Electrically Conductive Laminate Structures, Electrical Interconnects, And Methods Of Forming Electrical Interconnects

Gurtej S. Sandhu

Patent details

Patent

US 8,946,903

Electrically Conductive Laminate Structures, Electrical Interconnects, And Methods Of Forming Electrical Interconnects

Gurtej S. Sandhu

Drawings

Patent drawings and their descriptions. Click a drawing to enlarge it.

FIG. 1

FIGS. 1-7 are diagrammatic cross-sectional views of a portion of a semiconductor construction at various processing stages of an example embodiment. [0006]

FIG. 2

FIG. 2, a material 18 is formed across insulative material 14. The material 18 lines trench 16, and thus forms a second trench 20 within the trench 16. …

FIG. 3

FIG. 3, graphene 22 is formed over non-graphene material 18. Graphene 22 lines trench 20, and thus forms a third trench 24 within the second trench 20. [0026] …

FIG. 4

FIG. 4, a non-graphene material 26 is formed over graphene material 22. The non-graphene material 26 lines trench 24, and thus forms a fourth trench 28 within …

FIG. 5

FIG. 5, graphene 30 is formed over non-graphene material 26. Graphene 30 lines the fourth trench 28, and thus forms a ﬁfth trench 32 within the fourth trench. …

FIG. 6

FIG. 6, a non-graphene material 34 is formed over graphene material 30. The non-graphene material 34 ﬁlls the trench 32 in the shown embodiment. In other …

FIG. 7

FIG. 7. The cross-section of

FIG. 8

process tool top view

FIG. 8 is a diagrammatic top view of the semiconductor construction of

FIG. 9

FIG. 9. The cross-section of

FIG. 10

process tool top view

FIGS. 10 and 11 are a diagrammatic cross-sectional view and a diagrammatic top view, respectively, of the semiconductor construction of

FIG. 11

FIG. 11. [0009]

FIG. 12

process tool top view

FIGS. 12 and 13 are a diagrammatic cross-sectional view and a diagrammatic top view, respectively, of the semiconductor construction of

FIG. 13

FIG. 13. [0010]

FIG. 14

process tool top view

FIGS. 14 and 15 are a diagrammatic cross-sectional view and a diagrammatic top view, respectively, of the semiconductor construction of

FIG. 15

FIG. 15. [0011]

FIG. 16

process tool top view

FIGS. 16 and 17 are a diagrammatic cross-sectional view and a diagrammatic top view, respectively, of the semiconductor construction of

FIG. 17

FIG. 17. [0012]

FIG. 18

FIGS. 18 and 19 are diagrammatic cross-sectional views of a portion of a semiconductor construction at various processing stages of another example embodiment. …

FIG. 19

FIG. 19 shows the construction of

FIG. 20

process tool top view

FIGS. 20 and 21 are a cross-sectional side view and a diagrammatic top view of the semiconductor construction of

FIG. 21

FIG. 21. [0014]

FIG. 22

process tool top view

FIGS. 22-24 are a diagrammatic top view and a pair of cross-sectional side views of the semiconductor construction of

FIG. 23

FIG. 23 is along the lines 23-23 of

FIG. 24

FIG. 24 is along the lines 24-24 of

FIG. 25

process tool top view

FIGS. 25-27 are a diagrammatic top view and a pair of cross-sectional side views of the semiconductor construction of

FIG. 26

FIG. 26 is along the lines 26-26 of

FIG. 27

FIG. 27 is along the lines 27-27 of

FIG. 28

process tool top view

FIGS. 28-30 are a diagrammatic top view and a pair of cross-sectional side views of the semiconductor construction of

FIG. 29

FIG. 29 is along the lines 29-29 of

FIG. 30

FIG. 30 in accordance with an example embodiment.

FIG. 31

apparatus side view

FIG. 31 shows a diagrammatic cross-sectional side view of the construction of

Claims

Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.

34 independent · 3 dependent

1
Independentelectrically conductive non-graphene materialgraphene monolayerelectrically insulative non-graphene materialelectrically conductive laminate structure (claim 1)
(cu rre n tly am ended): A n electrically conductive laminate str uctu re c om prising: a ﬁ rs t n o n-gr a phene layer c o nﬁg u red as an upw ardly- open ing ﬁ rst conta iner sh ape; the ﬁ rs t n o n-gr a phene layer being e lectrically c ondu cti ve a nd c o ntin uous alo ng the ﬁ rs t c onta iner shape; a t least o ne gr a phene m onola yer within the ﬁ rs t c onta iner shape and directly against the ﬁrst no n-gr a phene layer, the gr a phene monola yer being co nﬁg u red as an u pwardly- o pening sec o nd c o ntainer shape; and a sec ond no n-gr a phene layer within the sec on d c o ntainer shape and directly against the gr a phene monolayer the second non-graphene layer bein elec tri call insul ati v e and c o ntin uous eangthe ﬁrst container shape.
2
Independentgraphene monolayerelectrically conductive laminate structure (claim 1)
C lai m 2 (pre viou sly presented): T he laminate str uctu re of cla im 1 fu rther c om prising a plurality of gr a phene m ono layers within the ﬁrst co ntainer shape and directly against the ﬁrst n o n-gr a phene layer.
3
Independentgraphene monolayerelectrically conductive laminate structure (claim 1)
C lai m 3 (pre vio usly presented): T he la m om 2 to 5 gr a phene monolayers within the ﬁrst on- graphene layer. C lai m 4 -6 (cancelled).
4
Independent
canceled
5
Independent
canceled
6
Independent
canceled
7
Independentelectrically conductive non-graphene materialelectrically conductive laminate structure (claim 1)
C lai m 7 (previous ly pr esented): Th e laminate the n on -gr aphene laye rs com pri ses one or more
8
Independentgraphene monolayerelectrically conductive laminate structure (claim 1)
(previous ly pr esented): Th e laminate structure gr aphene laye rs co mpri ses one o r b o th of
9
Independent
canceled
1. 31
  Dependent← claim 9, claim 10, claim 11, claim 12, claim 13, claim 14, claim 15, claim 16, claim 17, claim 18, claim 19, claim 20, claim 21, claim 22, claim 23, claim 24, claim 25, claim 26, claim 27, claim 28, claim 29, claim 30CuNi
  canceled inate structure of claim 1 fu rther c om prising fr c o ntainer shape a nd directly against the ﬁrst n str ucture of claim 1 wherein at least one o f met als. of cla im 1 wherein at least one o f the non-copper and nickel. Claims 9-34 (cancele d).
10
Independent
canceled
11
Independent
canceled
12
Independent
canceled
13
Independent
canceled
14
Independent
canceled
15
Independent
canceled
16
Independent
canceled
17
Independent
canceled
18
Independent
canceled
19
Independent
canceled
20
Independent
canceled
21
Independent
canceled
22
Independent
canceled
23
Independent
canceled
24
Independent
canceled
25
Independent
canceled
26
Independent
canceled
27
Independent
canceled
28
Independent
canceled
29
Independent
canceled
30
Independent
canceled
32
Independent
canceled
33
Independent
canceled
34
Independent
canceled
35
Independentelectrically conductive non-graphene materialgraphene monolayerelectrically insulative non-graphene materialelectrically conductive laminate structure (claim 35) with two graphene monolayers
C lai m 35: A n elec tri ca lly conductive laminate structure co mpri sing: a ﬁ rst non -gr aphene layer con ﬁg u red as an upw ardly- open ing ﬁ rst container shape; the ﬁ rst non -gr aphene layer b eing continuous alo ng the ﬁrst con tai ner s hap e; a ﬁ rs t graphene monolayer within the ﬁ rst con tai ner s hap e an d dir ec tly agai ns t the ﬁ rst non -graphene layer, the ﬁ rs t graphene monolayer being con ﬁg ure d as an upw ardly -opening second con tai ner s hap e; a second non -graphene layer w ithi n the seco nd con tai ner s hap e and dir ec tly against th e ﬁ rs t graphene mono lay e r; a nd a secon d graphene mono lay er w ithi n the ﬁ rst con tai ne r shape a nd directly against th e seco nd non -graphen e layer, the s eco nd graphene monolayer being con ﬁgured as an upw ardly- openin g se cond con tainer shape.
1. 36
  Dependent← claim 35electrically conductive non-graphene materialelectrically conductive laminate structure (claim 35) with two graphene monolayers
  Th e laminate structure of claim 35 wherein both non- graphene layers are elec tri ca lly conduc tiv e.
2. 37
  Dependent← claim 35electrically insulative non-graphene materialelectrically conductive laminate structure (claim 35) with two graphene monolayers
  The laminate structure of claim 35 where in b o th n on- graphene layers are elec tri cally insulative.

Device structures

Layer stacks claimed or described, ordered top of device to substrate.

electrically conductive laminate structure (claim 1)

electrically insulative non-graphene materialsecond non graphene layer insulative

graphene monolayergraphene monolayer container

electrically conductive non-graphene materialfirst non graphene layer conductive container

electrically conductive laminate structure (claim 35) with two graphene monolayers

graphene monolayersecond graphene monolayer container

electrically conductive non-graphene material

Materials

Materials described outside the worked examples.

electrically conductive non-graphene material

Conductive Non Graphene Layer

graphene monolayer

Graphene Layer

electrically insulative non-graphene material

Process steps

Additional fabrication and treatment steps described in the patent.

Cvd Growth

Step 1

Process details

method:chemical vapor deposition or atomic layer deposition

substrate:metallic non-graphene material (copper or nickel)

Materials:graphene monolayer

Why these are connected

Related documents with shared materials, methods, properties, or citations.

Electrically Conductive Laminate Structures, Electrical Interconnects, And Methods Of Forming Electrical Interconnects | Matter42 Literature