Patent
US 10,036,728graphene
silicon
Si
silicon dioxide
SiO₂
polydimethylsiloxane (PDMS)
SU-8 photoresist
poly(methyl methacrylate) (PMMA)
palladium (Pd)
Pd
FIG. 2B is a scanning electron microscope (SEM) image of carbon nanotubes. 10
FIG. 4A is a graph of variation in the flow of current through an exemplary ion sensor 25 device as a function of time, at varying pressure, and as the ion …
FIG. 4A is a graph of variation in the flow of current through an exemplary ion sensor 25 device as a function of time, at varying pressure, and as the ion …
FIG. 5B is a graph of variation in the change in the resistance of the CNM film 5 during the "on- period" at different voltages, plotted as a function of …
FIG. 6A is a graph of variation in the current flow (in p A; y-axis) through the CNM of an ion sensor device as a function of time (x-axis) at different …
FIG. 6A is a graph of variation in the current flow (in p A; y-axis) through the CNM of an ion sensor device as a function of time (x-axis) at different …
FIG. 7A is a graph of the variation in the number of ions as a function of distance 30 between the ion source and the CNM film (or Faraday cup) in the chamber …
FIG. 8B is a graph of the background current detected by a CNM film-containing ion detector device as a function of time at 0.2V. 10
FIG. 8B is a graph of the background current detected by a CNM film-containing ion detector device as a function of time at 0.2V. 10
FIG. 9A. Increased pressure led to a higher change in the current flowing through the graphene as the ion source was turned on.
FIG. 9A. Increased pressure led to a higher change in the current flowing through the graphene as the ion source was turned on.
carbon-based nanomaterial (CNM) film |
width of CNM film strip | 20–100000000 nm | carbon-based nanomaterial (CNM) film |
length of CNM film strip | 10–1000000 nm | carbon-based nanomaterial (CNM) film |
thickness of CNM film | 1–100 nm | carbon-based nanomaterial (CNM) film |
surface area of CNM film | 200–1500000 nm2 | carbon-based nanomaterial (CNM) film |
weight of the device | 1e-10–1 g | — |
Voltage | 0.1–3 V | — |
Thickness | 0.001 mm | — |
Pressure | 0.0001 Torr | — |
Voltage | 0.5–3 V | — |
Thickness | 11–100 nm | — |
Thickness | 1–999 nm | — |
Thickness | 1.5–2 mm | — |
Pressure | 0–3 Torr | — |
Pressure | ≥ 0.000001 Torr | — |
Thickness | ≥ 3 mm | — |
Thickness | ≥ 1 mm | — |
Thickness | ≥ 1 cm | — |
graphene
silicon
Si
silicon dioxide
SiO₂
polydimethylsiloxane (PDMS)
SU-8 photoresist
poly(methyl methacrylate) (PMMA)
palladium (Pd)
Pd
FIG. 2B is a scanning electron microscope (SEM) image of carbon nanotubes. 10
FIG. 4A is a graph of variation in the flow of current through an exemplary ion sensor 25 device as a function of time, at varying pressure, and as the ion …
FIG. 4A is a graph of variation in the flow of current through an exemplary ion sensor 25 device as a function of time, at varying pressure, and as the ion …
FIG. 5B is a graph of variation in the change in the resistance of the CNM film 5 during the "on- period" at different voltages, plotted as a function of …
FIG. 6A is a graph of variation in the current flow (in p A; y-axis) through the CNM of an ion sensor device as a function of time (x-axis) at different …
FIG. 6A is a graph of variation in the current flow (in p A; y-axis) through the CNM of an ion sensor device as a function of time (x-axis) at different …
FIG. 7A is a graph of the variation in the number of ions as a function of distance 30 between the ion source and the CNM film (or Faraday cup) in the chamber …
FIG. 8B is a graph of the background current detected by a CNM film-containing ion detector device as a function of time at 0.2V. 10
FIG. 8B is a graph of the background current detected by a CNM film-containing ion detector device as a function of time at 0.2V. 10
FIG. 9A. Increased pressure led to a higher change in the current flowing through the graphene as the ion source was turned on.
FIG. 9A. Increased pressure led to a higher change in the current flowing through the graphene as the ion source was turned on.
carbon-based nanomaterial (CNM) film |
width of CNM film strip | 20–100000000 nm | carbon-based nanomaterial (CNM) film |
length of CNM film strip | 10–1000000 nm | carbon-based nanomaterial (CNM) film |
thickness of CNM film | 1–100 nm | carbon-based nanomaterial (CNM) film |
surface area of CNM film | 200–1500000 nm2 | carbon-based nanomaterial (CNM) film |
weight of the device | 1e-10–1 g | — |
Voltage | 0.1–3 V | — |
Thickness | 0.001 mm | — |
Pressure | 0.0001 Torr | — |
Voltage | 0.5–3 V | — |
Thickness | 11–100 nm | — |
Thickness | 1–999 nm | — |
Thickness | 1.5–2 mm | — |
Pressure | 0–3 Torr | — |
Pressure | ≥ 0.000001 Torr | — |
Thickness | ≥ 3 mm | — |
Thickness | ≥ 1 mm | — |
Thickness | ≥ 1 cm | — |
graphene
silicon
Si
silicon dioxide
SiO₂
polydimethylsiloxane (PDMS)
SU-8 photoresist
poly(methyl methacrylate) (PMMA)
palladium (Pd)
Pd
FIG. 2B is a scanning electron microscope (SEM) image of carbon nanotubes. 10
FIG. 4A is a graph of variation in the flow of current through an exemplary ion sensor 25 device as a function of time, at varying pressure, and as the ion …
FIG. 4A is a graph of variation in the flow of current through an exemplary ion sensor 25 device as a function of time, at varying pressure, and as the ion …
FIG. 5B is a graph of variation in the change in the resistance of the CNM film 5 during the "on- period" at different voltages, plotted as a function of …
FIG. 6A is a graph of variation in the current flow (in p A; y-axis) through the CNM of an ion sensor device as a function of time (x-axis) at different …
FIG. 6A is a graph of variation in the current flow (in p A; y-axis) through the CNM of an ion sensor device as a function of time (x-axis) at different …
FIG. 7A is a graph of the variation in the number of ions as a function of distance 30 between the ion source and the CNM film (or Faraday cup) in the chamber …
FIG. 8B is a graph of the background current detected by a CNM film-containing ion detector device as a function of time at 0.2V. 10
FIG. 8B is a graph of the background current detected by a CNM film-containing ion detector device as a function of time at 0.2V. 10
FIG. 9A. Increased pressure led to a higher change in the current flowing through the graphene as the ion source was turned on.
FIG. 9A. Increased pressure led to a higher change in the current flowing through the graphene as the ion source was turned on.
carbon-based nanomaterial (CNM) film |
width of CNM film strip | 20–100000000 nm | carbon-based nanomaterial (CNM) film |
length of CNM film strip | 10–1000000 nm | carbon-based nanomaterial (CNM) film |
thickness of CNM film | 1–100 nm | carbon-based nanomaterial (CNM) film |
surface area of CNM film | 200–1500000 nm2 | carbon-based nanomaterial (CNM) film |
weight of the device | 1e-10–1 g | — |
Voltage | 0.1–3 V | — |
Thickness | 0.001 mm | — |
Pressure | 0.0001 Torr | — |
Voltage | 0.5–3 V | — |
Thickness | 11–100 nm | — |
Thickness | 1–999 nm | — |
Thickness | 1.5–2 mm | — |
Pressure | 0–3 Torr | — |
Pressure | ≥ 0.000001 Torr | — |
Thickness | ≥ 3 mm | — |
Thickness | ≥ 1 mm | — |
Thickness | ≥ 1 cm | — |
graphene
silicon
Si
silicon dioxide
SiO₂
polydimethylsiloxane (PDMS)
SU-8 photoresist
poly(methyl methacrylate) (PMMA)
palladium (Pd)
Pd
FIG. 2B is a scanning electron microscope (SEM) image of carbon nanotubes. 10
FIG. 4A is a graph of variation in the flow of current through an exemplary ion sensor 25 device as a function of time, at varying pressure, and as the ion …
FIG. 4A is a graph of variation in the flow of current through an exemplary ion sensor 25 device as a function of time, at varying pressure, and as the ion …
FIG. 5B is a graph of variation in the change in the resistance of the CNM film 5 during the "on- period" at different voltages, plotted as a function of …
FIG. 6A is a graph of variation in the current flow (in p A; y-axis) through the CNM of an ion sensor device as a function of time (x-axis) at different …
FIG. 6A is a graph of variation in the current flow (in p A; y-axis) through the CNM of an ion sensor device as a function of time (x-axis) at different …
FIG. 7A is a graph of the variation in the number of ions as a function of distance 30 between the ion source and the CNM film (or Faraday cup) in the chamber …
FIG. 8B is a graph of the background current detected by a CNM film-containing ion detector device as a function of time at 0.2V. 10
FIG. 8B is a graph of the background current detected by a CNM film-containing ion detector device as a function of time at 0.2V. 10
FIG. 9A. Increased pressure led to a higher change in the current flowing through the graphene as the ion source was turned on.
FIG. 9A. Increased pressure led to a higher change in the current flowing through the graphene as the ion source was turned on.
carbon-based nanomaterial (CNM) film |
width of CNM film strip | 20–100000000 nm | carbon-based nanomaterial (CNM) film |
length of CNM film strip | 10–1000000 nm | carbon-based nanomaterial (CNM) film |
thickness of CNM film | 1–100 nm | carbon-based nanomaterial (CNM) film |
surface area of CNM film | 200–1500000 nm2 | carbon-based nanomaterial (CNM) film |
weight of the device | 1e-10–1 g | — |
Voltage | 0.1–3 V | — |
Thickness | 0.001 mm | — |
Pressure | 0.0001 Torr | — |
Voltage | 0.5–3 V | — |
Thickness | 11–100 nm | — |
Thickness | 1–999 nm | — |
Thickness | 1.5–2 mm | — |
Pressure | 0–3 Torr | — |
Pressure | ≥ 0.000001 Torr | — |
Thickness | ≥ 3 mm | — |
Thickness | ≥ 1 mm | — |
Thickness | ≥ 1 cm | — |