METHODS OF MANUFACTURING AND TRANSFERRING LARGER-SIZED GRAPHENE

Yun-sung Woo

Patent

Atlas literature

Patent

US 9,108,848

METHODS OF MANUFACTURING AND TRANSFERRING LARGER-SIZED GRAPHENE

Yun-sung Woo

Drawings

Patent drawings and their descriptions. Click a drawing to enlarge it.

FIG. 1

FIGS. 1-7 are cross-sectional views illustrating a method of manufacturing and transferring a larger-sized graphene layer according to example embodiments; and …

FIG. 2

FIG. 2, a protection layer 130 may be formed on the graphene layer 120. The protection layer 130 may be used to protect the graphene layer 120 during …

FIG. 3

FIG. 3, the substrate 100 may be separated from the catalyst layer 110 to form an exfoliated layer A. When the substrate 100 is formed of silicon, a lower …

FIG. 4

FIG. 4, the catalyst layer 110 may be removed from the exfoliated layer A of

FIG. 5

FIGS. 5 and 6, the resultant structure may be arranged on a transferring substrate 150 so that the graphene layer 120 contacts the transferring substrate 150. …

FIG. 6

FIG. 7

FIG. 7, the adhesive layer 140 and the protection layer 130 may be sequentially removed using etching, ion milling, and/or thermal treatment depending on the …

FIG. 8

FIGS. 8-13 are views schematically illustrating another method of manufacturing larger-sized graphene according to example embodiments.

FIG. 9

FIG. 9, an adhesive tape 240 may be adhered to the protection layer 130 disposed on the substrate holder 210. The adhesive tape 240 may be drawn out while …

FIG. 10

FIG. 10, while supported by the adhesive tape 240, the ﬁrst roll 221, and the second roll 222, the stack 250 may separated from the substrate holder 210. …

FIG. 11

FIG. 11, a lower surface of the silicon substrate 100 may be cut to form a cutting line. Consequently, when a hydrophilic liquid contacts the cutting line, the …

FIG. 12

FIG. 12, a non-adhesive tape 260 may be adhered to the adhesive tape 240 so as to cover the graphene layer 120. The non-adhesive tape 260 may be drawn out from …

FIG. 13

FIG. 13, it should be understood that the graphene layer 120, the protection layer 130, the adhesive tape 240, and the non-adhesive tape 260 have been …

Claims

Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.

3 independent · 15 dependent

1
IndependentCprotection layer materialadhesive layer materialcontact solution layer material
Atty. Dkt. No. 2557S I-00 1434-US U.S. Application No. 12/923,428 AMENDMENTS TO THE CLAIMS 1. A method of transferring a larger-sized graphene, comprising: forming a graphene layer on a substrate; sequentially forming a protection layer and an adhesive layer on the graphene layer; removing the substrate; disposing the graphene layer on a transferring substrate with a contact solution layer; and removing the adhesive layer and the protection layer, wherein the disposing includes coating the contact solution layer on a surface of the transferring substrate, the surface facing the graphene layer; and sliding the graphene layer onto the transferring substrate via the contact solution layer.
1. 2
  Dependent← claim 1catalyst layer material
  The method of claim 1, further comprising: forming a catalyst layer on the substrate prior to forming the graphene layer.
2. 3
  Dependent← claim 1protection layer material
  The method of claim 1, wherein the protection layer includes a material selected from the group consisting of poly methyl methacrylate (PMMA), photoresist (PR), electron resist (ER), SiO X, and A lOX.
3. 4
  Dependent← claim 1adhesive layer material
  The method of claim 1, wherein the adhesive layer includes a material selected from the group consisting of adhesive tape, glue, epoxy resin, thermal release tape, and water-soluble tape.
4. 8
  Dependent← claim 1
  The method of claim 1, wherein removing the substrate includes etching the substrate.
5. 10
  Dependent← claim 1contact solution layer material
  The method of claim 1, wherein the contact solution layer includes a material selected from the group consisti n g of deionized water, isopropyl alcohol, ethanol, methanol, and mineral oil.
6. 11
  Dependent← claim 1
  The method of claim 1, further comprising: evaporating the contact solution layer by heating the transferring substrate.
7. 18
  Dependent← claim 1hydrophilic liquid
  The method of claim 1, further comprising: cutting an exposed surface of the substrate to form a cutting line after forming the protection layer and the adhesive layer on the graphene. layer; and contacting a hydrophi l ic liquid to the cutting line.
8. 21
  Dependent← claim 1C
  The method of claim 1, wherein the graphene layer is formed on the substrate by chemical vapor deposition.
9. 22
  Dependent← claim 1
  The method of claim 1, wherein a majority of an upper surface of the transferring substrate is coated with the contact solution layer.
10. 23
  Dependent← claim 1
  The method of claim 1, wherein the graphene layer contacts the contact solution layer on the transferring substrate before contacting the transferring substrate.
9
Independent
canceled
24
Independent
5 canceled

Materials

Materials described outside the worked examples.

graphene layer

Transferred Material

protection layer material

Protection Layer

adhesive layer material

Adhesive Layer

Process steps

Additional fabrication and treatment steps described in the patent.

Cvd Growth

Step 1

Process details

method:chemical vapor deposition (CVD)

substrate:catalyst layer (Ni, Fe, Co, Pt, or Ru) on Si substrate

precursors:CH4, C₂H2, C₂H4, CO

graphene layers:single layer or multi-layer (e.g., bi-layer)

temperature c max:

Reported properties

Performance values and ranges asserted in the specification or claims.

Property	Value	Material
Thickness	100–300 nm	—
Thickness

Why these are connected

Related documents with shared materials, methods, properties, or citations.

METHODS OF MANUFACTURING AND TRANSFERRING LARGER-SIZED GRAPHENE | Matter42 Literature