Patent
US 9,150,417argon
Ar
silicon vapor
Si
second heating rate | 25–35 °C/min | — |
third heating rate | 30–40 °C/min | — |
argon
Ar
silicon vapor
Si
second heating rate | 25–35 °C/min | — |
third heating rate | 30–40 °C/min | — |
argon
Ar
silicon vapor
Si
second heating rate | 25–35 °C/min | — |
third heating rate | 30–40 °C/min | — |
argon
Ar
silicon vapor
Si
second heating rate | 25–35 °C/min | — |
third heating rate | 30–40 °C/min | — |