Patent
US 9,862,608PATTERNED STRUCTURES OF GRAPHENE AND GRAPHITIC CARBON AND METHODS FOR THEIR MANUFACTURE
Ronen Polsky
US
Copyright © 2026 Matter42. All rights reserved.
Patent
Atlas literature
Patent
US 9,862,608Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1 is a flowchart of an illustrative procedure for making a graphene or graphitic carbon article. [0012]
FIG. 2, view A is a scanning electron micrograph of a pattern of three-dimensional porous carbon created by interference lithography. [0013]
FIG. 3 is an idealized graphical depiction of a portion of the carbon structure at various stages of the processes represented by the preceding figures. The …
FIG. 4 provides four views, each of which is a scanning electron micrograph. Views A-D are scanning electron micrographs of a three-dimensional multilayer …
FIG. 5 provides six micrographic views. Views A and B are scanning electron micrographs of, respectively, a pyrolyzed carbon pattern prior to sputtering and a …
FIG. 6 provides three views, each of which is a scanning electron micrograph. Views A-C are scanning electron micrographs of three-dimensional nickel-graphene …
FIG. 7 is a micrograph of a stage in the creation of an array of suspended graphitic wires. Seen in the figure is a patterned body prior to pyrolysis. [0020]
FIG. 8 provides a micrographic view of the patterned body of
FIG. 9 shows a detail of
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
Canceled
The apparatus of claim 4, wherein the body is conformed as a honeycomb structure. Previously presented
The apparatus of claim 4, wherein the body is a product of a process that includes patterning a photoresist by interference lithography. Previously presented
Apparatus comprising a three-dimensionally patterned graphene or graphitic body, wherein the body is conformed as a porous interconnected network having an average pore size in the range 50-1000 nm, and wherein the body is conformed as a network of bulbous nodes interconnected by arms. Previously presented
The apparatus of claim 4, wherein at least some of the nodes contain metal nodules. Original
The apparatus of claim 4, wherein the three-dimensionally patterned graphene or graphitic body comprises multilayer graphene, and wherein at least some of the nodes contain metal cores. Previously presented
The apparatus of claim 4, comprising an electrochemical electrode comprising multilayer graphene conformed as a porous network of bulbous nodes interconnected by arms, and wherein at least some of the nodes contain metal cores. Previously presented
The apparatus of claim 4, wherein: at least one of the bulbous nodes contains a metal nodule having a composition that comprises at least one of copper, nickel, and ruthenium. Previously presented
Canceled
Canceled
Embodiments described in the patent, grouped by the materials and process steps they use.
4 materials4 process steps
Interference lithography was used to create a three-dimensional porous carbon pattern with approximately face-centered cubic structure (five interconnected layers, triangular in-plane structure, arm diameters ~20-50 nm, node diameters ~200 nm, honeycomb pore sizes ~600-800 nm). The carbon structure was formed from NR₇ photoresist via two-beam interferometric lithography with three 120-degree rotational exposures using a 355 nm Nd:YAG laser. Nickel was then sputter-coated onto the porous carbon at 0.5 Å/s for 20 minutes (1200 seconds), and the coated structure was annealed in forming gas at 750°C for 50 minutes to form graphene. The nickel was subsequently etched in 2 M sulfuric acid for 8 hours to produce a porous multilayer graphene electrode.
Layer stacks claimed or described, ordered top of device to substrate.
three-dimensionally patterned graphene or graphitic body (porous interconnected network)
electrochemical electrode comprising porous multilayer graphene network
Materials described outside the worked examples.
metal nodules/metal cores
copper
Cu
ruthenium
Additional fabrication and treatment steps described in the patent.
Measurements and analyses referenced in the patent, with their drawing references.
FIG. 2, view A is a scanning electron micrograph of a pattern of three-dimensional porous carbon created by interference lithography. [0013]
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
Thickness | 20–50 nm | — |
Thickness | 600–800 nm |
Related documents with shared materials, methods, properties, or citations.
Patent
Atlas literature
Patent
US 9,862,608Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1 is a flowchart of an illustrative procedure for making a graphene or graphitic carbon article. [0012]
FIG. 2, view A is a scanning electron micrograph of a pattern of three-dimensional porous carbon created by interference lithography. [0013]
FIG. 3 is an idealized graphical depiction of a portion of the carbon structure at various stages of the processes represented by the preceding figures. The …
FIG. 4 provides four views, each of which is a scanning electron micrograph. Views A-D are scanning electron micrographs of a three-dimensional multilayer …
FIG. 5 provides six micrographic views. Views A and B are scanning electron micrographs of, respectively, a pyrolyzed carbon pattern prior to sputtering and a …
FIG. 6 provides three views, each of which is a scanning electron micrograph. Views A-C are scanning electron micrographs of three-dimensional nickel-graphene …
FIG. 7 is a micrograph of a stage in the creation of an array of suspended graphitic wires. Seen in the figure is a patterned body prior to pyrolysis. [0020]
FIG. 8 provides a micrographic view of the patterned body of
FIG. 9 shows a detail of
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
Canceled
The apparatus of claim 4, wherein the body is conformed as a honeycomb structure. Previously presented
The apparatus of claim 4, wherein the body is a product of a process that includes patterning a photoresist by interference lithography. Previously presented
Apparatus comprising a three-dimensionally patterned graphene or graphitic body, wherein the body is conformed as a porous interconnected network having an average pore size in the range 50-1000 nm, and wherein the body is conformed as a network of bulbous nodes interconnected by arms. Previously presented
The apparatus of claim 4, wherein at least some of the nodes contain metal nodules. Original
The apparatus of claim 4, wherein the three-dimensionally patterned graphene or graphitic body comprises multilayer graphene, and wherein at least some of the nodes contain metal cores. Previously presented
The apparatus of claim 4, comprising an electrochemical electrode comprising multilayer graphene conformed as a porous network of bulbous nodes interconnected by arms, and wherein at least some of the nodes contain metal cores. Previously presented
The apparatus of claim 4, wherein: at least one of the bulbous nodes contains a metal nodule having a composition that comprises at least one of copper, nickel, and ruthenium. Previously presented
Canceled
Canceled
Embodiments described in the patent, grouped by the materials and process steps they use.
4 materials4 process steps
Interference lithography was used to create a three-dimensional porous carbon pattern with approximately face-centered cubic structure (five interconnected layers, triangular in-plane structure, arm diameters ~20-50 nm, node diameters ~200 nm, honeycomb pore sizes ~600-800 nm). The carbon structure was formed from NR₇ photoresist via two-beam interferometric lithography with three 120-degree rotational exposures using a 355 nm Nd:YAG laser. Nickel was then sputter-coated onto the porous carbon at 0.5 Å/s for 20 minutes (1200 seconds), and the coated structure was annealed in forming gas at 750°C for 50 minutes to form graphene. The nickel was subsequently etched in 2 M sulfuric acid for 8 hours to produce a porous multilayer graphene electrode.
Layer stacks claimed or described, ordered top of device to substrate.
three-dimensionally patterned graphene or graphitic body (porous interconnected network)
electrochemical electrode comprising porous multilayer graphene network
Materials described outside the worked examples.
metal nodules/metal cores
copper
Cu
ruthenium
Additional fabrication and treatment steps described in the patent.
Measurements and analyses referenced in the patent, with their drawing references.
FIG. 2, view A is a scanning electron micrograph of a pattern of three-dimensional porous carbon created by interference lithography. [0013]
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
Thickness | 20–50 nm | — |
Thickness | 600–800 nm |
Related documents with shared materials, methods, properties, or citations.
Patent
Atlas literature
Patent
US 9,862,608Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1 is a flowchart of an illustrative procedure for making a graphene or graphitic carbon article. [0012]
FIG. 2, view A is a scanning electron micrograph of a pattern of three-dimensional porous carbon created by interference lithography. [0013]
FIG. 3 is an idealized graphical depiction of a portion of the carbon structure at various stages of the processes represented by the preceding figures. The …
FIG. 4 provides four views, each of which is a scanning electron micrograph. Views A-D are scanning electron micrographs of a three-dimensional multilayer …
FIG. 5 provides six micrographic views. Views A and B are scanning electron micrographs of, respectively, a pyrolyzed carbon pattern prior to sputtering and a …
FIG. 6 provides three views, each of which is a scanning electron micrograph. Views A-C are scanning electron micrographs of three-dimensional nickel-graphene …
FIG. 7 is a micrograph of a stage in the creation of an array of suspended graphitic wires. Seen in the figure is a patterned body prior to pyrolysis. [0020]
FIG. 8 provides a micrographic view of the patterned body of
FIG. 9 shows a detail of
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
Canceled
The apparatus of claim 4, wherein the body is conformed as a honeycomb structure. Previously presented
The apparatus of claim 4, wherein the body is a product of a process that includes patterning a photoresist by interference lithography. Previously presented
Apparatus comprising a three-dimensionally patterned graphene or graphitic body, wherein the body is conformed as a porous interconnected network having an average pore size in the range 50-1000 nm, and wherein the body is conformed as a network of bulbous nodes interconnected by arms. Previously presented
The apparatus of claim 4, wherein at least some of the nodes contain metal nodules. Original
The apparatus of claim 4, wherein the three-dimensionally patterned graphene or graphitic body comprises multilayer graphene, and wherein at least some of the nodes contain metal cores. Previously presented
The apparatus of claim 4, comprising an electrochemical electrode comprising multilayer graphene conformed as a porous network of bulbous nodes interconnected by arms, and wherein at least some of the nodes contain metal cores. Previously presented
The apparatus of claim 4, wherein: at least one of the bulbous nodes contains a metal nodule having a composition that comprises at least one of copper, nickel, and ruthenium. Previously presented
Canceled
Canceled
Embodiments described in the patent, grouped by the materials and process steps they use.
4 materials4 process steps
Interference lithography was used to create a three-dimensional porous carbon pattern with approximately face-centered cubic structure (five interconnected layers, triangular in-plane structure, arm diameters ~20-50 nm, node diameters ~200 nm, honeycomb pore sizes ~600-800 nm). The carbon structure was formed from NR₇ photoresist via two-beam interferometric lithography with three 120-degree rotational exposures using a 355 nm Nd:YAG laser. Nickel was then sputter-coated onto the porous carbon at 0.5 Å/s for 20 minutes (1200 seconds), and the coated structure was annealed in forming gas at 750°C for 50 minutes to form graphene. The nickel was subsequently etched in 2 M sulfuric acid for 8 hours to produce a porous multilayer graphene electrode.
Layer stacks claimed or described, ordered top of device to substrate.
three-dimensionally patterned graphene or graphitic body (porous interconnected network)
electrochemical electrode comprising porous multilayer graphene network
Materials described outside the worked examples.
metal nodules/metal cores
copper
Cu
ruthenium
Additional fabrication and treatment steps described in the patent.
Measurements and analyses referenced in the patent, with their drawing references.
FIG. 2, view A is a scanning electron micrograph of a pattern of three-dimensional porous carbon created by interference lithography. [0013]
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
Thickness | 20–50 nm | — |
Thickness | 600–800 nm |
Related documents with shared materials, methods, properties, or citations.
Patent
Atlas literature
Patent
US 9,862,608Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1 is a flowchart of an illustrative procedure for making a graphene or graphitic carbon article. [0012]
FIG. 2, view A is a scanning electron micrograph of a pattern of three-dimensional porous carbon created by interference lithography. [0013]
FIG. 3 is an idealized graphical depiction of a portion of the carbon structure at various stages of the processes represented by the preceding figures. The …
FIG. 4 provides four views, each of which is a scanning electron micrograph. Views A-D are scanning electron micrographs of a three-dimensional multilayer …
FIG. 5 provides six micrographic views. Views A and B are scanning electron micrographs of, respectively, a pyrolyzed carbon pattern prior to sputtering and a …
FIG. 6 provides three views, each of which is a scanning electron micrograph. Views A-C are scanning electron micrographs of three-dimensional nickel-graphene …
FIG. 7 is a micrograph of a stage in the creation of an array of suspended graphitic wires. Seen in the figure is a patterned body prior to pyrolysis. [0020]
FIG. 8 provides a micrographic view of the patterned body of
FIG. 9 shows a detail of
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
Canceled
The apparatus of claim 4, wherein the body is conformed as a honeycomb structure. Previously presented
The apparatus of claim 4, wherein the body is a product of a process that includes patterning a photoresist by interference lithography. Previously presented
Apparatus comprising a three-dimensionally patterned graphene or graphitic body, wherein the body is conformed as a porous interconnected network having an average pore size in the range 50-1000 nm, and wherein the body is conformed as a network of bulbous nodes interconnected by arms. Previously presented
The apparatus of claim 4, wherein at least some of the nodes contain metal nodules. Original
The apparatus of claim 4, wherein the three-dimensionally patterned graphene or graphitic body comprises multilayer graphene, and wherein at least some of the nodes contain metal cores. Previously presented
The apparatus of claim 4, comprising an electrochemical electrode comprising multilayer graphene conformed as a porous network of bulbous nodes interconnected by arms, and wherein at least some of the nodes contain metal cores. Previously presented
The apparatus of claim 4, wherein: at least one of the bulbous nodes contains a metal nodule having a composition that comprises at least one of copper, nickel, and ruthenium. Previously presented
Canceled
Canceled
Embodiments described in the patent, grouped by the materials and process steps they use.
4 materials4 process steps
Interference lithography was used to create a three-dimensional porous carbon pattern with approximately face-centered cubic structure (five interconnected layers, triangular in-plane structure, arm diameters ~20-50 nm, node diameters ~200 nm, honeycomb pore sizes ~600-800 nm). The carbon structure was formed from NR₇ photoresist via two-beam interferometric lithography with three 120-degree rotational exposures using a 355 nm Nd:YAG laser. Nickel was then sputter-coated onto the porous carbon at 0.5 Å/s for 20 minutes (1200 seconds), and the coated structure was annealed in forming gas at 750°C for 50 minutes to form graphene. The nickel was subsequently etched in 2 M sulfuric acid for 8 hours to produce a porous multilayer graphene electrode.
Layer stacks claimed or described, ordered top of device to substrate.
three-dimensionally patterned graphene or graphitic body (porous interconnected network)
electrochemical electrode comprising porous multilayer graphene network
Materials described outside the worked examples.
metal nodules/metal cores
copper
Cu
ruthenium
Additional fabrication and treatment steps described in the patent.
Measurements and analyses referenced in the patent, with their drawing references.
FIG. 2, view A is a scanning electron micrograph of a pattern of three-dimensional porous carbon created by interference lithography. [0013]
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
Thickness | 20–50 nm | — |
Thickness | 600–800 nm |
Related documents with shared materials, methods, properties, or citations.
Ru
multilayer graphene
FIG. 4 provides four views, each of which is a scanning electron micrograph. Views A-D are scanning electron micrographs of a three-dimensional multilayer …
FIG. 5 provides six micrographic views. Views A and B are scanning electron micrographs of, respectively, a pyrolyzed carbon pattern prior to sputtering and a …
FIG. 6 provides three views, each of which is a scanning electron micrograph. Views A-C are scanning electron micrographs of three-dimensional nickel-graphene …
| — |
Thickness | 50–1000 nm | — |
Thickness | 20–30 nm | — |
Thickness | ≤ 5 nm | — |
Ru
multilayer graphene
FIG. 4 provides four views, each of which is a scanning electron micrograph. Views A-D are scanning electron micrographs of a three-dimensional multilayer …
FIG. 5 provides six micrographic views. Views A and B are scanning electron micrographs of, respectively, a pyrolyzed carbon pattern prior to sputtering and a …
FIG. 6 provides three views, each of which is a scanning electron micrograph. Views A-C are scanning electron micrographs of three-dimensional nickel-graphene …
| — |
Thickness | 50–1000 nm | — |
Thickness | 20–30 nm | — |
Thickness | ≤ 5 nm | — |
Ru
multilayer graphene
FIG. 4 provides four views, each of which is a scanning electron micrograph. Views A-D are scanning electron micrographs of a three-dimensional multilayer …
FIG. 5 provides six micrographic views. Views A and B are scanning electron micrographs of, respectively, a pyrolyzed carbon pattern prior to sputtering and a …
FIG. 6 provides three views, each of which is a scanning electron micrograph. Views A-C are scanning electron micrographs of three-dimensional nickel-graphene …
| — |
Thickness | 50–1000 nm | — |
Thickness | 20–30 nm | — |
Thickness | ≤ 5 nm | — |
Ru
multilayer graphene
FIG. 4 provides four views, each of which is a scanning electron micrograph. Views A-D are scanning electron micrographs of a three-dimensional multilayer …
FIG. 5 provides six micrographic views. Views A and B are scanning electron micrographs of, respectively, a pyrolyzed carbon pattern prior to sputtering and a …
FIG. 6 provides three views, each of which is a scanning electron micrograph. Views A-C are scanning electron micrographs of three-dimensional nickel-graphene …
| — |
Thickness | 50–1000 nm | — |
Thickness | 20–30 nm | — |
Thickness | ≤ 5 nm | — |