details:Large-area gratings with sub-micrometer resolution were created by EBL; commercial laser writer was also used to define micrometer-scale elements and contact pads.
A simple method for detection and quantitative estimation of deep levels in a barrier layer of AlGaN/GaN HEMT structures by analysis of light induced threshold voltage shift
topic GaN-based semiconductor devices and materialssubstrate SiCsubstrate GaNmaterial AlGaN
details:Large-area gratings with sub-micrometer resolution were created by EBL; commercial laser writer was also used to define micrometer-scale elements and contact pads.
A simple method for detection and quantitative estimation of deep levels in a barrier layer of AlGaN/GaN HEMT structures by analysis of light induced threshold voltage shift
topic GaN-based semiconductor devices and materialssubstrate SiCsubstrate GaNmaterial AlGaN
details:Large-area gratings with sub-micrometer resolution were created by EBL; commercial laser writer was also used to define micrometer-scale elements and contact pads.
A simple method for detection and quantitative estimation of deep levels in a barrier layer of AlGaN/GaN HEMT structures by analysis of light induced threshold voltage shift
topic GaN-based semiconductor devices and materialssubstrate SiCsubstrate GaNmaterial AlGaN
details:Large-area gratings with sub-micrometer resolution were created by EBL; commercial laser writer was also used to define micrometer-scale elements and contact pads.
A simple method for detection and quantitative estimation of deep levels in a barrier layer of AlGaN/GaN HEMT structures by analysis of light induced threshold voltage shift
topic GaN-based semiconductor devices and materialssubstrate SiCsubstrate GaNmaterial AlGaN