Research paper
Experimental CharacterizationComputational Multiscale| Type | Label | Value | Material | Sample | Condition | Source |
|---|---|---|---|---|---|---|
| Fet On Off Ratio | intrinsic quality factor Qi (ALD treated) | 220000 | — | |||
| Fet On Off Ratio | intrinsic quality factor Qi (bare untreated) | 160000 | — | |||
| Fet Sheet Resistance | propagation loss | 3.2dB/cm | — | |||
| Fet Sheet Resistance | propagation loss | 4.5dB/cm | — | |||
| Other | surface oxide spectral weight | >20% | — | |||
| Other | As 3d | 42eV | — | |||
| Other | Ga 3d | 19eV | — | |||
| Substrate Thickness | native GaAs oxide thickness | 1.35nm | — | |||
| Xps Binding Energy | As 3d | 42eV | — | |||
| Xps Binding Energy | Ga 3d | 19eV | — |
Gallium Arsenide Cell and Logic Circuit
| Type | Label | Value | Material | Sample | Condition | Source |
|---|---|---|---|---|---|---|
| Fet On Off Ratio | intrinsic quality factor Qi (ALD treated) | 220000 | — | |||
| Fet On Off Ratio | intrinsic quality factor Qi (bare untreated) | 160000 | — | |||
| Fet Sheet Resistance | propagation loss | 3.2dB/cm | — | |||
| Fet Sheet Resistance | propagation loss | 4.5dB/cm | — | |||
| Other | surface oxide spectral weight | >20% | — | |||
| Other | As 3d | 42eV | — | |||
| Other | Ga 3d | 19eV | — | |||
| Substrate Thickness | native GaAs oxide thickness | 1.35nm | — | |||
| Xps Binding Energy | As 3d | 42eV | — | |||
| Xps Binding Energy | Ga 3d | 19eV | — |
Gallium Arsenide Cell and Logic Circuit
| Type | Label | Value | Material | Sample | Condition | Source |
|---|---|---|---|---|---|---|
| Fet On Off Ratio | intrinsic quality factor Qi (ALD treated) | 220000 | — | |||
| Fet On Off Ratio | intrinsic quality factor Qi (bare untreated) | 160000 | — | |||
| Fet Sheet Resistance | propagation loss | 3.2dB/cm | — | |||
| Fet Sheet Resistance | propagation loss | 4.5dB/cm | — | |||
| Other | surface oxide spectral weight | >20% | — | |||
| Other | As 3d | 42eV | — | |||
| Other | Ga 3d | 19eV | — | |||
| Substrate Thickness | native GaAs oxide thickness | 1.35nm | — | |||
| Xps Binding Energy | As 3d | 42eV | — | |||
| Xps Binding Energy | Ga 3d | 19eV | — |
Gallium Arsenide Cell and Logic Circuit
| Type | Label | Value | Material | Sample | Condition | Source |
|---|---|---|---|---|---|---|
| Fet On Off Ratio | intrinsic quality factor Qi (ALD treated) | 220000 | — | |||
| Fet On Off Ratio | intrinsic quality factor Qi (bare untreated) | 160000 | — | |||
| Fet Sheet Resistance | propagation loss | 3.2dB/cm | — | |||
| Fet Sheet Resistance | propagation loss | 4.5dB/cm | — | |||
| Other | surface oxide spectral weight | >20% | — | |||
| Other | As 3d | 42eV | — | |||
| Other | Ga 3d | 19eV | — | |||
| Substrate Thickness | native GaAs oxide thickness | 1.35nm | — | |||
| Xps Binding Energy | As 3d | 42eV | — | |||
| Xps Binding Energy | Ga 3d | 19eV | — |
Gallium Arsenide Cell and Logic Circuit