Research paper
Experimental Characterization| Type | Label | Value | Material | Sample | Condition | Source |
|---|---|---|---|---|---|---|
| Substrate Thickness | 2DPA-1 film thickness | 35nm | — | |||
| Substrate Thickness | 2DPA-1 film thickness | 8nm | — | |||
| Substrate Thickness | 2DPA-1 film thickness | 15nm | — | |||
| Substrate Thickness | 2DPA-1 film thickness | 65nm | — | |||
| Resonator Radius | membrane radius | 4.25um | — | |||
| Resonator Radius | membrane radius | 2.75um | — | |||
| Substrate Depth | microwell depth | 960nm | — | |||
| Youngs Modulus | Young's modulus E | 11.2GPa | — |
| Type | Label | Value | Material | Sample | Condition | Source |
|---|---|---|---|---|---|---|
| Substrate Thickness | 2DPA-1 film thickness | 35nm | — | |||
| Substrate Thickness | 2DPA-1 film thickness | 8nm | — | |||
| Substrate Thickness | 2DPA-1 film thickness | 15nm | — | |||
| Substrate Thickness | 2DPA-1 film thickness | 65nm | — | |||
| Resonator Radius | membrane radius | 4.25um | — | |||
| Resonator Radius | membrane radius | 2.75um | — | |||
| Substrate Depth | microwell depth | 960nm | — | |||
| Youngs Modulus | Young's modulus E | 11.2GPa | — |
| Type | Label | Value | Material | Sample | Condition | Source |
|---|---|---|---|---|---|---|
| Substrate Thickness | 2DPA-1 film thickness | 35nm | — | |||
| Substrate Thickness | 2DPA-1 film thickness | 8nm | — | |||
| Substrate Thickness | 2DPA-1 film thickness | 15nm | — | |||
| Substrate Thickness | 2DPA-1 film thickness | 65nm | — | |||
| Resonator Radius | membrane radius | 4.25um | — | |||
| Resonator Radius | membrane radius | 2.75um | — | |||
| Substrate Depth | microwell depth | 960nm | — | |||
| Youngs Modulus | Young's modulus E | 11.2GPa | — |
| Type | Label | Value | Material | Sample | Condition | Source |
|---|---|---|---|---|---|---|
| Substrate Thickness | 2DPA-1 film thickness | 35nm | — | |||
| Substrate Thickness | 2DPA-1 film thickness | 8nm | — | |||
| Substrate Thickness | 2DPA-1 film thickness | 15nm | — | |||
| Substrate Thickness | 2DPA-1 film thickness | 65nm | — | |||
| Resonator Radius | membrane radius | 4.25um | — | |||
| Resonator Radius | membrane radius | 2.75um | — | |||
| Substrate Depth | microwell depth | 960nm | — | |||
| Youngs Modulus | Young's modulus E | 11.2GPa | — |