Patent
US 9,153,389CARBON NANOTUBE-GRAPHENE COMPOSITE, METHOD OF FORMING THE SAME, AND ELECTRONIC DEVICE
Yi-Ting Shih
US
Copyright © 2026 Matter42. All rights reserved.
Patent
Atlas literature
Patent
US 9,153,389Patent drawings and their descriptions. Click a drawing to enlarge it.
Figure 1B is a top view of the carbon nanotube-graphene composite of 25 Figure IA.
Figure 1 C illustrates a carbon nanotube-graphene composite according to the second embodiment of the present invention.
Figure 1 D illustrates the cross-sectional view of a carbon nanotube-graphene composite according to the third embodiment of the present invention. 30
Figure 2A illustrates a carbon nanotube-graphene composite according to the fourth embodiment of the present invention. -3- File: 46477usf
Figure 2B illustrates a carbon nanotube-graphene composite according to the fifth embodiment of the present invention.
Figures 3A-3G illustrate a process of forming a carbon nanotube-graphene composite according the sixth embodiment of the present invention. 5
Figures 4A-4D show the SEM images of several examples of carbon nanotube-graphene composites.
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
Claims 1-8. canceled
canceled
canceled
canceled
canceled
canceled
canceled
canceled
A method of forming a carbon nanotube-graphene composite, comprising: providing a graphene layer on a substrate; and forming a patterned layer of aligned carbon nanotubes on the graphene laye r, wherein the step comprises: forming a photoresist layer on the graphene layer; patterning the photoresist layer to form a patterned photoresist layer, wherein the patterned photoresist layer covers a first portion of the graphene layer and exposes a second portion of the graphene layer; and growing aligned carbon nanotubes on the second portion of the substrate.
The method of claim 9, further comprising forming a pseudocapacitive material on a surface of the patterned layer of aligned carbon nanotubes.
canceled
The method of claim [[1 0]]9, further comprising forming a catalyst layer on the graphene layer after patterning the photoresist layer and before growing the aligned carbon nanotubes.
The method of claim 11, further comprising for mi ng a buffer layer on the graphene layer after patterning the photoresist layer and before for m ing the catalyst layer on the graphene layer.
-3- canceled
Layer stacks claimed or described, ordered top of device to substrate.
carbon nanotube-graphene composite
supercapacitor or secondary battery electrode
Materials described outside the worked examples.
graphene
aligned carbon nanotubes
Additional fabrication and treatment steps described in the patent.
Measurements and analyses referenced in the patent, with their drawing references.
Figures 4A-4D show the SEM images of several examples of carbon nanotube-graphene composites.
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
graphene layer thickness | 1.7–5.1 nm | graphene |
carbon nanotube diameter | 20–40 nm |
Related documents with shared materials, methods, properties, or citations.
Patent
Atlas literature
Patent
US 9,153,389Patent drawings and their descriptions. Click a drawing to enlarge it.
Figure 1B is a top view of the carbon nanotube-graphene composite of 25 Figure IA.
Figure 1 C illustrates a carbon nanotube-graphene composite according to the second embodiment of the present invention.
Figure 1 D illustrates the cross-sectional view of a carbon nanotube-graphene composite according to the third embodiment of the present invention. 30
Figure 2A illustrates a carbon nanotube-graphene composite according to the fourth embodiment of the present invention. -3- File: 46477usf
Figure 2B illustrates a carbon nanotube-graphene composite according to the fifth embodiment of the present invention.
Figures 3A-3G illustrate a process of forming a carbon nanotube-graphene composite according the sixth embodiment of the present invention. 5
Figures 4A-4D show the SEM images of several examples of carbon nanotube-graphene composites.
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
Claims 1-8. canceled
canceled
canceled
canceled
canceled
canceled
canceled
canceled
A method of forming a carbon nanotube-graphene composite, comprising: providing a graphene layer on a substrate; and forming a patterned layer of aligned carbon nanotubes on the graphene laye r, wherein the step comprises: forming a photoresist layer on the graphene layer; patterning the photoresist layer to form a patterned photoresist layer, wherein the patterned photoresist layer covers a first portion of the graphene layer and exposes a second portion of the graphene layer; and growing aligned carbon nanotubes on the second portion of the substrate.
The method of claim 9, further comprising forming a pseudocapacitive material on a surface of the patterned layer of aligned carbon nanotubes.
canceled
The method of claim [[1 0]]9, further comprising forming a catalyst layer on the graphene layer after patterning the photoresist layer and before growing the aligned carbon nanotubes.
The method of claim 11, further comprising for mi ng a buffer layer on the graphene layer after patterning the photoresist layer and before for m ing the catalyst layer on the graphene layer.
-3- canceled
Layer stacks claimed or described, ordered top of device to substrate.
carbon nanotube-graphene composite
supercapacitor or secondary battery electrode
Materials described outside the worked examples.
graphene
aligned carbon nanotubes
Additional fabrication and treatment steps described in the patent.
Measurements and analyses referenced in the patent, with their drawing references.
Figures 4A-4D show the SEM images of several examples of carbon nanotube-graphene composites.
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
graphene layer thickness | 1.7–5.1 nm | graphene |
carbon nanotube diameter | 20–40 nm |
Related documents with shared materials, methods, properties, or citations.
Patent
Atlas literature
Patent
US 9,153,389Patent drawings and their descriptions. Click a drawing to enlarge it.
Figure 1B is a top view of the carbon nanotube-graphene composite of 25 Figure IA.
Figure 1 C illustrates a carbon nanotube-graphene composite according to the second embodiment of the present invention.
Figure 1 D illustrates the cross-sectional view of a carbon nanotube-graphene composite according to the third embodiment of the present invention. 30
Figure 2A illustrates a carbon nanotube-graphene composite according to the fourth embodiment of the present invention. -3- File: 46477usf
Figure 2B illustrates a carbon nanotube-graphene composite according to the fifth embodiment of the present invention.
Figures 3A-3G illustrate a process of forming a carbon nanotube-graphene composite according the sixth embodiment of the present invention. 5
Figures 4A-4D show the SEM images of several examples of carbon nanotube-graphene composites.
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
Claims 1-8. canceled
canceled
canceled
canceled
canceled
canceled
canceled
canceled
A method of forming a carbon nanotube-graphene composite, comprising: providing a graphene layer on a substrate; and forming a patterned layer of aligned carbon nanotubes on the graphene laye r, wherein the step comprises: forming a photoresist layer on the graphene layer; patterning the photoresist layer to form a patterned photoresist layer, wherein the patterned photoresist layer covers a first portion of the graphene layer and exposes a second portion of the graphene layer; and growing aligned carbon nanotubes on the second portion of the substrate.
The method of claim 9, further comprising forming a pseudocapacitive material on a surface of the patterned layer of aligned carbon nanotubes.
canceled
The method of claim [[1 0]]9, further comprising forming a catalyst layer on the graphene layer after patterning the photoresist layer and before growing the aligned carbon nanotubes.
The method of claim 11, further comprising for mi ng a buffer layer on the graphene layer after patterning the photoresist layer and before for m ing the catalyst layer on the graphene layer.
-3- canceled
Layer stacks claimed or described, ordered top of device to substrate.
carbon nanotube-graphene composite
supercapacitor or secondary battery electrode
Materials described outside the worked examples.
graphene
aligned carbon nanotubes
Additional fabrication and treatment steps described in the patent.
Measurements and analyses referenced in the patent, with their drawing references.
Figures 4A-4D show the SEM images of several examples of carbon nanotube-graphene composites.
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
graphene layer thickness | 1.7–5.1 nm | graphene |
carbon nanotube diameter | 20–40 nm |
Related documents with shared materials, methods, properties, or citations.
Patent
Atlas literature
Patent
US 9,153,389Patent drawings and their descriptions. Click a drawing to enlarge it.
Figure 1B is a top view of the carbon nanotube-graphene composite of 25 Figure IA.
Figure 1 C illustrates a carbon nanotube-graphene composite according to the second embodiment of the present invention.
Figure 1 D illustrates the cross-sectional view of a carbon nanotube-graphene composite according to the third embodiment of the present invention. 30
Figure 2A illustrates a carbon nanotube-graphene composite according to the fourth embodiment of the present invention. -3- File: 46477usf
Figure 2B illustrates a carbon nanotube-graphene composite according to the fifth embodiment of the present invention.
Figures 3A-3G illustrate a process of forming a carbon nanotube-graphene composite according the sixth embodiment of the present invention. 5
Figures 4A-4D show the SEM images of several examples of carbon nanotube-graphene composites.
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
Claims 1-8. canceled
canceled
canceled
canceled
canceled
canceled
canceled
canceled
A method of forming a carbon nanotube-graphene composite, comprising: providing a graphene layer on a substrate; and forming a patterned layer of aligned carbon nanotubes on the graphene laye r, wherein the step comprises: forming a photoresist layer on the graphene layer; patterning the photoresist layer to form a patterned photoresist layer, wherein the patterned photoresist layer covers a first portion of the graphene layer and exposes a second portion of the graphene layer; and growing aligned carbon nanotubes on the second portion of the substrate.
The method of claim 9, further comprising forming a pseudocapacitive material on a surface of the patterned layer of aligned carbon nanotubes.
canceled
The method of claim [[1 0]]9, further comprising forming a catalyst layer on the graphene layer after patterning the photoresist layer and before growing the aligned carbon nanotubes.
The method of claim 11, further comprising for mi ng a buffer layer on the graphene layer after patterning the photoresist layer and before for m ing the catalyst layer on the graphene layer.
-3- canceled
Layer stacks claimed or described, ordered top of device to substrate.
carbon nanotube-graphene composite
supercapacitor or secondary battery electrode
Materials described outside the worked examples.
graphene
aligned carbon nanotubes
Additional fabrication and treatment steps described in the patent.
Measurements and analyses referenced in the patent, with their drawing references.
Figures 4A-4D show the SEM images of several examples of carbon nanotube-graphene composites.
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
graphene layer thickness | 1.7–5.1 nm | graphene |
carbon nanotube diameter | 20–40 nm |
Related documents with shared materials, methods, properties, or citations.
pseudocapacitive material
RuO₂
IrO₂
NiOx
Co₃O₄
MnO₂
copper
Cu
nickel
Ni
silicon carbide
SiC
carbon nanotube length | 1–500 um | aligned carbon nanotubes |
carbon nanotube area density in bundles | 100000000–1000000000 /cm2 | aligned carbon nanotubes |
Pressure | 1e-7 torr | — |
pseudocapacitive material
RuO₂
IrO₂
NiOx
Co₃O₄
MnO₂
copper
Cu
nickel
Ni
silicon carbide
SiC
carbon nanotube length | 1–500 um | aligned carbon nanotubes |
carbon nanotube area density in bundles | 100000000–1000000000 /cm2 | aligned carbon nanotubes |
Pressure | 1e-7 torr | — |
pseudocapacitive material
RuO₂
IrO₂
NiOx
Co₃O₄
MnO₂
copper
Cu
nickel
Ni
silicon carbide
SiC
carbon nanotube length | 1–500 um | aligned carbon nanotubes |
carbon nanotube area density in bundles | 100000000–1000000000 /cm2 | aligned carbon nanotubes |
Pressure | 1e-7 torr | — |
pseudocapacitive material
RuO₂
IrO₂
NiOx
Co₃O₄
MnO₂
copper
Cu
nickel
Ni
silicon carbide
SiC
carbon nanotube length | 1–500 um | aligned carbon nanotubes |
carbon nanotube area density in bundles | 100000000–1000000000 /cm2 | aligned carbon nanotubes |
Pressure | 1e-7 torr | — |