Patent
US 9,567,224nitrogen
N₂
metallic substrate
polymeric substrate
helium
He
argon
Ar
| — |
Thickness | 0.1–100 nm | — |
Thickness | 0.1–5 nm | — |
Thickness | 0.1–10 nm | — |
Thickness | 0.5–100 nm | — |
Thickness | 0.5–5 nm | — |
Thickness | 0.5–10 nm | — |
Thickness | 1.5–5 nm | — |
Thickness | 1.5–10 nm | — |
Thickness | 1.5–100 nm | — |
Thickness | 0.2–0.3 nm | — |
Thickness | 1–20 mm | — |
— | 40–400 W | — |
Thickness | 0.5–1.75 nm | — |
Thickness | ≥ 10 nm | — |
Thickness | ≤ 5 nm | — |
Thickness | ≤ 1.5 nm | — |
Thickness | ≤ 10 nm | — |
nitrogen
N₂
metallic substrate
polymeric substrate
helium
He
argon
Ar
| — |
Thickness | 0.1–100 nm | — |
Thickness | 0.1–5 nm | — |
Thickness | 0.1–10 nm | — |
Thickness | 0.5–100 nm | — |
Thickness | 0.5–5 nm | — |
Thickness | 0.5–10 nm | — |
Thickness | 1.5–5 nm | — |
Thickness | 1.5–10 nm | — |
Thickness | 1.5–100 nm | — |
Thickness | 0.2–0.3 nm | — |
Thickness | 1–20 mm | — |
— | 40–400 W | — |
Thickness | 0.5–1.75 nm | — |
Thickness | ≥ 10 nm | — |
Thickness | ≤ 5 nm | — |
Thickness | ≤ 1.5 nm | — |
Thickness | ≤ 10 nm | — |
nitrogen
N₂
metallic substrate
polymeric substrate
helium
He
argon
Ar
| — |
Thickness | 0.1–100 nm | — |
Thickness | 0.1–5 nm | — |
Thickness | 0.1–10 nm | — |
Thickness | 0.5–100 nm | — |
Thickness | 0.5–5 nm | — |
Thickness | 0.5–10 nm | — |
Thickness | 1.5–5 nm | — |
Thickness | 1.5–10 nm | — |
Thickness | 1.5–100 nm | — |
Thickness | 0.2–0.3 nm | — |
Thickness | 1–20 mm | — |
— | 40–400 W | — |
Thickness | 0.5–1.75 nm | — |
Thickness | ≥ 10 nm | — |
Thickness | ≤ 5 nm | — |
Thickness | ≤ 1.5 nm | — |
Thickness | ≤ 10 nm | — |
nitrogen
N₂
metallic substrate
polymeric substrate
helium
He
argon
Ar
| — |
Thickness | 0.1–100 nm | — |
Thickness | 0.1–5 nm | — |
Thickness | 0.1–10 nm | — |
Thickness | 0.5–100 nm | — |
Thickness | 0.5–5 nm | — |
Thickness | 0.5–10 nm | — |
Thickness | 1.5–5 nm | — |
Thickness | 1.5–10 nm | — |
Thickness | 1.5–100 nm | — |
Thickness | 0.2–0.3 nm | — |
Thickness | 1–20 mm | — |
— | 40–400 W | — |
Thickness | 0.5–1.75 nm | — |
Thickness | ≥ 10 nm | — |
Thickness | ≤ 5 nm | — |
Thickness | ≤ 1.5 nm | — |
Thickness | ≤ 10 nm | — |