Wang, H.-X., et al., Graphene in Light: Design, Synthesis and Applications of Photo-active Graphene and Graphene-Like Materials. Small, 2013. 9(8): p. 35 1266-1283. WO 2015/189575 PCT/GB₂₀₁₅/051634

Zhang, Y., L. Zhang, and C. Zhou, Review of Chemical Vapor Deposition of Graphene and Related Applications. Accounts of Chemical Research, 2013. 46(10): p. 2329- 2339

Robertson, J., et al., Synthesis of carbon nanotubes and graphene for VLSI 5 interconnects. Microelectronic Engineering, 2013. 10 7(0): p. 210- 218

Batzill, M., The surface science of graphene: Metal interfaces, CVD synthesis, nanoribbons, chemical modifications, and defects. Surface Science Reports, 2012. 67(3 -4): p. 83- 115

An, H., W.-J. Lee, and J. Jung, Graphene synthesis on Fe foil using thermal 10 CVD. Current Applied Physics, 2011. 11(4, Supplement): p. S₈₁-S85.

Seah, C.-M., S.-P. Chai, and A.R. Mohamed, Synthesis of aligned carbon nanotubes. Carbon, 2011. 49(14): p. 46 1 3- 4635

Kumar, M. and Y. Ando, Chemical Vapor Deposition of Carbon Nanotubes: A Review on Growth Mechanism and Mass Production. Journal of Nanoscience 15 and Nanotechnology, 2010. io (6): p. 3739- 3758

Chen, G.Y., et al., Growth of carbon nanotubes at temperatures compatible with integrated circuit technologies. Carbon, 2011. 49(1): p. 280- 285

Tan, Y.Y., et al., Photo-thermal chemical vapor deposition growth of graphene. Carbon, 2012. 50(2): p. 668- 673 20 10. Shang, N.G., et al., High-rate low-temperature growth of vertically aligned carbon nanotubes. Nanotechnology, 2010. 2 1(50): p. 6.

Ahmad, M., et al., Efficient coupling of optical energy for rapid catalyzed nanomaterial growth: high-quality carbon nanotube synthesis at low substrate temperatures. ACS applied materials & interfaces, 2013. 5(9): p. 25 3861-6.

Saito, R., et al., Double resonance Raman spectroscopy of single-wall carbon nanotubes. New Journal of Physics, 2003. 5: p. 1- 157

Tuinstra, F. and J.L. Koenig, Raman Spectrum of Graphite. Journal of Chemical Physics, 1970. 53(3): p. 1126- 1131 30 14. Ferrari, A.C. and D.M. Basko, Raman spectroscopy as a versatile toolfor studying the properties of graphene. Nature Nanotechnology, 2013. 8 (4): p. 235-246.

Reina, A., et al., Large Area, Few-Layer Graphene Films on Arbitrary Substrates by Chemical Vapor Deposition. Nano Letters, 2009. 9(1): p. 30- 35 35 1 6. Li, X., et al., Large-Area Synthesis of High-Quality and Uniform Graphene Films on Copper Foils. Science, 2009. 324(5932): p. 1312- 1314 WO 2015/189575 PCT/GB₂₀₁₅/051634

Reina, A., et al., Large Area, Few-Layer Graphene Films on Arbitrary Substrates by Chemical V apor Deposition. Nano Letters, 2008. 9(1): p. 30-1 8. van der Veen, M.H., et al., Electrical characterization of CNT contacts with Cu Damascene top contact. Microelectronic Engineering, 2 01 3. 1o 6: p. SVG 15317562.12-09-2016.IWRP₃SU₈RXEAPX0.SPEC.45.6.1952.657.2108.691.svg 0.113 0.52 Chemistry Black and white 5 1 9. Nihei, M., et al., Electrical properties of carbon nanotube bundles for future via interconnects. Japanese Journal of Applied Physics Part i -Regular Papers Short Notes & Review Papers, 2005. 44(4A): p. 1626- 1628

Nessim, G.D., et al., Low Temperature Synthesis of V ertically Aligned Carbon Nanotubes with Electrical Contact to Metallic Substrates Enabled by Thermal 0 Decomposition of the Carbon Feedstock. Nano Letters, 2009. 9(1 0): p. 3398- 3405

Lee, Y.T., et al., Temperature-dependent growth of carbon nanotubes by pyrolysis offerrocene and acetylene in the range between 700 and 1000 degrees C. Chemical Physics Letters, 2003. 372(5 -6): p. 853- 859 15 22. Shamsudin, M.S., et al., Effect of Synthesis Temperature on the Growth Iron- Filled Carbon Nanotubes as Evidenced by Structural, Micro-Raman, and Thermogravimetric Analyses. Advances in Condensed Matter Physics, 2012.

Wang, T., et al., Formation of three-dimensional carbon nanotube structures by controllable vapor dens if ication. Materials Letters, 2 012. 78(0): p. 1 84- 187 20 24. ITRS, International Technology Roadmap for Semiconductors, edition: Interconnect: Tables, Chapter. 2 011. Claims What is claimed is:

Canceled

- 44. Canceled

Canceled

(Withdrawn; Currently Amended) A layer stack for growing graphene or carbon nanotubes (CNTs), wherein the layer stack comprises a substrate, a protective layer, a cavity provided within the layer stack, and an attachment surface, wherein the protective layer comprises a material selected from the group consisting of titanium nitride (Ti N), titanium (Ti), tantalum (Ta), tantalum nitride (TaN), gold (Au), silver (Ag), palladium (Pd), chromium (Cr), boron nitride (BN), molybdenum disulfide (MoS₂), molybdenum selenide (MoSe), and tungsten sulphide (WS₂), and allows carbon diffusion therethrough to both the cavity and the attachment surface, such that graphene or CNTs grow from the attachment surface, and wherein the substrate is capable of catalysing the growth of graphene or CNTs from the attachment surface or wherein the layer stack further comprises a catalyst layer disposed between the substrate and the protective layer. Currently amended

Canceled

- 54. Canceled

Canceled

A method for manufacturing a layer stack for use in growing graphene or carbon nanotubes (CNTs), the method comprising:- a) providing a substrate and depositing a catalyst layer capable of catalysing the growth of the graphene and/or the CNTs thereon; and b) depositing a protective layer on the catalyst layer, such that an attachment surface is disposed between the catalyst layer and the protective layer and the catalyst layer is disposed between the substrate and the protective layer, thereby creating a layer stack, wherein the protective layer comp ri ses a material selected from a group consisting of. Titanium Nitride (TiN), Titanium (Ti), Tantalum (Ta), Tantalum Nitride (TaN), Gold (Au), Silver (Ag), Palladium (Pd), Chromium (Cr), boron nitride (BN), molybdenum disulfide (MoS₂), molybdenum selenide (MoSe), and tungsten su l phide (WS₂) and allows carbon diffusion therethrough to the attachment surface such that graphene or CNTs grow therefrom. New

Wang, H.-X., et al., Graphene in Light: Design, Synthesis and Applications of Photo-active Graphene and Graphene-Like Materials. Small, 2013. 9(8): p. 35 1266-1283. WO 2015/189575 PCT/GB₂₀₁₅/051634

Zhang, Y., L. Zhang, and C. Zhou, Review of Chemical Vapor Deposition of Graphene and Related Applications. Accounts of Chemical Research, 2013. 46(10): p. 2329- 2339

Robertson, J., et al., Synthesis of carbon nanotubes and graphene for VLSI 5 interconnects. Microelectronic Engineering, 2013. 10 7(0): p. 210- 218

Batzill, M., The surface science of graphene: Metal interfaces, CVD synthesis, nanoribbons, chemical modifications, and defects. Surface Science Reports, 2012. 67(3 -4): p. 83- 115

An, H., W.-J. Lee, and J. Jung, Graphene synthesis on Fe foil using thermal 10 CVD. Current Applied Physics, 2011. 11(4, Supplement): p. S₈₁-S85.

Seah, C.-M., S.-P. Chai, and A.R. Mohamed, Synthesis of aligned carbon nanotubes. Carbon, 2011. 49(14): p. 46 1 3- 4635

Kumar, M. and Y. Ando, Chemical Vapor Deposition of Carbon Nanotubes: A Review on Growth Mechanism and Mass Production. Journal of Nanoscience 15 and Nanotechnology, 2010. io (6): p. 3739- 3758

Chen, G.Y., et al., Growth of carbon nanotubes at temperatures compatible with integrated circuit technologies. Carbon, 2011. 49(1): p. 280- 285

Tan, Y.Y., et al., Photo-thermal chemical vapor deposition growth of graphene. Carbon, 2012. 50(2): p. 668- 673 20 10. Shang, N.G., et al., High-rate low-temperature growth of vertically aligned carbon nanotubes. Nanotechnology, 2010. 2 1(50): p. 6.

Ahmad, M., et al., Efficient coupling of optical energy for rapid catalyzed nanomaterial growth: high-quality carbon nanotube synthesis at low substrate temperatures. ACS applied materials & interfaces, 2013. 5(9): p. 25 3861-6.

Saito, R., et al., Double resonance Raman spectroscopy of single-wall carbon nanotubes. New Journal of Physics, 2003. 5: p. 1- 157

Tuinstra, F. and J.L. Koenig, Raman Spectrum of Graphite. Journal of Chemical Physics, 1970. 53(3): p. 1126- 1131 30 14. Ferrari, A.C. and D.M. Basko, Raman spectroscopy as a versatile toolfor studying the properties of graphene. Nature Nanotechnology, 2013. 8 (4): p. 235-246.

Reina, A., et al., Large Area, Few-Layer Graphene Films on Arbitrary Substrates by Chemical Vapor Deposition. Nano Letters, 2009. 9(1): p. 30- 35 35 1 6. Li, X., et al., Large-Area Synthesis of High-Quality and Uniform Graphene Films on Copper Foils. Science, 2009. 324(5932): p. 1312- 1314 WO 2015/189575 PCT/GB₂₀₁₅/051634

Reina, A., et al., Large Area, Few-Layer Graphene Films on Arbitrary Substrates by Chemical V apor Deposition. Nano Letters, 2008. 9(1): p. 30-1 8. van der Veen, M.H., et al., Electrical characterization of CNT contacts with Cu Damascene top contact. Microelectronic Engineering, 2 01 3. 1o 6: p. SVG 15317562.12-09-2016.IWRP₃SU₈RXEAPX0.SPEC.45.6.1952.657.2108.691.svg 0.113 0.52 Chemistry Black and white 5 1 9. Nihei, M., et al., Electrical properties of carbon nanotube bundles for future via interconnects. Japanese Journal of Applied Physics Part i -Regular Papers Short Notes & Review Papers, 2005. 44(4A): p. 1626- 1628

Nessim, G.D., et al., Low Temperature Synthesis of V ertically Aligned Carbon Nanotubes with Electrical Contact to Metallic Substrates Enabled by Thermal 0 Decomposition of the Carbon Feedstock. Nano Letters, 2009. 9(1 0): p. 3398- 3405

Lee, Y.T., et al., Temperature-dependent growth of carbon nanotubes by pyrolysis offerrocene and acetylene in the range between 700 and 1000 degrees C. Chemical Physics Letters, 2003. 372(5 -6): p. 853- 859 15 22. Shamsudin, M.S., et al., Effect of Synthesis Temperature on the Growth Iron- Filled Carbon Nanotubes as Evidenced by Structural, Micro-Raman, and Thermogravimetric Analyses. Advances in Condensed Matter Physics, 2012.

Wang, T., et al., Formation of three-dimensional carbon nanotube structures by controllable vapor dens if ication. Materials Letters, 2 012. 78(0): p. 1 84- 187 20 24. ITRS, International Technology Roadmap for Semiconductors, edition: Interconnect: Tables, Chapter. 2 011. Claims What is claimed is:

Canceled

- 44. Canceled

Canceled

(Withdrawn; Currently Amended) A layer stack for growing graphene or carbon nanotubes (CNTs), wherein the layer stack comprises a substrate, a protective layer, a cavity provided within the layer stack, and an attachment surface, wherein the protective layer comprises a material selected from the group consisting of titanium nitride (Ti N), titanium (Ti), tantalum (Ta), tantalum nitride (TaN), gold (Au), silver (Ag), palladium (Pd), chromium (Cr), boron nitride (BN), molybdenum disulfide (MoS₂), molybdenum selenide (MoSe), and tungsten sulphide (WS₂), and allows carbon diffusion therethrough to both the cavity and the attachment surface, such that graphene or CNTs grow from the attachment surface, and wherein the substrate is capable of catalysing the growth of graphene or CNTs from the attachment surface or wherein the layer stack further comprises a catalyst layer disposed between the substrate and the protective layer. Currently amended

Canceled

- 54. Canceled

Canceled

A method for manufacturing a layer stack for use in growing graphene or carbon nanotubes (CNTs), the method comprising:- a) providing a substrate and depositing a catalyst layer capable of catalysing the growth of the graphene and/or the CNTs thereon; and b) depositing a protective layer on the catalyst layer, such that an attachment surface is disposed between the catalyst layer and the protective layer and the catalyst layer is disposed between the substrate and the protective layer, thereby creating a layer stack, wherein the protective layer comp ri ses a material selected from a group consisting of. Titanium Nitride (TiN), Titanium (Ti), Tantalum (Ta), Tantalum Nitride (TaN), Gold (Au), Silver (Ag), Palladium (Pd), Chromium (Cr), boron nitride (BN), molybdenum disulfide (MoS₂), molybdenum selenide (MoSe), and tungsten su l phide (WS₂) and allows carbon diffusion therethrough to the attachment surface such that graphene or CNTs grow therefrom. New

Wang, H.-X., et al., Graphene in Light: Design, Synthesis and Applications of Photo-active Graphene and Graphene-Like Materials. Small, 2013. 9(8): p. 35 1266-1283. WO 2015/189575 PCT/GB₂₀₁₅/051634

Zhang, Y., L. Zhang, and C. Zhou, Review of Chemical Vapor Deposition of Graphene and Related Applications. Accounts of Chemical Research, 2013. 46(10): p. 2329- 2339

Robertson, J., et al., Synthesis of carbon nanotubes and graphene for VLSI 5 interconnects. Microelectronic Engineering, 2013. 10 7(0): p. 210- 218

Batzill, M., The surface science of graphene: Metal interfaces, CVD synthesis, nanoribbons, chemical modifications, and defects. Surface Science Reports, 2012. 67(3 -4): p. 83- 115

An, H., W.-J. Lee, and J. Jung, Graphene synthesis on Fe foil using thermal 10 CVD. Current Applied Physics, 2011. 11(4, Supplement): p. S₈₁-S85.

Seah, C.-M., S.-P. Chai, and A.R. Mohamed, Synthesis of aligned carbon nanotubes. Carbon, 2011. 49(14): p. 46 1 3- 4635

Kumar, M. and Y. Ando, Chemical Vapor Deposition of Carbon Nanotubes: A Review on Growth Mechanism and Mass Production. Journal of Nanoscience 15 and Nanotechnology, 2010. io (6): p. 3739- 3758

Chen, G.Y., et al., Growth of carbon nanotubes at temperatures compatible with integrated circuit technologies. Carbon, 2011. 49(1): p. 280- 285

Tan, Y.Y., et al., Photo-thermal chemical vapor deposition growth of graphene. Carbon, 2012. 50(2): p. 668- 673 20 10. Shang, N.G., et al., High-rate low-temperature growth of vertically aligned carbon nanotubes. Nanotechnology, 2010. 2 1(50): p. 6.

Ahmad, M., et al., Efficient coupling of optical energy for rapid catalyzed nanomaterial growth: high-quality carbon nanotube synthesis at low substrate temperatures. ACS applied materials & interfaces, 2013. 5(9): p. 25 3861-6.

Saito, R., et al., Double resonance Raman spectroscopy of single-wall carbon nanotubes. New Journal of Physics, 2003. 5: p. 1- 157

Tuinstra, F. and J.L. Koenig, Raman Spectrum of Graphite. Journal of Chemical Physics, 1970. 53(3): p. 1126- 1131 30 14. Ferrari, A.C. and D.M. Basko, Raman spectroscopy as a versatile toolfor studying the properties of graphene. Nature Nanotechnology, 2013. 8 (4): p. 235-246.

Reina, A., et al., Large Area, Few-Layer Graphene Films on Arbitrary Substrates by Chemical Vapor Deposition. Nano Letters, 2009. 9(1): p. 30- 35 35 1 6. Li, X., et al., Large-Area Synthesis of High-Quality and Uniform Graphene Films on Copper Foils. Science, 2009. 324(5932): p. 1312- 1314 WO 2015/189575 PCT/GB₂₀₁₅/051634

Reina, A., et al., Large Area, Few-Layer Graphene Films on Arbitrary Substrates by Chemical V apor Deposition. Nano Letters, 2008. 9(1): p. 30-1 8. van der Veen, M.H., et al., Electrical characterization of CNT contacts with Cu Damascene top contact. Microelectronic Engineering, 2 01 3. 1o 6: p. SVG 15317562.12-09-2016.IWRP₃SU₈RXEAPX0.SPEC.45.6.1952.657.2108.691.svg 0.113 0.52 Chemistry Black and white 5 1 9. Nihei, M., et al., Electrical properties of carbon nanotube bundles for future via interconnects. Japanese Journal of Applied Physics Part i -Regular Papers Short Notes & Review Papers, 2005. 44(4A): p. 1626- 1628

Nessim, G.D., et al., Low Temperature Synthesis of V ertically Aligned Carbon Nanotubes with Electrical Contact to Metallic Substrates Enabled by Thermal 0 Decomposition of the Carbon Feedstock. Nano Letters, 2009. 9(1 0): p. 3398- 3405

Lee, Y.T., et al., Temperature-dependent growth of carbon nanotubes by pyrolysis offerrocene and acetylene in the range between 700 and 1000 degrees C. Chemical Physics Letters, 2003. 372(5 -6): p. 853- 859 15 22. Shamsudin, M.S., et al., Effect of Synthesis Temperature on the Growth Iron- Filled Carbon Nanotubes as Evidenced by Structural, Micro-Raman, and Thermogravimetric Analyses. Advances in Condensed Matter Physics, 2012.

Wang, T., et al., Formation of three-dimensional carbon nanotube structures by controllable vapor dens if ication. Materials Letters, 2 012. 78(0): p. 1 84- 187 20 24. ITRS, International Technology Roadmap for Semiconductors, edition: Interconnect: Tables, Chapter. 2 011. Claims What is claimed is:

Canceled

- 44. Canceled

Canceled

(Withdrawn; Currently Amended) A layer stack for growing graphene or carbon nanotubes (CNTs), wherein the layer stack comprises a substrate, a protective layer, a cavity provided within the layer stack, and an attachment surface, wherein the protective layer comprises a material selected from the group consisting of titanium nitride (Ti N), titanium (Ti), tantalum (Ta), tantalum nitride (TaN), gold (Au), silver (Ag), palladium (Pd), chromium (Cr), boron nitride (BN), molybdenum disulfide (MoS₂), molybdenum selenide (MoSe), and tungsten sulphide (WS₂), and allows carbon diffusion therethrough to both the cavity and the attachment surface, such that graphene or CNTs grow from the attachment surface, and wherein the substrate is capable of catalysing the growth of graphene or CNTs from the attachment surface or wherein the layer stack further comprises a catalyst layer disposed between the substrate and the protective layer. Currently amended

Canceled

- 54. Canceled

Canceled

A method for manufacturing a layer stack for use in growing graphene or carbon nanotubes (CNTs), the method comprising:- a) providing a substrate and depositing a catalyst layer capable of catalysing the growth of the graphene and/or the CNTs thereon; and b) depositing a protective layer on the catalyst layer, such that an attachment surface is disposed between the catalyst layer and the protective layer and the catalyst layer is disposed between the substrate and the protective layer, thereby creating a layer stack, wherein the protective layer comp ri ses a material selected from a group consisting of. Titanium Nitride (TiN), Titanium (Ti), Tantalum (Ta), Tantalum Nitride (TaN), Gold (Au), Silver (Ag), Palladium (Pd), Chromium (Cr), boron nitride (BN), molybdenum disulfide (MoS₂), molybdenum selenide (MoSe), and tungsten su l phide (WS₂) and allows carbon diffusion therethrough to the attachment surface such that graphene or CNTs grow therefrom. New

Wang, H.-X., et al., Graphene in Light: Design, Synthesis and Applications of Photo-active Graphene and Graphene-Like Materials. Small, 2013. 9(8): p. 35 1266-1283. WO 2015/189575 PCT/GB₂₀₁₅/051634

Zhang, Y., L. Zhang, and C. Zhou, Review of Chemical Vapor Deposition of Graphene and Related Applications. Accounts of Chemical Research, 2013. 46(10): p. 2329- 2339

Robertson, J., et al., Synthesis of carbon nanotubes and graphene for VLSI 5 interconnects. Microelectronic Engineering, 2013. 10 7(0): p. 210- 218

Batzill, M., The surface science of graphene: Metal interfaces, CVD synthesis, nanoribbons, chemical modifications, and defects. Surface Science Reports, 2012. 67(3 -4): p. 83- 115

An, H., W.-J. Lee, and J. Jung, Graphene synthesis on Fe foil using thermal 10 CVD. Current Applied Physics, 2011. 11(4, Supplement): p. S₈₁-S85.

Seah, C.-M., S.-P. Chai, and A.R. Mohamed, Synthesis of aligned carbon nanotubes. Carbon, 2011. 49(14): p. 46 1 3- 4635

Kumar, M. and Y. Ando, Chemical Vapor Deposition of Carbon Nanotubes: A Review on Growth Mechanism and Mass Production. Journal of Nanoscience 15 and Nanotechnology, 2010. io (6): p. 3739- 3758

Chen, G.Y., et al., Growth of carbon nanotubes at temperatures compatible with integrated circuit technologies. Carbon, 2011. 49(1): p. 280- 285

Tan, Y.Y., et al., Photo-thermal chemical vapor deposition growth of graphene. Carbon, 2012. 50(2): p. 668- 673 20 10. Shang, N.G., et al., High-rate low-temperature growth of vertically aligned carbon nanotubes. Nanotechnology, 2010. 2 1(50): p. 6.

Ahmad, M., et al., Efficient coupling of optical energy for rapid catalyzed nanomaterial growth: high-quality carbon nanotube synthesis at low substrate temperatures. ACS applied materials & interfaces, 2013. 5(9): p. 25 3861-6.

Saito, R., et al., Double resonance Raman spectroscopy of single-wall carbon nanotubes. New Journal of Physics, 2003. 5: p. 1- 157

Tuinstra, F. and J.L. Koenig, Raman Spectrum of Graphite. Journal of Chemical Physics, 1970. 53(3): p. 1126- 1131 30 14. Ferrari, A.C. and D.M. Basko, Raman spectroscopy as a versatile toolfor studying the properties of graphene. Nature Nanotechnology, 2013. 8 (4): p. 235-246.

Reina, A., et al., Large Area, Few-Layer Graphene Films on Arbitrary Substrates by Chemical Vapor Deposition. Nano Letters, 2009. 9(1): p. 30- 35 35 1 6. Li, X., et al., Large-Area Synthesis of High-Quality and Uniform Graphene Films on Copper Foils. Science, 2009. 324(5932): p. 1312- 1314 WO 2015/189575 PCT/GB₂₀₁₅/051634

Reina, A., et al., Large Area, Few-Layer Graphene Films on Arbitrary Substrates by Chemical V apor Deposition. Nano Letters, 2008. 9(1): p. 30-1 8. van der Veen, M.H., et al., Electrical characterization of CNT contacts with Cu Damascene top contact. Microelectronic Engineering, 2 01 3. 1o 6: p. SVG 15317562.12-09-2016.IWRP₃SU₈RXEAPX0.SPEC.45.6.1952.657.2108.691.svg 0.113 0.52 Chemistry Black and white 5 1 9. Nihei, M., et al., Electrical properties of carbon nanotube bundles for future via interconnects. Japanese Journal of Applied Physics Part i -Regular Papers Short Notes & Review Papers, 2005. 44(4A): p. 1626- 1628

Nessim, G.D., et al., Low Temperature Synthesis of V ertically Aligned Carbon Nanotubes with Electrical Contact to Metallic Substrates Enabled by Thermal 0 Decomposition of the Carbon Feedstock. Nano Letters, 2009. 9(1 0): p. 3398- 3405

Lee, Y.T., et al., Temperature-dependent growth of carbon nanotubes by pyrolysis offerrocene and acetylene in the range between 700 and 1000 degrees C. Chemical Physics Letters, 2003. 372(5 -6): p. 853- 859 15 22. Shamsudin, M.S., et al., Effect of Synthesis Temperature on the Growth Iron- Filled Carbon Nanotubes as Evidenced by Structural, Micro-Raman, and Thermogravimetric Analyses. Advances in Condensed Matter Physics, 2012.

Wang, T., et al., Formation of three-dimensional carbon nanotube structures by controllable vapor dens if ication. Materials Letters, 2 012. 78(0): p. 1 84- 187 20 24. ITRS, International Technology Roadmap for Semiconductors, edition: Interconnect: Tables, Chapter. 2 011. Claims What is claimed is:

Canceled

- 44. Canceled

Canceled

(Withdrawn; Currently Amended) A layer stack for growing graphene or carbon nanotubes (CNTs), wherein the layer stack comprises a substrate, a protective layer, a cavity provided within the layer stack, and an attachment surface, wherein the protective layer comprises a material selected from the group consisting of titanium nitride (Ti N), titanium (Ti), tantalum (Ta), tantalum nitride (TaN), gold (Au), silver (Ag), palladium (Pd), chromium (Cr), boron nitride (BN), molybdenum disulfide (MoS₂), molybdenum selenide (MoSe), and tungsten sulphide (WS₂), and allows carbon diffusion therethrough to both the cavity and the attachment surface, such that graphene or CNTs grow from the attachment surface, and wherein the substrate is capable of catalysing the growth of graphene or CNTs from the attachment surface or wherein the layer stack further comprises a catalyst layer disposed between the substrate and the protective layer. Currently amended

Canceled

- 54. Canceled

Canceled

A method for manufacturing a layer stack for use in growing graphene or carbon nanotubes (CNTs), the method comprising:- a) providing a substrate and depositing a catalyst layer capable of catalysing the growth of the graphene and/or the CNTs thereon; and b) depositing a protective layer on the catalyst layer, such that an attachment surface is disposed between the catalyst layer and the protective layer and the catalyst layer is disposed between the substrate and the protective layer, thereby creating a layer stack, wherein the protective layer comp ri ses a material selected from a group consisting of. Titanium Nitride (TiN), Titanium (Ti), Tantalum (Ta), Tantalum Nitride (TaN), Gold (Au), Silver (Ag), Palladium (Pd), Chromium (Cr), boron nitride (BN), molybdenum disulfide (MoS₂), molybdenum selenide (MoSe), and tungsten su l phide (WS₂) and allows carbon diffusion therethrough to the attachment surface such that graphene or CNTs grow therefrom. New