Patent
US 6,653,215InGaN
AlGaN
AlInGaN
Al (base layer)
Al
Ti (first barrier layer)
Ti
Ta
Pd
Pt (second barrier layer)
Pt
W
TiW alloy
Au (top layer)
Au
Ag
InGaN
AlGaN
AlInGaN
Al (base layer)
Al
Ti (first barrier layer)
Ti
Ta
Pd
Pt (second barrier layer)
Pt
W
TiW alloy
Au (top layer)
Au
Ag
InGaN
AlGaN
AlInGaN
Al (base layer)
Al
Ti (first barrier layer)
Ti
Ta
Pd
Pt (second barrier layer)
Pt
W
TiW alloy
Au (top layer)
Au
Ag
InGaN
AlGaN
AlInGaN
Al (base layer)
Al
Ti (first barrier layer)
Ti
Ta
Pd
Pt (second barrier layer)
Pt
W
TiW alloy
Au (top layer)
Au
Ag