Conception of an Electro-Mechanical Component for a Micro- or Nano-System Equipped with a Bar Forming an Axis of Rotation of the Component and Coated in Graphene

Jean-Christophe GABRIEL

Patent

Atlas literature

Patent

US 8,656,584

Conception of an Electro-Mechanical Component for a Micro- or Nano-System Equipped with a Bar Forming an Axis of Rotation of the Component and Coated in Graphene

Jean-Christophe GABRIEL

Claims

Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.

9 independent · 11 dependent

1
Independentgraphenegiven material (bar material)electro-mechanical microsystem/MEMS/NEMS with graphene-coated rotational bar
A method of fabricating an electro-mechanical microsystem provided with at least one ﬁxed part compris in g a bar, and at least one mobile part m rotation around at least one portion of said bar, the method compr ism g the steps of a) forming in a layer of at least one given material rest in g on a support[[, of]] at least one bar, and bj forming around the bar a plurality of sheets of graphene of which at least a ﬁrst graphene sheet, and at least one second graphene sheet, separated from the ﬁrst sheet and mobile with respect to the ﬁrst sheet
1. 2
  Dependent← claim 1given material (bar material)electro-mechanical microsystem/MEMS/NEMS with graphene-coated rotational bar
  The method accord in g to claim 1, in which, dur ing step a), etching said layer of said given material is carried out in order to form said bar
2. 3
  Dependent← claim 1given material (bar material)
  The method accord in g to claim 1, in which said given material is a material on which graphene growth can be car ri ed out or of which at least one thickness of said given material is decomposed in to graphene
3. 5
  Dependent← claim 1electro-mechanical microsystem/MEMS/NEMS with graphene-coated rotational bar
  (Previously Prese nt ed). The method accord in g to claim 1, the bar be ing fabricated during step a) in order to form a non-zero angle with the ma in plane of the support 2 SVG 12884871.01-03-2014.HPZHXOJMPXXIFW3.CLM₁0078842.2.295.162.1151.247.svg 0.283 2.853 Maths Black and white
4. 8
  Dependent← claim 1electro-mechanical microsystem/MEMS/NEMS with graphene-coated rotational bar
  The method accord in g to claim 1, said bar is parallel with a ma in plane of the support
5. 10
  Dependent← claim 1electro-mechanical microsystem/MEMS/NEMS with graphene-coated rotational bar
  The method accord in g to claim 1, further element of the mobile part rigidly attached to the
6. 11
  Dependent← claim 1electro-mechanical microsystem/MEMS/NEMS with graphene-coated rotational bar
  The method accord in g to claim 1, compris in least one step consisting of rounding the proﬁle of
7. 12
  Dependent← claim 1grapheneelectro-mechanical microsystem/MEMS/NEMS with graphene-coated rotational bar
  The method according to claim 1, at least one around the bar 3 SVG 12884871.01-03-2014.HPZHXOJMPXXIFW3.CLM₁0078843.2.300.161.1159.246.svg Graph Black and white
13
Independentgrapheneelectro-mechanical microsystem/MEMS/NEMS with graphene-coated rotational bar
The method accord in g to claim 1, the sheets comprises a plura li ty of sheets Claims 14-20
14
Independent
canceled
15
Independent
canceled
16
Independent
canceled
17
Independent
canceled
18
Independent
canceled
19
Independent
canceled
20
Independentgrapheneelectro-mechanical microsystem/MEMS/NEMS with graphene-coated rotational bar
canceled comprising-form in g on the bar at least one second graphene sheet g, in addition, between step a) and step b), at the bar of said sheets forming a cont in uous layer 0.283 2.863 be ing formed so that the periphery of the bar

Worked examples

Embodiments described in the patent, grouped by the materials and process steps they use.

First embodiment-vertical bar MEMS/NEMS fabrication

description derived process summary

9 materials1 process step

A first layer of given material (e.g. SiC, Cu, Ni, Ir, Pt, Ru, Pd) is deposited on a support. The layer is etched to form a bar oriented at a non-zero angle (e.g. 90°) with respect to the main plane of the support. The bar may be further etched to produce a flared shape from base to top. Graphene sheets are then formed around the bar, with at least one first graphene sheet fixed to the bar and at least one second graphene sheet mobile with respect to the first, enabling rotational motion around the bar axis.

Second embodiment-horizontal bar MEMS/NEMS fabrication

description derived process summary

2 materials1 process step

A bar is formed parallel to the main plane of the support from a layer of given material, optionally connected to an anchoring block area of the same layer. A masking block with critical dimension larger than the bar dimension may be used; graphene sheets are formed to cover both the bar and the mask. Mobile elements such as metallic blades may be rigidly attached to the second graphene sheet.

Device structures

Layer stacks claimed or described, ordered top of device to substrate.

electro-mechanical microsystem/MEMS/NEMS with graphene-coated rotational bar

graphenesecond graphene sheet (mobile)

graphenefirst graphene sheet (fixed)

given material (bar material)bar / fixed axis of rotation

Sisupport

Materials

Materials described outside the worked examples.

amorphous carbon

Bar Material/Graphene Precursor Material

silicon

Support Substrate Material

Reported properties

Performance values and ranges asserted in the specification or claims.

Property	Value	Material
Thickness	100–20000 nm	—
Thickness	20–100 nm

Why these are connected

Related documents with shared materials, methods, properties, or citations.

Conception of an Electro-Mechanical Component for a Micro- or Nano-System Equipped with a Bar Forming an Axis of Rotation of the Component and Coated in Graphene | Matter42 Literature