Patent
US 9,184,236METHOD OF TRANSFERRING GRAPHENE USING TRENCH AND SUBSTRATE FOR RECEIVING GRAPHENE
David SEO
US
Copyright © 2026 Matter42. All rights reserved.
Patent
Atlas literature
Patent
US 9,184,236Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1 is a plan view of a substrate for receiving graphene in a method of transferring graphene, according to an example embodiment; [0017]
FIG. 2 is a cross-sectional view taken along the line I I-II ' of
FIG. 3 is a plan view of a substrate for receiving graphene as a modified version of the substrate for receiving graphene of
FIG. 4 is a cross-sectional view of a graphene structure including graphene to be transferred, according to an example embodiment; [0020]
FIG. 5 is a cross-sectional view of a graphene structure disposed on a substrate; and [0021]
FIG. 6 is a schematic drawing showing an operation of discharging an adhesive liquid disposed on graphene to trenches by using a pressing device.
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A method of transferring graphene, the method comprising: patterning an upper su r face of a substrate to form at least one trench therein; providing a graphene layer on the substrate, the graphene layer including an adhesive liquid the r een only on a surface of the gra p hene layer facing the substrate, wherein the providing sequentially stacks a protective layer and a supporting layer on the graphene layer; pressing the graphene layer with respect to the substrate by sliding a roller on the supporting layer to press the adhesive liquid into the plurality of trenches; and removing the adhesive liquid by drying the substrate.
The method of claim 1, wherein the adhesive liquid includes at least one selected from a group consisting of deionized (DI) water, isopropyl alcohol (IPA), ethanol, methanol, and mineral oil.
The method of claim 1, wherein the protective layer includes at least one material selected from a group consisting of poly methyl methacrylate (PMMA), photoresist (PR), electron resist (ER), silicon oxide (SiOx), and aluminum oxide (A l Ox).
The method of claim 1, wherein the supporting layer includes at least one material selected from a group consisting of an adhesive tape, a thermal release tape, and an ultraviolet (UV) tape. previously presented
The method of claim 1, wherein the substrate includes at least one selected from a group consisting of a silicon-on-insulator (SO I) substrate, a plastic substrate, and a glass substrate. 14-21..
. canceled
. canceled
Layer stacks claimed or described, ordered top of device to substrate.
graphene-on-substrate structure with trenches
Materials described outside the worked examples.
graphene
adhesive liquid
Additional fabrication and treatment steps described in the patent.
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
Thickness | 0.1–10 cm | — |
Thickness | 0.3–2 nm |
Related documents with shared materials, methods, properties, or citations.
Patent
Atlas literature
Patent
US 9,184,236Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1 is a plan view of a substrate for receiving graphene in a method of transferring graphene, according to an example embodiment; [0017]
FIG. 2 is a cross-sectional view taken along the line I I-II ' of
FIG. 3 is a plan view of a substrate for receiving graphene as a modified version of the substrate for receiving graphene of
FIG. 4 is a cross-sectional view of a graphene structure including graphene to be transferred, according to an example embodiment; [0020]
FIG. 5 is a cross-sectional view of a graphene structure disposed on a substrate; and [0021]
FIG. 6 is a schematic drawing showing an operation of discharging an adhesive liquid disposed on graphene to trenches by using a pressing device.
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A method of transferring graphene, the method comprising: patterning an upper su r face of a substrate to form at least one trench therein; providing a graphene layer on the substrate, the graphene layer including an adhesive liquid the r een only on a surface of the gra p hene layer facing the substrate, wherein the providing sequentially stacks a protective layer and a supporting layer on the graphene layer; pressing the graphene layer with respect to the substrate by sliding a roller on the supporting layer to press the adhesive liquid into the plurality of trenches; and removing the adhesive liquid by drying the substrate.
The method of claim 1, wherein the adhesive liquid includes at least one selected from a group consisting of deionized (DI) water, isopropyl alcohol (IPA), ethanol, methanol, and mineral oil.
The method of claim 1, wherein the protective layer includes at least one material selected from a group consisting of poly methyl methacrylate (PMMA), photoresist (PR), electron resist (ER), silicon oxide (SiOx), and aluminum oxide (A l Ox).
The method of claim 1, wherein the supporting layer includes at least one material selected from a group consisting of an adhesive tape, a thermal release tape, and an ultraviolet (UV) tape. previously presented
The method of claim 1, wherein the substrate includes at least one selected from a group consisting of a silicon-on-insulator (SO I) substrate, a plastic substrate, and a glass substrate. 14-21..
. canceled
. canceled
Layer stacks claimed or described, ordered top of device to substrate.
graphene-on-substrate structure with trenches
Materials described outside the worked examples.
graphene
adhesive liquid
Additional fabrication and treatment steps described in the patent.
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
Thickness | 0.1–10 cm | — |
Thickness | 0.3–2 nm |
Related documents with shared materials, methods, properties, or citations.
Patent
Atlas literature
Patent
US 9,184,236Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1 is a plan view of a substrate for receiving graphene in a method of transferring graphene, according to an example embodiment; [0017]
FIG. 2 is a cross-sectional view taken along the line I I-II ' of
FIG. 3 is a plan view of a substrate for receiving graphene as a modified version of the substrate for receiving graphene of
FIG. 4 is a cross-sectional view of a graphene structure including graphene to be transferred, according to an example embodiment; [0020]
FIG. 5 is a cross-sectional view of a graphene structure disposed on a substrate; and [0021]
FIG. 6 is a schematic drawing showing an operation of discharging an adhesive liquid disposed on graphene to trenches by using a pressing device.
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A method of transferring graphene, the method comprising: patterning an upper su r face of a substrate to form at least one trench therein; providing a graphene layer on the substrate, the graphene layer including an adhesive liquid the r een only on a surface of the gra p hene layer facing the substrate, wherein the providing sequentially stacks a protective layer and a supporting layer on the graphene layer; pressing the graphene layer with respect to the substrate by sliding a roller on the supporting layer to press the adhesive liquid into the plurality of trenches; and removing the adhesive liquid by drying the substrate.
The method of claim 1, wherein the adhesive liquid includes at least one selected from a group consisting of deionized (DI) water, isopropyl alcohol (IPA), ethanol, methanol, and mineral oil.
The method of claim 1, wherein the protective layer includes at least one material selected from a group consisting of poly methyl methacrylate (PMMA), photoresist (PR), electron resist (ER), silicon oxide (SiOx), and aluminum oxide (A l Ox).
The method of claim 1, wherein the supporting layer includes at least one material selected from a group consisting of an adhesive tape, a thermal release tape, and an ultraviolet (UV) tape. previously presented
The method of claim 1, wherein the substrate includes at least one selected from a group consisting of a silicon-on-insulator (SO I) substrate, a plastic substrate, and a glass substrate. 14-21..
. canceled
. canceled
Layer stacks claimed or described, ordered top of device to substrate.
graphene-on-substrate structure with trenches
Materials described outside the worked examples.
graphene
adhesive liquid
Additional fabrication and treatment steps described in the patent.
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
Thickness | 0.1–10 cm | — |
Thickness | 0.3–2 nm |
Related documents with shared materials, methods, properties, or citations.
Patent
Atlas literature
Patent
US 9,184,236Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1 is a plan view of a substrate for receiving graphene in a method of transferring graphene, according to an example embodiment; [0017]
FIG. 2 is a cross-sectional view taken along the line I I-II ' of
FIG. 3 is a plan view of a substrate for receiving graphene as a modified version of the substrate for receiving graphene of
FIG. 4 is a cross-sectional view of a graphene structure including graphene to be transferred, according to an example embodiment; [0020]
FIG. 5 is a cross-sectional view of a graphene structure disposed on a substrate; and [0021]
FIG. 6 is a schematic drawing showing an operation of discharging an adhesive liquid disposed on graphene to trenches by using a pressing device.
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A method of transferring graphene, the method comprising: patterning an upper su r face of a substrate to form at least one trench therein; providing a graphene layer on the substrate, the graphene layer including an adhesive liquid the r een only on a surface of the gra p hene layer facing the substrate, wherein the providing sequentially stacks a protective layer and a supporting layer on the graphene layer; pressing the graphene layer with respect to the substrate by sliding a roller on the supporting layer to press the adhesive liquid into the plurality of trenches; and removing the adhesive liquid by drying the substrate.
The method of claim 1, wherein the adhesive liquid includes at least one selected from a group consisting of deionized (DI) water, isopropyl alcohol (IPA), ethanol, methanol, and mineral oil.
The method of claim 1, wherein the protective layer includes at least one material selected from a group consisting of poly methyl methacrylate (PMMA), photoresist (PR), electron resist (ER), silicon oxide (SiOx), and aluminum oxide (A l Ox).
The method of claim 1, wherein the supporting layer includes at least one material selected from a group consisting of an adhesive tape, a thermal release tape, and an ultraviolet (UV) tape. previously presented
The method of claim 1, wherein the substrate includes at least one selected from a group consisting of a silicon-on-insulator (SO I) substrate, a plastic substrate, and a glass substrate. 14-21..
. canceled
. canceled
Layer stacks claimed or described, ordered top of device to substrate.
graphene-on-substrate structure with trenches
Materials described outside the worked examples.
graphene
adhesive liquid
Additional fabrication and treatment steps described in the patent.
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
Thickness | 0.1–10 cm | — |
Thickness | 0.3–2 nm |
Related documents with shared materials, methods, properties, or citations.
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Methods of manufacturing and transferring larger-sized graphene
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Methods of manufacturing and transferring larger-sized graphene
supporting layer material
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CVD graphene
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