of Invention: SILYL PHOSPHINE COMPOUND, PROCESS FOR PRODUCING SILYL

Yosuke Takubo

Patent

Atlas literature

Patent

US 11,578,266

of Invention: SILYL PHOSPHINE COMPOUND, PROCESS FOR PRODUCING SILYL

Yosuke Takubo

Claims

Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.

5 independent · 7 dependent

1
Independent
1-2. Canceled
2
Independent
Canceled
3
Independentsilyl phosphine compound (formula 1)PH₃silylating agent (formula I)
A process for producing-, a composition comprising a silyl phosphine compound represented by the following formula (1), wherein an arsenic content is not more than 1 ppm by mass, R SVG 16979340.10-19-2022.L₉G₄₃Y₀RGREENX5.CLM.1.svg 0.73 2.02 Black and white R R wherein each R is independently an alk y l group having not less than 1 and not more than 5 carbon atoms or an ar y l group having not less than 6 and not more than 10 carbon atoms, wherein a content of at least one of compounds represented by the following formulas (2) to (7) as a ratio to a content of the compound represented by the formula (1) in the composition satisﬁes a corresponding one of the following requirements (a) to (f): (a) the content of the compound represented by the following formula (2) is not more than 0.3 mol %, SVG 16979340.10-19-2022.L₉G₄₃Y₀RGREENX5.CLM.2.svg 0.92 1.8 Black and white wherein R is the same as in the formula (1), (b) the content of the compound represented by the following formula (3) is not more than 0.1 mol %, SVG 16979340.10-19-2022.L₉G₄₃Y₀RGREENX5.CLM.3.svg 0.8 1.02 Black and white wherein R is the same as in the formula (1); (c) the content of the compound represented by the following formula (4) is not more than 0.50 mol %, SVG 16979340.10-19-2022.L₉G₄₃Y₀RGREENX5.CLM.4.svg 0.65 1.70 Black and white wherein R is the same as in the formula (1); (d) the content of the compound represented by the following formula (5) is not more than 0.30 mol %, SVG 16979340.10-19-2022.L₉G₄₃Y₀RGREENX5.CLM.5.svg 0.84 1.82 Black and white (5) SVG 16979340.10-19-2022.L₉G₄₃Y₀RGREENX5.CLM.6.svg 0.62 0.8 Black and white wherein R is the same as in the formula (1); (e) the content of the compound represented by the following formula (6) is not more than 0. 30 mol %, SVG 16979340.10-19-2022.L₉G₄₃Y₀RGREENX5.CLM.7.svg 1.01 2.22 Black and white i SVG 16979340.10-19-2022.L₉G₄₃Y₀RGREENX5.CLM.8.svg 0.45 0.72 Black and white wherein R is the same as in the formula (1), and (f) the content of the compound represented by the following formula (7) is not more than 1.0 mol %, SVG 16979340.10-19-2022.L₉G₄₃Y₀RGREENX5.CLM.9.svg 1.2 2.5 Black and white wherein R is the same as in the formula (1), the method comprising: a ﬁrst step of mixing a solvent which contains no halogen atom, a basic compound, a silylating agent represented by the following formula (I) and phosphine to obtain a solution containing a silyl phosphine compound; a second step of removing the solvent from the solution containing a silyl phosphine compound to obtain a concentrated solution of a silyl phosphine compound under a reduced pressure of not less than 5 kPa and not more than 20 kPa in terms of absolute pressure; and a third step of distilling the concentrated solution of a silyl phosphine compound to obtain the silyl phosphine compound under a reduced pressure of not less than 0.01 kPa and not more than 4 kPa in terms of absolute pressure; wherein as the phosphine, phosphine having an arsenic content of not more than 1 ppm by volume in terms of arsine is used, SVG 16979340.10-19-2022.L₉G₄₃Y₀RGREENX5.CLM.10.svg 0.72 1.44 Black and white wherein each R is independently an alkyl group having not less than I and not more than 5 carbon atoms or an aryl group having not less than 6 and not more than carbon atoms, and X is at least one group selected from a ﬂuorosulfonic acid group, a ﬂuoroalkanesulfonic acid group and a perchloric acid group Currently amended
1. 4
  Dependent← claim 3basic compound
  The process for producing the silyl phosphine compound according to claim 3, wherein the basic compound is one or two or more selected from methylamine, dimethylamine, trimethylamine, ethylamine, diethylamine, triethylamine, ethyl enedi amine, aniline, toluidine, pyridine and piperidine. Original
2. 5
  Dependent← claim 3silylating agent selected from trimethylsilyl trifluoromethanesulfonate, triethylsilyl trifluoromethanesulfonate, tributylsilyl trifluoromethanesulfonate, triisopropylsilyl trifluoromethanesulfonate, triphenylsilyl trifluoromethanesulfonate, tert-butyldimethylsilyl trifluoromethanesulfonate
  The process for producing the silyl phosphine compound according to claim 3, wherein the silylating agent is one or two or more selected from trimethylsilyl triﬂuoromethanesulfonate, triethylsilyl triﬂuoromethanesulfonate, tributylsilyl trif l uoromethanesulfonate, tri i sopropyl si lyl triﬂuoromethanesulfonate, triphenyl si lyl triﬂuoromethanesulfonate and tert-butyldimethylsilyl triﬂuoromethanesulfonate. Previously presented
3. 6
  Dependent← claim 3
  The process for producing a silyl phosphine compound according to claim 3, wherein the basic compound in an amount not less than 3 times and not more than 6 times the molar amount of phosphine is mixed with phosphine in the ﬁrst step. Previously presented
4. 7
  Dependent← claim 3
  The process for producing a silyl phosphine compound according to claim 3, wherein the silylating agent in an amount not less than 3 times and not more than 6 times the molar amount of phosphine is mixed with phosphine in the ﬁrst step. Previously presented
5. 8
  Dependent← claim 3P(SiMe₃)3
  The process for producing a silyl phosphine compound according to claim 3, wherein the silyl phosphine compound is tris(trimethylsilyl)phosphine. Previously presented
6. 9
  Dependent← claim 3
  The process for producing a silyl phosphine compound according to claim 3, wherein the ﬁrst step is carried out in an inert atmosphere. Previously presented
7. 10
  Dependent← claim 3
  The process for producing a silyl phosphine compound according to claim 3, wherein the silyl phosphine compound obtained in the third step is mixed with an organic solvent having been dehydrated, to obtain a silyl phosphine compound in a state of being dispersed in the organic solvent. Previously presented
11
Independent
11-18. Canceled
18
Independent
Canceled

Materials

Materials described outside the worked examples.

silyl phosphine compound (formula 1)

Product/Phosphorus Source

phosphine

PH₃

Process steps

Additional fabrication and treatment steps described in the patent.

Chemical Synthesis

Step 1

Ambient

inert atmosphere (optional, per claim 9)

Process details

step 1:Mix halogen-free solvent, basic compound, silylating agent (formula I), and phosphine (arsenic content ≤1 ppm by volume as arsine) to obtain solution containing silyl phosphine compound

step 2:Remove solvent under reduced pressure 5–20 kPa (absolute) to obtain concentrated solution

Reported properties

Performance values and ranges asserted in the specification or claims.

Property	Value	Material
arsenic content in silyl phosphine compound (formula 1)	≤1 ppm by mass ppm by mass	silyl phosphine compound (formula 1)
arsenic content in phosphine feedstock (as arsine)

Tables

Table 1
crude phosphine gas (manufactured by NIPPON CHEMICAL INDUSTRIAL CO., LTD.) having an arsenic content shown in Table 1 was introduced under the conditions of a ﬂow rate of 750 g/
p. 25
Table 2
The results are set forth in Table 2 described below.
p. 25

of Invention: SILYL PHOSPHINE COMPOUND, PROCESS FOR PRODUCING SILYL | Matter42 Literature