Patent
US 10,243,104graphitic layer
AlAs
AlN
GaSb
GaP
GaN
GaAs
InP
InN
InGaAs
InGaN
InAs
AlGaAs
AlGaN
AlInGaN
Au or Ag metal catalyst
Group III-V compound nanowire
| 25–200 nm |
| — |
Temperature | 300–700 °C | — |
Temperature | 540–630 °C | — |
Temperature | 590–630 °C | — |
Temperature | 420–540 °C | — |
Temperature | 430–540 °C | — |
Thickness | 50–300 nm | — |
Pressure | 0.000001 Torr | — |
Thickness | 100–200 nm | — |
Thickness | ≤ 10 nm | — |
Thickness | ≤ 50 nm | — |
Thickness | ≥ 1 µm | — |
Thickness | ≥ 80 nm | — |
Thickness | ≤ 500 nm | — |
Thickness | ≥ 500 nm | — |
Thickness | ≥ 350 nm | — |
Thickness | ≥ 300 nm | — |
Thickness | ≥ 200 nm | — |
graphitic layer
AlAs
AlN
GaSb
GaP
GaN
GaAs
InP
InN
InGaAs
InGaN
InAs
AlGaAs
AlGaN
AlInGaN
Au or Ag metal catalyst
Group III-V compound nanowire
| 25–200 nm |
| — |
Temperature | 300–700 °C | — |
Temperature | 540–630 °C | — |
Temperature | 590–630 °C | — |
Temperature | 420–540 °C | — |
Temperature | 430–540 °C | — |
Thickness | 50–300 nm | — |
Pressure | 0.000001 Torr | — |
Thickness | 100–200 nm | — |
Thickness | ≤ 10 nm | — |
Thickness | ≤ 50 nm | — |
Thickness | ≥ 1 µm | — |
Thickness | ≥ 80 nm | — |
Thickness | ≤ 500 nm | — |
Thickness | ≥ 500 nm | — |
Thickness | ≥ 350 nm | — |
Thickness | ≥ 300 nm | — |
Thickness | ≥ 200 nm | — |
graphitic layer
AlAs
AlN
GaSb
GaP
GaN
GaAs
InP
InN
InGaAs
InGaN
InAs
AlGaAs
AlGaN
AlInGaN
Au or Ag metal catalyst
Group III-V compound nanowire
| 25–200 nm |
| — |
Temperature | 300–700 °C | — |
Temperature | 540–630 °C | — |
Temperature | 590–630 °C | — |
Temperature | 420–540 °C | — |
Temperature | 430–540 °C | — |
Thickness | 50–300 nm | — |
Pressure | 0.000001 Torr | — |
Thickness | 100–200 nm | — |
Thickness | ≤ 10 nm | — |
Thickness | ≤ 50 nm | — |
Thickness | ≥ 1 µm | — |
Thickness | ≥ 80 nm | — |
Thickness | ≤ 500 nm | — |
Thickness | ≥ 500 nm | — |
Thickness | ≥ 350 nm | — |
Thickness | ≥ 300 nm | — |
Thickness | ≥ 200 nm | — |
graphitic layer
AlAs
AlN
GaSb
GaP
GaN
GaAs
InP
InN
InGaAs
InGaN
InAs
AlGaAs
AlGaN
AlInGaN
Au or Ag metal catalyst
Group III-V compound nanowire
| 25–200 nm |
| — |
Temperature | 300–700 °C | — |
Temperature | 540–630 °C | — |
Temperature | 590–630 °C | — |
Temperature | 420–540 °C | — |
Temperature | 430–540 °C | — |
Thickness | 50–300 nm | — |
Pressure | 0.000001 Torr | — |
Thickness | 100–200 nm | — |
Thickness | ≤ 10 nm | — |
Thickness | ≤ 50 nm | — |
Thickness | ≥ 1 µm | — |
Thickness | ≥ 80 nm | — |
Thickness | ≤ 500 nm | — |
Thickness | ≥ 500 nm | — |
Thickness | ≥ 350 nm | — |
Thickness | ≥ 300 nm | — |
Thickness | ≥ 200 nm | — |