Patent
US 9,172,041Plasmonic Device Enhancements
Mark Alan Davis
US
Copyright © 2026 Matter42. All rights reserved.
Patent
Atlas literature
Patent
US 9,172,041Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1 C and fabricated by an exemplary method in accordance with an embodiment of the present disclosure. [0013] Figure l E illustrates a top view of an …
FIG. 2A and fabricated by an exemplary method in accordance with an embodiment of the present disclosure. [0023] Figure 2C illustrates a top view of an …
FIG. 4A and fabricated by an exemplary method in accordance with an embodiment of the present disclosure. [0031] Figure 5 A illustrates a top view of an …
FIG. 5 A and fabricated by an exemplary method in accordance with an embodiment of the present disclosure. [0033] Figure 6 illustrates a cross-sectional view …
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
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An integrated graphene-based structure comprising an N- dimensional array of elements formed on a surface of a substrate, wherein: (i) the N-dimensional array of elements includes a plurality of rows, (ii) each respective row in the plurality of rows comprises a corresponding plurality of elements formed along a first dimension, the first dimension characterized by an axis of the respective row, each element in the corresponding plurality of elements (a) comprising at least one graphene stack comprising a plurality of planar sheets collectively forming a planar layer and (b) separated from an adjacent element along the first dimension by a first average spatial separation thereby resulting in a first periodicity in lateral spacing along the first dimension, (iii) each respective row in the plurality of rows is separated from an adjacent row along a second dimension by a second average spatial separation, thereby resulting in a second periodicity in lateral spacing along the second dimension, and (iv) the N-dimensional array exhibits a set of characteristic electromagnetic interference properties in response to electromagnetic radiation incident on the N-dimensional array, wherein each respective element in the corresponding plurality of elements comprises a plurality of contiguous cavities in the substrate in a direction substantially orthogonal to the native lateral surface of the substrate, and wherein the plurality of contiguous cavities is stacked contiguously along the direction substantially orthogonal to the surface of the substrate.
The structure of claim 102, wherein each respective cavity in the plurality of contiguous cavities includes a corresponding side wall and a corresponding trench surface.
The structure of claim 102, wherein each contiguous cavity in the plurality of contiguous cavities has a common central axis orthogonal to the native surface of the substrate.
The structure of claim 102, wherein: the plurality of contiguous cavities includes a first cavity comprising a first reference axis orthogonal to the native surface of the substrate and a second cavity comprising a second reference axis orthogonal to the native surface of the substrate; and the first reference axis is distinct from and parallel to the second reference axis.
The structure of claim 102, wherein: the plurality of contiguous cavities includes a first cavity comprising a first reference axis orthogonal to the native surface of the substrate and a second cavity comprising a second native axis orthogonal to the surface of the substrate; the first cavity has a first height defined along the first reference axis; and the second cavity has a second height defined along the second reference axis.
An integrated graphene-based structure comprising an N- dimensional array of elements formed on a surface of a substrate, wherein: (i) the N-dimensional array of elements includes a plurality of rows, (ii) each respective row in the plurality of rows comprises a corresponding plurality of elements formed along a first dimension, the first dimension characterized by an axis of the respective row, each element in the corresponding plurality of elements (a) comprising at least one graphene stack comprising a plurality of planar sheets collectively forming a planar layer and (b) separated from an adjacent element along the first dimension by a first average spatial separation thereby resulting in a first periodicity in lateral spacing along the first dimension, DB₂/25526481.1 Page 8 of 12 Application No. 14/322,729 Amendment dated: Reply to Office Action of: (iii) each respective row in the plurality of rows is separated from an adjacent row along a second dimension by a second average spatial separation, thereby resulting in a second periodicity in lateral spacing along the second dimension, and (iv) the N-dimensional array exhibits a set of characteristic electromagnetic interference properties in response to electromagnetic radiation incident on the N-dimensional array, wherein a first element in the corresponding plurality of elements consists of a single continuous cavity comprising a respective side wall and a respective trench surface.
The structure of claim 125, wherein a graphene stack in the at least one graphene stack is formed on the respective trench surface of the single continuous cavity.
The structure of claim 125, wherein a graphene stack in the at least one graphene stack is formed on the respective side wall of the single continuous cavity.
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Layer stacks claimed or described, ordered top of device to substrate.
integrated graphene-based plasmonic array structure
Materials described outside the worked examples.
graphene stack
substrate material
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
Thickness | 5–1000 nm | — |
Thickness |
Patent
Atlas literature
Patent
US 9,172,041Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1 C and fabricated by an exemplary method in accordance with an embodiment of the present disclosure. [0013] Figure l E illustrates a top view of an …
FIG. 2A and fabricated by an exemplary method in accordance with an embodiment of the present disclosure. [0023] Figure 2C illustrates a top view of an …
FIG. 4A and fabricated by an exemplary method in accordance with an embodiment of the present disclosure. [0031] Figure 5 A illustrates a top view of an …
FIG. 5 A and fabricated by an exemplary method in accordance with an embodiment of the present disclosure. [0033] Figure 6 illustrates a cross-sectional view …
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
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An integrated graphene-based structure comprising an N- dimensional array of elements formed on a surface of a substrate, wherein: (i) the N-dimensional array of elements includes a plurality of rows, (ii) each respective row in the plurality of rows comprises a corresponding plurality of elements formed along a first dimension, the first dimension characterized by an axis of the respective row, each element in the corresponding plurality of elements (a) comprising at least one graphene stack comprising a plurality of planar sheets collectively forming a planar layer and (b) separated from an adjacent element along the first dimension by a first average spatial separation thereby resulting in a first periodicity in lateral spacing along the first dimension, (iii) each respective row in the plurality of rows is separated from an adjacent row along a second dimension by a second average spatial separation, thereby resulting in a second periodicity in lateral spacing along the second dimension, and (iv) the N-dimensional array exhibits a set of characteristic electromagnetic interference properties in response to electromagnetic radiation incident on the N-dimensional array, wherein each respective element in the corresponding plurality of elements comprises a plurality of contiguous cavities in the substrate in a direction substantially orthogonal to the native lateral surface of the substrate, and wherein the plurality of contiguous cavities is stacked contiguously along the direction substantially orthogonal to the surface of the substrate.
The structure of claim 102, wherein each respective cavity in the plurality of contiguous cavities includes a corresponding side wall and a corresponding trench surface.
The structure of claim 102, wherein each contiguous cavity in the plurality of contiguous cavities has a common central axis orthogonal to the native surface of the substrate.
The structure of claim 102, wherein: the plurality of contiguous cavities includes a first cavity comprising a first reference axis orthogonal to the native surface of the substrate and a second cavity comprising a second reference axis orthogonal to the native surface of the substrate; and the first reference axis is distinct from and parallel to the second reference axis.
The structure of claim 102, wherein: the plurality of contiguous cavities includes a first cavity comprising a first reference axis orthogonal to the native surface of the substrate and a second cavity comprising a second native axis orthogonal to the surface of the substrate; the first cavity has a first height defined along the first reference axis; and the second cavity has a second height defined along the second reference axis.
An integrated graphene-based structure comprising an N- dimensional array of elements formed on a surface of a substrate, wherein: (i) the N-dimensional array of elements includes a plurality of rows, (ii) each respective row in the plurality of rows comprises a corresponding plurality of elements formed along a first dimension, the first dimension characterized by an axis of the respective row, each element in the corresponding plurality of elements (a) comprising at least one graphene stack comprising a plurality of planar sheets collectively forming a planar layer and (b) separated from an adjacent element along the first dimension by a first average spatial separation thereby resulting in a first periodicity in lateral spacing along the first dimension, DB₂/25526481.1 Page 8 of 12 Application No. 14/322,729 Amendment dated: Reply to Office Action of: (iii) each respective row in the plurality of rows is separated from an adjacent row along a second dimension by a second average spatial separation, thereby resulting in a second periodicity in lateral spacing along the second dimension, and (iv) the N-dimensional array exhibits a set of characteristic electromagnetic interference properties in response to electromagnetic radiation incident on the N-dimensional array, wherein a first element in the corresponding plurality of elements consists of a single continuous cavity comprising a respective side wall and a respective trench surface.
The structure of claim 125, wherein a graphene stack in the at least one graphene stack is formed on the respective trench surface of the single continuous cavity.
The structure of claim 125, wherein a graphene stack in the at least one graphene stack is formed on the respective side wall of the single continuous cavity.
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Layer stacks claimed or described, ordered top of device to substrate.
integrated graphene-based plasmonic array structure
Materials described outside the worked examples.
graphene stack
substrate material
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
Thickness | 5–1000 nm | — |
Thickness |
Patent
Atlas literature
Patent
US 9,172,041Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1 C and fabricated by an exemplary method in accordance with an embodiment of the present disclosure. [0013] Figure l E illustrates a top view of an …
FIG. 2A and fabricated by an exemplary method in accordance with an embodiment of the present disclosure. [0023] Figure 2C illustrates a top view of an …
FIG. 4A and fabricated by an exemplary method in accordance with an embodiment of the present disclosure. [0031] Figure 5 A illustrates a top view of an …
FIG. 5 A and fabricated by an exemplary method in accordance with an embodiment of the present disclosure. [0033] Figure 6 illustrates a cross-sectional view …
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
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An integrated graphene-based structure comprising an N- dimensional array of elements formed on a surface of a substrate, wherein: (i) the N-dimensional array of elements includes a plurality of rows, (ii) each respective row in the plurality of rows comprises a corresponding plurality of elements formed along a first dimension, the first dimension characterized by an axis of the respective row, each element in the corresponding plurality of elements (a) comprising at least one graphene stack comprising a plurality of planar sheets collectively forming a planar layer and (b) separated from an adjacent element along the first dimension by a first average spatial separation thereby resulting in a first periodicity in lateral spacing along the first dimension, (iii) each respective row in the plurality of rows is separated from an adjacent row along a second dimension by a second average spatial separation, thereby resulting in a second periodicity in lateral spacing along the second dimension, and (iv) the N-dimensional array exhibits a set of characteristic electromagnetic interference properties in response to electromagnetic radiation incident on the N-dimensional array, wherein each respective element in the corresponding plurality of elements comprises a plurality of contiguous cavities in the substrate in a direction substantially orthogonal to the native lateral surface of the substrate, and wherein the plurality of contiguous cavities is stacked contiguously along the direction substantially orthogonal to the surface of the substrate.
The structure of claim 102, wherein each respective cavity in the plurality of contiguous cavities includes a corresponding side wall and a corresponding trench surface.
The structure of claim 102, wherein each contiguous cavity in the plurality of contiguous cavities has a common central axis orthogonal to the native surface of the substrate.
The structure of claim 102, wherein: the plurality of contiguous cavities includes a first cavity comprising a first reference axis orthogonal to the native surface of the substrate and a second cavity comprising a second reference axis orthogonal to the native surface of the substrate; and the first reference axis is distinct from and parallel to the second reference axis.
The structure of claim 102, wherein: the plurality of contiguous cavities includes a first cavity comprising a first reference axis orthogonal to the native surface of the substrate and a second cavity comprising a second native axis orthogonal to the surface of the substrate; the first cavity has a first height defined along the first reference axis; and the second cavity has a second height defined along the second reference axis.
An integrated graphene-based structure comprising an N- dimensional array of elements formed on a surface of a substrate, wherein: (i) the N-dimensional array of elements includes a plurality of rows, (ii) each respective row in the plurality of rows comprises a corresponding plurality of elements formed along a first dimension, the first dimension characterized by an axis of the respective row, each element in the corresponding plurality of elements (a) comprising at least one graphene stack comprising a plurality of planar sheets collectively forming a planar layer and (b) separated from an adjacent element along the first dimension by a first average spatial separation thereby resulting in a first periodicity in lateral spacing along the first dimension, DB₂/25526481.1 Page 8 of 12 Application No. 14/322,729 Amendment dated: Reply to Office Action of: (iii) each respective row in the plurality of rows is separated from an adjacent row along a second dimension by a second average spatial separation, thereby resulting in a second periodicity in lateral spacing along the second dimension, and (iv) the N-dimensional array exhibits a set of characteristic electromagnetic interference properties in response to electromagnetic radiation incident on the N-dimensional array, wherein a first element in the corresponding plurality of elements consists of a single continuous cavity comprising a respective side wall and a respective trench surface.
The structure of claim 125, wherein a graphene stack in the at least one graphene stack is formed on the respective trench surface of the single continuous cavity.
The structure of claim 125, wherein a graphene stack in the at least one graphene stack is formed on the respective side wall of the single continuous cavity.
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Layer stacks claimed or described, ordered top of device to substrate.
integrated graphene-based plasmonic array structure
Materials described outside the worked examples.
graphene stack
substrate material
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
Thickness | 5–1000 nm | — |
Thickness |
Patent
Atlas literature
Patent
US 9,172,041Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1 C and fabricated by an exemplary method in accordance with an embodiment of the present disclosure. [0013] Figure l E illustrates a top view of an …
FIG. 2A and fabricated by an exemplary method in accordance with an embodiment of the present disclosure. [0023] Figure 2C illustrates a top view of an …
FIG. 4A and fabricated by an exemplary method in accordance with an embodiment of the present disclosure. [0031] Figure 5 A illustrates a top view of an …
FIG. 5 A and fabricated by an exemplary method in accordance with an embodiment of the present disclosure. [0033] Figure 6 illustrates a cross-sectional view …
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
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An integrated graphene-based structure comprising an N- dimensional array of elements formed on a surface of a substrate, wherein: (i) the N-dimensional array of elements includes a plurality of rows, (ii) each respective row in the plurality of rows comprises a corresponding plurality of elements formed along a first dimension, the first dimension characterized by an axis of the respective row, each element in the corresponding plurality of elements (a) comprising at least one graphene stack comprising a plurality of planar sheets collectively forming a planar layer and (b) separated from an adjacent element along the first dimension by a first average spatial separation thereby resulting in a first periodicity in lateral spacing along the first dimension, (iii) each respective row in the plurality of rows is separated from an adjacent row along a second dimension by a second average spatial separation, thereby resulting in a second periodicity in lateral spacing along the second dimension, and (iv) the N-dimensional array exhibits a set of characteristic electromagnetic interference properties in response to electromagnetic radiation incident on the N-dimensional array, wherein each respective element in the corresponding plurality of elements comprises a plurality of contiguous cavities in the substrate in a direction substantially orthogonal to the native lateral surface of the substrate, and wherein the plurality of contiguous cavities is stacked contiguously along the direction substantially orthogonal to the surface of the substrate.
The structure of claim 102, wherein each respective cavity in the plurality of contiguous cavities includes a corresponding side wall and a corresponding trench surface.
The structure of claim 102, wherein each contiguous cavity in the plurality of contiguous cavities has a common central axis orthogonal to the native surface of the substrate.
The structure of claim 102, wherein: the plurality of contiguous cavities includes a first cavity comprising a first reference axis orthogonal to the native surface of the substrate and a second cavity comprising a second reference axis orthogonal to the native surface of the substrate; and the first reference axis is distinct from and parallel to the second reference axis.
The structure of claim 102, wherein: the plurality of contiguous cavities includes a first cavity comprising a first reference axis orthogonal to the native surface of the substrate and a second cavity comprising a second native axis orthogonal to the surface of the substrate; the first cavity has a first height defined along the first reference axis; and the second cavity has a second height defined along the second reference axis.
An integrated graphene-based structure comprising an N- dimensional array of elements formed on a surface of a substrate, wherein: (i) the N-dimensional array of elements includes a plurality of rows, (ii) each respective row in the plurality of rows comprises a corresponding plurality of elements formed along a first dimension, the first dimension characterized by an axis of the respective row, each element in the corresponding plurality of elements (a) comprising at least one graphene stack comprising a plurality of planar sheets collectively forming a planar layer and (b) separated from an adjacent element along the first dimension by a first average spatial separation thereby resulting in a first periodicity in lateral spacing along the first dimension, DB₂/25526481.1 Page 8 of 12 Application No. 14/322,729 Amendment dated: Reply to Office Action of: (iii) each respective row in the plurality of rows is separated from an adjacent row along a second dimension by a second average spatial separation, thereby resulting in a second periodicity in lateral spacing along the second dimension, and (iv) the N-dimensional array exhibits a set of characteristic electromagnetic interference properties in response to electromagnetic radiation incident on the N-dimensional array, wherein a first element in the corresponding plurality of elements consists of a single continuous cavity comprising a respective side wall and a respective trench surface.
The structure of claim 125, wherein a graphene stack in the at least one graphene stack is formed on the respective trench surface of the single continuous cavity.
The structure of claim 125, wherein a graphene stack in the at least one graphene stack is formed on the respective side wall of the single continuous cavity.
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Layer stacks claimed or described, ordered top of device to substrate.
integrated graphene-based plasmonic array structure
Materials described outside the worked examples.
graphene stack
substrate material
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
Thickness | 5–1000 nm | — |
Thickness |
| — |
Thickness | 0.3–150 nm | — |
Thickness | 3–100 nm | — |
Thickness | 2–150 nm | — |
Thickness | 1–300 nm | — |
Thickness | 1–10 nm | — |
Thickness | 10–20 nm | — |
Thickness | 20–30 nm | — |
Thickness | 30–40 nm | — |
Thickness | 50–100 nm | — |
Thickness | 100–500 nm | — |
Thickness | 10–100 nm | — |
Thickness | ≥ 0.1 nm | — |
Thickness | ≥ 0.2 nm | — |
Thickness | ≥ 0.3 nm | — |
Thickness | ≥ 0.4 nm | — |
Thickness | ≥ 0.5 nm | — |
Thickness | ≥ 0.6 nm | — |
Thickness | ≥ 0.7 nm | — |
Thickness | ≥ 0.8 nm | — |
Thickness | ≥ 0.9 nm | — |
Thickness | ≥ 1 nm | — |
Thickness | ≥ 2 nm | — |
Thickness | ≥ 3 nm | — |
Thickness | ≥ 4 nm | — |
Thickness | ≥ 5 nm | — |
| — |
Thickness | 0.3–150 nm | — |
Thickness | 3–100 nm | — |
Thickness | 2–150 nm | — |
Thickness | 1–300 nm | — |
Thickness | 1–10 nm | — |
Thickness | 10–20 nm | — |
Thickness | 20–30 nm | — |
Thickness | 30–40 nm | — |
Thickness | 50–100 nm | — |
Thickness | 100–500 nm | — |
Thickness | 10–100 nm | — |
Thickness | ≥ 0.1 nm | — |
Thickness | ≥ 0.2 nm | — |
Thickness | ≥ 0.3 nm | — |
Thickness | ≥ 0.4 nm | — |
Thickness | ≥ 0.5 nm | — |
Thickness | ≥ 0.6 nm | — |
Thickness | ≥ 0.7 nm | — |
Thickness | ≥ 0.8 nm | — |
Thickness | ≥ 0.9 nm | — |
Thickness | ≥ 1 nm | — |
Thickness | ≥ 2 nm | — |
Thickness | ≥ 3 nm | — |
Thickness | ≥ 4 nm | — |
Thickness | ≥ 5 nm | — |
| — |
Thickness | 0.3–150 nm | — |
Thickness | 3–100 nm | — |
Thickness | 2–150 nm | — |
Thickness | 1–300 nm | — |
Thickness | 1–10 nm | — |
Thickness | 10–20 nm | — |
Thickness | 20–30 nm | — |
Thickness | 30–40 nm | — |
Thickness | 50–100 nm | — |
Thickness | 100–500 nm | — |
Thickness | 10–100 nm | — |
Thickness | ≥ 0.1 nm | — |
Thickness | ≥ 0.2 nm | — |
Thickness | ≥ 0.3 nm | — |
Thickness | ≥ 0.4 nm | — |
Thickness | ≥ 0.5 nm | — |
Thickness | ≥ 0.6 nm | — |
Thickness | ≥ 0.7 nm | — |
Thickness | ≥ 0.8 nm | — |
Thickness | ≥ 0.9 nm | — |
Thickness | ≥ 1 nm | — |
Thickness | ≥ 2 nm | — |
Thickness | ≥ 3 nm | — |
Thickness | ≥ 4 nm | — |
Thickness | ≥ 5 nm | — |
| — |
Thickness | 0.3–150 nm | — |
Thickness | 3–100 nm | — |
Thickness | 2–150 nm | — |
Thickness | 1–300 nm | — |
Thickness | 1–10 nm | — |
Thickness | 10–20 nm | — |
Thickness | 20–30 nm | — |
Thickness | 30–40 nm | — |
Thickness | 50–100 nm | — |
Thickness | 100–500 nm | — |
Thickness | 10–100 nm | — |
Thickness | ≥ 0.1 nm | — |
Thickness | ≥ 0.2 nm | — |
Thickness | ≥ 0.3 nm | — |
Thickness | ≥ 0.4 nm | — |
Thickness | ≥ 0.5 nm | — |
Thickness | ≥ 0.6 nm | — |
Thickness | ≥ 0.7 nm | — |
Thickness | ≥ 0.8 nm | — |
Thickness | ≥ 0.9 nm | — |
Thickness | ≥ 1 nm | — |
Thickness | ≥ 2 nm | — |
Thickness | ≥ 3 nm | — |
Thickness | ≥ 4 nm | — |
Thickness | ≥ 5 nm | — |