Patent
US 9,744,617METHODS FOR PERFORATING MULTI-LAYER GRAPHENE THROUGH ION BOMBARDMENT
Peter V. BEDWORTH, Jacob L. SWETT
US
Copyright © 2026 Matter42. All rights reserved.
oxidant (chemical etchant)
ozone
O₃
aqueous solution of potassium permanganate
aqueous solution of potassium permanganate and sulfuric acid
aqueous solution of potassium permanganate and potassium hydroxide
solution of hydrogen peroxide and sulfuric acid
xenon ions
Xe+
neon ions
Ne+
argon ions
Ar+
tropyllium ions
ferrocenium ions
single layer graphene
molybdenum sulfide
MoS₂
| 0.2–50 nm |
perforated multi-layer graphene |
pore size range 0.3–50 nm | 0.3–50 nm | perforated multi-layer graphene |
multi-layer graphene: 10 to 20 layers | 10–20 layers | multi-layer grapheneperforated multi-layer graphene |
ion energy: greater than 1.5 keV and less than 100 keV | 1500–100000 eV | — |
ion energy: greater than 1.5 keV and less than 10 keV | 1500–10000 eV | — |
graphene-based material thickness 0.3–10 nm (embodiment) | 0.3–10 nm | multi-layer graphene |
Thickness | 100–1000 nm | — |
Thickness | 200–800 nm | — |
Thickness | 300–500 nm | — |
Thickness | 0.1–10 nm | — |
Thickness | 0.2–2.5 nm | — |
Thickness | 0.2–2 nm | — |
Thickness | 0.5–1.5 nm | — |
Thickness | 0.3–20 nm | — |
Thickness | 0.5–2.5 nm | — |
Thickness | 0.3–0.5 nm | — |
Thickness | 0.5–10 nm | — |
Thickness | 5–20 nm | — |
Thickness | 1–100 nm | — |
Thickness | 0.34–10 nm | — |
Thickness | 0.34–5 nm | — |
Thickness | 0.34–3 nm | — |
Thickness | 10–100 nm | — |
Pressure | 0.000001 torr | — |
Thickness | ≥ 1 nm | — |
Thickness | ≥ 1 µm | — |
— | ≥ 1500 eV | — |
Thickness | 0.2–20 nm | — |
Thickness | 0.2–10 nm | — |
Thickness | 0.2–5 nm | — |
Thickness | ≤ 5 nm | — |
oxidant (chemical etchant)
ozone
O₃
aqueous solution of potassium permanganate
aqueous solution of potassium permanganate and sulfuric acid
aqueous solution of potassium permanganate and potassium hydroxide
solution of hydrogen peroxide and sulfuric acid
xenon ions
Xe+
neon ions
Ne+
argon ions
Ar+
tropyllium ions
ferrocenium ions
single layer graphene
molybdenum sulfide
MoS₂
| 0.2–50 nm |
perforated multi-layer graphene |
pore size range 0.3–50 nm | 0.3–50 nm | perforated multi-layer graphene |
multi-layer graphene: 10 to 20 layers | 10–20 layers | multi-layer grapheneperforated multi-layer graphene |
ion energy: greater than 1.5 keV and less than 100 keV | 1500–100000 eV | — |
ion energy: greater than 1.5 keV and less than 10 keV | 1500–10000 eV | — |
graphene-based material thickness 0.3–10 nm (embodiment) | 0.3–10 nm | multi-layer graphene |
Thickness | 100–1000 nm | — |
Thickness | 200–800 nm | — |
Thickness | 300–500 nm | — |
Thickness | 0.1–10 nm | — |
Thickness | 0.2–2.5 nm | — |
Thickness | 0.2–2 nm | — |
Thickness | 0.5–1.5 nm | — |
Thickness | 0.3–20 nm | — |
Thickness | 0.5–2.5 nm | — |
Thickness | 0.3–0.5 nm | — |
Thickness | 0.5–10 nm | — |
Thickness | 5–20 nm | — |
Thickness | 1–100 nm | — |
Thickness | 0.34–10 nm | — |
Thickness | 0.34–5 nm | — |
Thickness | 0.34–3 nm | — |
Thickness | 10–100 nm | — |
Pressure | 0.000001 torr | — |
Thickness | ≥ 1 nm | — |
Thickness | ≥ 1 µm | — |
— | ≥ 1500 eV | — |
Thickness | 0.2–20 nm | — |
Thickness | 0.2–10 nm | — |
Thickness | 0.2–5 nm | — |
Thickness | ≤ 5 nm | — |
oxidant (chemical etchant)
ozone
O₃
aqueous solution of potassium permanganate
aqueous solution of potassium permanganate and sulfuric acid
aqueous solution of potassium permanganate and potassium hydroxide
solution of hydrogen peroxide and sulfuric acid
xenon ions
Xe+
neon ions
Ne+
argon ions
Ar+
tropyllium ions
ferrocenium ions
single layer graphene
molybdenum sulfide
MoS₂
| 0.2–50 nm |
perforated multi-layer graphene |
pore size range 0.3–50 nm | 0.3–50 nm | perforated multi-layer graphene |
multi-layer graphene: 10 to 20 layers | 10–20 layers | multi-layer grapheneperforated multi-layer graphene |
ion energy: greater than 1.5 keV and less than 100 keV | 1500–100000 eV | — |
ion energy: greater than 1.5 keV and less than 10 keV | 1500–10000 eV | — |
graphene-based material thickness 0.3–10 nm (embodiment) | 0.3–10 nm | multi-layer graphene |
Thickness | 100–1000 nm | — |
Thickness | 200–800 nm | — |
Thickness | 300–500 nm | — |
Thickness | 0.1–10 nm | — |
Thickness | 0.2–2.5 nm | — |
Thickness | 0.2–2 nm | — |
Thickness | 0.5–1.5 nm | — |
Thickness | 0.3–20 nm | — |
Thickness | 0.5–2.5 nm | — |
Thickness | 0.3–0.5 nm | — |
Thickness | 0.5–10 nm | — |
Thickness | 5–20 nm | — |
Thickness | 1–100 nm | — |
Thickness | 0.34–10 nm | — |
Thickness | 0.34–5 nm | — |
Thickness | 0.34–3 nm | — |
Thickness | 10–100 nm | — |
Pressure | 0.000001 torr | — |
Thickness | ≥ 1 nm | — |
Thickness | ≥ 1 µm | — |
— | ≥ 1500 eV | — |
Thickness | 0.2–20 nm | — |
Thickness | 0.2–10 nm | — |
Thickness | 0.2–5 nm | — |
Thickness | ≤ 5 nm | — |
oxidant (chemical etchant)
ozone
O₃
aqueous solution of potassium permanganate
aqueous solution of potassium permanganate and sulfuric acid
aqueous solution of potassium permanganate and potassium hydroxide
solution of hydrogen peroxide and sulfuric acid
xenon ions
Xe+
neon ions
Ne+
argon ions
Ar+
tropyllium ions
ferrocenium ions
single layer graphene
molybdenum sulfide
MoS₂
| 0.2–50 nm |
perforated multi-layer graphene |
pore size range 0.3–50 nm | 0.3–50 nm | perforated multi-layer graphene |
multi-layer graphene: 10 to 20 layers | 10–20 layers | multi-layer grapheneperforated multi-layer graphene |
ion energy: greater than 1.5 keV and less than 100 keV | 1500–100000 eV | — |
ion energy: greater than 1.5 keV and less than 10 keV | 1500–10000 eV | — |
graphene-based material thickness 0.3–10 nm (embodiment) | 0.3–10 nm | multi-layer graphene |
Thickness | 100–1000 nm | — |
Thickness | 200–800 nm | — |
Thickness | 300–500 nm | — |
Thickness | 0.1–10 nm | — |
Thickness | 0.2–2.5 nm | — |
Thickness | 0.2–2 nm | — |
Thickness | 0.5–1.5 nm | — |
Thickness | 0.3–20 nm | — |
Thickness | 0.5–2.5 nm | — |
Thickness | 0.3–0.5 nm | — |
Thickness | 0.5–10 nm | — |
Thickness | 5–20 nm | — |
Thickness | 1–100 nm | — |
Thickness | 0.34–10 nm | — |
Thickness | 0.34–5 nm | — |
Thickness | 0.34–3 nm | — |
Thickness | 10–100 nm | — |
Pressure | 0.000001 torr | — |
Thickness | ≥ 1 nm | — |
Thickness | ≥ 1 µm | — |
— | ≥ 1500 eV | — |
Thickness | 0.2–20 nm | — |
Thickness | 0.2–10 nm | — |
Thickness | 0.2–5 nm | — |
Thickness | ≤ 5 nm | — |