Research paperExperimental CharacterizationMonolithic integration of single quantum emitters in hBN bullseye cavitiesLesley Spencer, Jake Horder, Sejeong Kim, Milos Toth et al.2028·10.1021/acsphotonics.3c01282·arXiv:2309.14575AbstractThe ability of hexagonal boron nitride to host quantum emitters in the form of deep-level color centers makes it an important material for quantum photonic applications. This work utilizes a monolithic circular Bragg grating device to enhance the collection of single photons with 436 nm wavelength emitted from quantum emitters in hexagonal boron nitride. We observe a 6-fold increase in collected intensity for a single photon emitter coupled to a device compared to an uncoupled emitter, and show exceptional spectral stability at cryogenic temperature. The devices were fabricated using a number of etching methods, beyond standard fluorine-based reactive ion etching, and the quantum emitters were created using a site-specific electron beam irradiation technique. Our work demonstrates the potential of monolithically-integrated systems for deterministically-placed quantum emitters using a variety of fabrication options.Read more
Bulk, unstructured hBN reference emitter sample on SiO₂/Si substrate.1 characterization5 properties1 figureExperimentalhBNStudied MaterialSiO₂Substrate / DielectricSiSubstrate / DielectricExpand
hBN circular Bragg grating device fabricated by fluorine-based RIE, used for emitter coupling and characterization.3 preparations3 characterizations4 properties3 figuresExperimentalhBNStudied MaterialSiO₂Substrate / DielectricSiSubstrate / DielectricExpand
hBN CBG device fabricated by argon IBE with PMMA mask.3 preparations1 characterization1 figureExperimentalhBNStudied MaterialSiO₂Substrate / DielectricSiSubstrate / DielectricExpand
hBN CBG device fabricated by argon/SF₆ CAIBE with PMMA mask.3 preparations1 characterization1 figureExperimentalhBNStudied MaterialSiO₂Substrate / DielectricSiSubstrate / DielectricExpand
hBN CBG device fabricated by chlorine-based RIE with CSAR mask removed before imaging.3 preparations1 characterization1 figureExperimentalhBNStudied MaterialSiO₂Substrate / DielectricSiSubstrate / DielectricExpand
Research paperExperimental CharacterizationMonolithic integration of single quantum emitters in hBN bullseye cavitiesLesley Spencer, Jake Horder, Sejeong Kim, Milos Toth et al.2028·10.1021/acsphotonics.3c01282·arXiv:2309.14575AbstractThe ability of hexagonal boron nitride to host quantum emitters in the form of deep-level color centers makes it an important material for quantum photonic applications. This work utilizes a monolithic circular Bragg grating device to enhance the collection of single photons with 436 nm wavelength emitted from quantum emitters in hexagonal boron nitride. We observe a 6-fold increase in collected intensity for a single photon emitter coupled to a device compared to an uncoupled emitter, and show exceptional spectral stability at cryogenic temperature. The devices were fabricated using a number of etching methods, beyond standard fluorine-based reactive ion etching, and the quantum emitters were created using a site-specific electron beam irradiation technique. Our work demonstrates the potential of monolithically-integrated systems for deterministically-placed quantum emitters using a variety of fabrication options.Read more
Bulk, unstructured hBN reference emitter sample on SiO₂/Si substrate.1 characterization5 properties1 figureExperimentalhBNStudied MaterialSiO₂Substrate / DielectricSiSubstrate / DielectricExpand
hBN circular Bragg grating device fabricated by fluorine-based RIE, used for emitter coupling and characterization.3 preparations3 characterizations4 properties3 figuresExperimentalhBNStudied MaterialSiO₂Substrate / DielectricSiSubstrate / DielectricExpand
hBN CBG device fabricated by argon IBE with PMMA mask.3 preparations1 characterization1 figureExperimentalhBNStudied MaterialSiO₂Substrate / DielectricSiSubstrate / DielectricExpand
hBN CBG device fabricated by argon/SF₆ CAIBE with PMMA mask.3 preparations1 characterization1 figureExperimentalhBNStudied MaterialSiO₂Substrate / DielectricSiSubstrate / DielectricExpand
hBN CBG device fabricated by chlorine-based RIE with CSAR mask removed before imaging.3 preparations1 characterization1 figureExperimentalhBNStudied MaterialSiO₂Substrate / DielectricSiSubstrate / DielectricExpand
Research paperExperimental CharacterizationMonolithic integration of single quantum emitters in hBN bullseye cavitiesLesley Spencer, Jake Horder, Sejeong Kim, Milos Toth et al.2028·10.1021/acsphotonics.3c01282·arXiv:2309.14575AbstractThe ability of hexagonal boron nitride to host quantum emitters in the form of deep-level color centers makes it an important material for quantum photonic applications. This work utilizes a monolithic circular Bragg grating device to enhance the collection of single photons with 436 nm wavelength emitted from quantum emitters in hexagonal boron nitride. We observe a 6-fold increase in collected intensity for a single photon emitter coupled to a device compared to an uncoupled emitter, and show exceptional spectral stability at cryogenic temperature. The devices were fabricated using a number of etching methods, beyond standard fluorine-based reactive ion etching, and the quantum emitters were created using a site-specific electron beam irradiation technique. Our work demonstrates the potential of monolithically-integrated systems for deterministically-placed quantum emitters using a variety of fabrication options.Read more
Bulk, unstructured hBN reference emitter sample on SiO₂/Si substrate.1 characterization5 properties1 figureExperimentalhBNStudied MaterialSiO₂Substrate / DielectricSiSubstrate / DielectricExpand
hBN circular Bragg grating device fabricated by fluorine-based RIE, used for emitter coupling and characterization.3 preparations3 characterizations4 properties3 figuresExperimentalhBNStudied MaterialSiO₂Substrate / DielectricSiSubstrate / DielectricExpand
hBN CBG device fabricated by argon IBE with PMMA mask.3 preparations1 characterization1 figureExperimentalhBNStudied MaterialSiO₂Substrate / DielectricSiSubstrate / DielectricExpand
hBN CBG device fabricated by argon/SF₆ CAIBE with PMMA mask.3 preparations1 characterization1 figureExperimentalhBNStudied MaterialSiO₂Substrate / DielectricSiSubstrate / DielectricExpand
hBN CBG device fabricated by chlorine-based RIE with CSAR mask removed before imaging.3 preparations1 characterization1 figureExperimentalhBNStudied MaterialSiO₂Substrate / DielectricSiSubstrate / DielectricExpand
Research paperExperimental CharacterizationMonolithic integration of single quantum emitters in hBN bullseye cavitiesLesley Spencer, Jake Horder, Sejeong Kim, Milos Toth et al.2028·10.1021/acsphotonics.3c01282·arXiv:2309.14575AbstractThe ability of hexagonal boron nitride to host quantum emitters in the form of deep-level color centers makes it an important material for quantum photonic applications. This work utilizes a monolithic circular Bragg grating device to enhance the collection of single photons with 436 nm wavelength emitted from quantum emitters in hexagonal boron nitride. We observe a 6-fold increase in collected intensity for a single photon emitter coupled to a device compared to an uncoupled emitter, and show exceptional spectral stability at cryogenic temperature. The devices were fabricated using a number of etching methods, beyond standard fluorine-based reactive ion etching, and the quantum emitters were created using a site-specific electron beam irradiation technique. Our work demonstrates the potential of monolithically-integrated systems for deterministically-placed quantum emitters using a variety of fabrication options.Read more
Bulk, unstructured hBN reference emitter sample on SiO₂/Si substrate.1 characterization5 properties1 figureExperimentalhBNStudied MaterialSiO₂Substrate / DielectricSiSubstrate / DielectricExpand
hBN circular Bragg grating device fabricated by fluorine-based RIE, used for emitter coupling and characterization.3 preparations3 characterizations4 properties3 figuresExperimentalhBNStudied MaterialSiO₂Substrate / DielectricSiSubstrate / DielectricExpand
hBN CBG device fabricated by argon IBE with PMMA mask.3 preparations1 characterization1 figureExperimentalhBNStudied MaterialSiO₂Substrate / DielectricSiSubstrate / DielectricExpand
hBN CBG device fabricated by argon/SF₆ CAIBE with PMMA mask.3 preparations1 characterization1 figureExperimentalhBNStudied MaterialSiO₂Substrate / DielectricSiSubstrate / DielectricExpand
hBN CBG device fabricated by chlorine-based RIE with CSAR mask removed before imaging.3 preparations1 characterization1 figureExperimentalhBNStudied MaterialSiO₂Substrate / DielectricSiSubstrate / DielectricExpand