METAL INTERCALATION IN LAYERED MoS2 DEVICES FOR ENHANCED PHOTODETECTION

Kristie Koski; Doron Naveh; Chen Stern; Avraham Twitto

Patent

Atlas literature

Patent

US 12,037,259 B2

METAL INTERCALATION IN LAYERED MoS₂ DEVICES FOR ENHANCED PHOTODETECTION

Kristie Koski, Doron Naveh, Chen Stern, Avraham Twitto

The Regents of the University of California, Oakland, CA (US), BAR-ILAN UNIVERSITY, Ramat Gan (IL)·Jul. 16, 2024·US

Drawings

Patent drawings and their descriptions. Click a drawing to enlarge it.

FIG. 1

FIG. 1 is a graphical illustration of a cross-section of a VA-MoS2—Si heterostructure photodiode device interca- lated by Cu. Cu is represented by red atoms, …

FIG. 2

FIG. 2 is a cross-section transmission electron micros- copy (TEM) image of a VA-MoS2—Si heterostructure pho- todiode device intercalated by Cu.

FIG. 3

FIG. 3 is an HRTEM image of Cu intercalated MoS₂ displaying an additional layer due to intercalation of Cu within the van der Waals (vdW) gaps.

FIG. 4

FIG. 4 is a STEM-HAADF image showing a z-contrast image with the inset showing a magniﬁed microscopy image of the area enclosed by the yellow square along with …

FIG. 5

FIG. 5 is a high-angle annular dark-ﬁeld scanning trans- mission electron microscopy (STEM-HAADF) image along with elemental distribution maps collected from …

FIG. 6

performance graph

FIG. 6 is a graph showing the distribution and mean value of interlayer spacing between VA-MoS₂ planes before and after Cu intercalation. The blue line …

FIG. 7

FIG. 7 displays Raman spectra of 2H-MoS₂ structure before and after Cu intercalation. Before intercalation is represented by the blue spectrum and after …

FIG. 8

FIG. 8 is a graph displaying the temperature-dependent evolution of the peak A1g Raman mode of MoS₂ before and after Cu intercalation. Before intercalation …

FIG. 9

FIG. 9 is an EDS spectrum from energy dispersive spectra mapping of S, Mo, and Cu. The sample was mounted on a Mo grid.

FIG. 10

process tool top view

FIG. 10 depicts a structural model of a partial Cu layer (CUT) intercalated within a single vdW gap of bulk MoS2. Unit cells are indicated by solid lines. One …

FIG. 11

process tool top view

FIG. 11 depicts a structural model of a Cu (111) mono- layer (CuML) intercalated within a single vdW gap of bulk 5 MoS2. Unit cells are indicated by solid …

FIG. 12

performance graph

FIG. 12 is a graph showing the energy per Cu atom (Eint) required for intercalation in to the vdW gap, (depicted by the 10 red line) and the resulting …

FIG. 13

FIG. 13 shows density of states (DOS) of MoS₂+CuML and MoS₂+CUT models calculated with the HSE functional. The total DOS (depicted by red lines) is further …

FIG. 14

FIG. 14 shows the calculated EELS spectrum of the MoS₂+CUT model (depicted by the red line) bulk MoS₂ 20 (depicted by the gray line) and the isolated CuML. The …

FIG. 15

performance graph

FIG. 15 is a graph of measured low-loss EELS spectra obtained from the Cu intercalated sample after removing the 25 zero line peak.

FIG. 16

performance graph

FIG. 16 is a graph of absorption versus wavelength of a MoS₂ device (depicted by the blue line) and a Cu interca- lated MoS₂ device (depicted by the green …

FIG. 17

performance graph

FIG. 17 is a graph of responsivity as a function of incident 30 power intensity of the MoS₂ device (depicted by the blue line) and the Cu intercalated MoS₂ …

FIG. 18

performance graph

FIG. 18 is a graph of responsivity versus wavelength for the MoS₂ device (depicted by the blue line) and the Cu intercalated MoS₂ device (depicted by the green …

FIG. 19

performance graph

FIG. 19 is a graph of the gain versus wavelength for the MoS₂ device (depicted by the blue line) and the Cu inter- 40 calated MoS₂ device (depicted by the …

FIG. 20

FIG. 20 is a STEM-HAADF image of Sn intercalated MoS₂ displaying an additional layer due to intercalation of Sn within the vdW gaps. Sn atoms are depicted in …

FIG. 21

FIG. 21. The blue arrows 50 indicate the MoS₂ layers, and the red arrows indicate the intercalated Sn layer.

FIG. 22

FIG. 22 is a graphic depiction of the intensity proﬁle across the rectangle marked in

FIG. 23

performance graph

FIG. 23 is a graph showing energy per Sn atom (Eint) required for intercalation into the vdW gap, and the resulting interlayer separation (depicted by the red …

FIG. 24

performance graph

FIG. 24 is a graph of the distribution and mean value of interlayer spacing between VA-MoS₂ planes before (de- picted by the blue line), and after (depicted by …

FIG. 25

FIG. 25 is an elemental distribution map of a) Mo, b) S, and c) Cn as collected by Energy Dispersive Spectroscopy (EDS).

FIG. 26

FIG. 26 is an EDS spectrum from energy dispersive spectra mapping of S, Mo, and Sn. The y-axis is ampliﬁed 65 100× after 19 keV. The Cu signal is noted form …

FIG. 27

FIG. 27 displays Raman spectra of 2H-MoS₂ structure before and after Sn intercalation. Before intercalation is represented by the blue spectrum and after …

FIG. 28

FIG. 28 depicts a structural model of (a) a two-Sn atom cluster (Sn2cluster), (b) a four-Sn atom cluster (Sn4cluster) and (c) a Sn monolayer (SnML) …

FIG. 29

FIG. 29 shows density of states (DOS) of MoS₂+Sn2cluster and MoS₂+Sn4cluster and MoS₂+SnML models calculated with the HSE functional. The total DOS (depicted …

FIG. 30

performance graph

FIG. 30 is a graph of the calculated absorption spectrum of the MoS₂+SnML device (depicted by a red line) and the MoS₂ device (depicted by the blue line). …

FIG. 31

performance graph

FIG. 31 is a graph of measured absorption vs wavelength of the MoS₂ device (depicted by the blue line) and the Sn intercalated MoS₂ device (depicted by the red …

FIG. 32

performance graph

FIG. 32 is a graph of the calculated EELS spectrum of the MoS₂+SnML model (depicted by the red line), MoS₂ (de- picted by the blue line) and the isolated SnML …

FIG. 33

performance graph

FIG. 33 is a graph of low-loss EELS spectra obtained from the Sn intercalated sample after removing the zero line peak.

FIG. 34

FIG. 34 is a graphical illustration of a cross-section of a VA-MoS₂ heterostructure photodiode device intercalated by Sn. MoS₂ is represented by yellow and …

FIG. 35

FIG. 35 is a bright ﬁeld TEM micrograph of the cross- section of the Sn intercalated VA-MoS₂ photodiode device structure.

FIG. 36

performance graph

FIG. 36 is a graph of responsivity as a function of incident power intensity of the MoS₂ device (depicted by the blue line) and the Sn intercalated MoS₂ device …

FIG. 37

performance graph

FIG. 37 is a graph of responsivity versus wavelength of the MoS₂ device (depicted by the blue line) and the Sn intercalated MoS₂ device (depicted by the red …

FIG. 38

performance graph

FIG. 38 is a graph of gain as a function of wavelength of the MoS₂ device (depicted by the blue line) and the Sn intercalated MoS₂ device (as depicted by the …

Claims

Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.

1 independent · 19 dependent

1
IndependentMoS₂transition metal or post-transition metal intercalantmetal-intercalated VA-MoS2 photodetector
A photodetector comprising 2D vertically-aligned MoS₂ (VA-MoS₂) layers, wherein a van der Waals (vdW) gap of at least two layers of the MoS₂ is intercalated with one or more transition metal or post-transition metal atoms.
1. 2
  Dependent← claim 1CuSnmetal-intercalated VA-MoS2 photodetector
  The photodetector of claim 1, wherein the one or more metal atoms comprise copper (Cu) and/or tin (Sn).
2. 3
  Dependent← claim 1MoS₂metal-intercalated VA-MoS2 photodetector
  The photodetector of claim 1, wherein all MoS₂ layers are intercalated with one or more metal atoms.
3. 4
  Dependent← claim 1transition metal or post-transition metal intercalant
  The photodetector of claim 1, wherein the intercalated metal atoms comprise clusters of at least 2 atoms.
4. 5
  Dependent← claim 1transition metal or post-transition metal intercalant
  The photodetector of claim 1, wherein the intercalated metal atoms comprise islands of about 20 nm to about 50 nm.
5. 6
  Dependent← claim 1transition metal or post-transition metal intercalant
  The photodetector of claim 1, wherein the intercalated metal atoms comprise a monolayer.
6. 7
  Dependent← claim 1transition metal or post-transition metal intercalant
  The photodetector of claim 1, wherein the intercalated metal atoms form clusters of at least 2 atoms and monolay-ers.
7. 8
  Dependent← claim 1metal-intercalated VA-MoS2 photodetector
  The photodetector of claim 1, wherein the photodetec-tor comprises a phototransistor, a photodiode, and/or a photoconductor.
8. 9
  Dependent← claim 1metal-intercalated VA-MoS2 photodetector
  The photodetector of claim 1, wherein the photodetec-tor is a part of a night-vision image intensiﬁer.
9. 10
  Dependent← claim 1MoS₂transition metal or post-transition metal intercalantmetal-intercalated VA-MoS2 photodetector
  A method of photodetection comprising: obtaining the photodetector of claim 1; and detecting a photoresponse.

Device structures

Layer stacks claimed or described, ordered top of device to substrate.

metal-intercalated VA-MoS₂ photodetector

transition metal or post-transition metal intercalantintercalant in vdW gap

MoS₂active photodetector channel

Materials

Materials described outside the worked examples.

vertically-aligned MoS₂

MoS₂

Host 2D Layered Material

transition metal or post-transition metal intercalant

Intercalant

Process steps

Additional fabrication and treatment steps described in the patent.

Cvd Growth

Step 1

Process details

note:VA-MoS₂ layers formed by chemical vapor deposition (CVD)

Materials:MoS₂

Characterization

Measurements and analyses referenced in the patent, with their drawing references.

tem

TEM

FIG. 2 is a cross-section transmission electron micros- copy (TEM) image of a VA-MoS2—Si heterostructure pho- todiode device intercalated by Cu.

Figure references

FIG. 2

MoS₂MoS₂

Reported properties

Performance values and ranges asserted in the specification or claims.

Property	Value	Material
Cu intercalant plasmonic resonance (low energy)	1–1.3	Cu-intercalated VA-MoS₂
Cu intercalant plasmonic resonance (high energy)	2–2

Cited prior art

Patents and literature cited by this patent (applicant and examiner references).

Cited patents · 3

US 10,680,403 B210,680,403 B2 * 6/2020 Cronin................ H01S 5/02453examiner
US 2022/0325432 A12022/0325432 A1 * 10/2022 Jariwala............... B01J 35/0013examiner
US 2023/0234003 A12023/0234003 A1 * 7/2023 Liu.................... B01D 67/0079examiner

Cited non-patent literature · 7

Why these are connected

Related documents with shared materials, methods, properties, or citations.

METAL INTERCALATION IN LAYERED MoS2 DEVICES FOR ENHANCED PHOTODETECTION | Matter42 Literature