Patent
US 9,606,095METHOD OF PREPARING GRAPHENE NANORIBBON ARRAYS AND SENSOR COMPRISING THE SAME
Gun-young JUNG
US
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Patent
Atlas literature
Patent
US 9,606,095Patent drawings and their descriptions. Click a drawing to enlarge it.
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A method of preparing graphene nanoribbons, comprising: sequentially forming a chromium layer and a resist layer o n a graphene layer; forming a resist layer on the chromium layer: and forming a pattern on patterning the resist layer and the chromium layer, followed by to form a resist pattern; patterning the chromium layer to form a chromium pattern; and forming a graphene pattern using the chromium pattern as a mask, or the resist pattern and the chromium pattern as a mask.
The method of preparing graphene nanoribbons according to claim 1, wherein the forming a graphene forming the graphene pattern comprises: forming a chromium the chromium pattern using the resist layer pattern as a mask; and etching the graphene layer using the chromium pattern as a mask.
The method of preparing graphene nanoribbons according to claim 1, wherein each of the chromium pattern and the graphene pattern has a width of 100 nm to 200 nm.
A sensor comprising graphene nanoribbons nanoribbons according to claim 1.
The sensor according to claim 9, wherein the according to claim 1, wherein the chromium prepared by the method of preparing graphene a catalyst layer and electrodes sequentially catalyst layer comprises palladium or platinum.
The method of preparing graphene nanoribbons pattern has a thickness of 10 nm to 20 nm.
Layer stacks claimed or described, ordered top of device to substrate.
graphene nanoribbon hydrogen sensor
Materials described outside the worked examples.
graphene
chromium
Cr
Additional fabrication and treatment steps described in the patent.
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
chromium pattern and graphene pattern width | 100–200 | grapheneCr |
chromium layer thickness (preferred) |
Related documents with shared materials, methods, properties, or citations.
Patent
Atlas literature
Patent
US 9,606,095Patent drawings and their descriptions. Click a drawing to enlarge it.
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A method of preparing graphene nanoribbons, comprising: sequentially forming a chromium layer and a resist layer o n a graphene layer; forming a resist layer on the chromium layer: and forming a pattern on patterning the resist layer and the chromium layer, followed by to form a resist pattern; patterning the chromium layer to form a chromium pattern; and forming a graphene pattern using the chromium pattern as a mask, or the resist pattern and the chromium pattern as a mask.
The method of preparing graphene nanoribbons according to claim 1, wherein the forming a graphene forming the graphene pattern comprises: forming a chromium the chromium pattern using the resist layer pattern as a mask; and etching the graphene layer using the chromium pattern as a mask.
The method of preparing graphene nanoribbons according to claim 1, wherein each of the chromium pattern and the graphene pattern has a width of 100 nm to 200 nm.
A sensor comprising graphene nanoribbons nanoribbons according to claim 1.
The sensor according to claim 9, wherein the according to claim 1, wherein the chromium prepared by the method of preparing graphene a catalyst layer and electrodes sequentially catalyst layer comprises palladium or platinum.
The method of preparing graphene nanoribbons pattern has a thickness of 10 nm to 20 nm.
Layer stacks claimed or described, ordered top of device to substrate.
graphene nanoribbon hydrogen sensor
Materials described outside the worked examples.
graphene
chromium
Cr
Additional fabrication and treatment steps described in the patent.
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
chromium pattern and graphene pattern width | 100–200 | grapheneCr |
chromium layer thickness (preferred) |
Related documents with shared materials, methods, properties, or citations.
Patent
Atlas literature
Patent
US 9,606,095Patent drawings and their descriptions. Click a drawing to enlarge it.
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A method of preparing graphene nanoribbons, comprising: sequentially forming a chromium layer and a resist layer o n a graphene layer; forming a resist layer on the chromium layer: and forming a pattern on patterning the resist layer and the chromium layer, followed by to form a resist pattern; patterning the chromium layer to form a chromium pattern; and forming a graphene pattern using the chromium pattern as a mask, or the resist pattern and the chromium pattern as a mask.
The method of preparing graphene nanoribbons according to claim 1, wherein the forming a graphene forming the graphene pattern comprises: forming a chromium the chromium pattern using the resist layer pattern as a mask; and etching the graphene layer using the chromium pattern as a mask.
The method of preparing graphene nanoribbons according to claim 1, wherein each of the chromium pattern and the graphene pattern has a width of 100 nm to 200 nm.
A sensor comprising graphene nanoribbons nanoribbons according to claim 1.
The sensor according to claim 9, wherein the according to claim 1, wherein the chromium prepared by the method of preparing graphene a catalyst layer and electrodes sequentially catalyst layer comprises palladium or platinum.
The method of preparing graphene nanoribbons pattern has a thickness of 10 nm to 20 nm.
Layer stacks claimed or described, ordered top of device to substrate.
graphene nanoribbon hydrogen sensor
Materials described outside the worked examples.
graphene
chromium
Cr
Additional fabrication and treatment steps described in the patent.
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
chromium pattern and graphene pattern width | 100–200 | grapheneCr |
chromium layer thickness (preferred) |
Related documents with shared materials, methods, properties, or citations.
Patent
Atlas literature
Patent
US 9,606,095Patent drawings and their descriptions. Click a drawing to enlarge it.
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A method of preparing graphene nanoribbons, comprising: sequentially forming a chromium layer and a resist layer o n a graphene layer; forming a resist layer on the chromium layer: and forming a pattern on patterning the resist layer and the chromium layer, followed by to form a resist pattern; patterning the chromium layer to form a chromium pattern; and forming a graphene pattern using the chromium pattern as a mask, or the resist pattern and the chromium pattern as a mask.
The method of preparing graphene nanoribbons according to claim 1, wherein the forming a graphene forming the graphene pattern comprises: forming a chromium the chromium pattern using the resist layer pattern as a mask; and etching the graphene layer using the chromium pattern as a mask.
The method of preparing graphene nanoribbons according to claim 1, wherein each of the chromium pattern and the graphene pattern has a width of 100 nm to 200 nm.
A sensor comprising graphene nanoribbons nanoribbons according to claim 1.
The sensor according to claim 9, wherein the according to claim 1, wherein the chromium prepared by the method of preparing graphene a catalyst layer and electrodes sequentially catalyst layer comprises palladium or platinum.
The method of preparing graphene nanoribbons pattern has a thickness of 10 nm to 20 nm.
Layer stacks claimed or described, ordered top of device to substrate.
graphene nanoribbon hydrogen sensor
Materials described outside the worked examples.
graphene
chromium
Cr
Additional fabrication and treatment steps described in the patent.
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
chromium pattern and graphene pattern width | 100–200 | grapheneCr |
chromium layer thickness (preferred) |
Related documents with shared materials, methods, properties, or citations.
resist
palladium
Pd
platinum
Pt
SU-8
polydimethylsiloxane
polymethylmethacrylate
| 10–20 |
Cr |
resist layer thickness | 400–500 | resist |
Thickness | 10–20 nm | — |
Thickness | 400–500 nm | — |
Thickness | 100–200 nm | — |
Pressure | 1e-7 Torr | — |
Thickness | ≥ 1 nm | — |
PROVIDING A TEMPORARY PROTECTIVE LAYER ON A GRAPHENE SHEET
resist
palladium
Pd
platinum
Pt
SU-8
polydimethylsiloxane
polymethylmethacrylate
| 10–20 |
Cr |
resist layer thickness | 400–500 | resist |
Thickness | 10–20 nm | — |
Thickness | 400–500 nm | — |
Thickness | 100–200 nm | — |
Pressure | 1e-7 Torr | — |
Thickness | ≥ 1 nm | — |
PROVIDING A TEMPORARY PROTECTIVE LAYER ON A GRAPHENE SHEET
resist
palladium
Pd
platinum
Pt
SU-8
polydimethylsiloxane
polymethylmethacrylate
| 10–20 |
Cr |
resist layer thickness | 400–500 | resist |
Thickness | 10–20 nm | — |
Thickness | 400–500 nm | — |
Thickness | 100–200 nm | — |
Pressure | 1e-7 Torr | — |
Thickness | ≥ 1 nm | — |
PROVIDING A TEMPORARY PROTECTIVE LAYER ON A GRAPHENE SHEET
resist
palladium
Pd
platinum
Pt
SU-8
polydimethylsiloxane
polymethylmethacrylate
| 10–20 |
Cr |
resist layer thickness | 400–500 | resist |
Thickness | 10–20 nm | — |
Thickness | 400–500 nm | — |
Thickness | 100–200 nm | — |
Pressure | 1e-7 Torr | — |
Thickness | ≥ 1 nm | — |
PROVIDING A TEMPORARY PROTECTIVE LAYER ON A GRAPHENE SHEET