Patent
US 8,834,967METHOD OF FORMING GRAPHENE NANOMESH
Ali Afzali-Ardakani
US
Copyright © 2026 Matter42. All rights reserved.
Patent
Atlas literature
Patent
US 8,834,967Patent drawings and their descriptions. Click a drawing to enlarge it.
Figure 1 A is a top view of a graphene sheet following an e-beam etching process to form an initial nanopore surrounded by active carbon sites; Page 2 of 14 YO R₉₂₀ 1 20893U S₂
Figure 1 B is a perspective view of the graphene sheet illustrated in
Figure 1;
Figure 2A is a schematic of a graphene sheet located in a vacuum environment containing passivation elements following an e-beam etching process to form a nanopore;
Figure 2B illustrates the graphene sheet of
Figure 3A is a schematic of a graphene sheet including a nanopore having passivated edges;
Figure 3B illustrates the graphene sheet of
Figure 4A illustrates the graphene sheet of
Figures 4B is a perspective view of the graphene sheet illustrated in
Figure 5A illustrates the graphene sheet of
Figure 5B is a perspective view of the graphene sheet illustrated in
Figure 6A is a top view of a graphene sheet having an initial nanopore formed therethrough via an e-beam etching process and located in a vacuum environment containing ethylene molecules according to another embodiment; Page 3 of 14 YO R₉₂₀ 1 20893US₂
Figure 6B is a perspective view of the graphene sheet illustrated in
Figure 7A illustrates the graphene sheet of
Figure 7B is a perspective view of the graphene sheet illustrated in
Figure 8 is a flow diagram illustrating a method of forming nanopores in a graphene sheet according to an exemplary embodiment; and
Figure 9 is a flow diagram illustrating a method of forming nanopores in a graphene sheet according to another exemplary embodiment.
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A method of forming pores in a graphene sheet, the method compris ing: locating a graphene sheet in vacuum containing a plurality of passivation elements; forming at least one pore having a first diameter in the graphene sheet via an e-beam, the e-beam inducing a plurality of active carbon sites at edges of each nanopore, such that the passivation elements bond to the active carbons sites; and exposing the carbon sites to the plurality of passivation elements for a predetermined period of time such that the passivation elements bond to the active carbon sites to form covalent bonds between the passivation elements and the active carbon sites and extend into the at least one pore to decrease the initial diameter, wherein the passivation elements are selected from a group comprising styrene and ethylene. previously presented
canceled
canceled
canceled
The method of claim 4, further comprising forming [[the]]a second diameter to be less than 1 nanometer.
A method of reducing the diameter of pores formed in a graphene sheet, the method comprising: forming at least one pore having a first diameter in the graphene sheet such that the at least one pore is surrounded by passivated edges of the graphene sheet; chemically reacting the passivated edges with a chemical compound, wherein the chemical compound comprises an organic compound selected from the group comprising benzene, toluene, ethyl benzene, n-propyl benzene, n-butyl benzene, p-xylene, phenol, 4- methylphenol, phenetole, 3,5-xylenol, and anisole; and Attorney Docket No. Y O R₉₂₀₁₂₀₈₉₃US₂ Page 2 of 5 Application Serial No: 13/966,442 In Reply to Office Action dated: forming a molecular brush at the passivated edges in response to the chemical reaction to define a second diameter that is less than the initial diameter of the at least one pore. previously presented
canceled
The method of claim 76 wherein the forming at least one pore further comprises forming the at least one pore via nanoprint lithography.
The method of claim 76 wherein the forming at least one pore further comprises forming the at least one pore via di-block copolymer lithography. Attorney Docket No. Y O R₉₂₀₁₂₀₈₉₃US₂ Page 3 of
Layer stacks claimed or described, ordered top of device to substrate.
graphene nanomesh
Materials described outside the worked examples.
graphene sheet
styrene
C₈H₈
Additional fabrication and treatment steps described in the patent.
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
Pore Diameter Initial | 1–30 nm | graphene sheet |
Pore Diameter Reduced | ≤ 1 nm |
Related documents with shared materials, methods, properties, or citations.
Patent
Atlas literature
Patent
US 8,834,967Patent drawings and their descriptions. Click a drawing to enlarge it.
Figure 1 A is a top view of a graphene sheet following an e-beam etching process to form an initial nanopore surrounded by active carbon sites; Page 2 of 14 YO R₉₂₀ 1 20893U S₂
Figure 1 B is a perspective view of the graphene sheet illustrated in
Figure 1;
Figure 2A is a schematic of a graphene sheet located in a vacuum environment containing passivation elements following an e-beam etching process to form a nanopore;
Figure 2B illustrates the graphene sheet of
Figure 3A is a schematic of a graphene sheet including a nanopore having passivated edges;
Figure 3B illustrates the graphene sheet of
Figure 4A illustrates the graphene sheet of
Figures 4B is a perspective view of the graphene sheet illustrated in
Figure 5A illustrates the graphene sheet of
Figure 5B is a perspective view of the graphene sheet illustrated in
Figure 6A is a top view of a graphene sheet having an initial nanopore formed therethrough via an e-beam etching process and located in a vacuum environment containing ethylene molecules according to another embodiment; Page 3 of 14 YO R₉₂₀ 1 20893US₂
Figure 6B is a perspective view of the graphene sheet illustrated in
Figure 7A illustrates the graphene sheet of
Figure 7B is a perspective view of the graphene sheet illustrated in
Figure 8 is a flow diagram illustrating a method of forming nanopores in a graphene sheet according to an exemplary embodiment; and
Figure 9 is a flow diagram illustrating a method of forming nanopores in a graphene sheet according to another exemplary embodiment.
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A method of forming pores in a graphene sheet, the method compris ing: locating a graphene sheet in vacuum containing a plurality of passivation elements; forming at least one pore having a first diameter in the graphene sheet via an e-beam, the e-beam inducing a plurality of active carbon sites at edges of each nanopore, such that the passivation elements bond to the active carbons sites; and exposing the carbon sites to the plurality of passivation elements for a predetermined period of time such that the passivation elements bond to the active carbon sites to form covalent bonds between the passivation elements and the active carbon sites and extend into the at least one pore to decrease the initial diameter, wherein the passivation elements are selected from a group comprising styrene and ethylene. previously presented
canceled
canceled
canceled
The method of claim 4, further comprising forming [[the]]a second diameter to be less than 1 nanometer.
A method of reducing the diameter of pores formed in a graphene sheet, the method comprising: forming at least one pore having a first diameter in the graphene sheet such that the at least one pore is surrounded by passivated edges of the graphene sheet; chemically reacting the passivated edges with a chemical compound, wherein the chemical compound comprises an organic compound selected from the group comprising benzene, toluene, ethyl benzene, n-propyl benzene, n-butyl benzene, p-xylene, phenol, 4- methylphenol, phenetole, 3,5-xylenol, and anisole; and Attorney Docket No. Y O R₉₂₀₁₂₀₈₉₃US₂ Page 2 of 5 Application Serial No: 13/966,442 In Reply to Office Action dated: forming a molecular brush at the passivated edges in response to the chemical reaction to define a second diameter that is less than the initial diameter of the at least one pore. previously presented
canceled
The method of claim 76 wherein the forming at least one pore further comprises forming the at least one pore via nanoprint lithography.
The method of claim 76 wherein the forming at least one pore further comprises forming the at least one pore via di-block copolymer lithography. Attorney Docket No. Y O R₉₂₀₁₂₀₈₉₃US₂ Page 3 of
Layer stacks claimed or described, ordered top of device to substrate.
graphene nanomesh
Materials described outside the worked examples.
graphene sheet
styrene
C₈H₈
Additional fabrication and treatment steps described in the patent.
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
Pore Diameter Initial | 1–30 nm | graphene sheet |
Pore Diameter Reduced | ≤ 1 nm |
Related documents with shared materials, methods, properties, or citations.
Patent
Atlas literature
Patent
US 8,834,967Patent drawings and their descriptions. Click a drawing to enlarge it.
Figure 1 A is a top view of a graphene sheet following an e-beam etching process to form an initial nanopore surrounded by active carbon sites; Page 2 of 14 YO R₉₂₀ 1 20893U S₂
Figure 1 B is a perspective view of the graphene sheet illustrated in
Figure 1;
Figure 2A is a schematic of a graphene sheet located in a vacuum environment containing passivation elements following an e-beam etching process to form a nanopore;
Figure 2B illustrates the graphene sheet of
Figure 3A is a schematic of a graphene sheet including a nanopore having passivated edges;
Figure 3B illustrates the graphene sheet of
Figure 4A illustrates the graphene sheet of
Figures 4B is a perspective view of the graphene sheet illustrated in
Figure 5A illustrates the graphene sheet of
Figure 5B is a perspective view of the graphene sheet illustrated in
Figure 6A is a top view of a graphene sheet having an initial nanopore formed therethrough via an e-beam etching process and located in a vacuum environment containing ethylene molecules according to another embodiment; Page 3 of 14 YO R₉₂₀ 1 20893US₂
Figure 6B is a perspective view of the graphene sheet illustrated in
Figure 7A illustrates the graphene sheet of
Figure 7B is a perspective view of the graphene sheet illustrated in
Figure 8 is a flow diagram illustrating a method of forming nanopores in a graphene sheet according to an exemplary embodiment; and
Figure 9 is a flow diagram illustrating a method of forming nanopores in a graphene sheet according to another exemplary embodiment.
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A method of forming pores in a graphene sheet, the method compris ing: locating a graphene sheet in vacuum containing a plurality of passivation elements; forming at least one pore having a first diameter in the graphene sheet via an e-beam, the e-beam inducing a plurality of active carbon sites at edges of each nanopore, such that the passivation elements bond to the active carbons sites; and exposing the carbon sites to the plurality of passivation elements for a predetermined period of time such that the passivation elements bond to the active carbon sites to form covalent bonds between the passivation elements and the active carbon sites and extend into the at least one pore to decrease the initial diameter, wherein the passivation elements are selected from a group comprising styrene and ethylene. previously presented
canceled
canceled
canceled
The method of claim 4, further comprising forming [[the]]a second diameter to be less than 1 nanometer.
A method of reducing the diameter of pores formed in a graphene sheet, the method comprising: forming at least one pore having a first diameter in the graphene sheet such that the at least one pore is surrounded by passivated edges of the graphene sheet; chemically reacting the passivated edges with a chemical compound, wherein the chemical compound comprises an organic compound selected from the group comprising benzene, toluene, ethyl benzene, n-propyl benzene, n-butyl benzene, p-xylene, phenol, 4- methylphenol, phenetole, 3,5-xylenol, and anisole; and Attorney Docket No. Y O R₉₂₀₁₂₀₈₉₃US₂ Page 2 of 5 Application Serial No: 13/966,442 In Reply to Office Action dated: forming a molecular brush at the passivated edges in response to the chemical reaction to define a second diameter that is less than the initial diameter of the at least one pore. previously presented
canceled
The method of claim 76 wherein the forming at least one pore further comprises forming the at least one pore via nanoprint lithography.
The method of claim 76 wherein the forming at least one pore further comprises forming the at least one pore via di-block copolymer lithography. Attorney Docket No. Y O R₉₂₀₁₂₀₈₉₃US₂ Page 3 of
Layer stacks claimed or described, ordered top of device to substrate.
graphene nanomesh
Materials described outside the worked examples.
graphene sheet
styrene
C₈H₈
Additional fabrication and treatment steps described in the patent.
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
Pore Diameter Initial | 1–30 nm | graphene sheet |
Pore Diameter Reduced | ≤ 1 nm |
Related documents with shared materials, methods, properties, or citations.
Patent
Atlas literature
Patent
US 8,834,967Patent drawings and their descriptions. Click a drawing to enlarge it.
Figure 1 A is a top view of a graphene sheet following an e-beam etching process to form an initial nanopore surrounded by active carbon sites; Page 2 of 14 YO R₉₂₀ 1 20893U S₂
Figure 1 B is a perspective view of the graphene sheet illustrated in
Figure 1;
Figure 2A is a schematic of a graphene sheet located in a vacuum environment containing passivation elements following an e-beam etching process to form a nanopore;
Figure 2B illustrates the graphene sheet of
Figure 3A is a schematic of a graphene sheet including a nanopore having passivated edges;
Figure 3B illustrates the graphene sheet of
Figure 4A illustrates the graphene sheet of
Figures 4B is a perspective view of the graphene sheet illustrated in
Figure 5A illustrates the graphene sheet of
Figure 5B is a perspective view of the graphene sheet illustrated in
Figure 6A is a top view of a graphene sheet having an initial nanopore formed therethrough via an e-beam etching process and located in a vacuum environment containing ethylene molecules according to another embodiment; Page 3 of 14 YO R₉₂₀ 1 20893US₂
Figure 6B is a perspective view of the graphene sheet illustrated in
Figure 7A illustrates the graphene sheet of
Figure 7B is a perspective view of the graphene sheet illustrated in
Figure 8 is a flow diagram illustrating a method of forming nanopores in a graphene sheet according to an exemplary embodiment; and
Figure 9 is a flow diagram illustrating a method of forming nanopores in a graphene sheet according to another exemplary embodiment.
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A method of forming pores in a graphene sheet, the method compris ing: locating a graphene sheet in vacuum containing a plurality of passivation elements; forming at least one pore having a first diameter in the graphene sheet via an e-beam, the e-beam inducing a plurality of active carbon sites at edges of each nanopore, such that the passivation elements bond to the active carbons sites; and exposing the carbon sites to the plurality of passivation elements for a predetermined period of time such that the passivation elements bond to the active carbon sites to form covalent bonds between the passivation elements and the active carbon sites and extend into the at least one pore to decrease the initial diameter, wherein the passivation elements are selected from a group comprising styrene and ethylene. previously presented
canceled
canceled
canceled
The method of claim 4, further comprising forming [[the]]a second diameter to be less than 1 nanometer.
A method of reducing the diameter of pores formed in a graphene sheet, the method comprising: forming at least one pore having a first diameter in the graphene sheet such that the at least one pore is surrounded by passivated edges of the graphene sheet; chemically reacting the passivated edges with a chemical compound, wherein the chemical compound comprises an organic compound selected from the group comprising benzene, toluene, ethyl benzene, n-propyl benzene, n-butyl benzene, p-xylene, phenol, 4- methylphenol, phenetole, 3,5-xylenol, and anisole; and Attorney Docket No. Y O R₉₂₀₁₂₀₈₉₃US₂ Page 2 of 5 Application Serial No: 13/966,442 In Reply to Office Action dated: forming a molecular brush at the passivated edges in response to the chemical reaction to define a second diameter that is less than the initial diameter of the at least one pore. previously presented
canceled
The method of claim 76 wherein the forming at least one pore further comprises forming the at least one pore via nanoprint lithography.
The method of claim 76 wherein the forming at least one pore further comprises forming the at least one pore via di-block copolymer lithography. Attorney Docket No. Y O R₉₂₀₁₂₀₈₉₃US₂ Page 3 of
Layer stacks claimed or described, ordered top of device to substrate.
graphene nanomesh
Materials described outside the worked examples.
graphene sheet
styrene
C₈H₈
Additional fabrication and treatment steps described in the patent.
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
Pore Diameter Initial | 1–30 nm | graphene sheet |
Pore Diameter Reduced | ≤ 1 nm |
Related documents with shared materials, methods, properties, or citations.
ethylene
C₂H₄
benzene
C₆H₆
toluene
C₇H₈
ethyl benzene
C₈H₁₀
n-propyl benzene
C₉H₁₂
n-butyl benzene
C₁₀H₁₄
phenol
C₆H₆O
4-methylphenol
C₇H₈O
phenetole
C₈H₁₀O
alkenes
oxygen atoms
O
INTERNALLY FUNCTIONALIZED GRAPHENE SUBSTRATES
ethylene
C₂H₄
benzene
C₆H₆
toluene
C₇H₈
ethyl benzene
C₈H₁₀
n-propyl benzene
C₉H₁₂
n-butyl benzene
C₁₀H₁₄
phenol
C₆H₆O
4-methylphenol
C₇H₈O
phenetole
C₈H₁₀O
alkenes
oxygen atoms
O
INTERNALLY FUNCTIONALIZED GRAPHENE SUBSTRATES
ethylene
C₂H₄
benzene
C₆H₆
toluene
C₇H₈
ethyl benzene
C₈H₁₀
n-propyl benzene
C₉H₁₂
n-butyl benzene
C₁₀H₁₄
phenol
C₆H₆O
4-methylphenol
C₇H₈O
phenetole
C₈H₁₀O
alkenes
oxygen atoms
O
INTERNALLY FUNCTIONALIZED GRAPHENE SUBSTRATES
ethylene
C₂H₄
benzene
C₆H₆
toluene
C₇H₈
ethyl benzene
C₈H₁₀
n-propyl benzene
C₉H₁₂
n-butyl benzene
C₁₀H₁₄
phenol
C₆H₆O
4-methylphenol
C₇H₈O
phenetole
C₈H₁₀O
alkenes
oxygen atoms
O
INTERNALLY FUNCTIONALIZED GRAPHENE SUBSTRATES