Patent
US 9,183,971LAYER BY LAYER REMOVAL OF GRAPHENE LAYERS
WAN-CHEN CHEN
US
Copyright © 2026 Matter42. All rights reserved.
Patent
Atlas literature
Patent
US 9,183,971Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1 is a schematic diagram illustrating an exemplary setup for a method of layer-by- layer removal of graphene layers in accordance with an embodiment of …
FIG. 2 is a block diagram illustrating the process flow for the layer- by-layer removal of graphene layers in accordance with the embodiment of the instant …
FIG. 3 is a block diagram illustrating further details of the process flow for the layer-by- layer removal of graphene layers method in accordance with another …
FIG. 4 illustrates both the light absorbance (%) of pristine graphene layers and the light absorbance with two graphene layers removed by the layer-by- layer …
FIG. 5 is a schematic diagram illustrating a hot plate heating graphene layers in accordance with the embodiment of the instant disclosure; [0016]
FIG. 6 is a schematic diagram illustrating an infrared illumination heating graphene layers in accordance with the embodiment of the instant disclosure; [0017]
FIG. 7 is a schematic diagram illustrating an electric current heating graphene layers in accordance with the embodiment of the instant disclosure.
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A method for controllable layer-by-layer removal of graphene layers, comprising the steps of: providing at least one layer of a plurality of g raphene layers; providing a highly graphene-oxidizing agent in a hermetic environment; providing a heating source for heating at least one the plurality of graphene layers; and providing a power adjustable laser for defining a pre-determined removal pattern on the plurality of g raphene layers, wherein defining the pre-determined pattern on the plurality of graphene layers includes steps of removing the plurality of graphene layers layer-by- layer by the power adjustable laser according to the pre-determined pattern, and the steps include: determining a targeted number of graphene layers to be removed according to the pre-determined pattern; partially removing portions of the plurality of graphene layers according to the pre-determined pattern by the power adjustable laser; then determining a number of graphene layers remained, obtaining a number of graphene layers removed by calculating the difference between a total number of graphene layers and the number of graphene layers remained through a feedback loop controller; Page 2 of 11 Application No.14/263,3 10 Attorney Docket No.103P000025US calculating the difference between the number of graphene layers removed and the targeted number of graphene layers to be removed to determine a number of graphene layers to be further removed through the feedback loop controller; adjusting the power of the power adjustable laser according to the number of graphene layers to be further removed through the feedback loop controller; and repeating the steps until all of the targeted number of graphene layers are removed and determining the laser power according to the difference between the targeted number of graphene layers and the number of graphene layers remained through a feedback loop controller.
The method as recited in claim 1, further comprising the steps o f: providing a sensor to determine the number of graphene layers remained after portions of the graphene layers removed; determining the number of graphene layers removed by calculating the difference between the number of graphene layers remained and the total number of pristine graphene layers through a feedback loop controller; comparing the number of graphene layers removed to the targeted number of graphene layers to be removed through a feedback loop controller; programming the feedback loop controller operatively connected to the laser so as to adjust the laser power according to a difference between the number of graphene layers removed and the targeted number of graphene layers to be removed.
The method as recited in claim 1, further comprising the steps o f: displacing selectively an adjustable structure for retaining the laser thereon and an adjustable stage for retaining the at least one graphene layer thereon according to the pre-determined pattern.
The method as recited in claim 1, further comprising the steps o f: arranging a lens interposed between the laser and the at least one graphene layer for adjusting the focus of the laser.
The method as recited in claim 1, wherein the highly graphene- oxidizing agent is ozone gas, chlorine gas, fluorine gas, sulfuric acid, sodium nitrate, or potassium permanganate.
The method as recited in claim 1, wherein the intensity of the laser beam is adjustable.
The method as recited in claim 1, wherein the heating source is a hot plate, an infrared illumination source, or an electrical current source for providing the pre-determined temperature.
The method as recited in claim 1, wherein the graphene layers being heated by the heating source at a temperature ranges from 20 to 300 °C.
The method as recited in claim 1, wherein the highly graphene-oxidizing agent is ozone gas, the ozone gas is in a concentration range of 0.01 to 20 weight percent, and preferably is at a concentration of 0.05 weight percent. Page 5 of 11
Materials described outside the worked examples.
graphene
C
ozone gas
O₃
Additional fabrication and treatment steps described in the patent.
Measurements and analyses referenced in the patent, with their drawing references.
FIG. 4 illustrates both the light absorbance (%) of pristine graphene layers and the light absorbance with two graphene layers removed by the layer-by- layer …
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
Carrier Mobility | > 10000 cm2/V·s | C |
Temperature | 20–300 °C |
Related documents with shared materials, methods, properties, or citations.
Patent
Atlas literature
Patent
US 9,183,971Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1 is a schematic diagram illustrating an exemplary setup for a method of layer-by- layer removal of graphene layers in accordance with an embodiment of …
FIG. 2 is a block diagram illustrating the process flow for the layer- by-layer removal of graphene layers in accordance with the embodiment of the instant …
FIG. 3 is a block diagram illustrating further details of the process flow for the layer-by- layer removal of graphene layers method in accordance with another …
FIG. 4 illustrates both the light absorbance (%) of pristine graphene layers and the light absorbance with two graphene layers removed by the layer-by- layer …
FIG. 5 is a schematic diagram illustrating a hot plate heating graphene layers in accordance with the embodiment of the instant disclosure; [0016]
FIG. 6 is a schematic diagram illustrating an infrared illumination heating graphene layers in accordance with the embodiment of the instant disclosure; [0017]
FIG. 7 is a schematic diagram illustrating an electric current heating graphene layers in accordance with the embodiment of the instant disclosure.
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A method for controllable layer-by-layer removal of graphene layers, comprising the steps of: providing at least one layer of a plurality of g raphene layers; providing a highly graphene-oxidizing agent in a hermetic environment; providing a heating source for heating at least one the plurality of graphene layers; and providing a power adjustable laser for defining a pre-determined removal pattern on the plurality of g raphene layers, wherein defining the pre-determined pattern on the plurality of graphene layers includes steps of removing the plurality of graphene layers layer-by- layer by the power adjustable laser according to the pre-determined pattern, and the steps include: determining a targeted number of graphene layers to be removed according to the pre-determined pattern; partially removing portions of the plurality of graphene layers according to the pre-determined pattern by the power adjustable laser; then determining a number of graphene layers remained, obtaining a number of graphene layers removed by calculating the difference between a total number of graphene layers and the number of graphene layers remained through a feedback loop controller; Page 2 of 11 Application No.14/263,3 10 Attorney Docket No.103P000025US calculating the difference between the number of graphene layers removed and the targeted number of graphene layers to be removed to determine a number of graphene layers to be further removed through the feedback loop controller; adjusting the power of the power adjustable laser according to the number of graphene layers to be further removed through the feedback loop controller; and repeating the steps until all of the targeted number of graphene layers are removed and determining the laser power according to the difference between the targeted number of graphene layers and the number of graphene layers remained through a feedback loop controller.
The method as recited in claim 1, further comprising the steps o f: providing a sensor to determine the number of graphene layers remained after portions of the graphene layers removed; determining the number of graphene layers removed by calculating the difference between the number of graphene layers remained and the total number of pristine graphene layers through a feedback loop controller; comparing the number of graphene layers removed to the targeted number of graphene layers to be removed through a feedback loop controller; programming the feedback loop controller operatively connected to the laser so as to adjust the laser power according to a difference between the number of graphene layers removed and the targeted number of graphene layers to be removed.
The method as recited in claim 1, further comprising the steps o f: displacing selectively an adjustable structure for retaining the laser thereon and an adjustable stage for retaining the at least one graphene layer thereon according to the pre-determined pattern.
The method as recited in claim 1, further comprising the steps o f: arranging a lens interposed between the laser and the at least one graphene layer for adjusting the focus of the laser.
The method as recited in claim 1, wherein the highly graphene- oxidizing agent is ozone gas, chlorine gas, fluorine gas, sulfuric acid, sodium nitrate, or potassium permanganate.
The method as recited in claim 1, wherein the intensity of the laser beam is adjustable.
The method as recited in claim 1, wherein the heating source is a hot plate, an infrared illumination source, or an electrical current source for providing the pre-determined temperature.
The method as recited in claim 1, wherein the graphene layers being heated by the heating source at a temperature ranges from 20 to 300 °C.
The method as recited in claim 1, wherein the highly graphene-oxidizing agent is ozone gas, the ozone gas is in a concentration range of 0.01 to 20 weight percent, and preferably is at a concentration of 0.05 weight percent. Page 5 of 11
Materials described outside the worked examples.
graphene
C
ozone gas
O₃
Additional fabrication and treatment steps described in the patent.
Measurements and analyses referenced in the patent, with their drawing references.
FIG. 4 illustrates both the light absorbance (%) of pristine graphene layers and the light absorbance with two graphene layers removed by the layer-by- layer …
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
Carrier Mobility | > 10000 cm2/V·s | C |
Temperature | 20–300 °C |
Related documents with shared materials, methods, properties, or citations.
Patent
Atlas literature
Patent
US 9,183,971Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1 is a schematic diagram illustrating an exemplary setup for a method of layer-by- layer removal of graphene layers in accordance with an embodiment of …
FIG. 2 is a block diagram illustrating the process flow for the layer- by-layer removal of graphene layers in accordance with the embodiment of the instant …
FIG. 3 is a block diagram illustrating further details of the process flow for the layer-by- layer removal of graphene layers method in accordance with another …
FIG. 4 illustrates both the light absorbance (%) of pristine graphene layers and the light absorbance with two graphene layers removed by the layer-by- layer …
FIG. 5 is a schematic diagram illustrating a hot plate heating graphene layers in accordance with the embodiment of the instant disclosure; [0016]
FIG. 6 is a schematic diagram illustrating an infrared illumination heating graphene layers in accordance with the embodiment of the instant disclosure; [0017]
FIG. 7 is a schematic diagram illustrating an electric current heating graphene layers in accordance with the embodiment of the instant disclosure.
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A method for controllable layer-by-layer removal of graphene layers, comprising the steps of: providing at least one layer of a plurality of g raphene layers; providing a highly graphene-oxidizing agent in a hermetic environment; providing a heating source for heating at least one the plurality of graphene layers; and providing a power adjustable laser for defining a pre-determined removal pattern on the plurality of g raphene layers, wherein defining the pre-determined pattern on the plurality of graphene layers includes steps of removing the plurality of graphene layers layer-by- layer by the power adjustable laser according to the pre-determined pattern, and the steps include: determining a targeted number of graphene layers to be removed according to the pre-determined pattern; partially removing portions of the plurality of graphene layers according to the pre-determined pattern by the power adjustable laser; then determining a number of graphene layers remained, obtaining a number of graphene layers removed by calculating the difference between a total number of graphene layers and the number of graphene layers remained through a feedback loop controller; Page 2 of 11 Application No.14/263,3 10 Attorney Docket No.103P000025US calculating the difference between the number of graphene layers removed and the targeted number of graphene layers to be removed to determine a number of graphene layers to be further removed through the feedback loop controller; adjusting the power of the power adjustable laser according to the number of graphene layers to be further removed through the feedback loop controller; and repeating the steps until all of the targeted number of graphene layers are removed and determining the laser power according to the difference between the targeted number of graphene layers and the number of graphene layers remained through a feedback loop controller.
The method as recited in claim 1, further comprising the steps o f: providing a sensor to determine the number of graphene layers remained after portions of the graphene layers removed; determining the number of graphene layers removed by calculating the difference between the number of graphene layers remained and the total number of pristine graphene layers through a feedback loop controller; comparing the number of graphene layers removed to the targeted number of graphene layers to be removed through a feedback loop controller; programming the feedback loop controller operatively connected to the laser so as to adjust the laser power according to a difference between the number of graphene layers removed and the targeted number of graphene layers to be removed.
The method as recited in claim 1, further comprising the steps o f: displacing selectively an adjustable structure for retaining the laser thereon and an adjustable stage for retaining the at least one graphene layer thereon according to the pre-determined pattern.
The method as recited in claim 1, further comprising the steps o f: arranging a lens interposed between the laser and the at least one graphene layer for adjusting the focus of the laser.
The method as recited in claim 1, wherein the highly graphene- oxidizing agent is ozone gas, chlorine gas, fluorine gas, sulfuric acid, sodium nitrate, or potassium permanganate.
The method as recited in claim 1, wherein the intensity of the laser beam is adjustable.
The method as recited in claim 1, wherein the heating source is a hot plate, an infrared illumination source, or an electrical current source for providing the pre-determined temperature.
The method as recited in claim 1, wherein the graphene layers being heated by the heating source at a temperature ranges from 20 to 300 °C.
The method as recited in claim 1, wherein the highly graphene-oxidizing agent is ozone gas, the ozone gas is in a concentration range of 0.01 to 20 weight percent, and preferably is at a concentration of 0.05 weight percent. Page 5 of 11
Materials described outside the worked examples.
graphene
C
ozone gas
O₃
Additional fabrication and treatment steps described in the patent.
Measurements and analyses referenced in the patent, with their drawing references.
FIG. 4 illustrates both the light absorbance (%) of pristine graphene layers and the light absorbance with two graphene layers removed by the layer-by- layer …
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
Carrier Mobility | > 10000 cm2/V·s | C |
Temperature | 20–300 °C |
Related documents with shared materials, methods, properties, or citations.
Patent
Atlas literature
Patent
US 9,183,971Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1 is a schematic diagram illustrating an exemplary setup for a method of layer-by- layer removal of graphene layers in accordance with an embodiment of …
FIG. 2 is a block diagram illustrating the process flow for the layer- by-layer removal of graphene layers in accordance with the embodiment of the instant …
FIG. 3 is a block diagram illustrating further details of the process flow for the layer-by- layer removal of graphene layers method in accordance with another …
FIG. 4 illustrates both the light absorbance (%) of pristine graphene layers and the light absorbance with two graphene layers removed by the layer-by- layer …
FIG. 5 is a schematic diagram illustrating a hot plate heating graphene layers in accordance with the embodiment of the instant disclosure; [0016]
FIG. 6 is a schematic diagram illustrating an infrared illumination heating graphene layers in accordance with the embodiment of the instant disclosure; [0017]
FIG. 7 is a schematic diagram illustrating an electric current heating graphene layers in accordance with the embodiment of the instant disclosure.
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A method for controllable layer-by-layer removal of graphene layers, comprising the steps of: providing at least one layer of a plurality of g raphene layers; providing a highly graphene-oxidizing agent in a hermetic environment; providing a heating source for heating at least one the plurality of graphene layers; and providing a power adjustable laser for defining a pre-determined removal pattern on the plurality of g raphene layers, wherein defining the pre-determined pattern on the plurality of graphene layers includes steps of removing the plurality of graphene layers layer-by- layer by the power adjustable laser according to the pre-determined pattern, and the steps include: determining a targeted number of graphene layers to be removed according to the pre-determined pattern; partially removing portions of the plurality of graphene layers according to the pre-determined pattern by the power adjustable laser; then determining a number of graphene layers remained, obtaining a number of graphene layers removed by calculating the difference between a total number of graphene layers and the number of graphene layers remained through a feedback loop controller; Page 2 of 11 Application No.14/263,3 10 Attorney Docket No.103P000025US calculating the difference between the number of graphene layers removed and the targeted number of graphene layers to be removed to determine a number of graphene layers to be further removed through the feedback loop controller; adjusting the power of the power adjustable laser according to the number of graphene layers to be further removed through the feedback loop controller; and repeating the steps until all of the targeted number of graphene layers are removed and determining the laser power according to the difference between the targeted number of graphene layers and the number of graphene layers remained through a feedback loop controller.
The method as recited in claim 1, further comprising the steps o f: providing a sensor to determine the number of graphene layers remained after portions of the graphene layers removed; determining the number of graphene layers removed by calculating the difference between the number of graphene layers remained and the total number of pristine graphene layers through a feedback loop controller; comparing the number of graphene layers removed to the targeted number of graphene layers to be removed through a feedback loop controller; programming the feedback loop controller operatively connected to the laser so as to adjust the laser power according to a difference between the number of graphene layers removed and the targeted number of graphene layers to be removed.
The method as recited in claim 1, further comprising the steps o f: displacing selectively an adjustable structure for retaining the laser thereon and an adjustable stage for retaining the at least one graphene layer thereon according to the pre-determined pattern.
The method as recited in claim 1, further comprising the steps o f: arranging a lens interposed between the laser and the at least one graphene layer for adjusting the focus of the laser.
The method as recited in claim 1, wherein the highly graphene- oxidizing agent is ozone gas, chlorine gas, fluorine gas, sulfuric acid, sodium nitrate, or potassium permanganate.
The method as recited in claim 1, wherein the intensity of the laser beam is adjustable.
The method as recited in claim 1, wherein the heating source is a hot plate, an infrared illumination source, or an electrical current source for providing the pre-determined temperature.
The method as recited in claim 1, wherein the graphene layers being heated by the heating source at a temperature ranges from 20 to 300 °C.
The method as recited in claim 1, wherein the highly graphene-oxidizing agent is ozone gas, the ozone gas is in a concentration range of 0.01 to 20 weight percent, and preferably is at a concentration of 0.05 weight percent. Page 5 of 11
Materials described outside the worked examples.
graphene
C
ozone gas
O₃
Additional fabrication and treatment steps described in the patent.
Measurements and analyses referenced in the patent, with their drawing references.
FIG. 4 illustrates both the light absorbance (%) of pristine graphene layers and the light absorbance with two graphene layers removed by the layer-by- layer …
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
Carrier Mobility | > 10000 cm2/V·s | C |
Temperature | 20–300 °C |
Related documents with shared materials, methods, properties, or citations.
chlorine gas
Cl₂
fluorine gas
F₂
sulfuric acid
H₂SO₄
sodium nitrate
NaNO₃
potassium permanganate
KMnO₄
oxygen
O₂
FIG. 6 is a schematic diagram illustrating an infrared illumination heating graphene layers in accordance with the embodiment of the instant disclosure; [0017]
| — |
Temperature | 30–300 °C | — |
Temperature | 100–120 °C | — |
chlorine gas
Cl₂
fluorine gas
F₂
sulfuric acid
H₂SO₄
sodium nitrate
NaNO₃
potassium permanganate
KMnO₄
oxygen
O₂
FIG. 6 is a schematic diagram illustrating an infrared illumination heating graphene layers in accordance with the embodiment of the instant disclosure; [0017]
| — |
Temperature | 30–300 °C | — |
Temperature | 100–120 °C | — |
chlorine gas
Cl₂
fluorine gas
F₂
sulfuric acid
H₂SO₄
sodium nitrate
NaNO₃
potassium permanganate
KMnO₄
oxygen
O₂
FIG. 6 is a schematic diagram illustrating an infrared illumination heating graphene layers in accordance with the embodiment of the instant disclosure; [0017]
| — |
Temperature | 30–300 °C | — |
Temperature | 100–120 °C | — |
chlorine gas
Cl₂
fluorine gas
F₂
sulfuric acid
H₂SO₄
sodium nitrate
NaNO₃
potassium permanganate
KMnO₄
oxygen
O₂
FIG. 6 is a schematic diagram illustrating an infrared illumination heating graphene layers in accordance with the embodiment of the instant disclosure; [0017]
| — |
Temperature | 30–300 °C | — |
Temperature | 100–120 °C | — |