Patent
US 9,006,644two- or three-layer graphene
ruthenium
Ru
transition metal
| 1250–1450 °C |
| — |
Temperature | 50–825 °C | — |
Thickness | 50–500 nm | — |
Pressure | 1e-8 Torr | — |
Pressure | 0–6 Torr | — |
Pressure | 0–6 torr | — |
— | 1–40 eV | — |
Pressure | 1e-7 torr | — |
Thickness | 30–40 nm | — |
Temperature | 950–1250 °C | — |
Temperature | 700–900 °C | — |
two- or three-layer graphene
ruthenium
Ru
transition metal
| 1250–1450 °C |
| — |
Temperature | 50–825 °C | — |
Thickness | 50–500 nm | — |
Pressure | 1e-8 Torr | — |
Pressure | 0–6 Torr | — |
Pressure | 0–6 torr | — |
— | 1–40 eV | — |
Pressure | 1e-7 torr | — |
Thickness | 30–40 nm | — |
Temperature | 950–1250 °C | — |
Temperature | 700–900 °C | — |
two- or three-layer graphene
ruthenium
Ru
transition metal
| 1250–1450 °C |
| — |
Temperature | 50–825 °C | — |
Thickness | 50–500 nm | — |
Pressure | 1e-8 Torr | — |
Pressure | 0–6 Torr | — |
Pressure | 0–6 torr | — |
— | 1–40 eV | — |
Pressure | 1e-7 torr | — |
Thickness | 30–40 nm | — |
Temperature | 950–1250 °C | — |
Temperature | 700–900 °C | — |
two- or three-layer graphene
ruthenium
Ru
transition metal
| 1250–1450 °C |
| — |
Temperature | 50–825 °C | — |
Thickness | 50–500 nm | — |
Pressure | 1e-8 Torr | — |
Pressure | 0–6 Torr | — |
Pressure | 0–6 torr | — |
— | 1–40 eV | — |
Pressure | 1e-7 torr | — |
Thickness | 30–40 nm | — |
Temperature | 950–1250 °C | — |
Temperature | 700–900 °C | — |