Patent
US 9,269,773graphene photodetector
silicon carbide
SiC
molybdenum trioxide
MoO₃
tungsten trioxide
WO₃
graphene oxide
epitaxial graphene
| 0.2 nm |
metal oxide film |
Film Thickness Max | 15 nm | metal oxide film |
Film Thickness | 5 nm | metal oxide film |
Thickness | ≤ 15 nm | — |
Thickness | ≥ 0.2 nm | — |
— | 5.3–6.8 eV | — |
— | 4–4.3 eV | — |
— | ≥ 2.5 eV | — |
Temperature | ≥ 400 K | — |
graphene photodetector
silicon carbide
SiC
molybdenum trioxide
MoO₃
tungsten trioxide
WO₃
graphene oxide
epitaxial graphene
| 0.2 nm |
metal oxide film |
Film Thickness Max | 15 nm | metal oxide film |
Film Thickness | 5 nm | metal oxide film |
Thickness | ≤ 15 nm | — |
Thickness | ≥ 0.2 nm | — |
— | 5.3–6.8 eV | — |
— | 4–4.3 eV | — |
— | ≥ 2.5 eV | — |
Temperature | ≥ 400 K | — |
graphene photodetector
silicon carbide
SiC
molybdenum trioxide
MoO₃
tungsten trioxide
WO₃
graphene oxide
epitaxial graphene
| 0.2 nm |
metal oxide film |
Film Thickness Max | 15 nm | metal oxide film |
Film Thickness | 5 nm | metal oxide film |
Thickness | ≤ 15 nm | — |
Thickness | ≥ 0.2 nm | — |
— | 5.3–6.8 eV | — |
— | 4–4.3 eV | — |
— | ≥ 2.5 eV | — |
Temperature | ≥ 400 K | — |
graphene photodetector
silicon carbide
SiC
molybdenum trioxide
MoO₃
tungsten trioxide
WO₃
graphene oxide
epitaxial graphene
| 0.2 nm |
metal oxide film |
Film Thickness Max | 15 nm | metal oxide film |
Film Thickness | 5 nm | metal oxide film |
Thickness | ≤ 15 nm | — |
Thickness | ≥ 0.2 nm | — |
— | 5.3–6.8 eV | — |
— | 4–4.3 eV | — |
— | ≥ 2.5 eV | — |
Temperature | ≥ 400 K | — |