Patent
US 9,595,401METHOD OF FABRICATING GRAPHENE NANO-MESH
Jooho LEE
US
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Patent
Atlas literature
Patent
US 9,595,401Patent drawings and their descriptions. Click a drawing to enlarge it.
FIGS. 1 A to 1 F are cross-sectional views for sequentially describing a method of fabricating a graphene nano-mesh according to an example embodiment; [0027]
FIG. 2 is a cross- sectional view schematically illustrating a super capacitor formed by using the graphene nano- mesh that is fabricated according to the …
FIGS. 3A to 3F are cross-sectional views for sequentially describing a method of fabricating a graphene nano-mesh according to another example embodiment; and …
FIG. 4 is a cross-sectional view schematically illustrating a super capacitor formed according to another example embodiment.
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A method of fabricating a graphene nano-mesh, the method comprising: forming a graphene layer on a catalyst layer; forming an oxide layer on at least one defect site of the graphene layer; forming a graphene nano-mesh including a plurality of openings by etching the oxide layer; and transferring, after removing the catalyst layer, the graphene nano-mesh onto a substrate.
The method of claim 1, further comprising, after forming the graphene nano-mesh including the plurality of openings, forming a cover film on the graphene nano-mesh.
The method of claim 1, wherein the forming of the graphene layer comprises forming the graphene layer via chemical vapor deposition.
The method of claim 1, wherein the forming of the oxide layer comprises forming the oxide layer via atomic layer deposition.
The method of claim 1, wherein the oxide layer comprises at least one of A 1 2 0 3, HfO X, TiO 2, SiO 2, and ZnO.
The method of claim 1, further comprising, after forming the graphene nano-mesh including the plurality of openings, chemically doping the graphene nano- mesh.
The method of claim 1, wherein the substrate is a flexible transparent substrate. 14 Atty. Dkt. No. 2557S I -002414-US
The method of claim 1, wherein the transferring of the graphene nano- mesh onto the substrate comprises stacking a plurality of the graphene nano-mesh on the substrate.
A method of fabricating a graphene nano-mesh, the method comprising: forming a graphene layer on a catalyst layer; forming an oxide layer on at least one defect site of the graphene layer; removing the catalyst layer; transferring the graphene layer and the oxide layer onto a substrate; and forming a graphene nano-mesh including a plurality of openings by etching the oxide layer.
The method of claim 10, further comprising, after forming the oxide layer, forming a cover film on the graphene layer and the oxide layer.
The method of claim 10, wherein the forming of the graphene layer comprises forming the graphene layer via chemical vapor deposition.
The method of claim 10, wherein the forming of the oxide layer comprises forming the oxide layer via atomic layer deposition.
The method of claim 10, wherein the oxide layer comprises at least one of A 1 2 0 3, HfO X, TiO 2, SiO 2, and ZnO.
1 6. The method of claim 10, further comprising, after forming the graphene nano-mesh including the plurality of openings, chemically doping the graphene nano- mesh.
A method of fabricating a super capacitor, the method comprising: forming a graphene layer on a catalyst layer; forming an oxide layer on at least one defect site of the graphene layer; Atty. Dkt. No. 2557S I -002414-US removing the catalyst layer; and transferring the graphene layer and the oxide layer onto a substrate by stacking a plurality of the graphene layer and the oxide layer on the substrate.
The method of claim 17, wherein the oxide layer comprises at least one of A 1 2 0 3, HfO X,
Layer stacks claimed or described, ordered top of device to substrate.
graphene nano-mesh
super capacitor
Materials described outside the worked examples.
graphene
oxide layer
Additional fabrication and treatment steps described in the patent.
Related documents with shared materials, methods, properties, or citations.
Patent
Atlas literature
Patent
US 9,595,401Patent drawings and their descriptions. Click a drawing to enlarge it.
FIGS. 1 A to 1 F are cross-sectional views for sequentially describing a method of fabricating a graphene nano-mesh according to an example embodiment; [0027]
FIG. 2 is a cross- sectional view schematically illustrating a super capacitor formed by using the graphene nano- mesh that is fabricated according to the …
FIGS. 3A to 3F are cross-sectional views for sequentially describing a method of fabricating a graphene nano-mesh according to another example embodiment; and …
FIG. 4 is a cross-sectional view schematically illustrating a super capacitor formed according to another example embodiment.
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A method of fabricating a graphene nano-mesh, the method comprising: forming a graphene layer on a catalyst layer; forming an oxide layer on at least one defect site of the graphene layer; forming a graphene nano-mesh including a plurality of openings by etching the oxide layer; and transferring, after removing the catalyst layer, the graphene nano-mesh onto a substrate.
The method of claim 1, further comprising, after forming the graphene nano-mesh including the plurality of openings, forming a cover film on the graphene nano-mesh.
The method of claim 1, wherein the forming of the graphene layer comprises forming the graphene layer via chemical vapor deposition.
The method of claim 1, wherein the forming of the oxide layer comprises forming the oxide layer via atomic layer deposition.
The method of claim 1, wherein the oxide layer comprises at least one of A 1 2 0 3, HfO X, TiO 2, SiO 2, and ZnO.
The method of claim 1, further comprising, after forming the graphene nano-mesh including the plurality of openings, chemically doping the graphene nano- mesh.
The method of claim 1, wherein the substrate is a flexible transparent substrate. 14 Atty. Dkt. No. 2557S I -002414-US
The method of claim 1, wherein the transferring of the graphene nano- mesh onto the substrate comprises stacking a plurality of the graphene nano-mesh on the substrate.
A method of fabricating a graphene nano-mesh, the method comprising: forming a graphene layer on a catalyst layer; forming an oxide layer on at least one defect site of the graphene layer; removing the catalyst layer; transferring the graphene layer and the oxide layer onto a substrate; and forming a graphene nano-mesh including a plurality of openings by etching the oxide layer.
The method of claim 10, further comprising, after forming the oxide layer, forming a cover film on the graphene layer and the oxide layer.
The method of claim 10, wherein the forming of the graphene layer comprises forming the graphene layer via chemical vapor deposition.
The method of claim 10, wherein the forming of the oxide layer comprises forming the oxide layer via atomic layer deposition.
The method of claim 10, wherein the oxide layer comprises at least one of A 1 2 0 3, HfO X, TiO 2, SiO 2, and ZnO.
1 6. The method of claim 10, further comprising, after forming the graphene nano-mesh including the plurality of openings, chemically doping the graphene nano- mesh.
A method of fabricating a super capacitor, the method comprising: forming a graphene layer on a catalyst layer; forming an oxide layer on at least one defect site of the graphene layer; Atty. Dkt. No. 2557S I -002414-US removing the catalyst layer; and transferring the graphene layer and the oxide layer onto a substrate by stacking a plurality of the graphene layer and the oxide layer on the substrate.
The method of claim 17, wherein the oxide layer comprises at least one of A 1 2 0 3, HfO X,
Layer stacks claimed or described, ordered top of device to substrate.
graphene nano-mesh
super capacitor
Materials described outside the worked examples.
graphene
oxide layer
Additional fabrication and treatment steps described in the patent.
Related documents with shared materials, methods, properties, or citations.
Patent
Atlas literature
Patent
US 9,595,401Patent drawings and their descriptions. Click a drawing to enlarge it.
FIGS. 1 A to 1 F are cross-sectional views for sequentially describing a method of fabricating a graphene nano-mesh according to an example embodiment; [0027]
FIG. 2 is a cross- sectional view schematically illustrating a super capacitor formed by using the graphene nano- mesh that is fabricated according to the …
FIGS. 3A to 3F are cross-sectional views for sequentially describing a method of fabricating a graphene nano-mesh according to another example embodiment; and …
FIG. 4 is a cross-sectional view schematically illustrating a super capacitor formed according to another example embodiment.
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A method of fabricating a graphene nano-mesh, the method comprising: forming a graphene layer on a catalyst layer; forming an oxide layer on at least one defect site of the graphene layer; forming a graphene nano-mesh including a plurality of openings by etching the oxide layer; and transferring, after removing the catalyst layer, the graphene nano-mesh onto a substrate.
The method of claim 1, further comprising, after forming the graphene nano-mesh including the plurality of openings, forming a cover film on the graphene nano-mesh.
The method of claim 1, wherein the forming of the graphene layer comprises forming the graphene layer via chemical vapor deposition.
The method of claim 1, wherein the forming of the oxide layer comprises forming the oxide layer via atomic layer deposition.
The method of claim 1, wherein the oxide layer comprises at least one of A 1 2 0 3, HfO X, TiO 2, SiO 2, and ZnO.
The method of claim 1, further comprising, after forming the graphene nano-mesh including the plurality of openings, chemically doping the graphene nano- mesh.
The method of claim 1, wherein the substrate is a flexible transparent substrate. 14 Atty. Dkt. No. 2557S I -002414-US
The method of claim 1, wherein the transferring of the graphene nano- mesh onto the substrate comprises stacking a plurality of the graphene nano-mesh on the substrate.
A method of fabricating a graphene nano-mesh, the method comprising: forming a graphene layer on a catalyst layer; forming an oxide layer on at least one defect site of the graphene layer; removing the catalyst layer; transferring the graphene layer and the oxide layer onto a substrate; and forming a graphene nano-mesh including a plurality of openings by etching the oxide layer.
The method of claim 10, further comprising, after forming the oxide layer, forming a cover film on the graphene layer and the oxide layer.
The method of claim 10, wherein the forming of the graphene layer comprises forming the graphene layer via chemical vapor deposition.
The method of claim 10, wherein the forming of the oxide layer comprises forming the oxide layer via atomic layer deposition.
The method of claim 10, wherein the oxide layer comprises at least one of A 1 2 0 3, HfO X, TiO 2, SiO 2, and ZnO.
1 6. The method of claim 10, further comprising, after forming the graphene nano-mesh including the plurality of openings, chemically doping the graphene nano- mesh.
A method of fabricating a super capacitor, the method comprising: forming a graphene layer on a catalyst layer; forming an oxide layer on at least one defect site of the graphene layer; Atty. Dkt. No. 2557S I -002414-US removing the catalyst layer; and transferring the graphene layer and the oxide layer onto a substrate by stacking a plurality of the graphene layer and the oxide layer on the substrate.
The method of claim 17, wherein the oxide layer comprises at least one of A 1 2 0 3, HfO X,
Layer stacks claimed or described, ordered top of device to substrate.
graphene nano-mesh
super capacitor
Materials described outside the worked examples.
graphene
oxide layer
Additional fabrication and treatment steps described in the patent.
Related documents with shared materials, methods, properties, or citations.
Patent
Atlas literature
Patent
US 9,595,401Patent drawings and their descriptions. Click a drawing to enlarge it.
FIGS. 1 A to 1 F are cross-sectional views for sequentially describing a method of fabricating a graphene nano-mesh according to an example embodiment; [0027]
FIG. 2 is a cross- sectional view schematically illustrating a super capacitor formed by using the graphene nano- mesh that is fabricated according to the …
FIGS. 3A to 3F are cross-sectional views for sequentially describing a method of fabricating a graphene nano-mesh according to another example embodiment; and …
FIG. 4 is a cross-sectional view schematically illustrating a super capacitor formed according to another example embodiment.
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A method of fabricating a graphene nano-mesh, the method comprising: forming a graphene layer on a catalyst layer; forming an oxide layer on at least one defect site of the graphene layer; forming a graphene nano-mesh including a plurality of openings by etching the oxide layer; and transferring, after removing the catalyst layer, the graphene nano-mesh onto a substrate.
The method of claim 1, further comprising, after forming the graphene nano-mesh including the plurality of openings, forming a cover film on the graphene nano-mesh.
The method of claim 1, wherein the forming of the graphene layer comprises forming the graphene layer via chemical vapor deposition.
The method of claim 1, wherein the forming of the oxide layer comprises forming the oxide layer via atomic layer deposition.
The method of claim 1, wherein the oxide layer comprises at least one of A 1 2 0 3, HfO X, TiO 2, SiO 2, and ZnO.
The method of claim 1, further comprising, after forming the graphene nano-mesh including the plurality of openings, chemically doping the graphene nano- mesh.
The method of claim 1, wherein the substrate is a flexible transparent substrate. 14 Atty. Dkt. No. 2557S I -002414-US
The method of claim 1, wherein the transferring of the graphene nano- mesh onto the substrate comprises stacking a plurality of the graphene nano-mesh on the substrate.
A method of fabricating a graphene nano-mesh, the method comprising: forming a graphene layer on a catalyst layer; forming an oxide layer on at least one defect site of the graphene layer; removing the catalyst layer; transferring the graphene layer and the oxide layer onto a substrate; and forming a graphene nano-mesh including a plurality of openings by etching the oxide layer.
The method of claim 10, further comprising, after forming the oxide layer, forming a cover film on the graphene layer and the oxide layer.
The method of claim 10, wherein the forming of the graphene layer comprises forming the graphene layer via chemical vapor deposition.
The method of claim 10, wherein the forming of the oxide layer comprises forming the oxide layer via atomic layer deposition.
The method of claim 10, wherein the oxide layer comprises at least one of A 1 2 0 3, HfO X, TiO 2, SiO 2, and ZnO.
1 6. The method of claim 10, further comprising, after forming the graphene nano-mesh including the plurality of openings, chemically doping the graphene nano- mesh.
A method of fabricating a super capacitor, the method comprising: forming a graphene layer on a catalyst layer; forming an oxide layer on at least one defect site of the graphene layer; Atty. Dkt. No. 2557S I -002414-US removing the catalyst layer; and transferring the graphene layer and the oxide layer onto a substrate by stacking a plurality of the graphene layer and the oxide layer on the substrate.
The method of claim 17, wherein the oxide layer comprises at least one of A 1 2 0 3, HfO X,
Layer stacks claimed or described, ordered top of device to substrate.
graphene nano-mesh
super capacitor
Materials described outside the worked examples.
graphene
oxide layer
Additional fabrication and treatment steps described in the patent.
Related documents with shared materials, methods, properties, or citations.
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