SELF-BYPASS DIODE FUNCTION FOR GALLIUM ARSENIDE PHOTOVOLTAIC DEVICES | Matter42 Literature
Patent
Atlas literature
Patent
US 11,695,088 B2
SELF-BYPASS DIODE FUNCTION FOR GALLIUM ARSENIDE PHOTOVOLTAIC DEVICES
Hui Nie, Brendan M. Kayes, Isik C. Kizilyalli
Utica Leaseco, LLC, Rochester Hills, MI (US)·Jul. 4, 2023·US
Drawings
Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1
FIG. 1 is a diagrammatic illustration of a series of 25 connected solar cells in a solar cell module including a shaded solar cell;
FIG. 2
FIG. 2 is a diagrammatic illustration of a series of connected solar cells having discrete bypass diodes con- nected in parallel; 30
FIG. 3
FIG. 3 to form a photo- voltaic cell in accordance with some embodiments described 35 herein;
FIG. 4
FIG. 4 depicts a cross-sectional view of a semiconductor structure formed from the unit of
FIG. 5
FIGS. 5-6 depict cross-sectional views of the semicon- ductor structure of
FIG. 6
FIG. 6 for illustrative purposes at a midpoint in the graded layer, due to the material gradation the heterojunction may be at any point 20 within the layer …
FIG. 7
FIG. 7 depicts a cross-sectional view of a two-sided 40 photovoltaic cell in accordance with some embodiments described herein; and
FIG. 8
performance graph
FIG. 8 is a graph illustrating doping and breakdown characteristics of a gallium arsenide based solar cell with respect to the bypass function described …
FIG. 9
performance graph
FIG. 9 is a graph illustrating voltage and current charac- teristics of a gallium arsenide based solar cell with respect to the bypass function described …
FIG. 10
performance graph
FIG. 10 is a graph illustrating band-to-band tunneling characteristics of a gallium arsenide based solar cell with 50 respect to the bypass function described …
FIG. 11
performance graph
FIG. 11 is a graph illustrating voltage and current char- acteristics of a gallium arsenide based solar cell with respect to the bypass function described …
Claims
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
2 independent · 16 dependent
1
IndependentGaAsemitter layer (higher bandgap material, different from base layer)intermediate layergallium arsenide based photovoltaic cell with self-bypass diode function
A method for forming a semiconductor device, the method comprising: providing a semiconductor structure, the semiconductor structure including a base layer configured to absorb photons to convert light energy into electrical energy at the device; and B₂ wherein providing the semiconductor structure includes forming an emitter layer in the semiconductor struc-ture, the emitter layer being made of a different material than the base layer and having a higher bandgap than the base layer, wherein a p-n junction of the semiconductor structure is formed between the emitter layer and the base layer such that under reverse-bias conditions in the resulting device the p-n junction provides a bypass function using a Zener breakdown effect that breaks down in a controlled manner, and wherein the semiconductor structure includes an interme-diate layer between the emitter layer and the base layer, the p-n junction being formed between the emitter layer and the intermediate layer, and a heterojunction being formed between the base layer and the intermediate layer.
2
Dependent← claim 1gallium arsenide based photovoltaic cell with self-bypass diode function
The method of claim 1, wherein the bypass function is intrinsic to the p-n junction of the semiconductor device such that the semiconductor device provides the bypass function with no distinct bypass diode connected to or included in the semiconductor device.
3
Dependent← claim 1GaAs
The method of claim 1, wherein the base layer is highly doped at about 4×1017 cm⁻³ or greater.
4
Dependent← claim 1GaAs
The method of claim 1, wherein the base layer is highly doped within a range of about 4×1017 cm⁻³ to about 1×1019 cm⁻³, and a thickness of the base layer is within a range of about 300 nm to about 3,500 nm.
5
Dependent← claim 1gallium arsenide based photovoltaic cell with self-bypass diode function
The method of claim 1, wherein the p-n junction is formed at a location offset from the heterojunction in the semiconductor structure by up to about 200 nm.
7
Dependent← claim 1sacrificial layer
The method of claim 1, further comprising separating the semiconductor structure from a growth wafer during an epitaxial lift-off (ELO) process, wherein the ELO process includes etching a sacrificial layer disposed between the semiconductor structure and the growth wafer.
8
Dependent← claim 1GaAsgallium arsenide based photovoltaic cell with self-bypass diode function
The method of claim 1, wherein the semiconductor device is a photovoltaic device and the base layer includes a Group III-V compound semiconductor.
9
Dependent← claim 1gallium arsenide based photovoltaic cell with self-bypass diode function
The method of claim 1, wherein forming the emitter layer includes forming the p-n junction, the p-n junction being a heterojunction.
10
Dependent← claim 1window layergallium arsenide based photovoltaic cell with self-bypass diode function
The method of claim 1, further comprising forming a window layer disposed on a surface of the base layer and away from the emitter layer.
11
IndependentGaAsemitter layer (higher bandgap material, different from base layer)intermediate layerwindow layergallium arsenide based photovoltaic cell with self-bypass diode function
A method for forming a semiconductor device, the method comprising: providing a semiconductor structure including a base layer that absorbs photons to convert light energy into electrical energy at the semiconductor device, with the base layer including a Group III-V compound semiconductor; forming the semiconductor structure to include an emitter layer that is made of a different material than the base layer and has a higher bandgap than the base layer; forming a p-n junction within the semiconductor structure between the emitter layer and the base layer such that under reverse-bias conditions of the semiconductor device, the p-n junction provides a bypass function using a Zener breakdown effect that breaks down in a controlled manner; forming an intermediate layer between the emitter layer and the base layer; and 19 forming a window layer disposed on a surface of the base layer and away from the emitter layer.
12
Dependent← claim 11GaAs
The method of claim 11, wherein the base layer is highly doped within a range of about 4×1017 cm⁻³ to about 1×1019 cm⁻³, and a thickness of the base layer is within a range of about 300 nm to about 3,500 nm.
13
Dependent← claim 11gallium arsenide based photovoltaic cell with self-bypass diode function
The method of claim 11, further comprising providing the bypass function with no distinct bypass diode connected to or included in the semiconductor device.
14
Dependent← claim 11contact layergallium arsenide based photovoltaic cell with self-bypass diode function
The method of claim 11, further comprising providing 10 a contact layer disposed adjacent to the window layer and a metal layer disposed adjacent to the contact layer.
15
Dependent← claim 11gallium arsenide based photovoltaic cell with self-bypass diode function
The method of claim 11, further comprising forming the p-n junction at a location offset from a heterojunction in the semiconductor structure by up to about 200 nm.
16
Dependent← claim 11gallium arsenide based photovoltaic cell with self-bypass diode function
The method of claim 11, further comprising forming the p-n junction between the emitter layer and the interme-diate layer, and forming a heterojunction between the base layer and the intermediate layer.
17
Dependent← claim 11intermediate layer
The method of claim 11, further comprising forming the intermediate layer to include a gradation in material composition from the material of the base layer to the material of the emitter layer.
18
Dependent← claim 11gallium arsenide based photovoltaic cell with self-bypass diode function
The method of claim 11, wherein the p-n junction is a heterojunction. ∗ ∗ ∗ ∗ ∗
Device structures
Layer stacks claimed or described, ordered top of device to substrate.
gallium arsenide based photovoltaic cell with self-bypass diode function
contact layercontact layer
emitter layer (higher bandgap material, different from base layer)emitter layer (higher bandgap)
intermediate layerintermediate layer
GaAsbase/absorber layer (GaAs)
window layerwindow layer
AlAssacrificial layer (ELO)
Materials
Materials described outside the worked examples.
base layer (Group III-V compound semiconductor, e.g. gallium arsenide)
GaAs
Absorber/Base Layer
Epitaxial Layer Material
emitter layer (higher bandgap material, different from base layer)
Process steps
Additional fabrication and treatment steps described in the patent.
1
Epitaxial Growth
Step 1
Temperature
550°C
Process details
methods:
Characterization
Measurements and analyses referenced in the patent, with their drawing references.
device performance measurement
Device Performance Measurement
FIG. 8 is a graph illustrating doping and breakdown characteristics of a gallium arsenide based solar cell with respect to the bypass function described …
SELF-BYPASS DIODE FUNCTION FOR GALLIUM ARSENIDE PHOTOVOLTAIC DEVICES
Hui Nie, Brendan M. Kayes, Isik C. Kizilyalli
Utica Leaseco, LLC, Rochester Hills, MI (US)·Jul. 4, 2023·US
Drawings
Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1
FIG. 1 is a diagrammatic illustration of a series of 25 connected solar cells in a solar cell module including a shaded solar cell;
FIG. 2
FIG. 2 is a diagrammatic illustration of a series of connected solar cells having discrete bypass diodes con- nected in parallel; 30
FIG. 3
FIG. 3 to form a photo- voltaic cell in accordance with some embodiments described 35 herein;
FIG. 4
FIG. 4 depicts a cross-sectional view of a semiconductor structure formed from the unit of
FIG. 5
FIGS. 5-6 depict cross-sectional views of the semicon- ductor structure of
FIG. 6
FIG. 6 for illustrative purposes at a midpoint in the graded layer, due to the material gradation the heterojunction may be at any point 20 within the layer …
FIG. 7
FIG. 7 depicts a cross-sectional view of a two-sided 40 photovoltaic cell in accordance with some embodiments described herein; and
FIG. 8
performance graph
FIG. 8 is a graph illustrating doping and breakdown characteristics of a gallium arsenide based solar cell with respect to the bypass function described …
FIG. 9
performance graph
FIG. 9 is a graph illustrating voltage and current charac- teristics of a gallium arsenide based solar cell with respect to the bypass function described …
FIG. 10
performance graph
FIG. 10 is a graph illustrating band-to-band tunneling characteristics of a gallium arsenide based solar cell with 50 respect to the bypass function described …
FIG. 11
performance graph
FIG. 11 is a graph illustrating voltage and current char- acteristics of a gallium arsenide based solar cell with respect to the bypass function described …
Claims
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
2 independent · 16 dependent
1
IndependentGaAsemitter layer (higher bandgap material, different from base layer)intermediate layergallium arsenide based photovoltaic cell with self-bypass diode function
A method for forming a semiconductor device, the method comprising: providing a semiconductor structure, the semiconductor structure including a base layer configured to absorb photons to convert light energy into electrical energy at the device; and B₂ wherein providing the semiconductor structure includes forming an emitter layer in the semiconductor struc-ture, the emitter layer being made of a different material than the base layer and having a higher bandgap than the base layer, wherein a p-n junction of the semiconductor structure is formed between the emitter layer and the base layer such that under reverse-bias conditions in the resulting device the p-n junction provides a bypass function using a Zener breakdown effect that breaks down in a controlled manner, and wherein the semiconductor structure includes an interme-diate layer between the emitter layer and the base layer, the p-n junction being formed between the emitter layer and the intermediate layer, and a heterojunction being formed between the base layer and the intermediate layer.
2
Dependent← claim 1gallium arsenide based photovoltaic cell with self-bypass diode function
The method of claim 1, wherein the bypass function is intrinsic to the p-n junction of the semiconductor device such that the semiconductor device provides the bypass function with no distinct bypass diode connected to or included in the semiconductor device.
3
Dependent← claim 1GaAs
The method of claim 1, wherein the base layer is highly doped at about 4×1017 cm⁻³ or greater.
4
Dependent← claim 1GaAs
The method of claim 1, wherein the base layer is highly doped within a range of about 4×1017 cm⁻³ to about 1×1019 cm⁻³, and a thickness of the base layer is within a range of about 300 nm to about 3,500 nm.
5
Dependent← claim 1gallium arsenide based photovoltaic cell with self-bypass diode function
The method of claim 1, wherein the p-n junction is formed at a location offset from the heterojunction in the semiconductor structure by up to about 200 nm.
7
Dependent← claim 1sacrificial layer
The method of claim 1, further comprising separating the semiconductor structure from a growth wafer during an epitaxial lift-off (ELO) process, wherein the ELO process includes etching a sacrificial layer disposed between the semiconductor structure and the growth wafer.
8
Dependent← claim 1GaAsgallium arsenide based photovoltaic cell with self-bypass diode function
The method of claim 1, wherein the semiconductor device is a photovoltaic device and the base layer includes a Group III-V compound semiconductor.
9
Dependent← claim 1gallium arsenide based photovoltaic cell with self-bypass diode function
The method of claim 1, wherein forming the emitter layer includes forming the p-n junction, the p-n junction being a heterojunction.
10
Dependent← claim 1window layergallium arsenide based photovoltaic cell with self-bypass diode function
The method of claim 1, further comprising forming a window layer disposed on a surface of the base layer and away from the emitter layer.
11
IndependentGaAsemitter layer (higher bandgap material, different from base layer)intermediate layerwindow layergallium arsenide based photovoltaic cell with self-bypass diode function
A method for forming a semiconductor device, the method comprising: providing a semiconductor structure including a base layer that absorbs photons to convert light energy into electrical energy at the semiconductor device, with the base layer including a Group III-V compound semiconductor; forming the semiconductor structure to include an emitter layer that is made of a different material than the base layer and has a higher bandgap than the base layer; forming a p-n junction within the semiconductor structure between the emitter layer and the base layer such that under reverse-bias conditions of the semiconductor device, the p-n junction provides a bypass function using a Zener breakdown effect that breaks down in a controlled manner; forming an intermediate layer between the emitter layer and the base layer; and 19 forming a window layer disposed on a surface of the base layer and away from the emitter layer.
12
Dependent← claim 11GaAs
The method of claim 11, wherein the base layer is highly doped within a range of about 4×1017 cm⁻³ to about 1×1019 cm⁻³, and a thickness of the base layer is within a range of about 300 nm to about 3,500 nm.
13
Dependent← claim 11gallium arsenide based photovoltaic cell with self-bypass diode function
The method of claim 11, further comprising providing the bypass function with no distinct bypass diode connected to or included in the semiconductor device.
14
Dependent← claim 11contact layergallium arsenide based photovoltaic cell with self-bypass diode function
The method of claim 11, further comprising providing 10 a contact layer disposed adjacent to the window layer and a metal layer disposed adjacent to the contact layer.
15
Dependent← claim 11gallium arsenide based photovoltaic cell with self-bypass diode function
The method of claim 11, further comprising forming the p-n junction at a location offset from a heterojunction in the semiconductor structure by up to about 200 nm.
16
Dependent← claim 11gallium arsenide based photovoltaic cell with self-bypass diode function
The method of claim 11, further comprising forming the p-n junction between the emitter layer and the interme-diate layer, and forming a heterojunction between the base layer and the intermediate layer.
17
Dependent← claim 11intermediate layer
The method of claim 11, further comprising forming the intermediate layer to include a gradation in material composition from the material of the base layer to the material of the emitter layer.
18
Dependent← claim 11gallium arsenide based photovoltaic cell with self-bypass diode function
The method of claim 11, wherein the p-n junction is a heterojunction. ∗ ∗ ∗ ∗ ∗
Device structures
Layer stacks claimed or described, ordered top of device to substrate.
gallium arsenide based photovoltaic cell with self-bypass diode function
contact layercontact layer
emitter layer (higher bandgap material, different from base layer)emitter layer (higher bandgap)
intermediate layerintermediate layer
GaAsbase/absorber layer (GaAs)
window layerwindow layer
AlAssacrificial layer (ELO)
Materials
Materials described outside the worked examples.
base layer (Group III-V compound semiconductor, e.g. gallium arsenide)
GaAs
Absorber/Base Layer
Epitaxial Layer Material
emitter layer (higher bandgap material, different from base layer)
Process steps
Additional fabrication and treatment steps described in the patent.
1
Epitaxial Growth
Step 1
Temperature
550°C
Process details
methods:
Characterization
Measurements and analyses referenced in the patent, with their drawing references.
device performance measurement
Device Performance Measurement
FIG. 8 is a graph illustrating doping and breakdown characteristics of a gallium arsenide based solar cell with respect to the bypass function described …
SELF-BYPASS DIODE FUNCTION FOR GALLIUM ARSENIDE PHOTOVOLTAIC DEVICES
Hui Nie, Brendan M. Kayes, Isik C. Kizilyalli
Utica Leaseco, LLC, Rochester Hills, MI (US)·Jul. 4, 2023·US
Drawings
Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1
FIG. 1 is a diagrammatic illustration of a series of 25 connected solar cells in a solar cell module including a shaded solar cell;
FIG. 2
FIG. 2 is a diagrammatic illustration of a series of connected solar cells having discrete bypass diodes con- nected in parallel; 30
FIG. 3
FIG. 3 to form a photo- voltaic cell in accordance with some embodiments described 35 herein;
FIG. 4
FIG. 4 depicts a cross-sectional view of a semiconductor structure formed from the unit of
FIG. 5
FIGS. 5-6 depict cross-sectional views of the semicon- ductor structure of
FIG. 6
FIG. 6 for illustrative purposes at a midpoint in the graded layer, due to the material gradation the heterojunction may be at any point 20 within the layer …
FIG. 7
FIG. 7 depicts a cross-sectional view of a two-sided 40 photovoltaic cell in accordance with some embodiments described herein; and
FIG. 8
performance graph
FIG. 8 is a graph illustrating doping and breakdown characteristics of a gallium arsenide based solar cell with respect to the bypass function described …
FIG. 9
performance graph
FIG. 9 is a graph illustrating voltage and current charac- teristics of a gallium arsenide based solar cell with respect to the bypass function described …
FIG. 10
performance graph
FIG. 10 is a graph illustrating band-to-band tunneling characteristics of a gallium arsenide based solar cell with 50 respect to the bypass function described …
FIG. 11
performance graph
FIG. 11 is a graph illustrating voltage and current char- acteristics of a gallium arsenide based solar cell with respect to the bypass function described …
Claims
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
2 independent · 16 dependent
1
IndependentGaAsemitter layer (higher bandgap material, different from base layer)intermediate layergallium arsenide based photovoltaic cell with self-bypass diode function
A method for forming a semiconductor device, the method comprising: providing a semiconductor structure, the semiconductor structure including a base layer configured to absorb photons to convert light energy into electrical energy at the device; and B₂ wherein providing the semiconductor structure includes forming an emitter layer in the semiconductor struc-ture, the emitter layer being made of a different material than the base layer and having a higher bandgap than the base layer, wherein a p-n junction of the semiconductor structure is formed between the emitter layer and the base layer such that under reverse-bias conditions in the resulting device the p-n junction provides a bypass function using a Zener breakdown effect that breaks down in a controlled manner, and wherein the semiconductor structure includes an interme-diate layer between the emitter layer and the base layer, the p-n junction being formed between the emitter layer and the intermediate layer, and a heterojunction being formed between the base layer and the intermediate layer.
2
Dependent← claim 1gallium arsenide based photovoltaic cell with self-bypass diode function
The method of claim 1, wherein the bypass function is intrinsic to the p-n junction of the semiconductor device such that the semiconductor device provides the bypass function with no distinct bypass diode connected to or included in the semiconductor device.
3
Dependent← claim 1GaAs
The method of claim 1, wherein the base layer is highly doped at about 4×1017 cm⁻³ or greater.
4
Dependent← claim 1GaAs
The method of claim 1, wherein the base layer is highly doped within a range of about 4×1017 cm⁻³ to about 1×1019 cm⁻³, and a thickness of the base layer is within a range of about 300 nm to about 3,500 nm.
5
Dependent← claim 1gallium arsenide based photovoltaic cell with self-bypass diode function
The method of claim 1, wherein the p-n junction is formed at a location offset from the heterojunction in the semiconductor structure by up to about 200 nm.
7
Dependent← claim 1sacrificial layer
The method of claim 1, further comprising separating the semiconductor structure from a growth wafer during an epitaxial lift-off (ELO) process, wherein the ELO process includes etching a sacrificial layer disposed between the semiconductor structure and the growth wafer.
8
Dependent← claim 1GaAsgallium arsenide based photovoltaic cell with self-bypass diode function
The method of claim 1, wherein the semiconductor device is a photovoltaic device and the base layer includes a Group III-V compound semiconductor.
9
Dependent← claim 1gallium arsenide based photovoltaic cell with self-bypass diode function
The method of claim 1, wherein forming the emitter layer includes forming the p-n junction, the p-n junction being a heterojunction.
10
Dependent← claim 1window layergallium arsenide based photovoltaic cell with self-bypass diode function
The method of claim 1, further comprising forming a window layer disposed on a surface of the base layer and away from the emitter layer.
11
IndependentGaAsemitter layer (higher bandgap material, different from base layer)intermediate layerwindow layergallium arsenide based photovoltaic cell with self-bypass diode function
A method for forming a semiconductor device, the method comprising: providing a semiconductor structure including a base layer that absorbs photons to convert light energy into electrical energy at the semiconductor device, with the base layer including a Group III-V compound semiconductor; forming the semiconductor structure to include an emitter layer that is made of a different material than the base layer and has a higher bandgap than the base layer; forming a p-n junction within the semiconductor structure between the emitter layer and the base layer such that under reverse-bias conditions of the semiconductor device, the p-n junction provides a bypass function using a Zener breakdown effect that breaks down in a controlled manner; forming an intermediate layer between the emitter layer and the base layer; and 19 forming a window layer disposed on a surface of the base layer and away from the emitter layer.
12
Dependent← claim 11GaAs
The method of claim 11, wherein the base layer is highly doped within a range of about 4×1017 cm⁻³ to about 1×1019 cm⁻³, and a thickness of the base layer is within a range of about 300 nm to about 3,500 nm.
13
Dependent← claim 11gallium arsenide based photovoltaic cell with self-bypass diode function
The method of claim 11, further comprising providing the bypass function with no distinct bypass diode connected to or included in the semiconductor device.
14
Dependent← claim 11contact layergallium arsenide based photovoltaic cell with self-bypass diode function
The method of claim 11, further comprising providing 10 a contact layer disposed adjacent to the window layer and a metal layer disposed adjacent to the contact layer.
15
Dependent← claim 11gallium arsenide based photovoltaic cell with self-bypass diode function
The method of claim 11, further comprising forming the p-n junction at a location offset from a heterojunction in the semiconductor structure by up to about 200 nm.
16
Dependent← claim 11gallium arsenide based photovoltaic cell with self-bypass diode function
The method of claim 11, further comprising forming the p-n junction between the emitter layer and the interme-diate layer, and forming a heterojunction between the base layer and the intermediate layer.
17
Dependent← claim 11intermediate layer
The method of claim 11, further comprising forming the intermediate layer to include a gradation in material composition from the material of the base layer to the material of the emitter layer.
18
Dependent← claim 11gallium arsenide based photovoltaic cell with self-bypass diode function
The method of claim 11, wherein the p-n junction is a heterojunction. ∗ ∗ ∗ ∗ ∗
Device structures
Layer stacks claimed or described, ordered top of device to substrate.
gallium arsenide based photovoltaic cell with self-bypass diode function
contact layercontact layer
emitter layer (higher bandgap material, different from base layer)emitter layer (higher bandgap)
intermediate layerintermediate layer
GaAsbase/absorber layer (GaAs)
window layerwindow layer
AlAssacrificial layer (ELO)
Materials
Materials described outside the worked examples.
base layer (Group III-V compound semiconductor, e.g. gallium arsenide)
GaAs
Absorber/Base Layer
Epitaxial Layer Material
emitter layer (higher bandgap material, different from base layer)
Process steps
Additional fabrication and treatment steps described in the patent.
1
Epitaxial Growth
Step 1
Temperature
550°C
Process details
methods:
Characterization
Measurements and analyses referenced in the patent, with their drawing references.
device performance measurement
Device Performance Measurement
FIG. 8 is a graph illustrating doping and breakdown characteristics of a gallium arsenide based solar cell with respect to the bypass function described …
SELF-BYPASS DIODE FUNCTION FOR GALLIUM ARSENIDE PHOTOVOLTAIC DEVICES
Hui Nie, Brendan M. Kayes, Isik C. Kizilyalli
Utica Leaseco, LLC, Rochester Hills, MI (US)·Jul. 4, 2023·US
Drawings
Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1
FIG. 1 is a diagrammatic illustration of a series of 25 connected solar cells in a solar cell module including a shaded solar cell;
FIG. 2
FIG. 2 is a diagrammatic illustration of a series of connected solar cells having discrete bypass diodes con- nected in parallel; 30
FIG. 3
FIG. 3 to form a photo- voltaic cell in accordance with some embodiments described 35 herein;
FIG. 4
FIG. 4 depicts a cross-sectional view of a semiconductor structure formed from the unit of
FIG. 5
FIGS. 5-6 depict cross-sectional views of the semicon- ductor structure of
FIG. 6
FIG. 6 for illustrative purposes at a midpoint in the graded layer, due to the material gradation the heterojunction may be at any point 20 within the layer …
FIG. 7
FIG. 7 depicts a cross-sectional view of a two-sided 40 photovoltaic cell in accordance with some embodiments described herein; and
FIG. 8
performance graph
FIG. 8 is a graph illustrating doping and breakdown characteristics of a gallium arsenide based solar cell with respect to the bypass function described …
FIG. 9
performance graph
FIG. 9 is a graph illustrating voltage and current charac- teristics of a gallium arsenide based solar cell with respect to the bypass function described …
FIG. 10
performance graph
FIG. 10 is a graph illustrating band-to-band tunneling characteristics of a gallium arsenide based solar cell with 50 respect to the bypass function described …
FIG. 11
performance graph
FIG. 11 is a graph illustrating voltage and current char- acteristics of a gallium arsenide based solar cell with respect to the bypass function described …
Claims
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
2 independent · 16 dependent
1
IndependentGaAsemitter layer (higher bandgap material, different from base layer)intermediate layergallium arsenide based photovoltaic cell with self-bypass diode function
A method for forming a semiconductor device, the method comprising: providing a semiconductor structure, the semiconductor structure including a base layer configured to absorb photons to convert light energy into electrical energy at the device; and B₂ wherein providing the semiconductor structure includes forming an emitter layer in the semiconductor struc-ture, the emitter layer being made of a different material than the base layer and having a higher bandgap than the base layer, wherein a p-n junction of the semiconductor structure is formed between the emitter layer and the base layer such that under reverse-bias conditions in the resulting device the p-n junction provides a bypass function using a Zener breakdown effect that breaks down in a controlled manner, and wherein the semiconductor structure includes an interme-diate layer between the emitter layer and the base layer, the p-n junction being formed between the emitter layer and the intermediate layer, and a heterojunction being formed between the base layer and the intermediate layer.
2
Dependent← claim 1gallium arsenide based photovoltaic cell with self-bypass diode function
The method of claim 1, wherein the bypass function is intrinsic to the p-n junction of the semiconductor device such that the semiconductor device provides the bypass function with no distinct bypass diode connected to or included in the semiconductor device.
3
Dependent← claim 1GaAs
The method of claim 1, wherein the base layer is highly doped at about 4×1017 cm⁻³ or greater.
4
Dependent← claim 1GaAs
The method of claim 1, wherein the base layer is highly doped within a range of about 4×1017 cm⁻³ to about 1×1019 cm⁻³, and a thickness of the base layer is within a range of about 300 nm to about 3,500 nm.
5
Dependent← claim 1gallium arsenide based photovoltaic cell with self-bypass diode function
The method of claim 1, wherein the p-n junction is formed at a location offset from the heterojunction in the semiconductor structure by up to about 200 nm.
7
Dependent← claim 1sacrificial layer
The method of claim 1, further comprising separating the semiconductor structure from a growth wafer during an epitaxial lift-off (ELO) process, wherein the ELO process includes etching a sacrificial layer disposed between the semiconductor structure and the growth wafer.
8
Dependent← claim 1GaAsgallium arsenide based photovoltaic cell with self-bypass diode function
The method of claim 1, wherein the semiconductor device is a photovoltaic device and the base layer includes a Group III-V compound semiconductor.
9
Dependent← claim 1gallium arsenide based photovoltaic cell with self-bypass diode function
The method of claim 1, wherein forming the emitter layer includes forming the p-n junction, the p-n junction being a heterojunction.
10
Dependent← claim 1window layergallium arsenide based photovoltaic cell with self-bypass diode function
The method of claim 1, further comprising forming a window layer disposed on a surface of the base layer and away from the emitter layer.
11
IndependentGaAsemitter layer (higher bandgap material, different from base layer)intermediate layerwindow layergallium arsenide based photovoltaic cell with self-bypass diode function
A method for forming a semiconductor device, the method comprising: providing a semiconductor structure including a base layer that absorbs photons to convert light energy into electrical energy at the semiconductor device, with the base layer including a Group III-V compound semiconductor; forming the semiconductor structure to include an emitter layer that is made of a different material than the base layer and has a higher bandgap than the base layer; forming a p-n junction within the semiconductor structure between the emitter layer and the base layer such that under reverse-bias conditions of the semiconductor device, the p-n junction provides a bypass function using a Zener breakdown effect that breaks down in a controlled manner; forming an intermediate layer between the emitter layer and the base layer; and 19 forming a window layer disposed on a surface of the base layer and away from the emitter layer.
12
Dependent← claim 11GaAs
The method of claim 11, wherein the base layer is highly doped within a range of about 4×1017 cm⁻³ to about 1×1019 cm⁻³, and a thickness of the base layer is within a range of about 300 nm to about 3,500 nm.
13
Dependent← claim 11gallium arsenide based photovoltaic cell with self-bypass diode function
The method of claim 11, further comprising providing the bypass function with no distinct bypass diode connected to or included in the semiconductor device.
14
Dependent← claim 11contact layergallium arsenide based photovoltaic cell with self-bypass diode function
The method of claim 11, further comprising providing 10 a contact layer disposed adjacent to the window layer and a metal layer disposed adjacent to the contact layer.
15
Dependent← claim 11gallium arsenide based photovoltaic cell with self-bypass diode function
The method of claim 11, further comprising forming the p-n junction at a location offset from a heterojunction in the semiconductor structure by up to about 200 nm.
16
Dependent← claim 11gallium arsenide based photovoltaic cell with self-bypass diode function
The method of claim 11, further comprising forming the p-n junction between the emitter layer and the interme-diate layer, and forming a heterojunction between the base layer and the intermediate layer.
17
Dependent← claim 11intermediate layer
The method of claim 11, further comprising forming the intermediate layer to include a gradation in material composition from the material of the base layer to the material of the emitter layer.
18
Dependent← claim 11gallium arsenide based photovoltaic cell with self-bypass diode function
The method of claim 11, wherein the p-n junction is a heterojunction. ∗ ∗ ∗ ∗ ∗
Device structures
Layer stacks claimed or described, ordered top of device to substrate.
gallium arsenide based photovoltaic cell with self-bypass diode function
contact layercontact layer
emitter layer (higher bandgap material, different from base layer)emitter layer (higher bandgap)
intermediate layerintermediate layer
GaAsbase/absorber layer (GaAs)
window layerwindow layer
AlAssacrificial layer (ELO)
Materials
Materials described outside the worked examples.
base layer (Group III-V compound semiconductor, e.g. gallium arsenide)
GaAs
Absorber/Base Layer
Epitaxial Layer Material
emitter layer (higher bandgap material, different from base layer)
Process steps
Additional fabrication and treatment steps described in the patent.
1
Epitaxial Growth
Step 1
Temperature
550°C
Process details
methods:
Characterization
Measurements and analyses referenced in the patent, with their drawing references.
device performance measurement
Device Performance Measurement
FIG. 8 is a graph illustrating doping and breakdown characteristics of a gallium arsenide based solar cell with respect to the bypass function described …
description:Wet etch selectively etches sacrificial layer (AlAs or AlAs alloy) to separate GaAs cell from growth wafer
Materials:AlAs
Device Performance Measurement
FIG. 9 is a graph illustrating voltage and current charac- teristics of a gallium arsenide based solar cell with respect to the bypass function described …
FIG. 10 is a graph illustrating band-to-band tunneling characteristics of a gallium arsenide based solar cell with 50 respect to the bypass function described …
FIG. 11 is a graph illustrating voltage and current char- acteristics of a gallium arsenide based solar cell with respect to the bypass function described …
US 5,902,417 A5,902,417 A 5/1999 Lillington et al.
US 5,911,839 A5,911,839 A 6/1999 Tsai et al.
US 6,278,054 B16,278,054 B1 8/2001 Ho et al.
US 6,316,716 B16,316,716 B1 11/2001 Hilgrath
US 6,552,259 B16,552,259 B1 4/2003 Hosomi et al.
US 7,592,538 B27,592,538 B2 9/2009 Sharps et al.
US 7,687,707 B27,687,707 B2 3/2010 Meck et al.
US 7,696,429 B27,696,429 B2 4/2010 Strobl
US 7,759,572 B27,759,572 B2 7/2010 Sharps et al.
US 8,124,870 B28,124,870 B2 2/2012 Woods et al.
US 2001/0017154 A12001/0017154 A1 8/2001 Washio
US 2003/0145884 A12003/0145884 A1 8/2003 King et al.
US 2005/0268963 A12005/0268963 A1 12/2005 Jordan et al.
US 2006/0185582 A12006/0185582 A1 8/2006 Atwater et al.
US 2007/0137700 A12007/0137700 A1 6/2007 Sherohman et al.
US 2009/0078310 A12009/0078310 A1 3/2009 Stan et al.
US 2009/0283848 A12009/0283848 A1 11/2009 Tan et al.
US 2010/0096001 A12010/0096001 A1 4/2010 Sivananthan et al.
US 2010/0108134 A12010/0108134 A1 5/2010 Ravi
US 2010/0212729 A12010/0212729 A1 8/2010 Hsu
US 2010/0320546 A12010/0320546 A1 12/2010 Tamura
US 2011/0139240 A12011/0139240 A1 6/2011 Allenic et al.
US 2011/0240099 A12011/0240099 A1 10/2011 Ellinger et al.
JP 2001189483 AJP 2001189483 A 7/2001
JP 2005514763 A5JP 2005514763 A5 5/2005
Cited non-patent literature · 2
Enhancing Efficiency of a Heteroface Solar Cell. Akeed Ahmed Pavel, et al., “Enhancing Efficiency of a Heteroface Solar Cell,” Electron Devices, 2005 Spanish Conference on Tarragona, Spain Feb. 2-4, 2005.
Chinese Office Action issued in Chinese Patent Application No. 201210027952.3 dated Apr. 12, 2016. European Search Report issued in EuropeanApplication No. 17198268 dated Jan. 10, 2018 (10 pages). Chinese Office Action issued in Chinese Patent Application No. 201710057541.1 dated Jul. 2, 2018 (10 pages total). European Office Action corresponding to European Application No. 17198268.9, dated Feb. 20, 2019. European communication pursuant to Article 94(3) corresponding to EP Application No. 17198268.9, dated Jul. 23, 2019. International Search Report and Written Opinion corresponding to PCT/US2020/018028, dated May 13, 2020.
description:Wet etch selectively etches sacrificial layer (AlAs or AlAs alloy) to separate GaAs cell from growth wafer
Materials:AlAs
Device Performance Measurement
FIG. 9 is a graph illustrating voltage and current charac- teristics of a gallium arsenide based solar cell with respect to the bypass function described …
FIG. 10 is a graph illustrating band-to-band tunneling characteristics of a gallium arsenide based solar cell with 50 respect to the bypass function described …
FIG. 11 is a graph illustrating voltage and current char- acteristics of a gallium arsenide based solar cell with respect to the bypass function described …
US 5,902,417 A5,902,417 A 5/1999 Lillington et al.
US 5,911,839 A5,911,839 A 6/1999 Tsai et al.
US 6,278,054 B16,278,054 B1 8/2001 Ho et al.
US 6,316,716 B16,316,716 B1 11/2001 Hilgrath
US 6,552,259 B16,552,259 B1 4/2003 Hosomi et al.
US 7,592,538 B27,592,538 B2 9/2009 Sharps et al.
US 7,687,707 B27,687,707 B2 3/2010 Meck et al.
US 7,696,429 B27,696,429 B2 4/2010 Strobl
US 7,759,572 B27,759,572 B2 7/2010 Sharps et al.
US 8,124,870 B28,124,870 B2 2/2012 Woods et al.
US 2001/0017154 A12001/0017154 A1 8/2001 Washio
US 2003/0145884 A12003/0145884 A1 8/2003 King et al.
US 2005/0268963 A12005/0268963 A1 12/2005 Jordan et al.
US 2006/0185582 A12006/0185582 A1 8/2006 Atwater et al.
US 2007/0137700 A12007/0137700 A1 6/2007 Sherohman et al.
US 2009/0078310 A12009/0078310 A1 3/2009 Stan et al.
US 2009/0283848 A12009/0283848 A1 11/2009 Tan et al.
US 2010/0096001 A12010/0096001 A1 4/2010 Sivananthan et al.
US 2010/0108134 A12010/0108134 A1 5/2010 Ravi
US 2010/0212729 A12010/0212729 A1 8/2010 Hsu
US 2010/0320546 A12010/0320546 A1 12/2010 Tamura
US 2011/0139240 A12011/0139240 A1 6/2011 Allenic et al.
US 2011/0240099 A12011/0240099 A1 10/2011 Ellinger et al.
JP 2001189483 AJP 2001189483 A 7/2001
JP 2005514763 A5JP 2005514763 A5 5/2005
Cited non-patent literature · 2
Enhancing Efficiency of a Heteroface Solar Cell. Akeed Ahmed Pavel, et al., “Enhancing Efficiency of a Heteroface Solar Cell,” Electron Devices, 2005 Spanish Conference on Tarragona, Spain Feb. 2-4, 2005.
Chinese Office Action issued in Chinese Patent Application No. 201210027952.3 dated Apr. 12, 2016. European Search Report issued in EuropeanApplication No. 17198268 dated Jan. 10, 2018 (10 pages). Chinese Office Action issued in Chinese Patent Application No. 201710057541.1 dated Jul. 2, 2018 (10 pages total). European Office Action corresponding to European Application No. 17198268.9, dated Feb. 20, 2019. European communication pursuant to Article 94(3) corresponding to EP Application No. 17198268.9, dated Jul. 23, 2019. International Search Report and Written Opinion corresponding to PCT/US2020/018028, dated May 13, 2020.
description:Wet etch selectively etches sacrificial layer (AlAs or AlAs alloy) to separate GaAs cell from growth wafer
Materials:AlAs
Device Performance Measurement
FIG. 9 is a graph illustrating voltage and current charac- teristics of a gallium arsenide based solar cell with respect to the bypass function described …
FIG. 10 is a graph illustrating band-to-band tunneling characteristics of a gallium arsenide based solar cell with 50 respect to the bypass function described …
FIG. 11 is a graph illustrating voltage and current char- acteristics of a gallium arsenide based solar cell with respect to the bypass function described …
US 5,902,417 A5,902,417 A 5/1999 Lillington et al.
US 5,911,839 A5,911,839 A 6/1999 Tsai et al.
US 6,278,054 B16,278,054 B1 8/2001 Ho et al.
US 6,316,716 B16,316,716 B1 11/2001 Hilgrath
US 6,552,259 B16,552,259 B1 4/2003 Hosomi et al.
US 7,592,538 B27,592,538 B2 9/2009 Sharps et al.
US 7,687,707 B27,687,707 B2 3/2010 Meck et al.
US 7,696,429 B27,696,429 B2 4/2010 Strobl
US 7,759,572 B27,759,572 B2 7/2010 Sharps et al.
US 8,124,870 B28,124,870 B2 2/2012 Woods et al.
US 2001/0017154 A12001/0017154 A1 8/2001 Washio
US 2003/0145884 A12003/0145884 A1 8/2003 King et al.
US 2005/0268963 A12005/0268963 A1 12/2005 Jordan et al.
US 2006/0185582 A12006/0185582 A1 8/2006 Atwater et al.
US 2007/0137700 A12007/0137700 A1 6/2007 Sherohman et al.
US 2009/0078310 A12009/0078310 A1 3/2009 Stan et al.
US 2009/0283848 A12009/0283848 A1 11/2009 Tan et al.
US 2010/0096001 A12010/0096001 A1 4/2010 Sivananthan et al.
US 2010/0108134 A12010/0108134 A1 5/2010 Ravi
US 2010/0212729 A12010/0212729 A1 8/2010 Hsu
US 2010/0320546 A12010/0320546 A1 12/2010 Tamura
US 2011/0139240 A12011/0139240 A1 6/2011 Allenic et al.
US 2011/0240099 A12011/0240099 A1 10/2011 Ellinger et al.
JP 2001189483 AJP 2001189483 A 7/2001
JP 2005514763 A5JP 2005514763 A5 5/2005
Cited non-patent literature · 2
Enhancing Efficiency of a Heteroface Solar Cell. Akeed Ahmed Pavel, et al., “Enhancing Efficiency of a Heteroface Solar Cell,” Electron Devices, 2005 Spanish Conference on Tarragona, Spain Feb. 2-4, 2005.
Chinese Office Action issued in Chinese Patent Application No. 201210027952.3 dated Apr. 12, 2016. European Search Report issued in EuropeanApplication No. 17198268 dated Jan. 10, 2018 (10 pages). Chinese Office Action issued in Chinese Patent Application No. 201710057541.1 dated Jul. 2, 2018 (10 pages total). European Office Action corresponding to European Application No. 17198268.9, dated Feb. 20, 2019. European communication pursuant to Article 94(3) corresponding to EP Application No. 17198268.9, dated Jul. 23, 2019. International Search Report and Written Opinion corresponding to PCT/US2020/018028, dated May 13, 2020.
description:Wet etch selectively etches sacrificial layer (AlAs or AlAs alloy) to separate GaAs cell from growth wafer
Materials:AlAs
Device Performance Measurement
FIG. 9 is a graph illustrating voltage and current charac- teristics of a gallium arsenide based solar cell with respect to the bypass function described …
FIG. 10 is a graph illustrating band-to-band tunneling characteristics of a gallium arsenide based solar cell with 50 respect to the bypass function described …
FIG. 11 is a graph illustrating voltage and current char- acteristics of a gallium arsenide based solar cell with respect to the bypass function described …
US 5,902,417 A5,902,417 A 5/1999 Lillington et al.
US 5,911,839 A5,911,839 A 6/1999 Tsai et al.
US 6,278,054 B16,278,054 B1 8/2001 Ho et al.
US 6,316,716 B16,316,716 B1 11/2001 Hilgrath
US 6,552,259 B16,552,259 B1 4/2003 Hosomi et al.
US 7,592,538 B27,592,538 B2 9/2009 Sharps et al.
US 7,687,707 B27,687,707 B2 3/2010 Meck et al.
US 7,696,429 B27,696,429 B2 4/2010 Strobl
US 7,759,572 B27,759,572 B2 7/2010 Sharps et al.
US 8,124,870 B28,124,870 B2 2/2012 Woods et al.
US 2001/0017154 A12001/0017154 A1 8/2001 Washio
US 2003/0145884 A12003/0145884 A1 8/2003 King et al.
US 2005/0268963 A12005/0268963 A1 12/2005 Jordan et al.
US 2006/0185582 A12006/0185582 A1 8/2006 Atwater et al.
US 2007/0137700 A12007/0137700 A1 6/2007 Sherohman et al.
US 2009/0078310 A12009/0078310 A1 3/2009 Stan et al.
US 2009/0283848 A12009/0283848 A1 11/2009 Tan et al.
US 2010/0096001 A12010/0096001 A1 4/2010 Sivananthan et al.
US 2010/0108134 A12010/0108134 A1 5/2010 Ravi
US 2010/0212729 A12010/0212729 A1 8/2010 Hsu
US 2010/0320546 A12010/0320546 A1 12/2010 Tamura
US 2011/0139240 A12011/0139240 A1 6/2011 Allenic et al.
US 2011/0240099 A12011/0240099 A1 10/2011 Ellinger et al.
JP 2001189483 AJP 2001189483 A 7/2001
JP 2005514763 A5JP 2005514763 A5 5/2005
Cited non-patent literature · 2
Enhancing Efficiency of a Heteroface Solar Cell. Akeed Ahmed Pavel, et al., “Enhancing Efficiency of a Heteroface Solar Cell,” Electron Devices, 2005 Spanish Conference on Tarragona, Spain Feb. 2-4, 2005.
Chinese Office Action issued in Chinese Patent Application No. 201210027952.3 dated Apr. 12, 2016. European Search Report issued in EuropeanApplication No. 17198268 dated Jan. 10, 2018 (10 pages). Chinese Office Action issued in Chinese Patent Application No. 201710057541.1 dated Jul. 2, 2018 (10 pages total). European Office Action corresponding to European Application No. 17198268.9, dated Feb. 20, 2019. European communication pursuant to Article 94(3) corresponding to EP Application No. 17198268.9, dated Jul. 23, 2019. International Search Report and Written Opinion corresponding to PCT/US2020/018028, dated May 13, 2020.