper surface of the interconnection trench, and 4 Application No. 13/216,435 Docket No.: 1242236-0073 US Amendment dated After Notice of Allowance of an end portion of a lower portion of the graphene layer is directly contact with the catalyst underlying film.
The interconnection of claim 21, wherein the graphene sheets are stacked only in the first direction.
The interconnection of claim 21, wherein end portions of not less than two graphene sheets and an end portion of the catalyst film are on a same plane.
(Cu rr ently Amended) A graphene interconnection comprising: an insulating film including an interconnection a trench; a catalyst underlying film formed on both side surfaces and the bottom surface of the interconnection trench; a catalyst film formed on the catalyst underlying film in the interconnection trench and filling at least a portion of the interconnection trench; and a graphene layer formed on the catalyst film in the interconnection trench, and including graphene sheets stacked in a direction perpendicularly non-parallel to a bottom surface of the interconnection trench, wherein the graphene layer has an upper surface higher than an upper surface of the interconnection trench, and a lower surface lower than the upper surface of the interconnection trench, side end portions of a lower portion of the graphene layer is directly in contact with the catalyst underlying film.
The interconnection of claim 24, wherein the graphene layer has an upper surface higher than an upper surface of the trench.
The interconnection of claim 24, wherein side end portions of a lower portion of the graphene layer is directly contact with the catalyst underlying film.
The interconnection of claim 24, wherein among the graphene sheets forming the graphene layer, end portions of not less than two graphene sheets are directly contact with the catalyst underlying film.
The interconnection of claim 24, wherein the catalyst underlying film includes one of Ta, Ti, and Ru.
The interconnection of claim 24, wherein the graphene sheets comprise between two and 100 graphene sheets.
The interconnection of claim 24, wherein the catalyst film comprises a continuous film.
The interconnection of claim 24, wherein the catalyst film comprises one of a film of a metal selected from the group consisting of Co, Ni, Fe, Ru, and Cu, a film of an alloy containing at least one of Co, Ni, Fe, Ru, and Cu, and a film of a carbide of any of Co, Ni, Fe, Ru, and Cu.
The interconnection of claim 24, wherein end portions of not less than two graphene sheets and an end portion of the catalyst film are on a same plane. 7
Layer stacks claimed or described, ordered top of device to substrate.
graphene interconnection (claim 1)
graphene interconnection (claim 21, plate form)
Materials described outside the worked examples.
catalyst underlying film
catalyst film
graphene layer
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
catalyst film minimum thickness for continuous film | 0.5 nm | catalyst film |
catalyst underlying film thickness |
Patent
Atlas literature
Patent
US 9,159,615Patent drawings and their descriptions. Click a drawing to enlarge it.
FIGS. 1l A and 11 B are sectional views showing the manufacturing steps of the graphene interconnection according to the third embodiment.
FIG. 2B. That is, an interconnection 20 layer insulating film 13 is formed on a first contact layer 100. Then, as shown in
FIG. 3A, the interconnection layer 15 insulating film 13 is coated with a resist (not shown), and a lithography step is performed. After that, interconnection …
FIG. 4A of the first embodiment. That is, a catalyst underlying film 14 and catalyst 15 film 15 outside interconnection trenches 30 are recessed, so the upper …
FIG. 5 A, when forming the graphene layers 16 of the interconnection layer 200, a graphene byproduct 50 is formed on the interconnection layer 5 insulating film …
FIG. 6 B, a graphene layer 16 including up to about 100 graphene sheets is formed on the catalyst film 15 in each interconnection trench 30. 5 Since the …
FIG. 7, the sacrificial film 51 outside the interconnection trenches 30 is removed by wet etching. At the same time, the graphene byproduct 15 50 formed on the …
FIGS. 8 A and 8B are sectional views showing the structure of a graphene interconnection according to 25 the second embodiment;
FIGS. 9A and 9B are sectional views showing the manufacturing steps of the graphene interconnection-4-according to the second embodiment;
FIG. 10 is a sectional view showing the structure of a graphene interconnection according to the third e mbodiment; and 5
FIG. 11 A, the upper portion of 15 each catalyst film 15 is removed by CMP. Conse q uently, the upper surface of the catalyst film 15 becomes lower than the …
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
Application No. 13/216,435 Docket No.: 1242236-0073 US Amendment dated After Notice of Allowance of AMENDMENTS TO THE CLAIMS 1. A graphene interconnection comprising: an insulating film including an interconnection trench; a catalyst underlying film formed on both side surfaces and the bottom surface of the interconnection trench; a catalyst film formed on the catalyst underlying film in the interconnection trench and filling at least a portion of the interconnection trench; and a graphene layer formed on the catalyst film in the interconnection trench, and including graphene sheets stacked in a direction perpendicularly to a bottom surface of the interconnection trench, wherein the graphene layer has an upper surface higher than an upper surface of the interconnection trench, and a lower surface lower than the upper surface of the interconnection trench, an end portion of a lower portion of the graphene layer is directly contact with the catalyst underlying film, and among the graphene sheets forming the graphene layer, end portions of not less than two graphene sheets are directly contact with the catalyst underlying film.
The interconnection of claim 1, wherein the catalyst underlying film includes one of Ta, Ti, and Ru.
The interconnection of claim 1, wherein the plurality of graphene sheets comprise between two and 100 graphene sheets.
The interconnection of claim 1, wherein the catalyst film comprises a continuous film.
The interconnection of claim 1, wherein the catalyst film comprises one of a film of a metal selected from the group consisting of Co, Ni, Fe, Ru, and Cu, a film of an alloy containing at least one of Co, Ni, Fe, Ru, and Cu, and a film of a carbide of any of Co, Ni, Fe, Ru, and Cu.
The interconnection of claim 1, wherein the graphene layer has a line shape in a plan view.
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2 Application No. 13/216,435 Docket No.: 1242236-0073 US Amendment dated After Notice of Allowance of canceled
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3 Application No. 13/216,435 Docket No.: 1242236-0073 US Amendment dated After Notice of Allowance of canceled
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A graphene interconnection comprising: an insulating film including an interconnection trench; a catalyst underlying film formed on both side surfaces and the bottom surface of the interconnection trench, a catalyst film formed on the catalyst underlying film in the interconnection trench and filling at least a portion of the interconnection trench; and a graphene layer formed on the catalyst film in the interconnection trench, the graphene layer being a form of a plate, and the graphene layer including graphene sheets stacked in a first direction the first direction perpendicularly to a bottom surface of the interconnection trench, wherein the graphene layer has an upper surface higher than an upper surface of the interconnection trench, and a lower surface lower than the upper surface of the interconnection trench, and 4 Application No. 13/216,435 Docket No.: 1242236-0073 US Amendment dated After Notice of Allowance of an end portion of a lower portion of the graphene layer is directly contact with the catalyst underlying film.
The interconnection of claim 21, wherein the graphene sheets are stacked only in the first direction.
The interconnection of claim 21, wherein end portions of not less than two graphene sheets and an end portion of the catalyst film are on a same plane.
(Cu rr ently Amended) A graphene interconnection comprising: an insulating film including an interconnection a trench; a catalyst underlying film formed on both side surfaces and the bottom surface of the interconnection trench; a catalyst film formed on the catalyst underlying film in the interconnection trench and filling at least a portion of the interconnection trench; and a graphene layer formed on the catalyst film in the interconnection trench, and including graphene sheets stacked in a direction perpendicularly non-parallel to a bottom surface of the interconnection trench, wherein the graphene layer has an upper surface higher than an upper surface of the interconnection trench, and a lower surface lower than the upper surface of the interconnection trench, side end portions of a lower portion of the graphene layer is directly in contact with the catalyst underlying film.
The interconnection of claim 24, wherein the graphene layer has an upper surface higher than an upper surface of the trench.
The interconnection of claim 24, wherein side end portions of a lower portion of the graphene layer is directly contact with the catalyst underlying film.
The interconnection of claim 24, wherein among the graphene sheets forming the graphene layer, end portions of not less than two graphene sheets are directly contact with the catalyst underlying film.
The interconnection of claim 24, wherein the catalyst underlying film includes one of Ta, Ti, and Ru.
The interconnection of claim 24, wherein the graphene sheets comprise between two and 100 graphene sheets.
The interconnection of claim 24, wherein the catalyst film comprises a continuous film.
The interconnection of claim 24, wherein the catalyst film comprises one of a film of a metal selected from the group consisting of Co, Ni, Fe, Ru, and Cu, a film of an alloy containing at least one of Co, Ni, Fe, Ru, and Cu, and a film of a carbide of any of Co, Ni, Fe, Ru, and Cu.
The interconnection of claim 24, wherein end portions of not less than two graphene sheets and an end portion of the catalyst film are on a same plane. 7
Layer stacks claimed or described, ordered top of device to substrate.
graphene interconnection (claim 1)
graphene interconnection (claim 21, plate form)
Materials described outside the worked examples.
catalyst underlying film
catalyst film
graphene layer
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
catalyst film minimum thickness for continuous film | 0.5 nm | catalyst film |
catalyst underlying film thickness |
graphene interconnection (claim 24, non-parallel stacking)
graphene interconnection structure (described embodiment)
catalyst underlying film (Ta, Ti, or Ru)
catalyst film (Co, Ni, Fe, Ru, Cu or alloy/carbide thereof)
TaN
TiN
insulating film (SiOC)
SiOC
cap film (SiN or SiCN)
| 1 nm |
catalyst underlying film |
number of graphene sheets in graphene layer (claimed range) | 2–100 sheets | graphene layer |
Thickness | ≥ 0.5 nm | — |
Thickness | ≤ 0.5 nm | — |
graphene interconnection (claim 24, non-parallel stacking)
graphene interconnection structure (described embodiment)
catalyst underlying film (Ta, Ti, or Ru)
catalyst film (Co, Ni, Fe, Ru, Cu or alloy/carbide thereof)
TaN
TiN
insulating film (SiOC)
SiOC
cap film (SiN or SiCN)
| 1 nm |
catalyst underlying film |
number of graphene sheets in graphene layer (claimed range) | 2–100 sheets | graphene layer |
Thickness | ≥ 0.5 nm | — |
Thickness | ≤ 0.5 nm | — |
graphene interconnection (claim 24, non-parallel stacking)
graphene interconnection structure (described embodiment)
catalyst underlying film (Ta, Ti, or Ru)
catalyst film (Co, Ni, Fe, Ru, Cu or alloy/carbide thereof)
TaN
TiN
insulating film (SiOC)
SiOC
cap film (SiN or SiCN)
| 1 nm |
catalyst underlying film |
number of graphene sheets in graphene layer (claimed range) | 2–100 sheets | graphene layer |
Thickness | ≥ 0.5 nm | — |
Thickness | ≤ 0.5 nm | — |
graphene interconnection (claim 24, non-parallel stacking)
graphene interconnection structure (described embodiment)
catalyst underlying film (Ta, Ti, or Ru)
catalyst film (Co, Ni, Fe, Ru, Cu or alloy/carbide thereof)
TaN
TiN
insulating film (SiOC)
SiOC
cap film (SiN or SiCN)
| 1 nm |
catalyst underlying film |
number of graphene sheets in graphene layer (claimed range) | 2–100 sheets | graphene layer |
Thickness | ≥ 0.5 nm | — |
Thickness | ≤ 0.5 nm | — |