Patent
US 9,260,309METHOD AND APPARATUS FOR MANUFACTURING GRAPHENE
Young-Il Song
US
Copyright © 2026 Matter42. All rights reserved.
Patent
Atlas literature
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US 9,260,309Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1, the catalyst metal loading device 10 of the graphene syn- thesizing apparatus includes a frame 100, supporting units 200 which support a catalyst meta …
FIGS. 2A and 2B are schematic perspective views showing a combination of a supporting unit and a catalyst metal in the catalyst metal loading device of
FIG. 3, the graphene synthesizing apparatus may include a chamber 30 and a catalyst metal loading device 10 a rr anged inside the chamber 30. The frame 100 …
FIG. 4 is a schematic perspective view of a catalyst metal loading device according to another embodiment of the present invention. A graphene synthesizing …
FIG. 5. The catalyst metal may be loaded when the catalyst metal is coupled to a supporting unit. [81] According to another embodiment of the present …
FIG. 6, the graphene synthesizing apparatus may include a chamber 60 and the catalyst metal loading device 10 a rr anged inside the chamber 60. The catalyst …
FIG. 7, the graphene synthesizing apparatus includes the frame 100 and a roller unit 700 which supports and transfers the catalyst metals 300 l oaded to the …
FIG. 8, the graphene synthesizing apparatus may include a chamber 80 and the catalyst metal loading device 10 a rr anged inside the chamber 80. The catalyst …
FIG. 9 is a schematic perspective view of a catalyst metal loading device according to an embodiment of the present invention. [73] Referring to
FIG. 10 is a schematic flowchart of a method of synthesizing graphene according to another embodiment of the present invention. [80] Referring to
FIGS. 11 A and 11 B, grains are densely a rr anged within the predetermined portion X before a catalyst metal is heated. However, after the catalyst metal is …
FIG. 12 is a diagram showing that grains adjacent to each other merge with each other while the catalyst metal is being heated. [86] Referring to
FIG. 13 is a graph showing surface resistance characteristics of graphene synthesized using a method of synthesizing graphene according to an embodiment of the …
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
: A method of synthesizing graphene, the method comprising: loading catalyst metals into a chamber in the vertical direction; increasing sizes of grains of the catalyst metals by heating the catalyst metals before providing a vapor carbon source in the catalyst metals; raising a temperature inside the chamber while providing a-t he vapor carbon source in the catalyst metals; and forming graphene by cooling the catalyst metals.
: The method of claim 1, wherein a size of a grain of the catalyst metal is greater than 100 ga urm.
: The method of claim 1, wherein the catalyst metal contains one or more selected from the group consisting of nickel (Ni), cobalt (Co), iron (Fe), platinum (Pt), gold (Au), aluminum (Al), chrome (Cr), copper (Cu), magnesium (Mg), manganese (Mn), molybdenum (Mo), rhodium (R h), silicon (Si), tantalum (Ta), titanium (Ti), and tungsten (W).
: The method of claim 1, wherein the step of raising the temperature inside the chamber while providing a vapor carbon source in the catalyst metals comprises thermal 2 AMENDMENT UNDER 37 C.F.R. § 1.111 Attorney Docket No.: Q₂₀₅₉₂₄ App l n. No.: 13/982,880 chemical vapor deposition (T-CVD), rapid thermal chemical vapor deposition (RT-CVD), inductive coupled plasma chemical vapor deposition (I CP-CVD), or plasma enhanced chemical vapor deposition (PECVD).
: The method of claim 1, wherein, in the step of loading catalyst metals, the catalyst metals are loaded by at least a pair of roller units using a reel-to-reel method in which the catalyst metals are located between a first roller and a second roller, the first roler is wound with the catalyst metals and rotates in a direction and the second roller rotates in the same direction as the first roller so the catalyst metals are transferred to the direction.
: The method of claim 1, wherein, in the step of loading catalyst metals, the catalyst metal is loaded by fixing a surface or an edge of the catalyst metal to a frame.
: Graphene synthesized by using the method of one of claims 1 through 6. withdrawn
: A graphene synthesizing apparatus for manufacturing graphene, the graphene synthesizing apparatus comprising: a frame including an accommodation space for accommodating catalyst metals extending in a vertical direction or a horizontal direction; and supporting units supporting the catalyst metals, wherein the catalyst metals are apart from each other. 3 AMENDMENT UNDER 37 C.F.R. § 1.111 Attorney Docket No.: Q₂₀₅₉₂₄ App l n. No.: 13/982,880 withdrawn
: The graphene synthesizing apparatus of claim 9, wherein the supporting units are arranged apart from each other around the catalyst metal. withdrawn
: The graphene synthesizing apparatus of claim 9, wherein the supporting units are coupled to at least one of edges of the catalyst metal. withdrawn
: The graphene synthesizing apparatus of claim 9, wherein the supporting units support a surface of the catalyst metal. withdrawn
: A graphene synthesizing apparatus for manufacturing graphene, the graphene synthesizing apparatus comprising: a frame including an accommodation space for accommodating catalyst metals extending in a vertical direction or a horizontal direction; and roller units supporting and transfe rr ing the catalyst metals, such that the catalyst metals are arranged apart from each other inside the accom- modation space. withdrawn
: The graphene synthesizing apparatus of claim 13, wherein the roller units comprise a pair of rollers that are arranged in parallel to each other and a rr anged around the accommodation space. withdrawn
Layer stacks claimed or described, ordered top of device to substrate.
graphene synthesizing apparatus with supporting units
No layer stack recorded.
graphene synthesizing apparatus with roller units
No layer stack recorded.
Materials described outside the worked examples.
graphene
catalyst metal
vapor carbon source
Additional fabrication and treatment steps described in the patent.
Measurements and analyses referenced in the patent, with their drawing references.
FIG. 13 is a graph showing surface resistance characteristics of graphene synthesized using a method of synthesizing graphene according to an embodiment of the …
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
Fet Sheet Resistance | — | graphene |
Related documents with shared materials, methods, properties, or citations.
Patent
Atlas literature
Patent
US 9,260,309Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1, the catalyst metal loading device 10 of the graphene syn- thesizing apparatus includes a frame 100, supporting units 200 which support a catalyst meta …
FIGS. 2A and 2B are schematic perspective views showing a combination of a supporting unit and a catalyst metal in the catalyst metal loading device of
FIG. 3, the graphene synthesizing apparatus may include a chamber 30 and a catalyst metal loading device 10 a rr anged inside the chamber 30. The frame 100 …
FIG. 4 is a schematic perspective view of a catalyst metal loading device according to another embodiment of the present invention. A graphene synthesizing …
FIG. 5. The catalyst metal may be loaded when the catalyst metal is coupled to a supporting unit. [81] According to another embodiment of the present …
FIG. 6, the graphene synthesizing apparatus may include a chamber 60 and the catalyst metal loading device 10 a rr anged inside the chamber 60. The catalyst …
FIG. 7, the graphene synthesizing apparatus includes the frame 100 and a roller unit 700 which supports and transfers the catalyst metals 300 l oaded to the …
FIG. 8, the graphene synthesizing apparatus may include a chamber 80 and the catalyst metal loading device 10 a rr anged inside the chamber 80. The catalyst …
FIG. 9 is a schematic perspective view of a catalyst metal loading device according to an embodiment of the present invention. [73] Referring to
FIG. 10 is a schematic flowchart of a method of synthesizing graphene according to another embodiment of the present invention. [80] Referring to
FIGS. 11 A and 11 B, grains are densely a rr anged within the predetermined portion X before a catalyst metal is heated. However, after the catalyst metal is …
FIG. 12 is a diagram showing that grains adjacent to each other merge with each other while the catalyst metal is being heated. [86] Referring to
FIG. 13 is a graph showing surface resistance characteristics of graphene synthesized using a method of synthesizing graphene according to an embodiment of the …
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
: A method of synthesizing graphene, the method comprising: loading catalyst metals into a chamber in the vertical direction; increasing sizes of grains of the catalyst metals by heating the catalyst metals before providing a vapor carbon source in the catalyst metals; raising a temperature inside the chamber while providing a-t he vapor carbon source in the catalyst metals; and forming graphene by cooling the catalyst metals.
: The method of claim 1, wherein a size of a grain of the catalyst metal is greater than 100 ga urm.
: The method of claim 1, wherein the catalyst metal contains one or more selected from the group consisting of nickel (Ni), cobalt (Co), iron (Fe), platinum (Pt), gold (Au), aluminum (Al), chrome (Cr), copper (Cu), magnesium (Mg), manganese (Mn), molybdenum (Mo), rhodium (R h), silicon (Si), tantalum (Ta), titanium (Ti), and tungsten (W).
: The method of claim 1, wherein the step of raising the temperature inside the chamber while providing a vapor carbon source in the catalyst metals comprises thermal 2 AMENDMENT UNDER 37 C.F.R. § 1.111 Attorney Docket No.: Q₂₀₅₉₂₄ App l n. No.: 13/982,880 chemical vapor deposition (T-CVD), rapid thermal chemical vapor deposition (RT-CVD), inductive coupled plasma chemical vapor deposition (I CP-CVD), or plasma enhanced chemical vapor deposition (PECVD).
: The method of claim 1, wherein, in the step of loading catalyst metals, the catalyst metals are loaded by at least a pair of roller units using a reel-to-reel method in which the catalyst metals are located between a first roller and a second roller, the first roler is wound with the catalyst metals and rotates in a direction and the second roller rotates in the same direction as the first roller so the catalyst metals are transferred to the direction.
: The method of claim 1, wherein, in the step of loading catalyst metals, the catalyst metal is loaded by fixing a surface or an edge of the catalyst metal to a frame.
: Graphene synthesized by using the method of one of claims 1 through 6. withdrawn
: A graphene synthesizing apparatus for manufacturing graphene, the graphene synthesizing apparatus comprising: a frame including an accommodation space for accommodating catalyst metals extending in a vertical direction or a horizontal direction; and supporting units supporting the catalyst metals, wherein the catalyst metals are apart from each other. 3 AMENDMENT UNDER 37 C.F.R. § 1.111 Attorney Docket No.: Q₂₀₅₉₂₄ App l n. No.: 13/982,880 withdrawn
: The graphene synthesizing apparatus of claim 9, wherein the supporting units are arranged apart from each other around the catalyst metal. withdrawn
: The graphene synthesizing apparatus of claim 9, wherein the supporting units are coupled to at least one of edges of the catalyst metal. withdrawn
: The graphene synthesizing apparatus of claim 9, wherein the supporting units support a surface of the catalyst metal. withdrawn
: A graphene synthesizing apparatus for manufacturing graphene, the graphene synthesizing apparatus comprising: a frame including an accommodation space for accommodating catalyst metals extending in a vertical direction or a horizontal direction; and roller units supporting and transfe rr ing the catalyst metals, such that the catalyst metals are arranged apart from each other inside the accom- modation space. withdrawn
: The graphene synthesizing apparatus of claim 13, wherein the roller units comprise a pair of rollers that are arranged in parallel to each other and a rr anged around the accommodation space. withdrawn
Layer stacks claimed or described, ordered top of device to substrate.
graphene synthesizing apparatus with supporting units
No layer stack recorded.
graphene synthesizing apparatus with roller units
No layer stack recorded.
Materials described outside the worked examples.
graphene
catalyst metal
vapor carbon source
Additional fabrication and treatment steps described in the patent.
Measurements and analyses referenced in the patent, with their drawing references.
FIG. 13 is a graph showing surface resistance characteristics of graphene synthesized using a method of synthesizing graphene according to an embodiment of the …
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
Fet Sheet Resistance | — | graphene |
Related documents with shared materials, methods, properties, or citations.
Patent
Atlas literature
Patent
US 9,260,309Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1, the catalyst metal loading device 10 of the graphene syn- thesizing apparatus includes a frame 100, supporting units 200 which support a catalyst meta …
FIGS. 2A and 2B are schematic perspective views showing a combination of a supporting unit and a catalyst metal in the catalyst metal loading device of
FIG. 3, the graphene synthesizing apparatus may include a chamber 30 and a catalyst metal loading device 10 a rr anged inside the chamber 30. The frame 100 …
FIG. 4 is a schematic perspective view of a catalyst metal loading device according to another embodiment of the present invention. A graphene synthesizing …
FIG. 5. The catalyst metal may be loaded when the catalyst metal is coupled to a supporting unit. [81] According to another embodiment of the present …
FIG. 6, the graphene synthesizing apparatus may include a chamber 60 and the catalyst metal loading device 10 a rr anged inside the chamber 60. The catalyst …
FIG. 7, the graphene synthesizing apparatus includes the frame 100 and a roller unit 700 which supports and transfers the catalyst metals 300 l oaded to the …
FIG. 8, the graphene synthesizing apparatus may include a chamber 80 and the catalyst metal loading device 10 a rr anged inside the chamber 80. The catalyst …
FIG. 9 is a schematic perspective view of a catalyst metal loading device according to an embodiment of the present invention. [73] Referring to
FIG. 10 is a schematic flowchart of a method of synthesizing graphene according to another embodiment of the present invention. [80] Referring to
FIGS. 11 A and 11 B, grains are densely a rr anged within the predetermined portion X before a catalyst metal is heated. However, after the catalyst metal is …
FIG. 12 is a diagram showing that grains adjacent to each other merge with each other while the catalyst metal is being heated. [86] Referring to
FIG. 13 is a graph showing surface resistance characteristics of graphene synthesized using a method of synthesizing graphene according to an embodiment of the …
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
: A method of synthesizing graphene, the method comprising: loading catalyst metals into a chamber in the vertical direction; increasing sizes of grains of the catalyst metals by heating the catalyst metals before providing a vapor carbon source in the catalyst metals; raising a temperature inside the chamber while providing a-t he vapor carbon source in the catalyst metals; and forming graphene by cooling the catalyst metals.
: The method of claim 1, wherein a size of a grain of the catalyst metal is greater than 100 ga urm.
: The method of claim 1, wherein the catalyst metal contains one or more selected from the group consisting of nickel (Ni), cobalt (Co), iron (Fe), platinum (Pt), gold (Au), aluminum (Al), chrome (Cr), copper (Cu), magnesium (Mg), manganese (Mn), molybdenum (Mo), rhodium (R h), silicon (Si), tantalum (Ta), titanium (Ti), and tungsten (W).
: The method of claim 1, wherein the step of raising the temperature inside the chamber while providing a vapor carbon source in the catalyst metals comprises thermal 2 AMENDMENT UNDER 37 C.F.R. § 1.111 Attorney Docket No.: Q₂₀₅₉₂₄ App l n. No.: 13/982,880 chemical vapor deposition (T-CVD), rapid thermal chemical vapor deposition (RT-CVD), inductive coupled plasma chemical vapor deposition (I CP-CVD), or plasma enhanced chemical vapor deposition (PECVD).
: The method of claim 1, wherein, in the step of loading catalyst metals, the catalyst metals are loaded by at least a pair of roller units using a reel-to-reel method in which the catalyst metals are located between a first roller and a second roller, the first roler is wound with the catalyst metals and rotates in a direction and the second roller rotates in the same direction as the first roller so the catalyst metals are transferred to the direction.
: The method of claim 1, wherein, in the step of loading catalyst metals, the catalyst metal is loaded by fixing a surface or an edge of the catalyst metal to a frame.
: Graphene synthesized by using the method of one of claims 1 through 6. withdrawn
: A graphene synthesizing apparatus for manufacturing graphene, the graphene synthesizing apparatus comprising: a frame including an accommodation space for accommodating catalyst metals extending in a vertical direction or a horizontal direction; and supporting units supporting the catalyst metals, wherein the catalyst metals are apart from each other. 3 AMENDMENT UNDER 37 C.F.R. § 1.111 Attorney Docket No.: Q₂₀₅₉₂₄ App l n. No.: 13/982,880 withdrawn
: The graphene synthesizing apparatus of claim 9, wherein the supporting units are arranged apart from each other around the catalyst metal. withdrawn
: The graphene synthesizing apparatus of claim 9, wherein the supporting units are coupled to at least one of edges of the catalyst metal. withdrawn
: The graphene synthesizing apparatus of claim 9, wherein the supporting units support a surface of the catalyst metal. withdrawn
: A graphene synthesizing apparatus for manufacturing graphene, the graphene synthesizing apparatus comprising: a frame including an accommodation space for accommodating catalyst metals extending in a vertical direction or a horizontal direction; and roller units supporting and transfe rr ing the catalyst metals, such that the catalyst metals are arranged apart from each other inside the accom- modation space. withdrawn
: The graphene synthesizing apparatus of claim 13, wherein the roller units comprise a pair of rollers that are arranged in parallel to each other and a rr anged around the accommodation space. withdrawn
Layer stacks claimed or described, ordered top of device to substrate.
graphene synthesizing apparatus with supporting units
No layer stack recorded.
graphene synthesizing apparatus with roller units
No layer stack recorded.
Materials described outside the worked examples.
graphene
catalyst metal
vapor carbon source
Additional fabrication and treatment steps described in the patent.
Measurements and analyses referenced in the patent, with their drawing references.
FIG. 13 is a graph showing surface resistance characteristics of graphene synthesized using a method of synthesizing graphene according to an embodiment of the …
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
Fet Sheet Resistance | — | graphene |
Related documents with shared materials, methods, properties, or citations.
Patent
Atlas literature
Patent
US 9,260,309Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1, the catalyst metal loading device 10 of the graphene syn- thesizing apparatus includes a frame 100, supporting units 200 which support a catalyst meta …
FIGS. 2A and 2B are schematic perspective views showing a combination of a supporting unit and a catalyst metal in the catalyst metal loading device of
FIG. 3, the graphene synthesizing apparatus may include a chamber 30 and a catalyst metal loading device 10 a rr anged inside the chamber 30. The frame 100 …
FIG. 4 is a schematic perspective view of a catalyst metal loading device according to another embodiment of the present invention. A graphene synthesizing …
FIG. 5. The catalyst metal may be loaded when the catalyst metal is coupled to a supporting unit. [81] According to another embodiment of the present …
FIG. 6, the graphene synthesizing apparatus may include a chamber 60 and the catalyst metal loading device 10 a rr anged inside the chamber 60. The catalyst …
FIG. 7, the graphene synthesizing apparatus includes the frame 100 and a roller unit 700 which supports and transfers the catalyst metals 300 l oaded to the …
FIG. 8, the graphene synthesizing apparatus may include a chamber 80 and the catalyst metal loading device 10 a rr anged inside the chamber 80. The catalyst …
FIG. 9 is a schematic perspective view of a catalyst metal loading device according to an embodiment of the present invention. [73] Referring to
FIG. 10 is a schematic flowchart of a method of synthesizing graphene according to another embodiment of the present invention. [80] Referring to
FIGS. 11 A and 11 B, grains are densely a rr anged within the predetermined portion X before a catalyst metal is heated. However, after the catalyst metal is …
FIG. 12 is a diagram showing that grains adjacent to each other merge with each other while the catalyst metal is being heated. [86] Referring to
FIG. 13 is a graph showing surface resistance characteristics of graphene synthesized using a method of synthesizing graphene according to an embodiment of the …
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
: A method of synthesizing graphene, the method comprising: loading catalyst metals into a chamber in the vertical direction; increasing sizes of grains of the catalyst metals by heating the catalyst metals before providing a vapor carbon source in the catalyst metals; raising a temperature inside the chamber while providing a-t he vapor carbon source in the catalyst metals; and forming graphene by cooling the catalyst metals.
: The method of claim 1, wherein a size of a grain of the catalyst metal is greater than 100 ga urm.
: The method of claim 1, wherein the catalyst metal contains one or more selected from the group consisting of nickel (Ni), cobalt (Co), iron (Fe), platinum (Pt), gold (Au), aluminum (Al), chrome (Cr), copper (Cu), magnesium (Mg), manganese (Mn), molybdenum (Mo), rhodium (R h), silicon (Si), tantalum (Ta), titanium (Ti), and tungsten (W).
: The method of claim 1, wherein the step of raising the temperature inside the chamber while providing a vapor carbon source in the catalyst metals comprises thermal 2 AMENDMENT UNDER 37 C.F.R. § 1.111 Attorney Docket No.: Q₂₀₅₉₂₄ App l n. No.: 13/982,880 chemical vapor deposition (T-CVD), rapid thermal chemical vapor deposition (RT-CVD), inductive coupled plasma chemical vapor deposition (I CP-CVD), or plasma enhanced chemical vapor deposition (PECVD).
: The method of claim 1, wherein, in the step of loading catalyst metals, the catalyst metals are loaded by at least a pair of roller units using a reel-to-reel method in which the catalyst metals are located between a first roller and a second roller, the first roler is wound with the catalyst metals and rotates in a direction and the second roller rotates in the same direction as the first roller so the catalyst metals are transferred to the direction.
: The method of claim 1, wherein, in the step of loading catalyst metals, the catalyst metal is loaded by fixing a surface or an edge of the catalyst metal to a frame.
: Graphene synthesized by using the method of one of claims 1 through 6. withdrawn
: A graphene synthesizing apparatus for manufacturing graphene, the graphene synthesizing apparatus comprising: a frame including an accommodation space for accommodating catalyst metals extending in a vertical direction or a horizontal direction; and supporting units supporting the catalyst metals, wherein the catalyst metals are apart from each other. 3 AMENDMENT UNDER 37 C.F.R. § 1.111 Attorney Docket No.: Q₂₀₅₉₂₄ App l n. No.: 13/982,880 withdrawn
: The graphene synthesizing apparatus of claim 9, wherein the supporting units are arranged apart from each other around the catalyst metal. withdrawn
: The graphene synthesizing apparatus of claim 9, wherein the supporting units are coupled to at least one of edges of the catalyst metal. withdrawn
: The graphene synthesizing apparatus of claim 9, wherein the supporting units support a surface of the catalyst metal. withdrawn
: A graphene synthesizing apparatus for manufacturing graphene, the graphene synthesizing apparatus comprising: a frame including an accommodation space for accommodating catalyst metals extending in a vertical direction or a horizontal direction; and roller units supporting and transfe rr ing the catalyst metals, such that the catalyst metals are arranged apart from each other inside the accom- modation space. withdrawn
: The graphene synthesizing apparatus of claim 13, wherein the roller units comprise a pair of rollers that are arranged in parallel to each other and a rr anged around the accommodation space. withdrawn
Layer stacks claimed or described, ordered top of device to substrate.
graphene synthesizing apparatus with supporting units
No layer stack recorded.
graphene synthesizing apparatus with roller units
No layer stack recorded.
Materials described outside the worked examples.
graphene
catalyst metal
vapor carbon source
Additional fabrication and treatment steps described in the patent.
Measurements and analyses referenced in the patent, with their drawing references.
FIG. 13 is a graph showing surface resistance characteristics of graphene synthesized using a method of synthesizing graphene according to an embodiment of the …
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
Fet Sheet Resistance | — | graphene |
Related documents with shared materials, methods, properties, or citations.