Patent
US 10,354,771gold
Au
niobium
Nb
tantalum
Ta
titanium
Ti
natural 14N₂ gas
14N₂
| 15 times |
graphene |
particle beam energy incident on target material | — | 68Zn nitrate in nitric acid |
Thickness | 0.15–0.5 mm | — |
Pressure | 0.5–11 MPa | — |
Thickness | ≤ 1 µm | — |
Thickness | ≤ 50 µm | — |
Thickness | ≤ 10 mm | — |
Thickness | ≤ 8 mm | — |
Thickness | ≤ 6 mm | — |
Thickness | ≤ 4 mm | — |
Thickness | ≥ 20 µm | — |
Thickness | ≥ 25 µm | — |
Thickness | ≥ 30 µm | — |
Thickness | ≥ 35 µm | — |
Thickness | ≥ 40 µm | — |
Thickness | ≥ 1308 mm | — |
— | ≥ 1400 W | — |
gold
Au
niobium
Nb
tantalum
Ta
titanium
Ti
natural 14N₂ gas
14N₂
| 15 times |
graphene |
particle beam energy incident on target material | — | 68Zn nitrate in nitric acid |
Thickness | 0.15–0.5 mm | — |
Pressure | 0.5–11 MPa | — |
Thickness | ≤ 1 µm | — |
Thickness | ≤ 50 µm | — |
Thickness | ≤ 10 mm | — |
Thickness | ≤ 8 mm | — |
Thickness | ≤ 6 mm | — |
Thickness | ≤ 4 mm | — |
Thickness | ≥ 20 µm | — |
Thickness | ≥ 25 µm | — |
Thickness | ≥ 30 µm | — |
Thickness | ≥ 35 µm | — |
Thickness | ≥ 40 µm | — |
Thickness | ≥ 1308 mm | — |
— | ≥ 1400 W | — |
gold
Au
niobium
Nb
tantalum
Ta
titanium
Ti
natural 14N₂ gas
14N₂
| 15 times |
graphene |
particle beam energy incident on target material | — | 68Zn nitrate in nitric acid |
Thickness | 0.15–0.5 mm | — |
Pressure | 0.5–11 MPa | — |
Thickness | ≤ 1 µm | — |
Thickness | ≤ 50 µm | — |
Thickness | ≤ 10 mm | — |
Thickness | ≤ 8 mm | — |
Thickness | ≤ 6 mm | — |
Thickness | ≤ 4 mm | — |
Thickness | ≥ 20 µm | — |
Thickness | ≥ 25 µm | — |
Thickness | ≥ 30 µm | — |
Thickness | ≥ 35 µm | — |
Thickness | ≥ 40 µm | — |
Thickness | ≥ 1308 mm | — |
— | ≥ 1400 W | — |
gold
Au
niobium
Nb
tantalum
Ta
titanium
Ti
natural 14N₂ gas
14N₂
| 15 times |
graphene |
particle beam energy incident on target material | — | 68Zn nitrate in nitric acid |
Thickness | 0.15–0.5 mm | — |
Pressure | 0.5–11 MPa | — |
Thickness | ≤ 1 µm | — |
Thickness | ≤ 50 µm | — |
Thickness | ≤ 10 mm | — |
Thickness | ≤ 8 mm | — |
Thickness | ≤ 6 mm | — |
Thickness | ≤ 4 mm | — |
Thickness | ≥ 20 µm | — |
Thickness | ≥ 25 µm | — |
Thickness | ≥ 30 µm | — |
Thickness | ≥ 35 µm | — |
Thickness | ≥ 40 µm | — |
Thickness | ≥ 1308 mm | — |
— | ≥ 1400 W | — |