High-Temperature-Resilient Hyperbolicity in a Mixed-Dimensional Superlattice

Jason Lynch; Tzu-Yu Peng; Jing-Wei Yang; Ben R. Conran; Bongjun Choi; Cindy Yueli Chen; Zahra Fakhraai; Clifford McAleese; Yu-Jung Lu; Deep Jariwala

doi:10.1364/OE.14.008247

Paper details

Research paper

Experimental GrowthExperimental Characterization

High-Temperature-Resilient Hyperbolicity in a Mixed-Dimensional Superlattice

Jason Lynch, Tzu-Yu Peng, Jing-Wei Yang, Ben R. Conran et al.

2025

Samples

Each sample groups how it was prepared, characterized, and measured. Click a card to expand.

TiN thin film grown on sapphire substrate for ellipsometric comparison.

1 preparation1 characterization4 properties11 figures

ExperimentalTiNStudied MaterialAl₂O₃Substrate / Dielectric

TiN film grown on transferred hBN on sapphire, used for layer-dependent ellipsometry comparisons.

2 preparations1 characterization5 properties11 figures

ExperimentalTiNStudied MaterialBNStudied MaterialAl₂O₃Substrate / DielectricAlNSubstrate / Dielectric

hBN layer grown on sapphire before wet transfer onto TiN.

1 preparation1 property

ExperimentalBNStudied MaterialAl₂O₃Substrate / Dielectric

TiN/hBN hyperbolic superlattice with four TiN layers and hBN spacer layers.

3 preparations5 characterizations4 properties14 figures

ExperimentalTiNStudied MaterialBNStudied Material

TiN/Al₂O₃ hyperbolic superlattice with five TiN layers and amorphous Al₂O₃ spacer layers.

2 preparations5 characterizations2 properties14 figures

ExperimentalTiNStudied MaterialAl₂O₃Studied Material

Materials

TiN

Studied Material

Also known as

titanium nitride

studied material

hBN

Studied Material

Also known as

Why these are connected

Related documents with shared materials, methods, properties, or citations.

High-Temperature-Resilient Hyperbolicity in a Mixed-Dimensional Superlattice | Matter42 Literature

Properties

Type	Label	Value	Material	Sample	Source
Thin Film Thickness	TiN thickness on sapphire	5.03nm	TiN	TiN thin film grown on sapphire substrate for ellipsometric	—
Thin Film Thickness	TiN thickness on hBN	4.57nm	TiN	TiN film grown on transferred hBN on sapphire, used for laye	—
Thin Film Thickness	hBN thickness	3nm	BN	hBN layer grown on sapphire before wet transfer onto TiN.	—
Plasma Energy	TiN plasmon energy	2.71eV	TiN	TiN thin film grown on sapphire substrate for ellipsometric	—
Plasma Energy	TiN plasmon energy	2.65eV	TiN	TiN film grown on transferred hBN on sapphire, used for laye	—
Epsilon Zero Crossing Energy	ε1 = 0 energy	2.42eV	TiN	TiN thin film grown on sapphire substrate for ellipsometric	—
Epsilon Zero Crossing Energy	ε1 = 0 energy	2.15eV	TiN	TiN film grown on transferred hBN on sapphire, used for laye	—
Optical Damping Factor	TiN damping factor	0.359eV	TiN	TiN thin film grown on sapphire substrate for ellipsometric	—
Optical Damping Factor	TiN damping factor	0.567eV	TiN	TiN film grown on transferred hBN on sapphire, used for laye	—
Epsilon Zero Crossing Wavelength	ε1 = 0 wavelength	578nm	TiN	TiN/hBN hyperbolic superlattice with four TiN layers and hBN	—
Epsilon Zero Crossing Wavelength	ε1 = 0 wavelength	579nm	TiN	TiN/hBN hyperbolic superlattice with four TiN layers and hBN	—
Epsilon Zero Crossing Wavelength	ε1 = 0 wavelength	575nm	TiN	TiN/hBN hyperbolic superlattice with four TiN layers and hBN	—
Epsilon Zero Crossing Wavelength	ε1 = 0 wavelength	622nm	TiN	TiN/hBN hyperbolic superlattice with four TiN layers and hBN	—
Epsilon Zero Crossing Wavelength	ε1 = 0 wavelength	513nm	TiN	TiN/Al₂O₃ hyperbolic superlattice with five TiN layers and a	—
Epsilon Zero Crossing Wavelength	ε1 = 0 wavelength	525nm	TiN	TiN/Al₂O₃ hyperbolic superlattice with five TiN layers and a	—
Plasma Energy	TiN plasmon energy	2.65eV	TiN	TiN film grown on transferred hBN on sapphire, used for laye	—

Properties

Type	Label	Value	Material	Sample	Source
Thin Film Thickness	TiN thickness on sapphire	5.03nm	TiN	TiN thin film grown on sapphire substrate for ellipsometric	—
Thin Film Thickness	TiN thickness on hBN	4.57nm	TiN	TiN film grown on transferred hBN on sapphire, used for laye	—
Thin Film Thickness	hBN thickness	3nm	BN	hBN layer grown on sapphire before wet transfer onto TiN.	—
Plasma Energy	TiN plasmon energy	2.71eV	TiN	TiN thin film grown on sapphire substrate for ellipsometric	—
Plasma Energy	TiN plasmon energy	2.65eV	TiN	TiN film grown on transferred hBN on sapphire, used for laye	—
Epsilon Zero Crossing Energy	ε1 = 0 energy	2.42eV	TiN	TiN thin film grown on sapphire substrate for ellipsometric	—
Epsilon Zero Crossing Energy	ε1 = 0 energy	2.15eV	TiN	TiN film grown on transferred hBN on sapphire, used for laye	—
Optical Damping Factor	TiN damping factor	0.359eV	TiN	TiN thin film grown on sapphire substrate for ellipsometric	—
Optical Damping Factor	TiN damping factor	0.567eV	TiN	TiN film grown on transferred hBN on sapphire, used for laye	—
Epsilon Zero Crossing Wavelength	ε1 = 0 wavelength	578nm	TiN	TiN/hBN hyperbolic superlattice with four TiN layers and hBN	—
Epsilon Zero Crossing Wavelength	ε1 = 0 wavelength	579nm	TiN	TiN/hBN hyperbolic superlattice with four TiN layers and hBN	—
Epsilon Zero Crossing Wavelength	ε1 = 0 wavelength	575nm	TiN	TiN/hBN hyperbolic superlattice with four TiN layers and hBN	—
Epsilon Zero Crossing Wavelength	ε1 = 0 wavelength	622nm	TiN	TiN/hBN hyperbolic superlattice with four TiN layers and hBN	—
Epsilon Zero Crossing Wavelength	ε1 = 0 wavelength	513nm	TiN	TiN/Al₂O₃ hyperbolic superlattice with five TiN layers and a	—
Epsilon Zero Crossing Wavelength	ε1 = 0 wavelength	525nm	TiN	TiN/Al₂O₃ hyperbolic superlattice with five TiN layers and a	—
Plasma Energy	TiN plasmon energy	2.65eV	TiN	TiN film grown on transferred hBN on sapphire, used for laye	—

Properties

Type	Label	Value	Material	Sample	Source
Thin Film Thickness	TiN thickness on sapphire	5.03nm	TiN	TiN thin film grown on sapphire substrate for ellipsometric	—
Thin Film Thickness	TiN thickness on hBN	4.57nm	TiN	TiN film grown on transferred hBN on sapphire, used for laye	—
Thin Film Thickness	hBN thickness	3nm	BN	hBN layer grown on sapphire before wet transfer onto TiN.	—
Plasma Energy	TiN plasmon energy	2.71eV	TiN	TiN thin film grown on sapphire substrate for ellipsometric	—
Plasma Energy	TiN plasmon energy	2.65eV	TiN	TiN film grown on transferred hBN on sapphire, used for laye	—
Epsilon Zero Crossing Energy	ε1 = 0 energy	2.42eV	TiN	TiN thin film grown on sapphire substrate for ellipsometric	—
Epsilon Zero Crossing Energy	ε1 = 0 energy	2.15eV	TiN	TiN film grown on transferred hBN on sapphire, used for laye	—
Optical Damping Factor	TiN damping factor	0.359eV	TiN	TiN thin film grown on sapphire substrate for ellipsometric	—
Optical Damping Factor	TiN damping factor	0.567eV	TiN	TiN film grown on transferred hBN on sapphire, used for laye	—
Epsilon Zero Crossing Wavelength	ε1 = 0 wavelength	578nm	TiN	TiN/hBN hyperbolic superlattice with four TiN layers and hBN	—
Epsilon Zero Crossing Wavelength	ε1 = 0 wavelength	579nm	TiN	TiN/hBN hyperbolic superlattice with four TiN layers and hBN	—
Epsilon Zero Crossing Wavelength	ε1 = 0 wavelength	575nm	TiN	TiN/hBN hyperbolic superlattice with four TiN layers and hBN	—
Epsilon Zero Crossing Wavelength	ε1 = 0 wavelength	622nm	TiN	TiN/hBN hyperbolic superlattice with four TiN layers and hBN	—
Epsilon Zero Crossing Wavelength	ε1 = 0 wavelength	513nm	TiN	TiN/Al₂O₃ hyperbolic superlattice with five TiN layers and a	—
Epsilon Zero Crossing Wavelength	ε1 = 0 wavelength	525nm	TiN	TiN/Al₂O₃ hyperbolic superlattice with five TiN layers and a	—
Plasma Energy	TiN plasmon energy	2.65eV	TiN	TiN film grown on transferred hBN on sapphire, used for laye	—

Properties

Type	Label	Value	Material	Sample	Source
Thin Film Thickness	TiN thickness on sapphire	5.03nm	TiN	TiN thin film grown on sapphire substrate for ellipsometric	—
Thin Film Thickness	TiN thickness on hBN	4.57nm	TiN	TiN film grown on transferred hBN on sapphire, used for laye	—
Thin Film Thickness	hBN thickness	3nm	BN	hBN layer grown on sapphire before wet transfer onto TiN.	—
Plasma Energy	TiN plasmon energy	2.71eV	TiN	TiN thin film grown on sapphire substrate for ellipsometric	—
Plasma Energy	TiN plasmon energy	2.65eV	TiN	TiN film grown on transferred hBN on sapphire, used for laye	—
Epsilon Zero Crossing Energy	ε1 = 0 energy	2.42eV	TiN	TiN thin film grown on sapphire substrate for ellipsometric	—
Epsilon Zero Crossing Energy	ε1 = 0 energy	2.15eV	TiN	TiN film grown on transferred hBN on sapphire, used for laye	—
Optical Damping Factor	TiN damping factor	0.359eV	TiN	TiN thin film grown on sapphire substrate for ellipsometric	—
Optical Damping Factor	TiN damping factor	0.567eV	TiN	TiN film grown on transferred hBN on sapphire, used for laye	—
Epsilon Zero Crossing Wavelength	ε1 = 0 wavelength	578nm	TiN	TiN/hBN hyperbolic superlattice with four TiN layers and hBN	—
Epsilon Zero Crossing Wavelength	ε1 = 0 wavelength	579nm	TiN	TiN/hBN hyperbolic superlattice with four TiN layers and hBN	—
Epsilon Zero Crossing Wavelength	ε1 = 0 wavelength	575nm	TiN	TiN/hBN hyperbolic superlattice with four TiN layers and hBN	—
Epsilon Zero Crossing Wavelength	ε1 = 0 wavelength	622nm	TiN	TiN/hBN hyperbolic superlattice with four TiN layers and hBN	—
Epsilon Zero Crossing Wavelength	ε1 = 0 wavelength	513nm	TiN	TiN/Al₂O₃ hyperbolic superlattice with five TiN layers and a	—
Epsilon Zero Crossing Wavelength	ε1 = 0 wavelength	525nm	TiN	TiN/Al₂O₃ hyperbolic superlattice with five TiN layers and a	—
Plasma Energy	TiN plasmon energy	2.65eV	TiN	TiN film grown on transferred hBN on sapphire, used for laye	—

High-Temperature-Resilient Hyperbolicity in a Mixed-Dimensional Superlattice

Samples

TiN thin film grown on sapphire substrate for ellipsometric comparison.

TiN film grown on transferred hBN on sapphire, used for layer-dependent ellipsometry comparisons.

hBN layer grown on sapphire before wet transfer onto TiN.

TiN/hBN hyperbolic superlattice with four TiN layers and hBN spacer layers.

TiN/Al₂O₃ hyperbolic superlattice with five TiN layers and amorphous Al₂O₃ spacer layers.

Materials

Why these are connected

High-Temperature-Resilient Hyperbolicity in a Mixed-Dimensional Superlattice

Samples

TiN thin film grown on sapphire substrate for ellipsometric comparison.

TiN film grown on transferred hBN on sapphire, used for layer-dependent ellipsometry comparisons.

hBN layer grown on sapphire before wet transfer onto TiN.

TiN/hBN hyperbolic superlattice with four TiN layers and hBN spacer layers.

TiN/Al₂O₃ hyperbolic superlattice with five TiN layers and amorphous Al₂O₃ spacer layers.

Materials

Why these are connected

High-Temperature-Resilient Hyperbolicity in a Mixed-Dimensional Superlattice

Samples

TiN thin film grown on sapphire substrate for ellipsometric comparison.

TiN film grown on transferred hBN on sapphire, used for layer-dependent ellipsometry comparisons.

hBN layer grown on sapphire before wet transfer onto TiN.

TiN/hBN hyperbolic superlattice with four TiN layers and hBN spacer layers.

TiN/Al₂O₃ hyperbolic superlattice with five TiN layers and amorphous Al₂O₃ spacer layers.

Materials

Why these are connected

High-Temperature-Resilient Hyperbolicity in a Mixed-Dimensional Superlattice

Samples

TiN thin film grown on sapphire substrate for ellipsometric comparison.

TiN film grown on transferred hBN on sapphire, used for layer-dependent ellipsometry comparisons.

hBN layer grown on sapphire before wet transfer onto TiN.

TiN/hBN hyperbolic superlattice with four TiN layers and hBN spacer layers.

TiN/Al₂O₃ hyperbolic superlattice with five TiN layers and amorphous Al₂O₃ spacer layers.

Materials

Why these are connected

High-Temperature-Resilient Hyperbolicity in a Mixed-Dimensional Superlattice

Samples

TiN thin film grown on sapphire substrate for ellipsometric comparison.

TiN film grown on transferred hBN on sapphire, used for layer-dependent ellipsometry comparisons.

hBN layer grown on sapphire before wet transfer onto TiN.

TiN/hBN hyperbolic superlattice with four TiN layers and hBN spacer layers.

TiN/Al₂O₃ hyperbolic superlattice with five TiN layers and amorphous Al₂O₃ spacer layers.

Materials

Why these are connected

High-Temperature-Resilient Hyperbolicity in a Mixed-Dimensional Superlattice

Samples

TiN thin film grown on sapphire substrate for ellipsometric comparison.

TiN film grown on transferred hBN on sapphire, used for layer-dependent ellipsometry comparisons.

hBN layer grown on sapphire before wet transfer onto TiN.

TiN/hBN hyperbolic superlattice with four TiN layers and hBN spacer layers.

TiN/Al₂O₃ hyperbolic superlattice with five TiN layers and amorphous Al₂O₃ spacer layers.

Materials

Why these are connected

High-Temperature-Resilient Hyperbolicity in a Mixed-Dimensional Superlattice

Samples

TiN thin film grown on sapphire substrate for ellipsometric comparison.

TiN film grown on transferred hBN on sapphire, used for layer-dependent ellipsometry comparisons.

hBN layer grown on sapphire before wet transfer onto TiN.

TiN/hBN hyperbolic superlattice with four TiN layers and hBN spacer layers.

TiN/Al₂O₃ hyperbolic superlattice with five TiN layers and amorphous Al₂O₃ spacer layers.

Materials

Why these are connected

High-Temperature-Resilient Hyperbolicity in a Mixed-Dimensional Superlattice

Samples

TiN thin film grown on sapphire substrate for ellipsometric comparison.

TiN film grown on transferred hBN on sapphire, used for layer-dependent ellipsometry comparisons.

hBN layer grown on sapphire before wet transfer onto TiN.

TiN/hBN hyperbolic superlattice with four TiN layers and hBN spacer layers.

TiN/Al₂O₃ hyperbolic superlattice with five TiN layers and amorphous Al₂O₃ spacer layers.

Materials

Why these are connected

Growth

Processing

Characterization

Properties

Growth

Processing

Characterization

Properties