Patent
US 10,421,665PROCESS FOR THE FORMATION OF A GRAPHENE MEMBRANE COMPONENT, GRAPHENE MEMBRANE COMPONENT, MICROPHONE AND HALL-EFFECT SENSOR
Guenther Ruhl
US
Copyright © 2026 Matter42. All rights reserved.
Patent
Atlas literature
Patent
US 10,421,665Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A graphene membrane component comprising: a supportive substrate having a cut-out with an opening at a surface of the supportive substrate, wherein the supportive substrate comprises an adhesive layer and a bulk region; and a graphene membrane arranged on the surface of the supportive substrate, wherein the graphene membrane extends across the cut-out of the supportive substrate, a first portion of the graphene membrane is arranged on the surface of the supportive substrate, a second portion of the graphene membrane is arranged at the opening of the cut-out, an energy of adhesion between the adhesive layer and the graphene membrane is greater than an energy of adhesion between the bulk region and the graphene membrane, the second portion of the graphene membrane is permanently in a tensioned condition in an operating temperature range of the graphene membrane component, and a third portion of the graphene membrane inherently adheres on a portion of a wall of the cut-out formed by the adhesive layer. Original
The graphene membrane component according to claim 1, wherein the third portion of the graphene membrane lies between the first portion of the graphene membrane and the second portion of the graphene membrane. Original
The graphene membrane component according to claim 1, wherein the energy of adhesion between the graphene membrane and a surface of the bulk region of the supportive substrate within the cut-out is less than 200 mJ per m 2. Original
The graphene membrane component according to claim 1, wherein a number of atomic graphene layers in the graphene membrane is less than 11. Original
A microelectromechanical systems (MEMS) microphone comprising the graphene membrane component according to claim 1. Original
The method of claim 1 6, wherein the using the graphene membrane component as the pressure sensor comprises using the graphene membrane component as a microphone. Original
A microphone or Hall-effect sensor with the graphene membrane component according to claim
The Hall-effect sensor of claim 6, wherein the graphene membrane component is arranged on the supportive substrate and the Hall-effect sensor further comprises a plurality of contacts disposed on the supportive substrate. Original
The Hall-effect sensor of claim 6, wherein the graphene membrane component is circular. Original
A method of forming a graphene membrane component the method comprising: forming a supportive substrate having a cut-out with an opening at a surface of the supportive substrate, wherein the supportive substrate comprises an adhesive layer and a bulk region; and forming a graphene membrane arranged on the surface of the supportive substrate, wherein the graphene membrane extends across the cut-out of the supportive substrate, a first portion of the graphene membrane is arranged on the surface of the supportive substrate, a second portion of the graphene membrane is arranged at the opening of the cut-out, an energy of adhesion between the adhesive layer and the graphene membrane is greater than an energy of adhesion between the bulk region and the graphene membrane, the second portion of the graphene membrane is permanently in a tensioned condition in an operating temperature range of the graphene membrane component, and a third portion of the graphene membrane inherently adheres on a portion of a wall of the cut-out formed by the adhesive layer. Original
The method of claim 10, wherein the third portion of the graphene membrane lies between the first portion of the graphene membrane and the second portion of the graphene membrane. Original
The method of claim 10, wherein the energy of adhesion between the graphene membrane and a surface of the bulk region of the supportive substrate within the cut- out is less than 200 mJ per m 2. Original
The method of claim 10, wherein a number of atomic graphene layers in the graphene membrane is less than 11. Original
A method of using a graphene membrane component comprising a supportive substrate having a cut-out with an opening at a surface of the supportive substrate, wherein the supportive substrate comprises an adhesive layer and a bulk region; and a graphene membrane arranged on the surface of the supportive substrate, wherein the graphene membrane extends across the cut-out of the supportive substrate, a first portion of the graphene membrane is arranged on the surface of the supportive substrate, a second portion of the graphene membrane is arranged at the opening of the cut-out, an energy of adhesion between the adhesive layer and the graphene membrane is greater than an energy of adhesion between the bulk region and the graphene membrane, the second portion of the graphene membrane is permanently in a tensioned condition in an operating temperature range of the graphene membrane component, and a third portion of the graphene membrane inherently adheres on a portion of a wall of the cut-out formed by the adhesive layer, the method comprising: transducing a pressure using the graphene membrane component. Original
The method of claim 15, wherein transducing the pressure comprises using the graphene membrane component as a pressure sensor. Original
1 8. The method of claim 15, wherein transducing the pressure comprises using the graphene membrane component as a loudspeaker. Original
Layer stacks claimed or described, ordered top of device to substrate.
graphene membrane component
MEMS microphone
Hall-effect sensor
Materials described outside the worked examples.
graphene membrane
adhesive layer
bulk region of supportive substrate
Additional fabrication and treatment steps described in the patent.
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
energy of adhesion between graphene membrane and adhesive layer | >250 mJ/m² | graphene membraneadhesive layer |
energy of adhesion between graphene membrane and bulk region surface within cut-out |
Related documents with shared materials, methods, properties, or citations.
Patent
Atlas literature
Patent
US 10,421,665Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A graphene membrane component comprising: a supportive substrate having a cut-out with an opening at a surface of the supportive substrate, wherein the supportive substrate comprises an adhesive layer and a bulk region; and a graphene membrane arranged on the surface of the supportive substrate, wherein the graphene membrane extends across the cut-out of the supportive substrate, a first portion of the graphene membrane is arranged on the surface of the supportive substrate, a second portion of the graphene membrane is arranged at the opening of the cut-out, an energy of adhesion between the adhesive layer and the graphene membrane is greater than an energy of adhesion between the bulk region and the graphene membrane, the second portion of the graphene membrane is permanently in a tensioned condition in an operating temperature range of the graphene membrane component, and a third portion of the graphene membrane inherently adheres on a portion of a wall of the cut-out formed by the adhesive layer. Original
The graphene membrane component according to claim 1, wherein the third portion of the graphene membrane lies between the first portion of the graphene membrane and the second portion of the graphene membrane. Original
The graphene membrane component according to claim 1, wherein the energy of adhesion between the graphene membrane and a surface of the bulk region of the supportive substrate within the cut-out is less than 200 mJ per m 2. Original
The graphene membrane component according to claim 1, wherein a number of atomic graphene layers in the graphene membrane is less than 11. Original
A microelectromechanical systems (MEMS) microphone comprising the graphene membrane component according to claim 1. Original
The method of claim 1 6, wherein the using the graphene membrane component as the pressure sensor comprises using the graphene membrane component as a microphone. Original
A microphone or Hall-effect sensor with the graphene membrane component according to claim
The Hall-effect sensor of claim 6, wherein the graphene membrane component is arranged on the supportive substrate and the Hall-effect sensor further comprises a plurality of contacts disposed on the supportive substrate. Original
The Hall-effect sensor of claim 6, wherein the graphene membrane component is circular. Original
A method of forming a graphene membrane component the method comprising: forming a supportive substrate having a cut-out with an opening at a surface of the supportive substrate, wherein the supportive substrate comprises an adhesive layer and a bulk region; and forming a graphene membrane arranged on the surface of the supportive substrate, wherein the graphene membrane extends across the cut-out of the supportive substrate, a first portion of the graphene membrane is arranged on the surface of the supportive substrate, a second portion of the graphene membrane is arranged at the opening of the cut-out, an energy of adhesion between the adhesive layer and the graphene membrane is greater than an energy of adhesion between the bulk region and the graphene membrane, the second portion of the graphene membrane is permanently in a tensioned condition in an operating temperature range of the graphene membrane component, and a third portion of the graphene membrane inherently adheres on a portion of a wall of the cut-out formed by the adhesive layer. Original
The method of claim 10, wherein the third portion of the graphene membrane lies between the first portion of the graphene membrane and the second portion of the graphene membrane. Original
The method of claim 10, wherein the energy of adhesion between the graphene membrane and a surface of the bulk region of the supportive substrate within the cut- out is less than 200 mJ per m 2. Original
The method of claim 10, wherein a number of atomic graphene layers in the graphene membrane is less than 11. Original
A method of using a graphene membrane component comprising a supportive substrate having a cut-out with an opening at a surface of the supportive substrate, wherein the supportive substrate comprises an adhesive layer and a bulk region; and a graphene membrane arranged on the surface of the supportive substrate, wherein the graphene membrane extends across the cut-out of the supportive substrate, a first portion of the graphene membrane is arranged on the surface of the supportive substrate, a second portion of the graphene membrane is arranged at the opening of the cut-out, an energy of adhesion between the adhesive layer and the graphene membrane is greater than an energy of adhesion between the bulk region and the graphene membrane, the second portion of the graphene membrane is permanently in a tensioned condition in an operating temperature range of the graphene membrane component, and a third portion of the graphene membrane inherently adheres on a portion of a wall of the cut-out formed by the adhesive layer, the method comprising: transducing a pressure using the graphene membrane component. Original
The method of claim 15, wherein transducing the pressure comprises using the graphene membrane component as a pressure sensor. Original
1 8. The method of claim 15, wherein transducing the pressure comprises using the graphene membrane component as a loudspeaker. Original
Layer stacks claimed or described, ordered top of device to substrate.
graphene membrane component
MEMS microphone
Hall-effect sensor
Materials described outside the worked examples.
graphene membrane
adhesive layer
bulk region of supportive substrate
Additional fabrication and treatment steps described in the patent.
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
energy of adhesion between graphene membrane and adhesive layer | >250 mJ/m² | graphene membraneadhesive layer |
energy of adhesion between graphene membrane and bulk region surface within cut-out |
Related documents with shared materials, methods, properties, or citations.
Patent
Atlas literature
Patent
US 10,421,665Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A graphene membrane component comprising: a supportive substrate having a cut-out with an opening at a surface of the supportive substrate, wherein the supportive substrate comprises an adhesive layer and a bulk region; and a graphene membrane arranged on the surface of the supportive substrate, wherein the graphene membrane extends across the cut-out of the supportive substrate, a first portion of the graphene membrane is arranged on the surface of the supportive substrate, a second portion of the graphene membrane is arranged at the opening of the cut-out, an energy of adhesion between the adhesive layer and the graphene membrane is greater than an energy of adhesion between the bulk region and the graphene membrane, the second portion of the graphene membrane is permanently in a tensioned condition in an operating temperature range of the graphene membrane component, and a third portion of the graphene membrane inherently adheres on a portion of a wall of the cut-out formed by the adhesive layer. Original
The graphene membrane component according to claim 1, wherein the third portion of the graphene membrane lies between the first portion of the graphene membrane and the second portion of the graphene membrane. Original
The graphene membrane component according to claim 1, wherein the energy of adhesion between the graphene membrane and a surface of the bulk region of the supportive substrate within the cut-out is less than 200 mJ per m 2. Original
The graphene membrane component according to claim 1, wherein a number of atomic graphene layers in the graphene membrane is less than 11. Original
A microelectromechanical systems (MEMS) microphone comprising the graphene membrane component according to claim 1. Original
The method of claim 1 6, wherein the using the graphene membrane component as the pressure sensor comprises using the graphene membrane component as a microphone. Original
A microphone or Hall-effect sensor with the graphene membrane component according to claim
The Hall-effect sensor of claim 6, wherein the graphene membrane component is arranged on the supportive substrate and the Hall-effect sensor further comprises a plurality of contacts disposed on the supportive substrate. Original
The Hall-effect sensor of claim 6, wherein the graphene membrane component is circular. Original
A method of forming a graphene membrane component the method comprising: forming a supportive substrate having a cut-out with an opening at a surface of the supportive substrate, wherein the supportive substrate comprises an adhesive layer and a bulk region; and forming a graphene membrane arranged on the surface of the supportive substrate, wherein the graphene membrane extends across the cut-out of the supportive substrate, a first portion of the graphene membrane is arranged on the surface of the supportive substrate, a second portion of the graphene membrane is arranged at the opening of the cut-out, an energy of adhesion between the adhesive layer and the graphene membrane is greater than an energy of adhesion between the bulk region and the graphene membrane, the second portion of the graphene membrane is permanently in a tensioned condition in an operating temperature range of the graphene membrane component, and a third portion of the graphene membrane inherently adheres on a portion of a wall of the cut-out formed by the adhesive layer. Original
The method of claim 10, wherein the third portion of the graphene membrane lies between the first portion of the graphene membrane and the second portion of the graphene membrane. Original
The method of claim 10, wherein the energy of adhesion between the graphene membrane and a surface of the bulk region of the supportive substrate within the cut- out is less than 200 mJ per m 2. Original
The method of claim 10, wherein a number of atomic graphene layers in the graphene membrane is less than 11. Original
A method of using a graphene membrane component comprising a supportive substrate having a cut-out with an opening at a surface of the supportive substrate, wherein the supportive substrate comprises an adhesive layer and a bulk region; and a graphene membrane arranged on the surface of the supportive substrate, wherein the graphene membrane extends across the cut-out of the supportive substrate, a first portion of the graphene membrane is arranged on the surface of the supportive substrate, a second portion of the graphene membrane is arranged at the opening of the cut-out, an energy of adhesion between the adhesive layer and the graphene membrane is greater than an energy of adhesion between the bulk region and the graphene membrane, the second portion of the graphene membrane is permanently in a tensioned condition in an operating temperature range of the graphene membrane component, and a third portion of the graphene membrane inherently adheres on a portion of a wall of the cut-out formed by the adhesive layer, the method comprising: transducing a pressure using the graphene membrane component. Original
The method of claim 15, wherein transducing the pressure comprises using the graphene membrane component as a pressure sensor. Original
1 8. The method of claim 15, wherein transducing the pressure comprises using the graphene membrane component as a loudspeaker. Original
Layer stacks claimed or described, ordered top of device to substrate.
graphene membrane component
MEMS microphone
Hall-effect sensor
Materials described outside the worked examples.
graphene membrane
adhesive layer
bulk region of supportive substrate
Additional fabrication and treatment steps described in the patent.
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
energy of adhesion between graphene membrane and adhesive layer | >250 mJ/m² | graphene membraneadhesive layer |
energy of adhesion between graphene membrane and bulk region surface within cut-out |
Related documents with shared materials, methods, properties, or citations.
Patent
Atlas literature
Patent
US 10,421,665Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A graphene membrane component comprising: a supportive substrate having a cut-out with an opening at a surface of the supportive substrate, wherein the supportive substrate comprises an adhesive layer and a bulk region; and a graphene membrane arranged on the surface of the supportive substrate, wherein the graphene membrane extends across the cut-out of the supportive substrate, a first portion of the graphene membrane is arranged on the surface of the supportive substrate, a second portion of the graphene membrane is arranged at the opening of the cut-out, an energy of adhesion between the adhesive layer and the graphene membrane is greater than an energy of adhesion between the bulk region and the graphene membrane, the second portion of the graphene membrane is permanently in a tensioned condition in an operating temperature range of the graphene membrane component, and a third portion of the graphene membrane inherently adheres on a portion of a wall of the cut-out formed by the adhesive layer. Original
The graphene membrane component according to claim 1, wherein the third portion of the graphene membrane lies between the first portion of the graphene membrane and the second portion of the graphene membrane. Original
The graphene membrane component according to claim 1, wherein the energy of adhesion between the graphene membrane and a surface of the bulk region of the supportive substrate within the cut-out is less than 200 mJ per m 2. Original
The graphene membrane component according to claim 1, wherein a number of atomic graphene layers in the graphene membrane is less than 11. Original
A microelectromechanical systems (MEMS) microphone comprising the graphene membrane component according to claim 1. Original
The method of claim 1 6, wherein the using the graphene membrane component as the pressure sensor comprises using the graphene membrane component as a microphone. Original
A microphone or Hall-effect sensor with the graphene membrane component according to claim
The Hall-effect sensor of claim 6, wherein the graphene membrane component is arranged on the supportive substrate and the Hall-effect sensor further comprises a plurality of contacts disposed on the supportive substrate. Original
The Hall-effect sensor of claim 6, wherein the graphene membrane component is circular. Original
A method of forming a graphene membrane component the method comprising: forming a supportive substrate having a cut-out with an opening at a surface of the supportive substrate, wherein the supportive substrate comprises an adhesive layer and a bulk region; and forming a graphene membrane arranged on the surface of the supportive substrate, wherein the graphene membrane extends across the cut-out of the supportive substrate, a first portion of the graphene membrane is arranged on the surface of the supportive substrate, a second portion of the graphene membrane is arranged at the opening of the cut-out, an energy of adhesion between the adhesive layer and the graphene membrane is greater than an energy of adhesion between the bulk region and the graphene membrane, the second portion of the graphene membrane is permanently in a tensioned condition in an operating temperature range of the graphene membrane component, and a third portion of the graphene membrane inherently adheres on a portion of a wall of the cut-out formed by the adhesive layer. Original
The method of claim 10, wherein the third portion of the graphene membrane lies between the first portion of the graphene membrane and the second portion of the graphene membrane. Original
The method of claim 10, wherein the energy of adhesion between the graphene membrane and a surface of the bulk region of the supportive substrate within the cut- out is less than 200 mJ per m 2. Original
The method of claim 10, wherein a number of atomic graphene layers in the graphene membrane is less than 11. Original
A method of using a graphene membrane component comprising a supportive substrate having a cut-out with an opening at a surface of the supportive substrate, wherein the supportive substrate comprises an adhesive layer and a bulk region; and a graphene membrane arranged on the surface of the supportive substrate, wherein the graphene membrane extends across the cut-out of the supportive substrate, a first portion of the graphene membrane is arranged on the surface of the supportive substrate, a second portion of the graphene membrane is arranged at the opening of the cut-out, an energy of adhesion between the adhesive layer and the graphene membrane is greater than an energy of adhesion between the bulk region and the graphene membrane, the second portion of the graphene membrane is permanently in a tensioned condition in an operating temperature range of the graphene membrane component, and a third portion of the graphene membrane inherently adheres on a portion of a wall of the cut-out formed by the adhesive layer, the method comprising: transducing a pressure using the graphene membrane component. Original
The method of claim 15, wherein transducing the pressure comprises using the graphene membrane component as a pressure sensor. Original
1 8. The method of claim 15, wherein transducing the pressure comprises using the graphene membrane component as a loudspeaker. Original
Layer stacks claimed or described, ordered top of device to substrate.
graphene membrane component
MEMS microphone
Hall-effect sensor
Materials described outside the worked examples.
graphene membrane
adhesive layer
bulk region of supportive substrate
Additional fabrication and treatment steps described in the patent.
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
energy of adhesion between graphene membrane and adhesive layer | >250 mJ/m² | graphene membraneadhesive layer |
energy of adhesion between graphene membrane and bulk region surface within cut-out |
Related documents with shared materials, methods, properties, or citations.
| <200 mJ/m² |
graphene membranebulk region of supportive substrate |
number of atomic graphene layers in graphene membrane | <11 layers | graphene membrane |
Thickness | ≤ 1 mm | — |
Thickness | ≥ 2 nm | — |
Thickness | ≥ 5 nm | — |
Thickness | ≥ 10 nm | — |
Thickness | ≥ 1 nm | — |
| <200 mJ/m² |
graphene membranebulk region of supportive substrate |
number of atomic graphene layers in graphene membrane | <11 layers | graphene membrane |
Thickness | ≤ 1 mm | — |
Thickness | ≥ 2 nm | — |
Thickness | ≥ 5 nm | — |
Thickness | ≥ 10 nm | — |
Thickness | ≥ 1 nm | — |
| <200 mJ/m² |
graphene membranebulk region of supportive substrate |
number of atomic graphene layers in graphene membrane | <11 layers | graphene membrane |
Thickness | ≤ 1 mm | — |
Thickness | ≥ 2 nm | — |
Thickness | ≥ 5 nm | — |
Thickness | ≥ 10 nm | — |
Thickness | ≥ 1 nm | — |
| <200 mJ/m² |
graphene membranebulk region of supportive substrate |
number of atomic graphene layers in graphene membrane | <11 layers | graphene membrane |
Thickness | ≤ 1 mm | — |
Thickness | ≥ 2 nm | — |
Thickness | ≥ 5 nm | — |
Thickness | ≥ 10 nm | — |
Thickness | ≥ 1 nm | — |