Patent
US 9,105,793few-layer graphene
dopant island
superconducting material
Sn
chemically sensitive material
heavily doped silicon
Si
silicon oxide
SiO₂
Pd
Au
intercalated atoms or molecules
| 1e-7 torr |
| — |
Thickness | ≥ 2 nm | — |
Thickness | ≥ 5 nm | — |
Thickness | ≥ 10 nm | — |
Thickness | ≥ 1 nm | — |
Thickness | ≥ 1 cm | — |
few-layer graphene
dopant island
superconducting material
Sn
chemically sensitive material
heavily doped silicon
Si
silicon oxide
SiO₂
Pd
Au
intercalated atoms or molecules
| 1e-7 torr |
| — |
Thickness | ≥ 2 nm | — |
Thickness | ≥ 5 nm | — |
Thickness | ≥ 10 nm | — |
Thickness | ≥ 1 nm | — |
Thickness | ≥ 1 cm | — |
few-layer graphene
dopant island
superconducting material
Sn
chemically sensitive material
heavily doped silicon
Si
silicon oxide
SiO₂
Pd
Au
intercalated atoms or molecules
| 1e-7 torr |
| — |
Thickness | ≥ 2 nm | — |
Thickness | ≥ 5 nm | — |
Thickness | ≥ 10 nm | — |
Thickness | ≥ 1 nm | — |
Thickness | ≥ 1 cm | — |
few-layer graphene
dopant island
superconducting material
Sn
chemically sensitive material
heavily doped silicon
Si
silicon oxide
SiO₂
Pd
Au
intercalated atoms or molecules
| 1e-7 torr |
| — |
Thickness | ≥ 2 nm | — |
Thickness | ≥ 5 nm | — |
Thickness | ≥ 10 nm | — |
Thickness | ≥ 1 nm | — |
Thickness | ≥ 1 cm | — |