Patent
US 8,828,523METHOD FOR MANUFACTURING GRAPHENE USING LIGHT AND GRAPHENE MANUFACTURED USING THE SAME
Jinsan MOON, Wonbae PARK, Mynghee JUNG, Jonghyun RHO et al.
US
Copyright © 2026 Matter42. All rights reserved.
Patent
Atlas literature
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US 8,828,523Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1 is a cross-sectional view illustrating a structure in which a graphene layer is formed on a catalyst metal layer; [0016]
FIG. 2 is a schematic diagram illustrating a device for forming a graphene layer; [0017]
FIG. 3 is a cross-sectional view illustrating a structure in which a graphene layer is formed on one surface of a catalyst metal layer; [0018]
FIG. 4 is a cross-sectional view illustrating a structure in which a support layer is formed on the graphene layer; [0019]
FIG. 5 is a cross-sectional view illustrating a structure in which the catalyst metal layer is removed; [0020]
FIG. 6 is a cross-sectional view illustrating a structure in which a substrate is disposed on the graphene layer; [0021]
FIG. 7 is a cross-sectional view illustrating a first example of irradiating light to the substrate; [0022]
FIG. 8 is a cross-sectional view illustrating a second example of irradiating light to the substrate; [0023]
FIG. 9 is a cross-sectional view illustrating a third example of irradiating light to the substrate; [0024]
FIG. 10 is a cross-sectional view illustrating a structure in which a graphene layer is transferred onto the substrate; [0025]
FIG. 11 is a cross-sectional view illustrating a first example of irradiating light to a pattern mask; [0026]
FIG. 12 is a cross-sectional view illustrating a second example of irradiating light to the pattern mask; [0027]
FIG. 13 is a cross-sectional view illustrating a third example of irradiating light to the pattern mask; [0028]
FIG. 14 is a cross-sectional view illustrating a fourth example of irradiating light to the pattern mask; [0029]
FIG. 15 is a cross-sectional view illustrating another example of irradiating light to the pattern mask; [0030]
FIG. 16 is a cross-sectional view illustrating a structure in which a graphene pattern is transferred onto the substrate; and [0031]
FIG. 17 is a flowchart illustrating a process of manufacturing graphene.
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
Application No.: NEW Docket No.: 0465-3609PUS 1 Page 2 of 5 AMENDMENTS TO THE CLAIMS 1. A method of manufacturing graphene using light, the method comprising: forming a graphene layer on a catalyst metal layer; attaching a support layer losing adhesion by light on the graphene layer; removing the catalyst metal layer; disposing a substrate on the graphene layer; and separating the support layer from the graphene layer by irradiating light to the support layer.
The method according to claim 1, wherein the support layer comprises an optical transfer film.
The method according to claim 1, wherein the separating of the support layer by irradiating light is performed using a surface light source or a cylindrical light source.
BIRCH, STEWART, KOLASCH & BIRCH, LLP JTE/JTE/ltb Application No.: NEW Docket No.: 0465-3609PUS 1 Page 3 of 5 9. The method according to claim 1, further comprising disposing a pattern mask on the support layer after disposing the substrate on the graphene layer.
The method according to claim 1, wherein the separating of the support layer by irradiating light to the support layer is performed by irradiating light via laser scanning.
The method according to claim 1, wherein the disposing of the substrate on the graphene layer and the irradiating of light to the support layer are simultaneously performed.
A graphene manufactured using a method according to claim 1 or 45.
A method of manufacturing graphene using light, the method comprising: forming a graphene layer on a catalyst metal layer; attaching an optical transfer film to the graphene layer; removing the catalyst metal layer; disposing a substrate on the graphene layer; and simultaneously separating the optical transfer film from the graphene layer and patterning the graphene layer by selectively irradiating light to the optical transfer film.
The method according to claim 15, wherein the optical transfer film comprises: a base; and BIRCH, STEWART, KOLASCH & BIRCH, LLP JTE/JTE/ltb Application No.: NEW Docket No.: 0465-3609PUS 1 Page 4 of 5 a photoreactive adhesive layer having adhesion and losing adhesion in response to light.
The method according to claim 15, wherein the selectively irradiating of light to the optical transfer film is performed by disposing a pattern mask on the optical transfer film.
The method according to claim 15, wherein the selectively irradiating of light to the optical transfer film is performed by laser scanning.
The method according to claim 15, wherein at least one of the catalyst metal layer, the graphene layer, the optical transfer film, and the substrate is transported by a roller.
A graphene manufactured using a method according to claim 15.
Materials described outside the worked examples.
graphene
catalyst metal layer
substrate
Additional fabrication and treatment steps described in the patent.
Related documents with shared materials, methods, properties, or citations.
Patent
Atlas literature
Patent
US 8,828,523Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1 is a cross-sectional view illustrating a structure in which a graphene layer is formed on a catalyst metal layer; [0016]
FIG. 2 is a schematic diagram illustrating a device for forming a graphene layer; [0017]
FIG. 3 is a cross-sectional view illustrating a structure in which a graphene layer is formed on one surface of a catalyst metal layer; [0018]
FIG. 4 is a cross-sectional view illustrating a structure in which a support layer is formed on the graphene layer; [0019]
FIG. 5 is a cross-sectional view illustrating a structure in which the catalyst metal layer is removed; [0020]
FIG. 6 is a cross-sectional view illustrating a structure in which a substrate is disposed on the graphene layer; [0021]
FIG. 7 is a cross-sectional view illustrating a first example of irradiating light to the substrate; [0022]
FIG. 8 is a cross-sectional view illustrating a second example of irradiating light to the substrate; [0023]
FIG. 9 is a cross-sectional view illustrating a third example of irradiating light to the substrate; [0024]
FIG. 10 is a cross-sectional view illustrating a structure in which a graphene layer is transferred onto the substrate; [0025]
FIG. 11 is a cross-sectional view illustrating a first example of irradiating light to a pattern mask; [0026]
FIG. 12 is a cross-sectional view illustrating a second example of irradiating light to the pattern mask; [0027]
FIG. 13 is a cross-sectional view illustrating a third example of irradiating light to the pattern mask; [0028]
FIG. 14 is a cross-sectional view illustrating a fourth example of irradiating light to the pattern mask; [0029]
FIG. 15 is a cross-sectional view illustrating another example of irradiating light to the pattern mask; [0030]
FIG. 16 is a cross-sectional view illustrating a structure in which a graphene pattern is transferred onto the substrate; and [0031]
FIG. 17 is a flowchart illustrating a process of manufacturing graphene.
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
Application No.: NEW Docket No.: 0465-3609PUS 1 Page 2 of 5 AMENDMENTS TO THE CLAIMS 1. A method of manufacturing graphene using light, the method comprising: forming a graphene layer on a catalyst metal layer; attaching a support layer losing adhesion by light on the graphene layer; removing the catalyst metal layer; disposing a substrate on the graphene layer; and separating the support layer from the graphene layer by irradiating light to the support layer.
The method according to claim 1, wherein the support layer comprises an optical transfer film.
The method according to claim 1, wherein the separating of the support layer by irradiating light is performed using a surface light source or a cylindrical light source.
BIRCH, STEWART, KOLASCH & BIRCH, LLP JTE/JTE/ltb Application No.: NEW Docket No.: 0465-3609PUS 1 Page 3 of 5 9. The method according to claim 1, further comprising disposing a pattern mask on the support layer after disposing the substrate on the graphene layer.
The method according to claim 1, wherein the separating of the support layer by irradiating light to the support layer is performed by irradiating light via laser scanning.
The method according to claim 1, wherein the disposing of the substrate on the graphene layer and the irradiating of light to the support layer are simultaneously performed.
A graphene manufactured using a method according to claim 1 or 45.
A method of manufacturing graphene using light, the method comprising: forming a graphene layer on a catalyst metal layer; attaching an optical transfer film to the graphene layer; removing the catalyst metal layer; disposing a substrate on the graphene layer; and simultaneously separating the optical transfer film from the graphene layer and patterning the graphene layer by selectively irradiating light to the optical transfer film.
The method according to claim 15, wherein the optical transfer film comprises: a base; and BIRCH, STEWART, KOLASCH & BIRCH, LLP JTE/JTE/ltb Application No.: NEW Docket No.: 0465-3609PUS 1 Page 4 of 5 a photoreactive adhesive layer having adhesion and losing adhesion in response to light.
The method according to claim 15, wherein the selectively irradiating of light to the optical transfer film is performed by disposing a pattern mask on the optical transfer film.
The method according to claim 15, wherein the selectively irradiating of light to the optical transfer film is performed by laser scanning.
The method according to claim 15, wherein at least one of the catalyst metal layer, the graphene layer, the optical transfer film, and the substrate is transported by a roller.
A graphene manufactured using a method according to claim 15.
Materials described outside the worked examples.
graphene
catalyst metal layer
substrate
Additional fabrication and treatment steps described in the patent.
Related documents with shared materials, methods, properties, or citations.
Patent
Atlas literature
Patent
US 8,828,523Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1 is a cross-sectional view illustrating a structure in which a graphene layer is formed on a catalyst metal layer; [0016]
FIG. 2 is a schematic diagram illustrating a device for forming a graphene layer; [0017]
FIG. 3 is a cross-sectional view illustrating a structure in which a graphene layer is formed on one surface of a catalyst metal layer; [0018]
FIG. 4 is a cross-sectional view illustrating a structure in which a support layer is formed on the graphene layer; [0019]
FIG. 5 is a cross-sectional view illustrating a structure in which the catalyst metal layer is removed; [0020]
FIG. 6 is a cross-sectional view illustrating a structure in which a substrate is disposed on the graphene layer; [0021]
FIG. 7 is a cross-sectional view illustrating a first example of irradiating light to the substrate; [0022]
FIG. 8 is a cross-sectional view illustrating a second example of irradiating light to the substrate; [0023]
FIG. 9 is a cross-sectional view illustrating a third example of irradiating light to the substrate; [0024]
FIG. 10 is a cross-sectional view illustrating a structure in which a graphene layer is transferred onto the substrate; [0025]
FIG. 11 is a cross-sectional view illustrating a first example of irradiating light to a pattern mask; [0026]
FIG. 12 is a cross-sectional view illustrating a second example of irradiating light to the pattern mask; [0027]
FIG. 13 is a cross-sectional view illustrating a third example of irradiating light to the pattern mask; [0028]
FIG. 14 is a cross-sectional view illustrating a fourth example of irradiating light to the pattern mask; [0029]
FIG. 15 is a cross-sectional view illustrating another example of irradiating light to the pattern mask; [0030]
FIG. 16 is a cross-sectional view illustrating a structure in which a graphene pattern is transferred onto the substrate; and [0031]
FIG. 17 is a flowchart illustrating a process of manufacturing graphene.
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
Application No.: NEW Docket No.: 0465-3609PUS 1 Page 2 of 5 AMENDMENTS TO THE CLAIMS 1. A method of manufacturing graphene using light, the method comprising: forming a graphene layer on a catalyst metal layer; attaching a support layer losing adhesion by light on the graphene layer; removing the catalyst metal layer; disposing a substrate on the graphene layer; and separating the support layer from the graphene layer by irradiating light to the support layer.
The method according to claim 1, wherein the support layer comprises an optical transfer film.
The method according to claim 1, wherein the separating of the support layer by irradiating light is performed using a surface light source or a cylindrical light source.
BIRCH, STEWART, KOLASCH & BIRCH, LLP JTE/JTE/ltb Application No.: NEW Docket No.: 0465-3609PUS 1 Page 3 of 5 9. The method according to claim 1, further comprising disposing a pattern mask on the support layer after disposing the substrate on the graphene layer.
The method according to claim 1, wherein the separating of the support layer by irradiating light to the support layer is performed by irradiating light via laser scanning.
The method according to claim 1, wherein the disposing of the substrate on the graphene layer and the irradiating of light to the support layer are simultaneously performed.
A graphene manufactured using a method according to claim 1 or 45.
A method of manufacturing graphene using light, the method comprising: forming a graphene layer on a catalyst metal layer; attaching an optical transfer film to the graphene layer; removing the catalyst metal layer; disposing a substrate on the graphene layer; and simultaneously separating the optical transfer film from the graphene layer and patterning the graphene layer by selectively irradiating light to the optical transfer film.
The method according to claim 15, wherein the optical transfer film comprises: a base; and BIRCH, STEWART, KOLASCH & BIRCH, LLP JTE/JTE/ltb Application No.: NEW Docket No.: 0465-3609PUS 1 Page 4 of 5 a photoreactive adhesive layer having adhesion and losing adhesion in response to light.
The method according to claim 15, wherein the selectively irradiating of light to the optical transfer film is performed by disposing a pattern mask on the optical transfer film.
The method according to claim 15, wherein the selectively irradiating of light to the optical transfer film is performed by laser scanning.
The method according to claim 15, wherein at least one of the catalyst metal layer, the graphene layer, the optical transfer film, and the substrate is transported by a roller.
A graphene manufactured using a method according to claim 15.
Materials described outside the worked examples.
graphene
catalyst metal layer
substrate
Additional fabrication and treatment steps described in the patent.
Related documents with shared materials, methods, properties, or citations.
Patent
Atlas literature
Patent
US 8,828,523Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1 is a cross-sectional view illustrating a structure in which a graphene layer is formed on a catalyst metal layer; [0016]
FIG. 2 is a schematic diagram illustrating a device for forming a graphene layer; [0017]
FIG. 3 is a cross-sectional view illustrating a structure in which a graphene layer is formed on one surface of a catalyst metal layer; [0018]
FIG. 4 is a cross-sectional view illustrating a structure in which a support layer is formed on the graphene layer; [0019]
FIG. 5 is a cross-sectional view illustrating a structure in which the catalyst metal layer is removed; [0020]
FIG. 6 is a cross-sectional view illustrating a structure in which a substrate is disposed on the graphene layer; [0021]
FIG. 7 is a cross-sectional view illustrating a first example of irradiating light to the substrate; [0022]
FIG. 8 is a cross-sectional view illustrating a second example of irradiating light to the substrate; [0023]
FIG. 9 is a cross-sectional view illustrating a third example of irradiating light to the substrate; [0024]
FIG. 10 is a cross-sectional view illustrating a structure in which a graphene layer is transferred onto the substrate; [0025]
FIG. 11 is a cross-sectional view illustrating a first example of irradiating light to a pattern mask; [0026]
FIG. 12 is a cross-sectional view illustrating a second example of irradiating light to the pattern mask; [0027]
FIG. 13 is a cross-sectional view illustrating a third example of irradiating light to the pattern mask; [0028]
FIG. 14 is a cross-sectional view illustrating a fourth example of irradiating light to the pattern mask; [0029]
FIG. 15 is a cross-sectional view illustrating another example of irradiating light to the pattern mask; [0030]
FIG. 16 is a cross-sectional view illustrating a structure in which a graphene pattern is transferred onto the substrate; and [0031]
FIG. 17 is a flowchart illustrating a process of manufacturing graphene.
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
Application No.: NEW Docket No.: 0465-3609PUS 1 Page 2 of 5 AMENDMENTS TO THE CLAIMS 1. A method of manufacturing graphene using light, the method comprising: forming a graphene layer on a catalyst metal layer; attaching a support layer losing adhesion by light on the graphene layer; removing the catalyst metal layer; disposing a substrate on the graphene layer; and separating the support layer from the graphene layer by irradiating light to the support layer.
The method according to claim 1, wherein the support layer comprises an optical transfer film.
The method according to claim 1, wherein the separating of the support layer by irradiating light is performed using a surface light source or a cylindrical light source.
BIRCH, STEWART, KOLASCH & BIRCH, LLP JTE/JTE/ltb Application No.: NEW Docket No.: 0465-3609PUS 1 Page 3 of 5 9. The method according to claim 1, further comprising disposing a pattern mask on the support layer after disposing the substrate on the graphene layer.
The method according to claim 1, wherein the separating of the support layer by irradiating light to the support layer is performed by irradiating light via laser scanning.
The method according to claim 1, wherein the disposing of the substrate on the graphene layer and the irradiating of light to the support layer are simultaneously performed.
A graphene manufactured using a method according to claim 1 or 45.
A method of manufacturing graphene using light, the method comprising: forming a graphene layer on a catalyst metal layer; attaching an optical transfer film to the graphene layer; removing the catalyst metal layer; disposing a substrate on the graphene layer; and simultaneously separating the optical transfer film from the graphene layer and patterning the graphene layer by selectively irradiating light to the optical transfer film.
The method according to claim 15, wherein the optical transfer film comprises: a base; and BIRCH, STEWART, KOLASCH & BIRCH, LLP JTE/JTE/ltb Application No.: NEW Docket No.: 0465-3609PUS 1 Page 4 of 5 a photoreactive adhesive layer having adhesion and losing adhesion in response to light.
The method according to claim 15, wherein the selectively irradiating of light to the optical transfer film is performed by disposing a pattern mask on the optical transfer film.
The method according to claim 15, wherein the selectively irradiating of light to the optical transfer film is performed by laser scanning.
The method according to claim 15, wherein at least one of the catalyst metal layer, the graphene layer, the optical transfer film, and the substrate is transported by a roller.
A graphene manufactured using a method according to claim 15.
Materials described outside the worked examples.
graphene
catalyst metal layer
substrate
Additional fabrication and treatment steps described in the patent.
Related documents with shared materials, methods, properties, or citations.
optical transfer film
base
photoreactive adhesive layer
copper (Cu) catalyst metal layer
Cu
methane
CH₄
polyethylene terephthalate (PET)
triacetyl cellulose (TAC)
polycarbonate (PC)
optical transfer film
base
photoreactive adhesive layer
copper (Cu) catalyst metal layer
Cu
methane
CH₄
polyethylene terephthalate (PET)
triacetyl cellulose (TAC)
polycarbonate (PC)
optical transfer film
base
photoreactive adhesive layer
copper (Cu) catalyst metal layer
Cu
methane
CH₄
polyethylene terephthalate (PET)
triacetyl cellulose (TAC)
polycarbonate (PC)
optical transfer film
base
photoreactive adhesive layer
copper (Cu) catalyst metal layer
Cu
methane
CH₄
polyethylene terephthalate (PET)
triacetyl cellulose (TAC)
polycarbonate (PC)