Patent
US 9,850,571C
substrate (metal, semiconductor, or insulator)
silicon
Si
germanium
Ge
silicon oxide
SiO₂
sapphire
Al₂O₃
| 10–490 °C |
| — |
Temperature | 650–720 °C | — |
Duration | 5–180 minutes | — |
Temperature | 400–700 °C | — |
Temperature | 600–750 °C | — |
Temperature | 0.1–1 °C | — |
NANOTUBE AND GRAPHENE SEMICONDUCTOR STRUCTURES WITH VARYING ELECTRICAL PROPERTIES
C
substrate (metal, semiconductor, or insulator)
silicon
Si
germanium
Ge
silicon oxide
SiO₂
sapphire
Al₂O₃
| 10–490 °C |
| — |
Temperature | 650–720 °C | — |
Duration | 5–180 minutes | — |
Temperature | 400–700 °C | — |
Temperature | 600–750 °C | — |
Temperature | 0.1–1 °C | — |
NANOTUBE AND GRAPHENE SEMICONDUCTOR STRUCTURES WITH VARYING ELECTRICAL PROPERTIES
C
substrate (metal, semiconductor, or insulator)
silicon
Si
germanium
Ge
silicon oxide
SiO₂
sapphire
Al₂O₃
| 10–490 °C |
| — |
Temperature | 650–720 °C | — |
Duration | 5–180 minutes | — |
Temperature | 400–700 °C | — |
Temperature | 600–750 °C | — |
Temperature | 0.1–1 °C | — |
NANOTUBE AND GRAPHENE SEMICONDUCTOR STRUCTURES WITH VARYING ELECTRICAL PROPERTIES
C
substrate (metal, semiconductor, or insulator)
silicon
Si
germanium
Ge
silicon oxide
SiO₂
sapphire
Al₂O₃
| 10–490 °C |
| — |
Temperature | 650–720 °C | — |
Duration | 5–180 minutes | — |
Temperature | 400–700 °C | — |
Temperature | 600–750 °C | — |
Temperature | 0.1–1 °C | — |
NANOTUBE AND GRAPHENE SEMICONDUCTOR STRUCTURES WITH VARYING ELECTRICAL PROPERTIES