Patent
US 9,393,767METHOD FOR MAKING STRIP SHAPED GRAPHENE LAYER
XIAO-YANG LIN
US
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US 9,393,767Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1. DETAILED DESCRIPTION [0016 1 The disclosure is illustrated by way of example and not by way of limitation in the figures of the accompanying drawings in …
FIG. 2) on the other surface. Alternatively, another graphene film on the other surface can be removed in some embodiments by polishing. Step S 13 can further …
FIG. 3, in one embodiment, the carbon nanotube structure 400 includes three of the drawn carbon nanotube films 410 stacked with each 10 other, and the carbon …
FIG. 4 is a scanning electron microscopic (SEM) image of a drawn carbon nanotube film of the carbon nanotube structure in
FIG. 5 is a schematic view of a method for making the drawn carbon nanotube film in
FIG. 6 is a schematic view of the step S₃ of the method in
FIG. 7 is a schematic view of one embodiment of a strip shaped graphene layer obtained by the method of
FIG. 8 is a schematic view of another embodiment of a strip shaped graphene layer obtained by the method of
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
: A method for making a strip shaped graphene layer comprising: S1, providing a graphene film on a surface of a substrate; S2, drawing at least one carbon nanotube film comprising a plurality of carbon nanotube segments, each of the plurality of carbon nanotube segments being substantially parallel to each other and separated from each other by a strip-shaped gap; S3, disposing a carbon nanotube composite on the graphene film, wherein the carbon nanotube composite comprises a carbon nanotube structure embedded in a polymer material, the carbon nanotube structure comprises the at least one carbon nanotube film; S4, applying a voltage to the carbon nanotube structure to remove a portion of the polymer material to expose the plurality of carbon nanotube segments, wherein at least the polymer material in the strip-shaped gaps are retained; S5, etching the plurality of carbon nanotube segments and the graphene film covered by the plurality of carbon nanotube segments; and S6, removing a remaining portion of the polymer material.
: The method of claim 1, wherein in step S i, the substrate is a metal substrate having a thickness in a range from about 100 nanometers to about 100 micrometers.
: The method of claim 1, wherein the step S₃ comprises substeps of: S₃ 1, attaching the carbon nanotube structure on the graphene film; S 32, coating the carbon nanotube structure with the polymer material in a liquid state; and S 33, solidifying the polymer material to form the carbon nanotube composite on the graphene film.
: The method of claim 1, wherein in step S4, the voltage is applied to the carbon nanotube structure by attaching two parallel strip electrodes perpendicular to the plurality of carbon nanotube segments.
: The method of claim 1, wherein step S 5 comprises substeps of: Page 3 of 8 App l. No. 13/730,857 Response to Office Action dated Attorney Docket No.: US₄₅₀₅₀ 51, placing the substrate after Step S₄ in a reactive ion etching vacuum chamber; S 52, introducing reactive gas into the reactive ion etching vacuum chamber; S 53, obtaining reactive ions by glow discharge of the reactive gas to etch away the plurality of carbon nanotube segments; and 5 54, etching the graphene film under the plurality of carbon nanotube segments by the reactive ions.
: A method for making a strip shaped graphene layer comprising: S1, providing a graphene film on a surface of a substrate; S2, adhering a drawn carbon nanotube film on the graphene film, the drawn carbon nanotube film comprises a plurality of carbon nanotube segments, each of the plurality of carbon nanotube segments being substantially parallel to each other and separated from each other by a strip-shaped gap; S3, coating a polymer material in a liquid state on the drawn carbon nanotube film such that the polymer material permeates into each of the strip-shaped gap; S4, solidifying the polymer material in liquid state to form a carbon nanotube composite on the graphene film; S5, applying a voltage to the carbon nanotube structure to remove a portion of the polymer material surrounding the plurality of carbon nanotube segments, wherein at least the polymer material in the strip-shaped gaps are retained; and S6, etching the plurality of carbon nanotube segments and the graphene film covered by the plurality of carbon nanotube segments; and S7, removing a remaining portion of the polymer material to obtain the strip shaped graphene layer.
: The method of claim 12, wherein in step S5, the voltage is applied to the carbon nanotube structure by attaching two parallel strip electrodes perpendicular to the plurality of carbon nanotube segments. Page 4 of 8 App l. No. 13/730,857 Response to Office Action dated Attorney Docket No.:
: The method of claim 12, wherein step S₆ comprises sub steps of: S 61, placing the substrate after step S3, in a reactive ion etching vacuum chamber; S 62, introducing reactive gas into the reactive ion etching vacuum chamber; S 63, obtaining reactive ions by glow discharge of the reactive gas to etch away the plurality of carbon nanotube segments; and S 64, etching the graphene film under the plurality of carbon nanotube segments by the reactive ions.
: The method of claim 12, wherein a width of each of the strip-shaped gap ranges from about 10 nanometers to about 100 nanometers. Page 5 of 8
Materials described outside the worked examples.
graphene film
drawn carbon nanotube film
polymer material
Additional fabrication and treatment steps described in the patent.
Measurements and analyses referenced in the patent, with their drawing references.
FIG. 4 is a scanning electron microscopic (SEM) image of a drawn carbon nanotube film of the carbon nanotube structure in
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
graphene film transmittance | 97.7 % | graphene film |
graphene film thickness range |
Related documents with shared materials, methods, properties, or citations.
Patent
Atlas literature
Patent
US 9,393,767Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1. DETAILED DESCRIPTION [0016 1 The disclosure is illustrated by way of example and not by way of limitation in the figures of the accompanying drawings in …
FIG. 2) on the other surface. Alternatively, another graphene film on the other surface can be removed in some embodiments by polishing. Step S 13 can further …
FIG. 3, in one embodiment, the carbon nanotube structure 400 includes three of the drawn carbon nanotube films 410 stacked with each 10 other, and the carbon …
FIG. 4 is a scanning electron microscopic (SEM) image of a drawn carbon nanotube film of the carbon nanotube structure in
FIG. 5 is a schematic view of a method for making the drawn carbon nanotube film in
FIG. 6 is a schematic view of the step S₃ of the method in
FIG. 7 is a schematic view of one embodiment of a strip shaped graphene layer obtained by the method of
FIG. 8 is a schematic view of another embodiment of a strip shaped graphene layer obtained by the method of
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
: A method for making a strip shaped graphene layer comprising: S1, providing a graphene film on a surface of a substrate; S2, drawing at least one carbon nanotube film comprising a plurality of carbon nanotube segments, each of the plurality of carbon nanotube segments being substantially parallel to each other and separated from each other by a strip-shaped gap; S3, disposing a carbon nanotube composite on the graphene film, wherein the carbon nanotube composite comprises a carbon nanotube structure embedded in a polymer material, the carbon nanotube structure comprises the at least one carbon nanotube film; S4, applying a voltage to the carbon nanotube structure to remove a portion of the polymer material to expose the plurality of carbon nanotube segments, wherein at least the polymer material in the strip-shaped gaps are retained; S5, etching the plurality of carbon nanotube segments and the graphene film covered by the plurality of carbon nanotube segments; and S6, removing a remaining portion of the polymer material.
: The method of claim 1, wherein in step S i, the substrate is a metal substrate having a thickness in a range from about 100 nanometers to about 100 micrometers.
: The method of claim 1, wherein the step S₃ comprises substeps of: S₃ 1, attaching the carbon nanotube structure on the graphene film; S 32, coating the carbon nanotube structure with the polymer material in a liquid state; and S 33, solidifying the polymer material to form the carbon nanotube composite on the graphene film.
: The method of claim 1, wherein in step S4, the voltage is applied to the carbon nanotube structure by attaching two parallel strip electrodes perpendicular to the plurality of carbon nanotube segments.
: The method of claim 1, wherein step S 5 comprises substeps of: Page 3 of 8 App l. No. 13/730,857 Response to Office Action dated Attorney Docket No.: US₄₅₀₅₀ 51, placing the substrate after Step S₄ in a reactive ion etching vacuum chamber; S 52, introducing reactive gas into the reactive ion etching vacuum chamber; S 53, obtaining reactive ions by glow discharge of the reactive gas to etch away the plurality of carbon nanotube segments; and 5 54, etching the graphene film under the plurality of carbon nanotube segments by the reactive ions.
: A method for making a strip shaped graphene layer comprising: S1, providing a graphene film on a surface of a substrate; S2, adhering a drawn carbon nanotube film on the graphene film, the drawn carbon nanotube film comprises a plurality of carbon nanotube segments, each of the plurality of carbon nanotube segments being substantially parallel to each other and separated from each other by a strip-shaped gap; S3, coating a polymer material in a liquid state on the drawn carbon nanotube film such that the polymer material permeates into each of the strip-shaped gap; S4, solidifying the polymer material in liquid state to form a carbon nanotube composite on the graphene film; S5, applying a voltage to the carbon nanotube structure to remove a portion of the polymer material surrounding the plurality of carbon nanotube segments, wherein at least the polymer material in the strip-shaped gaps are retained; and S6, etching the plurality of carbon nanotube segments and the graphene film covered by the plurality of carbon nanotube segments; and S7, removing a remaining portion of the polymer material to obtain the strip shaped graphene layer.
: The method of claim 12, wherein in step S5, the voltage is applied to the carbon nanotube structure by attaching two parallel strip electrodes perpendicular to the plurality of carbon nanotube segments. Page 4 of 8 App l. No. 13/730,857 Response to Office Action dated Attorney Docket No.:
: The method of claim 12, wherein step S₆ comprises sub steps of: S 61, placing the substrate after step S3, in a reactive ion etching vacuum chamber; S 62, introducing reactive gas into the reactive ion etching vacuum chamber; S 63, obtaining reactive ions by glow discharge of the reactive gas to etch away the plurality of carbon nanotube segments; and S 64, etching the graphene film under the plurality of carbon nanotube segments by the reactive ions.
: The method of claim 12, wherein a width of each of the strip-shaped gap ranges from about 10 nanometers to about 100 nanometers. Page 5 of 8
Materials described outside the worked examples.
graphene film
drawn carbon nanotube film
polymer material
Additional fabrication and treatment steps described in the patent.
Measurements and analyses referenced in the patent, with their drawing references.
FIG. 4 is a scanning electron microscopic (SEM) image of a drawn carbon nanotube film of the carbon nanotube structure in
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
graphene film transmittance | 97.7 % | graphene film |
graphene film thickness range |
Related documents with shared materials, methods, properties, or citations.
Patent
Atlas literature
Patent
US 9,393,767Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1. DETAILED DESCRIPTION [0016 1 The disclosure is illustrated by way of example and not by way of limitation in the figures of the accompanying drawings in …
FIG. 2) on the other surface. Alternatively, another graphene film on the other surface can be removed in some embodiments by polishing. Step S 13 can further …
FIG. 3, in one embodiment, the carbon nanotube structure 400 includes three of the drawn carbon nanotube films 410 stacked with each 10 other, and the carbon …
FIG. 4 is a scanning electron microscopic (SEM) image of a drawn carbon nanotube film of the carbon nanotube structure in
FIG. 5 is a schematic view of a method for making the drawn carbon nanotube film in
FIG. 6 is a schematic view of the step S₃ of the method in
FIG. 7 is a schematic view of one embodiment of a strip shaped graphene layer obtained by the method of
FIG. 8 is a schematic view of another embodiment of a strip shaped graphene layer obtained by the method of
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
: A method for making a strip shaped graphene layer comprising: S1, providing a graphene film on a surface of a substrate; S2, drawing at least one carbon nanotube film comprising a plurality of carbon nanotube segments, each of the plurality of carbon nanotube segments being substantially parallel to each other and separated from each other by a strip-shaped gap; S3, disposing a carbon nanotube composite on the graphene film, wherein the carbon nanotube composite comprises a carbon nanotube structure embedded in a polymer material, the carbon nanotube structure comprises the at least one carbon nanotube film; S4, applying a voltage to the carbon nanotube structure to remove a portion of the polymer material to expose the plurality of carbon nanotube segments, wherein at least the polymer material in the strip-shaped gaps are retained; S5, etching the plurality of carbon nanotube segments and the graphene film covered by the plurality of carbon nanotube segments; and S6, removing a remaining portion of the polymer material.
: The method of claim 1, wherein in step S i, the substrate is a metal substrate having a thickness in a range from about 100 nanometers to about 100 micrometers.
: The method of claim 1, wherein the step S₃ comprises substeps of: S₃ 1, attaching the carbon nanotube structure on the graphene film; S 32, coating the carbon nanotube structure with the polymer material in a liquid state; and S 33, solidifying the polymer material to form the carbon nanotube composite on the graphene film.
: The method of claim 1, wherein in step S4, the voltage is applied to the carbon nanotube structure by attaching two parallel strip electrodes perpendicular to the plurality of carbon nanotube segments.
: The method of claim 1, wherein step S 5 comprises substeps of: Page 3 of 8 App l. No. 13/730,857 Response to Office Action dated Attorney Docket No.: US₄₅₀₅₀ 51, placing the substrate after Step S₄ in a reactive ion etching vacuum chamber; S 52, introducing reactive gas into the reactive ion etching vacuum chamber; S 53, obtaining reactive ions by glow discharge of the reactive gas to etch away the plurality of carbon nanotube segments; and 5 54, etching the graphene film under the plurality of carbon nanotube segments by the reactive ions.
: A method for making a strip shaped graphene layer comprising: S1, providing a graphene film on a surface of a substrate; S2, adhering a drawn carbon nanotube film on the graphene film, the drawn carbon nanotube film comprises a plurality of carbon nanotube segments, each of the plurality of carbon nanotube segments being substantially parallel to each other and separated from each other by a strip-shaped gap; S3, coating a polymer material in a liquid state on the drawn carbon nanotube film such that the polymer material permeates into each of the strip-shaped gap; S4, solidifying the polymer material in liquid state to form a carbon nanotube composite on the graphene film; S5, applying a voltage to the carbon nanotube structure to remove a portion of the polymer material surrounding the plurality of carbon nanotube segments, wherein at least the polymer material in the strip-shaped gaps are retained; and S6, etching the plurality of carbon nanotube segments and the graphene film covered by the plurality of carbon nanotube segments; and S7, removing a remaining portion of the polymer material to obtain the strip shaped graphene layer.
: The method of claim 12, wherein in step S5, the voltage is applied to the carbon nanotube structure by attaching two parallel strip electrodes perpendicular to the plurality of carbon nanotube segments. Page 4 of 8 App l. No. 13/730,857 Response to Office Action dated Attorney Docket No.:
: The method of claim 12, wherein step S₆ comprises sub steps of: S 61, placing the substrate after step S3, in a reactive ion etching vacuum chamber; S 62, introducing reactive gas into the reactive ion etching vacuum chamber; S 63, obtaining reactive ions by glow discharge of the reactive gas to etch away the plurality of carbon nanotube segments; and S 64, etching the graphene film under the plurality of carbon nanotube segments by the reactive ions.
: The method of claim 12, wherein a width of each of the strip-shaped gap ranges from about 10 nanometers to about 100 nanometers. Page 5 of 8
Materials described outside the worked examples.
graphene film
drawn carbon nanotube film
polymer material
Additional fabrication and treatment steps described in the patent.
Measurements and analyses referenced in the patent, with their drawing references.
FIG. 4 is a scanning electron microscopic (SEM) image of a drawn carbon nanotube film of the carbon nanotube structure in
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
graphene film transmittance | 97.7 % | graphene film |
graphene film thickness range |
Related documents with shared materials, methods, properties, or citations.
Patent
Atlas literature
Patent
US 9,393,767Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1. DETAILED DESCRIPTION [0016 1 The disclosure is illustrated by way of example and not by way of limitation in the figures of the accompanying drawings in …
FIG. 2) on the other surface. Alternatively, another graphene film on the other surface can be removed in some embodiments by polishing. Step S 13 can further …
FIG. 3, in one embodiment, the carbon nanotube structure 400 includes three of the drawn carbon nanotube films 410 stacked with each 10 other, and the carbon …
FIG. 4 is a scanning electron microscopic (SEM) image of a drawn carbon nanotube film of the carbon nanotube structure in
FIG. 5 is a schematic view of a method for making the drawn carbon nanotube film in
FIG. 6 is a schematic view of the step S₃ of the method in
FIG. 7 is a schematic view of one embodiment of a strip shaped graphene layer obtained by the method of
FIG. 8 is a schematic view of another embodiment of a strip shaped graphene layer obtained by the method of
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
: A method for making a strip shaped graphene layer comprising: S1, providing a graphene film on a surface of a substrate; S2, drawing at least one carbon nanotube film comprising a plurality of carbon nanotube segments, each of the plurality of carbon nanotube segments being substantially parallel to each other and separated from each other by a strip-shaped gap; S3, disposing a carbon nanotube composite on the graphene film, wherein the carbon nanotube composite comprises a carbon nanotube structure embedded in a polymer material, the carbon nanotube structure comprises the at least one carbon nanotube film; S4, applying a voltage to the carbon nanotube structure to remove a portion of the polymer material to expose the plurality of carbon nanotube segments, wherein at least the polymer material in the strip-shaped gaps are retained; S5, etching the plurality of carbon nanotube segments and the graphene film covered by the plurality of carbon nanotube segments; and S6, removing a remaining portion of the polymer material.
: The method of claim 1, wherein in step S i, the substrate is a metal substrate having a thickness in a range from about 100 nanometers to about 100 micrometers.
: The method of claim 1, wherein the step S₃ comprises substeps of: S₃ 1, attaching the carbon nanotube structure on the graphene film; S 32, coating the carbon nanotube structure with the polymer material in a liquid state; and S 33, solidifying the polymer material to form the carbon nanotube composite on the graphene film.
: The method of claim 1, wherein in step S4, the voltage is applied to the carbon nanotube structure by attaching two parallel strip electrodes perpendicular to the plurality of carbon nanotube segments.
: The method of claim 1, wherein step S 5 comprises substeps of: Page 3 of 8 App l. No. 13/730,857 Response to Office Action dated Attorney Docket No.: US₄₅₀₅₀ 51, placing the substrate after Step S₄ in a reactive ion etching vacuum chamber; S 52, introducing reactive gas into the reactive ion etching vacuum chamber; S 53, obtaining reactive ions by glow discharge of the reactive gas to etch away the plurality of carbon nanotube segments; and 5 54, etching the graphene film under the plurality of carbon nanotube segments by the reactive ions.
: A method for making a strip shaped graphene layer comprising: S1, providing a graphene film on a surface of a substrate; S2, adhering a drawn carbon nanotube film on the graphene film, the drawn carbon nanotube film comprises a plurality of carbon nanotube segments, each of the plurality of carbon nanotube segments being substantially parallel to each other and separated from each other by a strip-shaped gap; S3, coating a polymer material in a liquid state on the drawn carbon nanotube film such that the polymer material permeates into each of the strip-shaped gap; S4, solidifying the polymer material in liquid state to form a carbon nanotube composite on the graphene film; S5, applying a voltage to the carbon nanotube structure to remove a portion of the polymer material surrounding the plurality of carbon nanotube segments, wherein at least the polymer material in the strip-shaped gaps are retained; and S6, etching the plurality of carbon nanotube segments and the graphene film covered by the plurality of carbon nanotube segments; and S7, removing a remaining portion of the polymer material to obtain the strip shaped graphene layer.
: The method of claim 12, wherein in step S5, the voltage is applied to the carbon nanotube structure by attaching two parallel strip electrodes perpendicular to the plurality of carbon nanotube segments. Page 4 of 8 App l. No. 13/730,857 Response to Office Action dated Attorney Docket No.:
: The method of claim 12, wherein step S₆ comprises sub steps of: S 61, placing the substrate after step S3, in a reactive ion etching vacuum chamber; S 62, introducing reactive gas into the reactive ion etching vacuum chamber; S 63, obtaining reactive ions by glow discharge of the reactive gas to etch away the plurality of carbon nanotube segments; and S 64, etching the graphene film under the plurality of carbon nanotube segments by the reactive ions.
: The method of claim 12, wherein a width of each of the strip-shaped gap ranges from about 10 nanometers to about 100 nanometers. Page 5 of 8
Materials described outside the worked examples.
graphene film
drawn carbon nanotube film
polymer material
Additional fabrication and treatment steps described in the patent.
Measurements and analyses referenced in the patent, with their drawing references.
FIG. 4 is a scanning electron microscopic (SEM) image of a drawn carbon nanotube film of the carbon nanotube structure in
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
graphene film transmittance | 97.7 % | graphene film |
graphene film thickness range |
Related documents with shared materials, methods, properties, or citations.
metal substrate
copper
Cu
nickel
Ni
carbon source gas
methane
CH₄
hydrogen gas
H₂
| 0.34–10 nm |
graphene film |
graphene film heat capacity (monolayer) | ≤ 0.000557 J/cm2·K | graphene film |
metal substrate thickness range | 100–100000 nm | metal substrate |
width of strip-shaped gap in carbon nanotube film | 10–100 nm | drawn carbon nanotube film |
Duration | 20–60 minutes | — |
Pressure | 0.1–100 Pa | — |
Duration | 10–60 minutes | — |
Thickness | 0.5–100000 nm | — |
Thickness | 15000–5000000 nm | — |
Thickness | 100–900 µm | — |
Thickness | 1–10 cm | — |
Thickness | 0.01–100 µm | — |
Thickness | 50–80 nm | — |
Thickness | 2–200 µm | — |
Duration | 5–180 s | — |
Duration | 5–300 s | — |
Duration | 3–5 minutes | — |
Pressure | ≥ 1 Pa | — |
Pressure | ≥ 600 Pa | — |
metal substrate
copper
Cu
nickel
Ni
carbon source gas
methane
CH₄
hydrogen gas
H₂
| 0.34–10 nm |
graphene film |
graphene film heat capacity (monolayer) | ≤ 0.000557 J/cm2·K | graphene film |
metal substrate thickness range | 100–100000 nm | metal substrate |
width of strip-shaped gap in carbon nanotube film | 10–100 nm | drawn carbon nanotube film |
Duration | 20–60 minutes | — |
Pressure | 0.1–100 Pa | — |
Duration | 10–60 minutes | — |
Thickness | 0.5–100000 nm | — |
Thickness | 15000–5000000 nm | — |
Thickness | 100–900 µm | — |
Thickness | 1–10 cm | — |
Thickness | 0.01–100 µm | — |
Thickness | 50–80 nm | — |
Thickness | 2–200 µm | — |
Duration | 5–180 s | — |
Duration | 5–300 s | — |
Duration | 3–5 minutes | — |
Pressure | ≥ 1 Pa | — |
Pressure | ≥ 600 Pa | — |
metal substrate
copper
Cu
nickel
Ni
carbon source gas
methane
CH₄
hydrogen gas
H₂
| 0.34–10 nm |
graphene film |
graphene film heat capacity (monolayer) | ≤ 0.000557 J/cm2·K | graphene film |
metal substrate thickness range | 100–100000 nm | metal substrate |
width of strip-shaped gap in carbon nanotube film | 10–100 nm | drawn carbon nanotube film |
Duration | 20–60 minutes | — |
Pressure | 0.1–100 Pa | — |
Duration | 10–60 minutes | — |
Thickness | 0.5–100000 nm | — |
Thickness | 15000–5000000 nm | — |
Thickness | 100–900 µm | — |
Thickness | 1–10 cm | — |
Thickness | 0.01–100 µm | — |
Thickness | 50–80 nm | — |
Thickness | 2–200 µm | — |
Duration | 5–180 s | — |
Duration | 5–300 s | — |
Duration | 3–5 minutes | — |
Pressure | ≥ 1 Pa | — |
Pressure | ≥ 600 Pa | — |
metal substrate
copper
Cu
nickel
Ni
carbon source gas
methane
CH₄
hydrogen gas
H₂
| 0.34–10 nm |
graphene film |
graphene film heat capacity (monolayer) | ≤ 0.000557 J/cm2·K | graphene film |
metal substrate thickness range | 100–100000 nm | metal substrate |
width of strip-shaped gap in carbon nanotube film | 10–100 nm | drawn carbon nanotube film |
Duration | 20–60 minutes | — |
Pressure | 0.1–100 Pa | — |
Duration | 10–60 minutes | — |
Thickness | 0.5–100000 nm | — |
Thickness | 15000–5000000 nm | — |
Thickness | 100–900 µm | — |
Thickness | 1–10 cm | — |
Thickness | 0.01–100 µm | — |
Thickness | 50–80 nm | — |
Thickness | 2–200 µm | — |
Duration | 5–180 s | — |
Duration | 5–300 s | — |
Duration | 3–5 minutes | — |
Pressure | ≥ 1 Pa | — |
Pressure | ≥ 600 Pa | — |