Research paper
Experimental GrowthExperimental Characterization| Type | Label | Value | Material | Sample | Condition | Source |
|---|---|---|---|---|---|---|
| Substrate Miscut | miscut toward <110> | 4deg | — | |||
| Film Thickness | nominal thickness | 45nm | — | |||
| Film Thickness | pre-anneal thickness | 43nm | — | |||
| Film Thickness | post-anneal thickness | 48nm | — | |||
| Lattice Mismatch | aGaSe vs aGaAs,110 | -6.5% | — | — | ||
| Xrd Rocking Fwhm | (004) | 1.172deg | — | |||
| Xrd Rocking Fwhm | (004) | 4.506deg | — |
| Type | Label | Value | Material | Sample | Condition | Source |
|---|---|---|---|---|---|---|
| Substrate Miscut | miscut toward <110> | 4deg | — | |||
| Film Thickness | nominal thickness | 45nm | — | |||
| Film Thickness | pre-anneal thickness | 43nm | — | |||
| Film Thickness | post-anneal thickness | 48nm | — | |||
| Lattice Mismatch | aGaSe vs aGaAs,110 | -6.5% | — | — | ||
| Xrd Rocking Fwhm | (004) | 1.172deg | — | |||
| Xrd Rocking Fwhm | (004) | 4.506deg | — |
| Type | Label | Value | Material | Sample | Condition | Source |
|---|---|---|---|---|---|---|
| Substrate Miscut | miscut toward <110> | 4deg | — | |||
| Film Thickness | nominal thickness | 45nm | — | |||
| Film Thickness | pre-anneal thickness | 43nm | — | |||
| Film Thickness | post-anneal thickness | 48nm | — | |||
| Lattice Mismatch | aGaSe vs aGaAs,110 | -6.5% | — | — | ||
| Xrd Rocking Fwhm | (004) | 1.172deg | — | |||
| Xrd Rocking Fwhm | (004) | 4.506deg | — |
| Type | Label | Value | Material | Sample | Condition | Source |
|---|---|---|---|---|---|---|
| Substrate Miscut | miscut toward <110> | 4deg | — | |||
| Film Thickness | nominal thickness | 45nm | — | |||
| Film Thickness | pre-anneal thickness | 43nm | — | |||
| Film Thickness | post-anneal thickness | 48nm | — | |||
| Lattice Mismatch | aGaSe vs aGaAs,110 | -6.5% | — | — | ||
| Xrd Rocking Fwhm | (004) | 1.172deg | — | |||
| Xrd Rocking Fwhm | (004) | 4.506deg | — |
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