Abstract

Novel flexible micro-scale humidity sensors were directly fabricated in graphene oxide (GO) and polyimide (PI) using ion beam writing without further modifications and tested in an atmospheric chamber. Two low fluences of carbon ions at 5 MeV were used, and structural changes in irradiated materials were characterized by SEM, micro-Raman spectroscopy, XPS, RBS, EDS, and ERDA. Sensing performance was tested at relative humidity from 5% to 60%, with PI conductivity varying by three orders of magnitude and GO capacitance varying on the order of picofarads.

Abstract

Novel flexible micro-scale humidity sensors were directly fabricated in graphene oxide (GO) and polyimide (PI) using ion beam writing without further modifications and tested in an atmospheric chamber. Two low fluences of carbon ions at 5 MeV were used, and structural changes in irradiated materials were characterized by SEM, micro-Raman spectroscopy, XPS, RBS, EDS, and ERDA. Sensing performance was tested at relative humidity from 5% to 60%, with PI conductivity varying by three orders of magnitude and GO capacitance varying on the order of picofarads.

Abstract

Novel flexible micro-scale humidity sensors were directly fabricated in graphene oxide (GO) and polyimide (PI) using ion beam writing without further modifications and tested in an atmospheric chamber. Two low fluences of carbon ions at 5 MeV were used, and structural changes in irradiated materials were characterized by SEM, micro-Raman spectroscopy, XPS, RBS, EDS, and ERDA. Sensing performance was tested at relative humidity from 5% to 60%, with PI conductivity varying by three orders of magnitude and GO capacitance varying on the order of picofarads.

Abstract

Novel flexible micro-scale humidity sensors were directly fabricated in graphene oxide (GO) and polyimide (PI) using ion beam writing without further modifications and tested in an atmospheric chamber. Two low fluences of carbon ions at 5 MeV were used, and structural changes in irradiated materials were characterized by SEM, micro-Raman spectroscopy, XPS, RBS, EDS, and ERDA. Sensing performance was tested at relative humidity from 5% to 60%, with PI conductivity varying by three orders of magnitude and GO capacitance varying on the order of picofarads.