Patent
US 9,761,530GRAPHENE WIRING AND METHOD FOR MANUFACTURING THE SAME
Hisao MIYAZAKI
US
Copyright © 2026 Matter42. All rights reserved.
Patent
Atlas literature
Patent
US 9,761,530Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1 is a perspective schematic diagram of 20 graphene wiring according to an embodiment; [0007]
FIG. 2 is a schematic diagram of the graphene wiring according to the embodiment; [0008]
FIG. 3 is a schematic diagram of the graphene wiring according to the embodiment; 25 [0009]
FIG. 4 is a schematic diagram of the graphene wiring according to the embodiment; [0010]
FIG. 5 is a schematic diagram of the graphene wiring according to the embodiment; [0011]
FIG. 6 is a schematic diagram of a process in a 30 method for manufacturing the graphene wiring according to the embodiment; [0012]
FIG. 7 is a schematic diagram of a process in the method for manufacturing the graphene wiring according to the embodiment; and 2 G093185-USA-A FTS 1 061-US-A …
FIG. 8 is a schematic diagram of a process in the method for manufacturing the graphene wiring according to the embodiment.
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
Graphene wiring comprising: a graphene intercalation compound including a multilayer graphene having graphene sheets stacked therein and an interlayer substance disposed between layers of the multilayer graphene; and an interlayer cross-linked layer connected to a side surface of the multilayer graphene, wherein the interlayer cross-linked layer has a cross-linked molecular structure including multiple bonded molecules cross-linking the graphene sheets included in the multilayer graphene, the graphene interlaver compound extends to a wiring direction, the cross-linked molecular structure connects chemically with edges of the graphene sheets, and the graphene sheets are bridged at the edges of the graphene sheets by the interlayer cross-linked laver.
The wiring according to claim 1, wherein the cross-linked molecular structure includes at least one of alkane, alkene, and benzene.
The wiring according to claim 1, wherein the cross-linked molecular structure cross-links three or more layers of the graphene sheets. 2 Application No. 14/842,249 Reply to Office Action of
The wiring according to claim 1, wherein the interlayer substance includes at least one element of F, Cl, Br, I, O, S, N, P, Li, Na, K, Rb, Cs, Be, Mg, Ca, Sr, Y, Sc, Ba, Eu, Sm, Yb, Hg, and T i.
The wiring according to claim 1, wherein the width the multilayer graphene is 3 nm or more and 100 nm or less.
The wiring according to claim 1, wherein the width the multilayer graphene is 3 nm or more and 30 nm or less.
The wiring according to claim 1, wherein the cross-linked molecular structure includes first organic groups and second organic groups, and the first organic groups and the second organic groups are connected to each other.
The wiring according to claim 1, wherein the graphene sheets stacked are planar graphene sheets stacked.
The wiring according to claim 1, wherein a stacking direction of the graphene sheets is perpendicular to the wiring direction. 4
Claims 10 -14. canceled
canceled
canceled
canceled
3 Application No. 14/842,249 Reply to Office Action of canceled
Layer stacks claimed or described, ordered top of device to substrate.
graphene wiring
Materials described outside the worked examples.
multilayer graphene
interlayer substance
Additional fabrication and treatment steps described in the patent.
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
multilayer graphene wiring width (preferred range) | 3–100 | multilayer graphene |
multilayer graphene wiring width (more preferred range) | 3–30 |
Patent
Atlas literature
Patent
US 9,761,530Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1 is a perspective schematic diagram of 20 graphene wiring according to an embodiment; [0007]
FIG. 2 is a schematic diagram of the graphene wiring according to the embodiment; [0008]
FIG. 3 is a schematic diagram of the graphene wiring according to the embodiment; 25 [0009]
FIG. 4 is a schematic diagram of the graphene wiring according to the embodiment; [0010]
FIG. 5 is a schematic diagram of the graphene wiring according to the embodiment; [0011]
FIG. 6 is a schematic diagram of a process in a 30 method for manufacturing the graphene wiring according to the embodiment; [0012]
FIG. 7 is a schematic diagram of a process in the method for manufacturing the graphene wiring according to the embodiment; and 2 G093185-USA-A FTS 1 061-US-A …
FIG. 8 is a schematic diagram of a process in the method for manufacturing the graphene wiring according to the embodiment.
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
Graphene wiring comprising: a graphene intercalation compound including a multilayer graphene having graphene sheets stacked therein and an interlayer substance disposed between layers of the multilayer graphene; and an interlayer cross-linked layer connected to a side surface of the multilayer graphene, wherein the interlayer cross-linked layer has a cross-linked molecular structure including multiple bonded molecules cross-linking the graphene sheets included in the multilayer graphene, the graphene interlaver compound extends to a wiring direction, the cross-linked molecular structure connects chemically with edges of the graphene sheets, and the graphene sheets are bridged at the edges of the graphene sheets by the interlayer cross-linked laver.
The wiring according to claim 1, wherein the cross-linked molecular structure includes at least one of alkane, alkene, and benzene.
The wiring according to claim 1, wherein the cross-linked molecular structure cross-links three or more layers of the graphene sheets. 2 Application No. 14/842,249 Reply to Office Action of
The wiring according to claim 1, wherein the interlayer substance includes at least one element of F, Cl, Br, I, O, S, N, P, Li, Na, K, Rb, Cs, Be, Mg, Ca, Sr, Y, Sc, Ba, Eu, Sm, Yb, Hg, and T i.
The wiring according to claim 1, wherein the width the multilayer graphene is 3 nm or more and 100 nm or less.
The wiring according to claim 1, wherein the width the multilayer graphene is 3 nm or more and 30 nm or less.
The wiring according to claim 1, wherein the cross-linked molecular structure includes first organic groups and second organic groups, and the first organic groups and the second organic groups are connected to each other.
The wiring according to claim 1, wherein the graphene sheets stacked are planar graphene sheets stacked.
The wiring according to claim 1, wherein a stacking direction of the graphene sheets is perpendicular to the wiring direction. 4
Claims 10 -14. canceled
canceled
canceled
canceled
3 Application No. 14/842,249 Reply to Office Action of canceled
Layer stacks claimed or described, ordered top of device to substrate.
graphene wiring
Materials described outside the worked examples.
multilayer graphene
interlayer substance
Additional fabrication and treatment steps described in the patent.
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
multilayer graphene wiring width (preferred range) | 3–100 | multilayer graphene |
multilayer graphene wiring width (more preferred range) | 3–30 |
Patent
Atlas literature
Patent
US 9,761,530Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1 is a perspective schematic diagram of 20 graphene wiring according to an embodiment; [0007]
FIG. 2 is a schematic diagram of the graphene wiring according to the embodiment; [0008]
FIG. 3 is a schematic diagram of the graphene wiring according to the embodiment; 25 [0009]
FIG. 4 is a schematic diagram of the graphene wiring according to the embodiment; [0010]
FIG. 5 is a schematic diagram of the graphene wiring according to the embodiment; [0011]
FIG. 6 is a schematic diagram of a process in a 30 method for manufacturing the graphene wiring according to the embodiment; [0012]
FIG. 7 is a schematic diagram of a process in the method for manufacturing the graphene wiring according to the embodiment; and 2 G093185-USA-A FTS 1 061-US-A …
FIG. 8 is a schematic diagram of a process in the method for manufacturing the graphene wiring according to the embodiment.
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
Graphene wiring comprising: a graphene intercalation compound including a multilayer graphene having graphene sheets stacked therein and an interlayer substance disposed between layers of the multilayer graphene; and an interlayer cross-linked layer connected to a side surface of the multilayer graphene, wherein the interlayer cross-linked layer has a cross-linked molecular structure including multiple bonded molecules cross-linking the graphene sheets included in the multilayer graphene, the graphene interlaver compound extends to a wiring direction, the cross-linked molecular structure connects chemically with edges of the graphene sheets, and the graphene sheets are bridged at the edges of the graphene sheets by the interlayer cross-linked laver.
The wiring according to claim 1, wherein the cross-linked molecular structure includes at least one of alkane, alkene, and benzene.
The wiring according to claim 1, wherein the cross-linked molecular structure cross-links three or more layers of the graphene sheets. 2 Application No. 14/842,249 Reply to Office Action of
The wiring according to claim 1, wherein the interlayer substance includes at least one element of F, Cl, Br, I, O, S, N, P, Li, Na, K, Rb, Cs, Be, Mg, Ca, Sr, Y, Sc, Ba, Eu, Sm, Yb, Hg, and T i.
The wiring according to claim 1, wherein the width the multilayer graphene is 3 nm or more and 100 nm or less.
The wiring according to claim 1, wherein the width the multilayer graphene is 3 nm or more and 30 nm or less.
The wiring according to claim 1, wherein the cross-linked molecular structure includes first organic groups and second organic groups, and the first organic groups and the second organic groups are connected to each other.
The wiring according to claim 1, wherein the graphene sheets stacked are planar graphene sheets stacked.
The wiring according to claim 1, wherein a stacking direction of the graphene sheets is perpendicular to the wiring direction. 4
Claims 10 -14. canceled
canceled
canceled
canceled
3 Application No. 14/842,249 Reply to Office Action of canceled
Layer stacks claimed or described, ordered top of device to substrate.
graphene wiring
Materials described outside the worked examples.
multilayer graphene
interlayer substance
Additional fabrication and treatment steps described in the patent.
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
multilayer graphene wiring width (preferred range) | 3–100 | multilayer graphene |
multilayer graphene wiring width (more preferred range) | 3–30 |
Patent
Atlas literature
Patent
US 9,761,530Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1 is a perspective schematic diagram of 20 graphene wiring according to an embodiment; [0007]
FIG. 2 is a schematic diagram of the graphene wiring according to the embodiment; [0008]
FIG. 3 is a schematic diagram of the graphene wiring according to the embodiment; 25 [0009]
FIG. 4 is a schematic diagram of the graphene wiring according to the embodiment; [0010]
FIG. 5 is a schematic diagram of the graphene wiring according to the embodiment; [0011]
FIG. 6 is a schematic diagram of a process in a 30 method for manufacturing the graphene wiring according to the embodiment; [0012]
FIG. 7 is a schematic diagram of a process in the method for manufacturing the graphene wiring according to the embodiment; and 2 G093185-USA-A FTS 1 061-US-A …
FIG. 8 is a schematic diagram of a process in the method for manufacturing the graphene wiring according to the embodiment.
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
Graphene wiring comprising: a graphene intercalation compound including a multilayer graphene having graphene sheets stacked therein and an interlayer substance disposed between layers of the multilayer graphene; and an interlayer cross-linked layer connected to a side surface of the multilayer graphene, wherein the interlayer cross-linked layer has a cross-linked molecular structure including multiple bonded molecules cross-linking the graphene sheets included in the multilayer graphene, the graphene interlaver compound extends to a wiring direction, the cross-linked molecular structure connects chemically with edges of the graphene sheets, and the graphene sheets are bridged at the edges of the graphene sheets by the interlayer cross-linked laver.
The wiring according to claim 1, wherein the cross-linked molecular structure includes at least one of alkane, alkene, and benzene.
The wiring according to claim 1, wherein the cross-linked molecular structure cross-links three or more layers of the graphene sheets. 2 Application No. 14/842,249 Reply to Office Action of
The wiring according to claim 1, wherein the interlayer substance includes at least one element of F, Cl, Br, I, O, S, N, P, Li, Na, K, Rb, Cs, Be, Mg, Ca, Sr, Y, Sc, Ba, Eu, Sm, Yb, Hg, and T i.
The wiring according to claim 1, wherein the width the multilayer graphene is 3 nm or more and 100 nm or less.
The wiring according to claim 1, wherein the width the multilayer graphene is 3 nm or more and 30 nm or less.
The wiring according to claim 1, wherein the cross-linked molecular structure includes first organic groups and second organic groups, and the first organic groups and the second organic groups are connected to each other.
The wiring according to claim 1, wherein the graphene sheets stacked are planar graphene sheets stacked.
The wiring according to claim 1, wherein a stacking direction of the graphene sheets is perpendicular to the wiring direction. 4
Claims 10 -14. canceled
canceled
canceled
canceled
3 Application No. 14/842,249 Reply to Office Action of canceled
Layer stacks claimed or described, ordered top of device to substrate.
graphene wiring
Materials described outside the worked examples.
multilayer graphene
interlayer substance
Additional fabrication and treatment steps described in the patent.
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
multilayer graphene wiring width (preferred range) | 3–100 | multilayer graphene |
multilayer graphene wiring width (more preferred range) | 3–30 |
cross-linked molecular structure (first and second organic groups)
alkane/alkene/benzene (cross-linking molecules)
graphene intercalation compound
halogen interlayer substances (F2, Cl2, Br2, I2, IBr, ICl)
metal halide interlayer substances (FeCl3, CuCl2, BF4, AsF)
acid interlayer substances (sulfuric acid, nitric acid, phosphoric acid)
alkali/alkaline earth metal interlayer substances (Li, Na, K, Mg, Ca)
interlayer distance of pristine multilayer graphene | 0.335 | multilayer graphene |
interlayer distance of multilayer graphene with interlayer substance (average) | 0.7–1 | graphene intercalation compound |
layer number of multilayer graphene (typical range) | 2–100 | multilayer graphene |
Thickness | 0.7–1 nm | — |
cross-linked molecular structure (first and second organic groups)
alkane/alkene/benzene (cross-linking molecules)
graphene intercalation compound
halogen interlayer substances (F2, Cl2, Br2, I2, IBr, ICl)
metal halide interlayer substances (FeCl3, CuCl2, BF4, AsF)
acid interlayer substances (sulfuric acid, nitric acid, phosphoric acid)
alkali/alkaline earth metal interlayer substances (Li, Na, K, Mg, Ca)
interlayer distance of pristine multilayer graphene | 0.335 | multilayer graphene |
interlayer distance of multilayer graphene with interlayer substance (average) | 0.7–1 | graphene intercalation compound |
layer number of multilayer graphene (typical range) | 2–100 | multilayer graphene |
Thickness | 0.7–1 nm | — |
cross-linked molecular structure (first and second organic groups)
alkane/alkene/benzene (cross-linking molecules)
graphene intercalation compound
halogen interlayer substances (F2, Cl2, Br2, I2, IBr, ICl)
metal halide interlayer substances (FeCl3, CuCl2, BF4, AsF)
acid interlayer substances (sulfuric acid, nitric acid, phosphoric acid)
alkali/alkaline earth metal interlayer substances (Li, Na, K, Mg, Ca)
interlayer distance of pristine multilayer graphene | 0.335 | multilayer graphene |
interlayer distance of multilayer graphene with interlayer substance (average) | 0.7–1 | graphene intercalation compound |
layer number of multilayer graphene (typical range) | 2–100 | multilayer graphene |
Thickness | 0.7–1 nm | — |
cross-linked molecular structure (first and second organic groups)
alkane/alkene/benzene (cross-linking molecules)
graphene intercalation compound
halogen interlayer substances (F2, Cl2, Br2, I2, IBr, ICl)
metal halide interlayer substances (FeCl3, CuCl2, BF4, AsF)
acid interlayer substances (sulfuric acid, nitric acid, phosphoric acid)
alkali/alkaline earth metal interlayer substances (Li, Na, K, Mg, Ca)
interlayer distance of pristine multilayer graphene | 0.335 | multilayer graphene |
interlayer distance of multilayer graphene with interlayer substance (average) | 0.7–1 | graphene intercalation compound |
layer number of multilayer graphene (typical range) | 2–100 | multilayer graphene |
Thickness | 0.7–1 nm | — |