Patent
US 9,630,183ELECTROWETTING ON DIELECTRIC USING GRAPHENE
Mark Ming-Cheng Cheng
US
Copyright © 2026 Matter42. All rights reserved.
Patent
Atlas literature
Patent
US 9,630,183Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1 is a perspective view of an EWOD device in accordance with the principles of the present disclosure; [0009]
FIG. 2 is a perspective view of an EWOD device in accordance with the principles of the present disclosure; [0010]
FIG. 3 is a flowchart of a method of forming an EWOD device in accordance with the principles of the present disclosure; [0011]
FIG. 4 illustrates a graph showing Raman spectra of the graphene of
FIG. 5 illustrates a schematic view of an EWOD device 10 in accordance -3- Substitute Specification-Not Marked Attorney Docket No. 10114-241 (WSU 12-1088) with …
FIG. 6 illustrates a side view of changes in a contact angle of a droplet on the EWOD device in response to applied AC voltages in accordance with the …
FIG. 7 Illustrates a graph showing the changes in a contact angle of droplets in response to applied AC voltages in accordance with the principles of the …
FIG. 8 illustrates a graph showing the cyclability of the contact angles of a droplet in accordance with the principles of the present disclosure; [0016]
FIG. 9 illustrates a schematic view of an equivalent circuit model for an EWOD device; [0017]
FIG. 10 illustrates a graph 66 showing Nyquist plots which demonstrate that the circuit may be cataloged by two different regions depending on the frequency of …
FIG. 11 illustrates a graph showing leakage current measurements of an EWOD device with thin Teflon coatings on gold vs. graphene electrodes in accordance with …
FIG. 12 illustrates a graph showing leakage current measurements of an EWOD device with a thick Teflon layer on gold vs. graphene electrodes in accordance with …
FIG. 13 illustrates a schematic view of an EWOD device in accordance with the principles of the present disclosure; [0021]
FIG. 14 illustrates a graph showing leakage current measurements of an EWOD device with a Parylene C pinhole-free dielectric layer with thin Teflon -4- …
FIG. 15 illustrates a side view of gas bubble generation around Teflon/gold electrodes in accordance with the principles of the present disclosure; [0023]
FIG. 16 illustrates a side view of Teflon/graphene electrodes with no bubble generation in accordance with the principles of the present disclosure; [0024]
FIGS. 17 illustrates perspective views of electrowetting performed on gold electrodes with no voltage applied; [0025]
FIGS. 18 illustrates perspective views of electrowetting performed on gold electrodes with AC voltage applied; [0026]
FIGS. 19 illustrates perspective views of electrowetting performed on graphene electrodes with no voltage applied; [0027]
FIGS. 20 illustrates perspective views of electrowetting performed on graphene electrodes with AC voltage applied; [0028]
FIGS. 21-26 illustrate perspective views of a fabrication process of an EWOD device having multiple spaced apart graphene electrodes; [0029]
FIG. 22, photolithography and oxygen plasma may be used to pattern the graphene 14 into individual graphene electrodes 14 in a circular pattern. During this …
FIG. 23, the Ti/Au contact electrodes 20 may then be defined using a lift-off technique. In
FIG. 24, after photolithography and e-beam evaporation, the substrate 18 (e.g. glass slide or PET film) may be coated with 1 pm Parylene C 78. In
FIG. 25, a thin layer of Teflon 76 may be spin-coated on top as a hydrophobic dielectric layer 76. In
FIG. 26, dielectric layers 16 (including the Parylene C 78 and Teflon 76) on the Ti/Au contact electrodes may be removed. In
FIG. 27 illustrates a side view of part of the completed EWOD device formed by the process of
FIGS. 28-33 illustrate a top view of an EWOD device used for manipulating movement of a liquid droplet in a circular pattern; and [0031]
FIG. 34 illustrates a top view of an EWOD device used for manipulating movement of a liquid droplet in a linear pattern. [0032] The drawings described herein …
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
Preliminary Amendment Attorney Docket No. 10114-241 (WSU 12-1088) II. Listing of the Claims 1. A method of electrowetting, the method comprising: providing an electrode, the electrode comprising: a graphene layer having a first side and a second side, the second side opposing the first side; and a dielectric layer disposed on the first side of the graphene layer; providing a liquid droplet on the dielectric layer; and applying a voltage through the droplet and the electrode, wherein a contact angle between the dielectric layer and an edge of the liquid droplet contacting the dielectric layer changes in response to the applied voltage.
The method of claim 1 wherein the dielectric layer comprises a Teflon layer.
The method of claim 1 further comprising a substrate layer disposed on the second side of the graphene layer.
The method of claim 1 wherein the electrode further comprises at least one contact pad in contact with one or both of the graphene layer and the dielectric layer.
The method of claim 1 wherein the contact pad comprises gold.
The method of claim 1 further comprising sensing, by the electrode, a property of the liquid droplet.
An electrowetting device comprising: an electrode comprising: -4- Brinks Gilson & Lione Ann Arbor, Michigan Preliminary Amendment Attorney Docket No. 10114-241 (WSU 12-1088) a graphene layer having a first side and a second side that opposes the first side; and a dielectric layer disposed on the first side of the graphene layer, the dielectric layer configured to allow a liquid droplet to be disposed thereon; and wherein the electrowetting device is configured to cause a change in a contact angle between the dielectric layer and an edge of the liquid droplet contacting the dielectric layer in response to a voltage applied through the droplet and the electrode.
The electrowetting device of claim 12 wherein the dielectric layer comprises a Teflon layer.
The electrowetting device of claim 12 further comprising a substrate layer disposed on the second side of the graphene layer.
The electrowetting device of claim 12 wherein the electrode further comprises at least one contact pad in contact with one or both of the a graphene layer and the dielectric layer.
The electrowetting device of claim 12 wherein the contact pad comprises gold.
The electrowetting device of claim 12 wherein the electrode is configured to sense a property of the liquid droplet.
An electrowetting device comprising: a first graphene electrode having a first side and a second side that opposes the first side; and -6- Brinks Gilson & Lione Ann Arbor, Michigan Preliminary Amendment Attorney Docket No. 10114-241 (WSU 12-1088) a second graphene electrode having a first side and a second side that opposes the first side, the second graphene electrode being spaced apart from the first graphene electrode; and a dielectric layer disposed on the first sides of the first and second graphene electrodes, the dielectric layer configured to allow a liquid droplet to be disposed thereon; and wherein the electrowetting device is configured to cause a change in a contact angle between the dielectric layer and an edge of the liquid droplet contacting the dielectric layer in response to a voltage applied through the droplet and one or both of the first or second electrodes.
Layer stacks claimed or described, ordered top of device to substrate.
electrowetting on dielectric (EWOD) device with single graphene electrode
electrowetting on dielectric (EWOD) device with dual graphene electrodes
Materials described outside the worked examples.
graphene
C
dielectric layer
Additional fabrication and treatment steps described in the patent.
Measurements and analyses referenced in the patent, with their drawing references.
FIG. 4 illustrates a graph showing Raman spectra of the graphene of
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
graphene optical transmission (frequency-independent) | 97.7 % | C |
graphene thin film optical transmission (better than ITO) |
Related documents with shared materials, methods, properties, or citations.
MULTILAYER CERAMIC ELECTRONIC COMPONENT HAVING AN EXTERNAL ELECTRODE WHICH INCLUDES A GRAPHENE PLATELET
METHOD OF MANUFACTURING LARGE AREA GRAPHENE AND GRAPHENE-BASED PHOTONICS DEVICES
Patent
Atlas literature
Patent
US 9,630,183Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1 is a perspective view of an EWOD device in accordance with the principles of the present disclosure; [0009]
FIG. 2 is a perspective view of an EWOD device in accordance with the principles of the present disclosure; [0010]
FIG. 3 is a flowchart of a method of forming an EWOD device in accordance with the principles of the present disclosure; [0011]
FIG. 4 illustrates a graph showing Raman spectra of the graphene of
FIG. 5 illustrates a schematic view of an EWOD device 10 in accordance -3- Substitute Specification-Not Marked Attorney Docket No. 10114-241 (WSU 12-1088) with …
FIG. 6 illustrates a side view of changes in a contact angle of a droplet on the EWOD device in response to applied AC voltages in accordance with the …
FIG. 7 Illustrates a graph showing the changes in a contact angle of droplets in response to applied AC voltages in accordance with the principles of the …
FIG. 8 illustrates a graph showing the cyclability of the contact angles of a droplet in accordance with the principles of the present disclosure; [0016]
FIG. 9 illustrates a schematic view of an equivalent circuit model for an EWOD device; [0017]
FIG. 10 illustrates a graph 66 showing Nyquist plots which demonstrate that the circuit may be cataloged by two different regions depending on the frequency of …
FIG. 11 illustrates a graph showing leakage current measurements of an EWOD device with thin Teflon coatings on gold vs. graphene electrodes in accordance with …
FIG. 12 illustrates a graph showing leakage current measurements of an EWOD device with a thick Teflon layer on gold vs. graphene electrodes in accordance with …
FIG. 13 illustrates a schematic view of an EWOD device in accordance with the principles of the present disclosure; [0021]
FIG. 14 illustrates a graph showing leakage current measurements of an EWOD device with a Parylene C pinhole-free dielectric layer with thin Teflon -4- …
FIG. 15 illustrates a side view of gas bubble generation around Teflon/gold electrodes in accordance with the principles of the present disclosure; [0023]
FIG. 16 illustrates a side view of Teflon/graphene electrodes with no bubble generation in accordance with the principles of the present disclosure; [0024]
FIGS. 17 illustrates perspective views of electrowetting performed on gold electrodes with no voltage applied; [0025]
FIGS. 18 illustrates perspective views of electrowetting performed on gold electrodes with AC voltage applied; [0026]
FIGS. 19 illustrates perspective views of electrowetting performed on graphene electrodes with no voltage applied; [0027]
FIGS. 20 illustrates perspective views of electrowetting performed on graphene electrodes with AC voltage applied; [0028]
FIGS. 21-26 illustrate perspective views of a fabrication process of an EWOD device having multiple spaced apart graphene electrodes; [0029]
FIG. 22, photolithography and oxygen plasma may be used to pattern the graphene 14 into individual graphene electrodes 14 in a circular pattern. During this …
FIG. 23, the Ti/Au contact electrodes 20 may then be defined using a lift-off technique. In
FIG. 24, after photolithography and e-beam evaporation, the substrate 18 (e.g. glass slide or PET film) may be coated with 1 pm Parylene C 78. In
FIG. 25, a thin layer of Teflon 76 may be spin-coated on top as a hydrophobic dielectric layer 76. In
FIG. 26, dielectric layers 16 (including the Parylene C 78 and Teflon 76) on the Ti/Au contact electrodes may be removed. In
FIG. 27 illustrates a side view of part of the completed EWOD device formed by the process of
FIGS. 28-33 illustrate a top view of an EWOD device used for manipulating movement of a liquid droplet in a circular pattern; and [0031]
FIG. 34 illustrates a top view of an EWOD device used for manipulating movement of a liquid droplet in a linear pattern. [0032] The drawings described herein …
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
Preliminary Amendment Attorney Docket No. 10114-241 (WSU 12-1088) II. Listing of the Claims 1. A method of electrowetting, the method comprising: providing an electrode, the electrode comprising: a graphene layer having a first side and a second side, the second side opposing the first side; and a dielectric layer disposed on the first side of the graphene layer; providing a liquid droplet on the dielectric layer; and applying a voltage through the droplet and the electrode, wherein a contact angle between the dielectric layer and an edge of the liquid droplet contacting the dielectric layer changes in response to the applied voltage.
The method of claim 1 wherein the dielectric layer comprises a Teflon layer.
The method of claim 1 further comprising a substrate layer disposed on the second side of the graphene layer.
The method of claim 1 wherein the electrode further comprises at least one contact pad in contact with one or both of the graphene layer and the dielectric layer.
The method of claim 1 wherein the contact pad comprises gold.
The method of claim 1 further comprising sensing, by the electrode, a property of the liquid droplet.
An electrowetting device comprising: an electrode comprising: -4- Brinks Gilson & Lione Ann Arbor, Michigan Preliminary Amendment Attorney Docket No. 10114-241 (WSU 12-1088) a graphene layer having a first side and a second side that opposes the first side; and a dielectric layer disposed on the first side of the graphene layer, the dielectric layer configured to allow a liquid droplet to be disposed thereon; and wherein the electrowetting device is configured to cause a change in a contact angle between the dielectric layer and an edge of the liquid droplet contacting the dielectric layer in response to a voltage applied through the droplet and the electrode.
The electrowetting device of claim 12 wherein the dielectric layer comprises a Teflon layer.
The electrowetting device of claim 12 further comprising a substrate layer disposed on the second side of the graphene layer.
The electrowetting device of claim 12 wherein the electrode further comprises at least one contact pad in contact with one or both of the a graphene layer and the dielectric layer.
The electrowetting device of claim 12 wherein the contact pad comprises gold.
The electrowetting device of claim 12 wherein the electrode is configured to sense a property of the liquid droplet.
An electrowetting device comprising: a first graphene electrode having a first side and a second side that opposes the first side; and -6- Brinks Gilson & Lione Ann Arbor, Michigan Preliminary Amendment Attorney Docket No. 10114-241 (WSU 12-1088) a second graphene electrode having a first side and a second side that opposes the first side, the second graphene electrode being spaced apart from the first graphene electrode; and a dielectric layer disposed on the first sides of the first and second graphene electrodes, the dielectric layer configured to allow a liquid droplet to be disposed thereon; and wherein the electrowetting device is configured to cause a change in a contact angle between the dielectric layer and an edge of the liquid droplet contacting the dielectric layer in response to a voltage applied through the droplet and one or both of the first or second electrodes.
Layer stacks claimed or described, ordered top of device to substrate.
electrowetting on dielectric (EWOD) device with single graphene electrode
electrowetting on dielectric (EWOD) device with dual graphene electrodes
Materials described outside the worked examples.
graphene
C
dielectric layer
Additional fabrication and treatment steps described in the patent.
Measurements and analyses referenced in the patent, with their drawing references.
FIG. 4 illustrates a graph showing Raman spectra of the graphene of
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
graphene optical transmission (frequency-independent) | 97.7 % | C |
graphene thin film optical transmission (better than ITO) |
Related documents with shared materials, methods, properties, or citations.
MULTILAYER CERAMIC ELECTRONIC COMPONENT HAVING AN EXTERNAL ELECTRODE WHICH INCLUDES A GRAPHENE PLATELET
METHOD OF MANUFACTURING LARGE AREA GRAPHENE AND GRAPHENE-BASED PHOTONICS DEVICES
Patent
Atlas literature
Patent
US 9,630,183Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1 is a perspective view of an EWOD device in accordance with the principles of the present disclosure; [0009]
FIG. 2 is a perspective view of an EWOD device in accordance with the principles of the present disclosure; [0010]
FIG. 3 is a flowchart of a method of forming an EWOD device in accordance with the principles of the present disclosure; [0011]
FIG. 4 illustrates a graph showing Raman spectra of the graphene of
FIG. 5 illustrates a schematic view of an EWOD device 10 in accordance -3- Substitute Specification-Not Marked Attorney Docket No. 10114-241 (WSU 12-1088) with …
FIG. 6 illustrates a side view of changes in a contact angle of a droplet on the EWOD device in response to applied AC voltages in accordance with the …
FIG. 7 Illustrates a graph showing the changes in a contact angle of droplets in response to applied AC voltages in accordance with the principles of the …
FIG. 8 illustrates a graph showing the cyclability of the contact angles of a droplet in accordance with the principles of the present disclosure; [0016]
FIG. 9 illustrates a schematic view of an equivalent circuit model for an EWOD device; [0017]
FIG. 10 illustrates a graph 66 showing Nyquist plots which demonstrate that the circuit may be cataloged by two different regions depending on the frequency of …
FIG. 11 illustrates a graph showing leakage current measurements of an EWOD device with thin Teflon coatings on gold vs. graphene electrodes in accordance with …
FIG. 12 illustrates a graph showing leakage current measurements of an EWOD device with a thick Teflon layer on gold vs. graphene electrodes in accordance with …
FIG. 13 illustrates a schematic view of an EWOD device in accordance with the principles of the present disclosure; [0021]
FIG. 14 illustrates a graph showing leakage current measurements of an EWOD device with a Parylene C pinhole-free dielectric layer with thin Teflon -4- …
FIG. 15 illustrates a side view of gas bubble generation around Teflon/gold electrodes in accordance with the principles of the present disclosure; [0023]
FIG. 16 illustrates a side view of Teflon/graphene electrodes with no bubble generation in accordance with the principles of the present disclosure; [0024]
FIGS. 17 illustrates perspective views of electrowetting performed on gold electrodes with no voltage applied; [0025]
FIGS. 18 illustrates perspective views of electrowetting performed on gold electrodes with AC voltage applied; [0026]
FIGS. 19 illustrates perspective views of electrowetting performed on graphene electrodes with no voltage applied; [0027]
FIGS. 20 illustrates perspective views of electrowetting performed on graphene electrodes with AC voltage applied; [0028]
FIGS. 21-26 illustrate perspective views of a fabrication process of an EWOD device having multiple spaced apart graphene electrodes; [0029]
FIG. 22, photolithography and oxygen plasma may be used to pattern the graphene 14 into individual graphene electrodes 14 in a circular pattern. During this …
FIG. 23, the Ti/Au contact electrodes 20 may then be defined using a lift-off technique. In
FIG. 24, after photolithography and e-beam evaporation, the substrate 18 (e.g. glass slide or PET film) may be coated with 1 pm Parylene C 78. In
FIG. 25, a thin layer of Teflon 76 may be spin-coated on top as a hydrophobic dielectric layer 76. In
FIG. 26, dielectric layers 16 (including the Parylene C 78 and Teflon 76) on the Ti/Au contact electrodes may be removed. In
FIG. 27 illustrates a side view of part of the completed EWOD device formed by the process of
FIGS. 28-33 illustrate a top view of an EWOD device used for manipulating movement of a liquid droplet in a circular pattern; and [0031]
FIG. 34 illustrates a top view of an EWOD device used for manipulating movement of a liquid droplet in a linear pattern. [0032] The drawings described herein …
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
Preliminary Amendment Attorney Docket No. 10114-241 (WSU 12-1088) II. Listing of the Claims 1. A method of electrowetting, the method comprising: providing an electrode, the electrode comprising: a graphene layer having a first side and a second side, the second side opposing the first side; and a dielectric layer disposed on the first side of the graphene layer; providing a liquid droplet on the dielectric layer; and applying a voltage through the droplet and the electrode, wherein a contact angle between the dielectric layer and an edge of the liquid droplet contacting the dielectric layer changes in response to the applied voltage.
The method of claim 1 wherein the dielectric layer comprises a Teflon layer.
The method of claim 1 further comprising a substrate layer disposed on the second side of the graphene layer.
The method of claim 1 wherein the electrode further comprises at least one contact pad in contact with one or both of the graphene layer and the dielectric layer.
The method of claim 1 wherein the contact pad comprises gold.
The method of claim 1 further comprising sensing, by the electrode, a property of the liquid droplet.
An electrowetting device comprising: an electrode comprising: -4- Brinks Gilson & Lione Ann Arbor, Michigan Preliminary Amendment Attorney Docket No. 10114-241 (WSU 12-1088) a graphene layer having a first side and a second side that opposes the first side; and a dielectric layer disposed on the first side of the graphene layer, the dielectric layer configured to allow a liquid droplet to be disposed thereon; and wherein the electrowetting device is configured to cause a change in a contact angle between the dielectric layer and an edge of the liquid droplet contacting the dielectric layer in response to a voltage applied through the droplet and the electrode.
The electrowetting device of claim 12 wherein the dielectric layer comprises a Teflon layer.
The electrowetting device of claim 12 further comprising a substrate layer disposed on the second side of the graphene layer.
The electrowetting device of claim 12 wherein the electrode further comprises at least one contact pad in contact with one or both of the a graphene layer and the dielectric layer.
The electrowetting device of claim 12 wherein the contact pad comprises gold.
The electrowetting device of claim 12 wherein the electrode is configured to sense a property of the liquid droplet.
An electrowetting device comprising: a first graphene electrode having a first side and a second side that opposes the first side; and -6- Brinks Gilson & Lione Ann Arbor, Michigan Preliminary Amendment Attorney Docket No. 10114-241 (WSU 12-1088) a second graphene electrode having a first side and a second side that opposes the first side, the second graphene electrode being spaced apart from the first graphene electrode; and a dielectric layer disposed on the first sides of the first and second graphene electrodes, the dielectric layer configured to allow a liquid droplet to be disposed thereon; and wherein the electrowetting device is configured to cause a change in a contact angle between the dielectric layer and an edge of the liquid droplet contacting the dielectric layer in response to a voltage applied through the droplet and one or both of the first or second electrodes.
Layer stacks claimed or described, ordered top of device to substrate.
electrowetting on dielectric (EWOD) device with single graphene electrode
electrowetting on dielectric (EWOD) device with dual graphene electrodes
Materials described outside the worked examples.
graphene
C
dielectric layer
Additional fabrication and treatment steps described in the patent.
Measurements and analyses referenced in the patent, with their drawing references.
FIG. 4 illustrates a graph showing Raman spectra of the graphene of
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
graphene optical transmission (frequency-independent) | 97.7 % | C |
graphene thin film optical transmission (better than ITO) |
Related documents with shared materials, methods, properties, or citations.
MULTILAYER CERAMIC ELECTRONIC COMPONENT HAVING AN EXTERNAL ELECTRODE WHICH INCLUDES A GRAPHENE PLATELET
METHOD OF MANUFACTURING LARGE AREA GRAPHENE AND GRAPHENE-BASED PHOTONICS DEVICES
Patent
Atlas literature
Patent
US 9,630,183Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1 is a perspective view of an EWOD device in accordance with the principles of the present disclosure; [0009]
FIG. 2 is a perspective view of an EWOD device in accordance with the principles of the present disclosure; [0010]
FIG. 3 is a flowchart of a method of forming an EWOD device in accordance with the principles of the present disclosure; [0011]
FIG. 4 illustrates a graph showing Raman spectra of the graphene of
FIG. 5 illustrates a schematic view of an EWOD device 10 in accordance -3- Substitute Specification-Not Marked Attorney Docket No. 10114-241 (WSU 12-1088) with …
FIG. 6 illustrates a side view of changes in a contact angle of a droplet on the EWOD device in response to applied AC voltages in accordance with the …
FIG. 7 Illustrates a graph showing the changes in a contact angle of droplets in response to applied AC voltages in accordance with the principles of the …
FIG. 8 illustrates a graph showing the cyclability of the contact angles of a droplet in accordance with the principles of the present disclosure; [0016]
FIG. 9 illustrates a schematic view of an equivalent circuit model for an EWOD device; [0017]
FIG. 10 illustrates a graph 66 showing Nyquist plots which demonstrate that the circuit may be cataloged by two different regions depending on the frequency of …
FIG. 11 illustrates a graph showing leakage current measurements of an EWOD device with thin Teflon coatings on gold vs. graphene electrodes in accordance with …
FIG. 12 illustrates a graph showing leakage current measurements of an EWOD device with a thick Teflon layer on gold vs. graphene electrodes in accordance with …
FIG. 13 illustrates a schematic view of an EWOD device in accordance with the principles of the present disclosure; [0021]
FIG. 14 illustrates a graph showing leakage current measurements of an EWOD device with a Parylene C pinhole-free dielectric layer with thin Teflon -4- …
FIG. 15 illustrates a side view of gas bubble generation around Teflon/gold electrodes in accordance with the principles of the present disclosure; [0023]
FIG. 16 illustrates a side view of Teflon/graphene electrodes with no bubble generation in accordance with the principles of the present disclosure; [0024]
FIGS. 17 illustrates perspective views of electrowetting performed on gold electrodes with no voltage applied; [0025]
FIGS. 18 illustrates perspective views of electrowetting performed on gold electrodes with AC voltage applied; [0026]
FIGS. 19 illustrates perspective views of electrowetting performed on graphene electrodes with no voltage applied; [0027]
FIGS. 20 illustrates perspective views of electrowetting performed on graphene electrodes with AC voltage applied; [0028]
FIGS. 21-26 illustrate perspective views of a fabrication process of an EWOD device having multiple spaced apart graphene electrodes; [0029]
FIG. 22, photolithography and oxygen plasma may be used to pattern the graphene 14 into individual graphene electrodes 14 in a circular pattern. During this …
FIG. 23, the Ti/Au contact electrodes 20 may then be defined using a lift-off technique. In
FIG. 24, after photolithography and e-beam evaporation, the substrate 18 (e.g. glass slide or PET film) may be coated with 1 pm Parylene C 78. In
FIG. 25, a thin layer of Teflon 76 may be spin-coated on top as a hydrophobic dielectric layer 76. In
FIG. 26, dielectric layers 16 (including the Parylene C 78 and Teflon 76) on the Ti/Au contact electrodes may be removed. In
FIG. 27 illustrates a side view of part of the completed EWOD device formed by the process of
FIGS. 28-33 illustrate a top view of an EWOD device used for manipulating movement of a liquid droplet in a circular pattern; and [0031]
FIG. 34 illustrates a top view of an EWOD device used for manipulating movement of a liquid droplet in a linear pattern. [0032] The drawings described herein …
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
Preliminary Amendment Attorney Docket No. 10114-241 (WSU 12-1088) II. Listing of the Claims 1. A method of electrowetting, the method comprising: providing an electrode, the electrode comprising: a graphene layer having a first side and a second side, the second side opposing the first side; and a dielectric layer disposed on the first side of the graphene layer; providing a liquid droplet on the dielectric layer; and applying a voltage through the droplet and the electrode, wherein a contact angle between the dielectric layer and an edge of the liquid droplet contacting the dielectric layer changes in response to the applied voltage.
The method of claim 1 wherein the dielectric layer comprises a Teflon layer.
The method of claim 1 further comprising a substrate layer disposed on the second side of the graphene layer.
The method of claim 1 wherein the electrode further comprises at least one contact pad in contact with one or both of the graphene layer and the dielectric layer.
The method of claim 1 wherein the contact pad comprises gold.
The method of claim 1 further comprising sensing, by the electrode, a property of the liquid droplet.
An electrowetting device comprising: an electrode comprising: -4- Brinks Gilson & Lione Ann Arbor, Michigan Preliminary Amendment Attorney Docket No. 10114-241 (WSU 12-1088) a graphene layer having a first side and a second side that opposes the first side; and a dielectric layer disposed on the first side of the graphene layer, the dielectric layer configured to allow a liquid droplet to be disposed thereon; and wherein the electrowetting device is configured to cause a change in a contact angle between the dielectric layer and an edge of the liquid droplet contacting the dielectric layer in response to a voltage applied through the droplet and the electrode.
The electrowetting device of claim 12 wherein the dielectric layer comprises a Teflon layer.
The electrowetting device of claim 12 further comprising a substrate layer disposed on the second side of the graphene layer.
The electrowetting device of claim 12 wherein the electrode further comprises at least one contact pad in contact with one or both of the a graphene layer and the dielectric layer.
The electrowetting device of claim 12 wherein the contact pad comprises gold.
The electrowetting device of claim 12 wherein the electrode is configured to sense a property of the liquid droplet.
An electrowetting device comprising: a first graphene electrode having a first side and a second side that opposes the first side; and -6- Brinks Gilson & Lione Ann Arbor, Michigan Preliminary Amendment Attorney Docket No. 10114-241 (WSU 12-1088) a second graphene electrode having a first side and a second side that opposes the first side, the second graphene electrode being spaced apart from the first graphene electrode; and a dielectric layer disposed on the first sides of the first and second graphene electrodes, the dielectric layer configured to allow a liquid droplet to be disposed thereon; and wherein the electrowetting device is configured to cause a change in a contact angle between the dielectric layer and an edge of the liquid droplet contacting the dielectric layer in response to a voltage applied through the droplet and one or both of the first or second electrodes.
Layer stacks claimed or described, ordered top of device to substrate.
electrowetting on dielectric (EWOD) device with single graphene electrode
electrowetting on dielectric (EWOD) device with dual graphene electrodes
Materials described outside the worked examples.
graphene
C
dielectric layer
Additional fabrication and treatment steps described in the patent.
Measurements and analyses referenced in the patent, with their drawing references.
FIG. 4 illustrates a graph showing Raman spectra of the graphene of
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
graphene optical transmission (frequency-independent) | 97.7 % | C |
graphene thin film optical transmission (better than ITO) |
Related documents with shared materials, methods, properties, or citations.
MULTILAYER CERAMIC ELECTRONIC COMPONENT HAVING AN EXTERNAL ELECTRODE WHICH INCLUDES A GRAPHENE PLATELET
METHOD OF MANUFACTURING LARGE AREA GRAPHENE AND GRAPHENE-BASED PHOTONICS DEVICES
EWOD device on PET substrate (described embodiment)
EWOD device on glass substrate (described embodiment)
Teflon
Parylene C
polyethylene terephthalate
glass
gold
Au
PMMA 495
copper foil
Cu
ferric chloride solution
FeCl₃
FIG. 4 illustrates a graph showing Raman spectra of the graphene of
FIG. 7 Illustrates a graph showing the changes in a contact angle of droplets in response to applied AC voltages in accordance with the principles of the …
FIG. 8 illustrates a graph showing the cyclability of the contact angles of a droplet in accordance with the principles of the present disclosure; [0016]
FIG. 11 illustrates a graph showing leakage current measurements of an EWOD device with thin Teflon coatings on gold vs. graphene electrodes in accordance with …
FIG. 12 illustrates a graph showing leakage current measurements of an EWOD device with a thick Teflon layer on gold vs. graphene electrodes in accordance with …
FIG. 14 illustrates a graph showing leakage current measurements of an EWOD device with a Parylene C pinhole-free dielectric layer with thin Teflon -4- …
durability and reversibility of the Teflon 16 on the graphene structure 12. Similar contact angle 50 changes to those described above occur with applied DC voltages instead of AC voltages. The contact angle 50 changes and the change range may vary depending on
| 90 % |
C |
ITO optical transparency in visible range | 85 % | — |
Voltage | 15.3–46.9 V | — |
Voltage | 15–36 V | — |
Voltage | 0–100 V | — |
Pressure | 50–110 pA | — |
Voltage | 40–50 V | — |
Thickness | ≤ 1 nm | — |
Pressure | ≤ 200 pA | — |
— | ≤ 1 W | — |
Voltage | ≥ 80 V | — |
EWOD device on PET substrate (described embodiment)
EWOD device on glass substrate (described embodiment)
Teflon
Parylene C
polyethylene terephthalate
glass
gold
Au
PMMA 495
copper foil
Cu
ferric chloride solution
FeCl₃
FIG. 4 illustrates a graph showing Raman spectra of the graphene of
FIG. 7 Illustrates a graph showing the changes in a contact angle of droplets in response to applied AC voltages in accordance with the principles of the …
FIG. 8 illustrates a graph showing the cyclability of the contact angles of a droplet in accordance with the principles of the present disclosure; [0016]
FIG. 11 illustrates a graph showing leakage current measurements of an EWOD device with thin Teflon coatings on gold vs. graphene electrodes in accordance with …
FIG. 12 illustrates a graph showing leakage current measurements of an EWOD device with a thick Teflon layer on gold vs. graphene electrodes in accordance with …
FIG. 14 illustrates a graph showing leakage current measurements of an EWOD device with a Parylene C pinhole-free dielectric layer with thin Teflon -4- …
durability and reversibility of the Teflon 16 on the graphene structure 12. Similar contact angle 50 changes to those described above occur with applied DC voltages instead of AC voltages. The contact angle 50 changes and the change range may vary depending on
| 90 % |
C |
ITO optical transparency in visible range | 85 % | — |
Voltage | 15.3–46.9 V | — |
Voltage | 15–36 V | — |
Voltage | 0–100 V | — |
Pressure | 50–110 pA | — |
Voltage | 40–50 V | — |
Thickness | ≤ 1 nm | — |
Pressure | ≤ 200 pA | — |
— | ≤ 1 W | — |
Voltage | ≥ 80 V | — |
EWOD device on PET substrate (described embodiment)
EWOD device on glass substrate (described embodiment)
Teflon
Parylene C
polyethylene terephthalate
glass
gold
Au
PMMA 495
copper foil
Cu
ferric chloride solution
FeCl₃
FIG. 4 illustrates a graph showing Raman spectra of the graphene of
FIG. 7 Illustrates a graph showing the changes in a contact angle of droplets in response to applied AC voltages in accordance with the principles of the …
FIG. 8 illustrates a graph showing the cyclability of the contact angles of a droplet in accordance with the principles of the present disclosure; [0016]
FIG. 11 illustrates a graph showing leakage current measurements of an EWOD device with thin Teflon coatings on gold vs. graphene electrodes in accordance with …
FIG. 12 illustrates a graph showing leakage current measurements of an EWOD device with a thick Teflon layer on gold vs. graphene electrodes in accordance with …
FIG. 14 illustrates a graph showing leakage current measurements of an EWOD device with a Parylene C pinhole-free dielectric layer with thin Teflon -4- …
durability and reversibility of the Teflon 16 on the graphene structure 12. Similar contact angle 50 changes to those described above occur with applied DC voltages instead of AC voltages. The contact angle 50 changes and the change range may vary depending on
| 90 % |
C |
ITO optical transparency in visible range | 85 % | — |
Voltage | 15.3–46.9 V | — |
Voltage | 15–36 V | — |
Voltage | 0–100 V | — |
Pressure | 50–110 pA | — |
Voltage | 40–50 V | — |
Thickness | ≤ 1 nm | — |
Pressure | ≤ 200 pA | — |
— | ≤ 1 W | — |
Voltage | ≥ 80 V | — |
EWOD device on PET substrate (described embodiment)
EWOD device on glass substrate (described embodiment)
Teflon
Parylene C
polyethylene terephthalate
glass
gold
Au
PMMA 495
copper foil
Cu
ferric chloride solution
FeCl₃
FIG. 4 illustrates a graph showing Raman spectra of the graphene of
FIG. 7 Illustrates a graph showing the changes in a contact angle of droplets in response to applied AC voltages in accordance with the principles of the …
FIG. 8 illustrates a graph showing the cyclability of the contact angles of a droplet in accordance with the principles of the present disclosure; [0016]
FIG. 11 illustrates a graph showing leakage current measurements of an EWOD device with thin Teflon coatings on gold vs. graphene electrodes in accordance with …
FIG. 12 illustrates a graph showing leakage current measurements of an EWOD device with a thick Teflon layer on gold vs. graphene electrodes in accordance with …
FIG. 14 illustrates a graph showing leakage current measurements of an EWOD device with a Parylene C pinhole-free dielectric layer with thin Teflon -4- …
durability and reversibility of the Teflon 16 on the graphene structure 12. Similar contact angle 50 changes to those described above occur with applied DC voltages instead of AC voltages. The contact angle 50 changes and the change range may vary depending on
| 90 % |
C |
ITO optical transparency in visible range | 85 % | — |
Voltage | 15.3–46.9 V | — |
Voltage | 15–36 V | — |
Voltage | 0–100 V | — |
Pressure | 50–110 pA | — |
Voltage | 40–50 V | — |
Thickness | ≤ 1 nm | — |
Pressure | ≤ 200 pA | — |
— | ≤ 1 W | — |
Voltage | ≥ 80 V | — |