Patent
US 10,450,650METHOD OF MANUFACTURING LARGE AREA GRAPHENE AND GRAPHENE-BASED PHOTONICS DEVICES
Mahmooda Sultana
US
Copyright © 2026 Matter42. All rights reserved.
Patent
Atlas literature
Patent
US 10,450,650Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1 A shows the 2 -dimensional lattice structure of graphene, and
FIG. 2G, the graphene layer 20 1 B is disposed on an activated N-BK₇ substrate 205 N-BK₇ is an arsenic- and lead-free optical glass used for high quality …
FIGS. 3A-3D are schematic diagrams showing the steps in a novel multilayer transfer method for large area graphene, according to one embodiment consistent with …
FIG. 4 is a graph showing the results of the mode locked pulses and optical spectrum of a mode- locked graphene-based photonic device, according to one …
FIG. 5 is a schematic diagram showing how the graphene-based photonics device dimensions can be controlled by patterning graphene films through photolithography …
FIG. 6A is a schematic diagram showing how a tunable plasmonic structure is formed by coupling light into graphene resistors using grating couplers, for a …
FIG. 7 is a schematic diagram showing a test setup for measuring the bolometric response of a metamaterial-based graphene-grating detector, according to one …
FIGS. 8A and 8B are schematic diagrams showing the steps in the cu rr ent transfer methods for graphene.
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A method of preparing large area graphene for use in a tunable terahertz bandwidth range spectroscope capable of operating from mid infrared to long wave infrared, where mid infrared is 300 nanometers and long wave infrared is 6 micrometers in wavelength, plus or minus 10 percent in wavelength, for use in a space based vehicle, comprising: growing a first graphene layer on one side of a metal substrate without using metal pins, and a second graphene layer on another side of said metal substrate also without using metal pins, said first and second graphene layers with exte rn al photo responsivity of 6.1 mA/W at 1.55 micrometer wavelength; coating said first graphene layer with a plurality of resist layers; removing said second graphene layer and said metal substrate to reveal said first graphene layer; disposing said first graphene layer on an optical substrate; removing said plurality of resist layers from said first graphene layer to reveal a final graphene layer, and installing said tunable terahertz bandwidth range spectroscope integral to said space based vehicle; using said final graphene layer in a saturable absorber at the 1500 n m band by placing a single layer of graphene on the tip of a fiber optic cable in ultra-high bandwidth detectors for producing ultrafast laser pulses, each of said ultra-high bandwidth detectors integral to said spectroscope; wherein said saturable absorber is one of a single layer-PAGE 2 110* RCVD AT 5 161 2019 9:35:17 AM [Eastern Daylight Time] * SVR: W- PTOFAX-003 122' DN I S:2738300 * CSI D:301 286 9502 * AN I:3012869502 " DURATION (mm-ss):02-55 graphene and multiple la y er graphene, and a saturable absorber performance of said multiple la y er graphene detector is relatively less than that of a saturable absorb performance of said single la y er graphene detector; patterning graphene films through photolithography to form microscale graphene ribbons of tunable plasmonic structures that support plasma oscillations by var ying the width of graphene microstrips and electrostatic doping in said graphene microstrip further patterning a metal la y er on graphene into strips to form a metal grating coupler to enable coupling to light at all wavelengths. Currently amended
The method of claim 1, wherein said first graphene layer and said second graphene layer are prepared using a low pressure chemical vapor deposition (LPCVD) technique. Original
The method of claim 1, further comprising: providing a third graphene layer with a plurality of resist layers thereon, and disposing said third graphene layer on said final graphene layer which is disposed on said optical substrate. Original
The method of claim 1, wherein said final graphene la yer is used in a laser or mode locking application, or disposed on a tip of an optical fiber. Original
Canceled
Canceled
Canceled
20. Canceled
Canceled
Layer stacks claimed or described, ordered top of device to substrate.
saturable absorber/ultra-high bandwidth detector
tunable plasmonic graphene THz spectroscope with metal grating coupler
Materials described outside the worked examples.
graphene
C
low molecular weight polymethylmethacrylate
Additional fabrication and treatment steps described in the patent.
Measurements and analyses referenced in the patent, with their drawing references.
FIG. 4 is a graph showing the results of the mode locked pulses and optical spectrum of a mode- locked graphene-based photonic device, according to one …
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
external photoresponsivity at 1.55 µm | 6.1 mA/W | C |
Related documents with shared materials, methods, properties, or citations.
Patent
Atlas literature
Patent
US 10,450,650Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1 A shows the 2 -dimensional lattice structure of graphene, and
FIG. 2G, the graphene layer 20 1 B is disposed on an activated N-BK₇ substrate 205 N-BK₇ is an arsenic- and lead-free optical glass used for high quality …
FIGS. 3A-3D are schematic diagrams showing the steps in a novel multilayer transfer method for large area graphene, according to one embodiment consistent with …
FIG. 4 is a graph showing the results of the mode locked pulses and optical spectrum of a mode- locked graphene-based photonic device, according to one …
FIG. 5 is a schematic diagram showing how the graphene-based photonics device dimensions can be controlled by patterning graphene films through photolithography …
FIG. 6A is a schematic diagram showing how a tunable plasmonic structure is formed by coupling light into graphene resistors using grating couplers, for a …
FIG. 7 is a schematic diagram showing a test setup for measuring the bolometric response of a metamaterial-based graphene-grating detector, according to one …
FIGS. 8A and 8B are schematic diagrams showing the steps in the cu rr ent transfer methods for graphene.
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A method of preparing large area graphene for use in a tunable terahertz bandwidth range spectroscope capable of operating from mid infrared to long wave infrared, where mid infrared is 300 nanometers and long wave infrared is 6 micrometers in wavelength, plus or minus 10 percent in wavelength, for use in a space based vehicle, comprising: growing a first graphene layer on one side of a metal substrate without using metal pins, and a second graphene layer on another side of said metal substrate also without using metal pins, said first and second graphene layers with exte rn al photo responsivity of 6.1 mA/W at 1.55 micrometer wavelength; coating said first graphene layer with a plurality of resist layers; removing said second graphene layer and said metal substrate to reveal said first graphene layer; disposing said first graphene layer on an optical substrate; removing said plurality of resist layers from said first graphene layer to reveal a final graphene layer, and installing said tunable terahertz bandwidth range spectroscope integral to said space based vehicle; using said final graphene layer in a saturable absorber at the 1500 n m band by placing a single layer of graphene on the tip of a fiber optic cable in ultra-high bandwidth detectors for producing ultrafast laser pulses, each of said ultra-high bandwidth detectors integral to said spectroscope; wherein said saturable absorber is one of a single layer-PAGE 2 110* RCVD AT 5 161 2019 9:35:17 AM [Eastern Daylight Time] * SVR: W- PTOFAX-003 122' DN I S:2738300 * CSI D:301 286 9502 * AN I:3012869502 " DURATION (mm-ss):02-55 graphene and multiple la y er graphene, and a saturable absorber performance of said multiple la y er graphene detector is relatively less than that of a saturable absorb performance of said single la y er graphene detector; patterning graphene films through photolithography to form microscale graphene ribbons of tunable plasmonic structures that support plasma oscillations by var ying the width of graphene microstrips and electrostatic doping in said graphene microstrip further patterning a metal la y er on graphene into strips to form a metal grating coupler to enable coupling to light at all wavelengths. Currently amended
The method of claim 1, wherein said first graphene layer and said second graphene layer are prepared using a low pressure chemical vapor deposition (LPCVD) technique. Original
The method of claim 1, further comprising: providing a third graphene layer with a plurality of resist layers thereon, and disposing said third graphene layer on said final graphene layer which is disposed on said optical substrate. Original
The method of claim 1, wherein said final graphene la yer is used in a laser or mode locking application, or disposed on a tip of an optical fiber. Original
Canceled
Canceled
Canceled
20. Canceled
Canceled
Layer stacks claimed or described, ordered top of device to substrate.
saturable absorber/ultra-high bandwidth detector
tunable plasmonic graphene THz spectroscope with metal grating coupler
Materials described outside the worked examples.
graphene
C
low molecular weight polymethylmethacrylate
Additional fabrication and treatment steps described in the patent.
Measurements and analyses referenced in the patent, with their drawing references.
FIG. 4 is a graph showing the results of the mode locked pulses and optical spectrum of a mode- locked graphene-based photonic device, according to one …
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
external photoresponsivity at 1.55 µm | 6.1 mA/W | C |
Related documents with shared materials, methods, properties, or citations.
Patent
Atlas literature
Patent
US 10,450,650Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1 A shows the 2 -dimensional lattice structure of graphene, and
FIG. 2G, the graphene layer 20 1 B is disposed on an activated N-BK₇ substrate 205 N-BK₇ is an arsenic- and lead-free optical glass used for high quality …
FIGS. 3A-3D are schematic diagrams showing the steps in a novel multilayer transfer method for large area graphene, according to one embodiment consistent with …
FIG. 4 is a graph showing the results of the mode locked pulses and optical spectrum of a mode- locked graphene-based photonic device, according to one …
FIG. 5 is a schematic diagram showing how the graphene-based photonics device dimensions can be controlled by patterning graphene films through photolithography …
FIG. 6A is a schematic diagram showing how a tunable plasmonic structure is formed by coupling light into graphene resistors using grating couplers, for a …
FIG. 7 is a schematic diagram showing a test setup for measuring the bolometric response of a metamaterial-based graphene-grating detector, according to one …
FIGS. 8A and 8B are schematic diagrams showing the steps in the cu rr ent transfer methods for graphene.
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A method of preparing large area graphene for use in a tunable terahertz bandwidth range spectroscope capable of operating from mid infrared to long wave infrared, where mid infrared is 300 nanometers and long wave infrared is 6 micrometers in wavelength, plus or minus 10 percent in wavelength, for use in a space based vehicle, comprising: growing a first graphene layer on one side of a metal substrate without using metal pins, and a second graphene layer on another side of said metal substrate also without using metal pins, said first and second graphene layers with exte rn al photo responsivity of 6.1 mA/W at 1.55 micrometer wavelength; coating said first graphene layer with a plurality of resist layers; removing said second graphene layer and said metal substrate to reveal said first graphene layer; disposing said first graphene layer on an optical substrate; removing said plurality of resist layers from said first graphene layer to reveal a final graphene layer, and installing said tunable terahertz bandwidth range spectroscope integral to said space based vehicle; using said final graphene layer in a saturable absorber at the 1500 n m band by placing a single layer of graphene on the tip of a fiber optic cable in ultra-high bandwidth detectors for producing ultrafast laser pulses, each of said ultra-high bandwidth detectors integral to said spectroscope; wherein said saturable absorber is one of a single layer-PAGE 2 110* RCVD AT 5 161 2019 9:35:17 AM [Eastern Daylight Time] * SVR: W- PTOFAX-003 122' DN I S:2738300 * CSI D:301 286 9502 * AN I:3012869502 " DURATION (mm-ss):02-55 graphene and multiple la y er graphene, and a saturable absorber performance of said multiple la y er graphene detector is relatively less than that of a saturable absorb performance of said single la y er graphene detector; patterning graphene films through photolithography to form microscale graphene ribbons of tunable plasmonic structures that support plasma oscillations by var ying the width of graphene microstrips and electrostatic doping in said graphene microstrip further patterning a metal la y er on graphene into strips to form a metal grating coupler to enable coupling to light at all wavelengths. Currently amended
The method of claim 1, wherein said first graphene layer and said second graphene layer are prepared using a low pressure chemical vapor deposition (LPCVD) technique. Original
The method of claim 1, further comprising: providing a third graphene layer with a plurality of resist layers thereon, and disposing said third graphene layer on said final graphene layer which is disposed on said optical substrate. Original
The method of claim 1, wherein said final graphene la yer is used in a laser or mode locking application, or disposed on a tip of an optical fiber. Original
Canceled
Canceled
Canceled
20. Canceled
Canceled
Layer stacks claimed or described, ordered top of device to substrate.
saturable absorber/ultra-high bandwidth detector
tunable plasmonic graphene THz spectroscope with metal grating coupler
Materials described outside the worked examples.
graphene
C
low molecular weight polymethylmethacrylate
Additional fabrication and treatment steps described in the patent.
Measurements and analyses referenced in the patent, with their drawing references.
FIG. 4 is a graph showing the results of the mode locked pulses and optical spectrum of a mode- locked graphene-based photonic device, according to one …
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
external photoresponsivity at 1.55 µm | 6.1 mA/W | C |
Related documents with shared materials, methods, properties, or citations.
Patent
Atlas literature
Patent
US 10,450,650Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1 A shows the 2 -dimensional lattice structure of graphene, and
FIG. 2G, the graphene layer 20 1 B is disposed on an activated N-BK₇ substrate 205 N-BK₇ is an arsenic- and lead-free optical glass used for high quality …
FIGS. 3A-3D are schematic diagrams showing the steps in a novel multilayer transfer method for large area graphene, according to one embodiment consistent with …
FIG. 4 is a graph showing the results of the mode locked pulses and optical spectrum of a mode- locked graphene-based photonic device, according to one …
FIG. 5 is a schematic diagram showing how the graphene-based photonics device dimensions can be controlled by patterning graphene films through photolithography …
FIG. 6A is a schematic diagram showing how a tunable plasmonic structure is formed by coupling light into graphene resistors using grating couplers, for a …
FIG. 7 is a schematic diagram showing a test setup for measuring the bolometric response of a metamaterial-based graphene-grating detector, according to one …
FIGS. 8A and 8B are schematic diagrams showing the steps in the cu rr ent transfer methods for graphene.
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A method of preparing large area graphene for use in a tunable terahertz bandwidth range spectroscope capable of operating from mid infrared to long wave infrared, where mid infrared is 300 nanometers and long wave infrared is 6 micrometers in wavelength, plus or minus 10 percent in wavelength, for use in a space based vehicle, comprising: growing a first graphene layer on one side of a metal substrate without using metal pins, and a second graphene layer on another side of said metal substrate also without using metal pins, said first and second graphene layers with exte rn al photo responsivity of 6.1 mA/W at 1.55 micrometer wavelength; coating said first graphene layer with a plurality of resist layers; removing said second graphene layer and said metal substrate to reveal said first graphene layer; disposing said first graphene layer on an optical substrate; removing said plurality of resist layers from said first graphene layer to reveal a final graphene layer, and installing said tunable terahertz bandwidth range spectroscope integral to said space based vehicle; using said final graphene layer in a saturable absorber at the 1500 n m band by placing a single layer of graphene on the tip of a fiber optic cable in ultra-high bandwidth detectors for producing ultrafast laser pulses, each of said ultra-high bandwidth detectors integral to said spectroscope; wherein said saturable absorber is one of a single layer-PAGE 2 110* RCVD AT 5 161 2019 9:35:17 AM [Eastern Daylight Time] * SVR: W- PTOFAX-003 122' DN I S:2738300 * CSI D:301 286 9502 * AN I:3012869502 " DURATION (mm-ss):02-55 graphene and multiple la y er graphene, and a saturable absorber performance of said multiple la y er graphene detector is relatively less than that of a saturable absorb performance of said single la y er graphene detector; patterning graphene films through photolithography to form microscale graphene ribbons of tunable plasmonic structures that support plasma oscillations by var ying the width of graphene microstrips and electrostatic doping in said graphene microstrip further patterning a metal la y er on graphene into strips to form a metal grating coupler to enable coupling to light at all wavelengths. Currently amended
The method of claim 1, wherein said first graphene layer and said second graphene layer are prepared using a low pressure chemical vapor deposition (LPCVD) technique. Original
The method of claim 1, further comprising: providing a third graphene layer with a plurality of resist layers thereon, and disposing said third graphene layer on said final graphene layer which is disposed on said optical substrate. Original
The method of claim 1, wherein said final graphene la yer is used in a laser or mode locking application, or disposed on a tip of an optical fiber. Original
Canceled
Canceled
Canceled
20. Canceled
Canceled
Layer stacks claimed or described, ordered top of device to substrate.
saturable absorber/ultra-high bandwidth detector
tunable plasmonic graphene THz spectroscope with metal grating coupler
Materials described outside the worked examples.
graphene
C
low molecular weight polymethylmethacrylate
Additional fabrication and treatment steps described in the patent.
Measurements and analyses referenced in the patent, with their drawing references.
FIG. 4 is a graph showing the results of the mode locked pulses and optical spectrum of a mode- locked graphene-based photonic device, according to one …
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
external photoresponsivity at 1.55 µm | 6.1 mA/W | C |
Related documents with shared materials, methods, properties, or citations.
high molecular weight polymethylmethacrylate
copper substrate
Cu
lead free optical glass
metal grating coupler
FIG. 6A is a schematic diagram showing how a tunable plasmonic structure is formed by coupling light into graphene resistors using grating couplers, for a …
FIG. 6A is a schematic diagram showing how a tunable plasmonic structure is formed by coupling light into graphene resistors using grating couplers, for a …
| 850–1000 °C |
| — |
Thickness | 200–1060 nm | — |
Flow Rate | 5–50 sccm | — |
Flow Rate | 200–1000 sccm | — |
Thickness | 10–20 µm | — |
high molecular weight polymethylmethacrylate
copper substrate
Cu
lead free optical glass
metal grating coupler
FIG. 6A is a schematic diagram showing how a tunable plasmonic structure is formed by coupling light into graphene resistors using grating couplers, for a …
FIG. 6A is a schematic diagram showing how a tunable plasmonic structure is formed by coupling light into graphene resistors using grating couplers, for a …
| 850–1000 °C |
| — |
Thickness | 200–1060 nm | — |
Flow Rate | 5–50 sccm | — |
Flow Rate | 200–1000 sccm | — |
Thickness | 10–20 µm | — |
high molecular weight polymethylmethacrylate
copper substrate
Cu
lead free optical glass
metal grating coupler
FIG. 6A is a schematic diagram showing how a tunable plasmonic structure is formed by coupling light into graphene resistors using grating couplers, for a …
FIG. 6A is a schematic diagram showing how a tunable plasmonic structure is formed by coupling light into graphene resistors using grating couplers, for a …
| 850–1000 °C |
| — |
Thickness | 200–1060 nm | — |
Flow Rate | 5–50 sccm | — |
Flow Rate | 200–1000 sccm | — |
Thickness | 10–20 µm | — |
high molecular weight polymethylmethacrylate
copper substrate
Cu
lead free optical glass
metal grating coupler
FIG. 6A is a schematic diagram showing how a tunable plasmonic structure is formed by coupling light into graphene resistors using grating couplers, for a …
FIG. 6A is a schematic diagram showing how a tunable plasmonic structure is formed by coupling light into graphene resistors using grating couplers, for a …
| 850–1000 °C |
| — |
Thickness | 200–1060 nm | — |
Flow Rate | 5–50 sccm | — |
Flow Rate | 200–1000 sccm | — |
Thickness | 10–20 µm | — |