Patent
US 9,196,478GRAPHENE TRANSFERRING METHODS, DEVICE MANUFACTURING METHOD USING THE SAME, AND SUBSTRATE STRUCTURES INCLUDING GRAPHENE
Joo-ho LEE
US
Copyright © 2026 Matter42. All rights reserved.
Patent
Atlas literature
Patent
US 9,196,478Patent drawings and their descriptions. Click a drawing to enlarge it.
FIGS. 1 A through 1H are cross-sectional views for explaining a graphene transferring method, according to example embodiments; [39]
FIGS. 2A through 2 C are cross-sectional views for explaining a graphene transferring method, according to example embodiments; [40]
FIGS. 3A and 3B are cross-sectional views for explaining a graphene transferring method, according to example embodiments; [41]
FIGS. 4A and 4B are cross-sectional views for explaining a graphene transferring method, according to example embodiments; [42]
FIGS. 5A through 5 C are cross-sectional views for explaining a graphene transferring method, according to example embodiments; [43]
FIGS. 6A through 6E are cross-sectional views for explaining a graphene transferring method, according to example embodiments; [44]
FIG. 7 is a photo of a structure corresponding to an operation of
FIG. 8 is a photo of a structure corresponding to an operation of
FIGS. 9 and 10 are scanning electron microscope (SEM) images of surfaces of graphene layers transferred according to a comparative example and example …
FIG. 10; [48]
FIG. 11 is a graph illustrating a result obtained by measuring a Raman spectrum characteristic of the graphene layer of
FIG. 12 is a graph illustrating a result obtained by measuring electrical resistance of graphene layers transferred according to a comparative example and …
FIGS. 13A through 13E are cross-sectional views illustrating a method of manufacturing a graphene applied device by applying a graphene transferring method, …
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A graphene transfer method, comprising: forming a catalyst layer on a first substrate; forming a graphene layer on the catalyst layer; forming a protection metal layer on the graphene layer; attaching a supporter to the protection metal layer; separating the first substrate from the catalyst layer such that the protection metal layer, the graphene layer, and the catalyst layer remain on the supporter; removing the catalyst layer from the supporter; and transferring the protection metal layer and the graphene layer from the supporter to a second substrate.
The graphene transfer method of claim 1, wherein a size of the protection metal layer is smaller than a size of the graphene layer, and an outer portion of the graphene layer is exposed by the protection metal layer.
The graphene transfer method of claim 1, wherein the protection metal layer includes at least one of Au, Cu, Ni, Ti, Fe, Ru, Pd, Al and combinations thereof. Page 2 Application No. 14/268,053 Attorney Docket No. 2557SI- 00 2043-US
The graphene transfer method of claim 1, wherein the forming of the protection metal layer includes performing an evaporation process.
The graphene transfer method of claim 1, further comprising: providing an insulating layer between the first substrate and the catalyst layer, wherein the separating of the first substrate includes separating the catalyst layer and the insulating layer from each other.
The graphene transfer method of claim 1, further comprising: providing an insulating layer between the first substrate and the catalyst layer, wherein the separating of the first substrate includes removing at least a portion of the insulating layer.
The graphene transfer method of claim 1, wherein a size of the supporter is greater than a size of the first substrate.
The graphene transfer method of claim 1, wherein the transferring of the protection metal layer and the graphene layer from the supporter to the second substrate includes, attaching the second substrate to the graphene layer; and removing the supporter from the protection metal layer.
The graphene transfer method of claim 1, wherein at least one of the first substrate and the second substrate is a wafer level substrate.
A method of manufacturing a graphene applied device, the SVG 14268053.04-23-2015.I₉₃₂₀₂DGPXXIFW4.CLM15374968.30.527.2217.1255.2271.svg 0.18 2.427 Graph Black and white transferring the graphene layer and the protection metal layer from the first substrate to the second substrate according to the method of claim 1; and forming the graphene applied device such that the graphene layer on the second substrate is incorporated into the graphene applied device.
A graphene transfer method, comprising: forming a thin film including a graphene layer on a first substrate; forming a protection layer having a size smaller than a size of the graphene layer on the thin film such that a portion of the thin film around the protection layer is exposed; attaching a supporter to the protection layer and the exposed portion of the thin film; separating the first substrate from the thin film such that the protection layer and the thin film remain on the supporter; and transferring the graphene layer from the supporter to a second substrate.
The graphene transfer method of claim 14, wherein the thin film further includes a catalyst layer provided between the first substrate and the graphene layer.
canceled
canceled
canceled
canceled of the graphene applied device includes forming layer. Page 4 Application No. 14/268,053 applied device includes a transistor. 20- 23.
Layer stacks claimed or described, ordered top of device to substrate.
graphene applied device (transistor)
Materials described outside the worked examples.
graphene layer
protection metal layer
catalyst layer
Additional fabrication and treatment steps described in the patent.
Measurements and analyses referenced in the patent, with their drawing references.
FIGS. 9 and 10 are scanning electron microscope (SEM) images of surfaces of graphene layers transferred according to a comparative example and example …
Related documents with shared materials, methods, properties, or citations.
Patent
Atlas literature
Patent
US 9,196,478Patent drawings and their descriptions. Click a drawing to enlarge it.
FIGS. 1 A through 1H are cross-sectional views for explaining a graphene transferring method, according to example embodiments; [39]
FIGS. 2A through 2 C are cross-sectional views for explaining a graphene transferring method, according to example embodiments; [40]
FIGS. 3A and 3B are cross-sectional views for explaining a graphene transferring method, according to example embodiments; [41]
FIGS. 4A and 4B are cross-sectional views for explaining a graphene transferring method, according to example embodiments; [42]
FIGS. 5A through 5 C are cross-sectional views for explaining a graphene transferring method, according to example embodiments; [43]
FIGS. 6A through 6E are cross-sectional views for explaining a graphene transferring method, according to example embodiments; [44]
FIG. 7 is a photo of a structure corresponding to an operation of
FIG. 8 is a photo of a structure corresponding to an operation of
FIGS. 9 and 10 are scanning electron microscope (SEM) images of surfaces of graphene layers transferred according to a comparative example and example …
FIG. 10; [48]
FIG. 11 is a graph illustrating a result obtained by measuring a Raman spectrum characteristic of the graphene layer of
FIG. 12 is a graph illustrating a result obtained by measuring electrical resistance of graphene layers transferred according to a comparative example and …
FIGS. 13A through 13E are cross-sectional views illustrating a method of manufacturing a graphene applied device by applying a graphene transferring method, …
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A graphene transfer method, comprising: forming a catalyst layer on a first substrate; forming a graphene layer on the catalyst layer; forming a protection metal layer on the graphene layer; attaching a supporter to the protection metal layer; separating the first substrate from the catalyst layer such that the protection metal layer, the graphene layer, and the catalyst layer remain on the supporter; removing the catalyst layer from the supporter; and transferring the protection metal layer and the graphene layer from the supporter to a second substrate.
The graphene transfer method of claim 1, wherein a size of the protection metal layer is smaller than a size of the graphene layer, and an outer portion of the graphene layer is exposed by the protection metal layer.
The graphene transfer method of claim 1, wherein the protection metal layer includes at least one of Au, Cu, Ni, Ti, Fe, Ru, Pd, Al and combinations thereof. Page 2 Application No. 14/268,053 Attorney Docket No. 2557SI- 00 2043-US
The graphene transfer method of claim 1, wherein the forming of the protection metal layer includes performing an evaporation process.
The graphene transfer method of claim 1, further comprising: providing an insulating layer between the first substrate and the catalyst layer, wherein the separating of the first substrate includes separating the catalyst layer and the insulating layer from each other.
The graphene transfer method of claim 1, further comprising: providing an insulating layer between the first substrate and the catalyst layer, wherein the separating of the first substrate includes removing at least a portion of the insulating layer.
The graphene transfer method of claim 1, wherein a size of the supporter is greater than a size of the first substrate.
The graphene transfer method of claim 1, wherein the transferring of the protection metal layer and the graphene layer from the supporter to the second substrate includes, attaching the second substrate to the graphene layer; and removing the supporter from the protection metal layer.
The graphene transfer method of claim 1, wherein at least one of the first substrate and the second substrate is a wafer level substrate.
A method of manufacturing a graphene applied device, the SVG 14268053.04-23-2015.I₉₃₂₀₂DGPXXIFW4.CLM15374968.30.527.2217.1255.2271.svg 0.18 2.427 Graph Black and white transferring the graphene layer and the protection metal layer from the first substrate to the second substrate according to the method of claim 1; and forming the graphene applied device such that the graphene layer on the second substrate is incorporated into the graphene applied device.
A graphene transfer method, comprising: forming a thin film including a graphene layer on a first substrate; forming a protection layer having a size smaller than a size of the graphene layer on the thin film such that a portion of the thin film around the protection layer is exposed; attaching a supporter to the protection layer and the exposed portion of the thin film; separating the first substrate from the thin film such that the protection layer and the thin film remain on the supporter; and transferring the graphene layer from the supporter to a second substrate.
The graphene transfer method of claim 14, wherein the thin film further includes a catalyst layer provided between the first substrate and the graphene layer.
canceled
canceled
canceled
canceled of the graphene applied device includes forming layer. Page 4 Application No. 14/268,053 applied device includes a transistor. 20- 23.
Layer stacks claimed or described, ordered top of device to substrate.
graphene applied device (transistor)
Materials described outside the worked examples.
graphene layer
protection metal layer
catalyst layer
Additional fabrication and treatment steps described in the patent.
Measurements and analyses referenced in the patent, with their drawing references.
FIGS. 9 and 10 are scanning electron microscope (SEM) images of surfaces of graphene layers transferred according to a comparative example and example …
Related documents with shared materials, methods, properties, or citations.
Patent
Atlas literature
Patent
US 9,196,478Patent drawings and their descriptions. Click a drawing to enlarge it.
FIGS. 1 A through 1H are cross-sectional views for explaining a graphene transferring method, according to example embodiments; [39]
FIGS. 2A through 2 C are cross-sectional views for explaining a graphene transferring method, according to example embodiments; [40]
FIGS. 3A and 3B are cross-sectional views for explaining a graphene transferring method, according to example embodiments; [41]
FIGS. 4A and 4B are cross-sectional views for explaining a graphene transferring method, according to example embodiments; [42]
FIGS. 5A through 5 C are cross-sectional views for explaining a graphene transferring method, according to example embodiments; [43]
FIGS. 6A through 6E are cross-sectional views for explaining a graphene transferring method, according to example embodiments; [44]
FIG. 7 is a photo of a structure corresponding to an operation of
FIG. 8 is a photo of a structure corresponding to an operation of
FIGS. 9 and 10 are scanning electron microscope (SEM) images of surfaces of graphene layers transferred according to a comparative example and example …
FIG. 10; [48]
FIG. 11 is a graph illustrating a result obtained by measuring a Raman spectrum characteristic of the graphene layer of
FIG. 12 is a graph illustrating a result obtained by measuring electrical resistance of graphene layers transferred according to a comparative example and …
FIGS. 13A through 13E are cross-sectional views illustrating a method of manufacturing a graphene applied device by applying a graphene transferring method, …
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A graphene transfer method, comprising: forming a catalyst layer on a first substrate; forming a graphene layer on the catalyst layer; forming a protection metal layer on the graphene layer; attaching a supporter to the protection metal layer; separating the first substrate from the catalyst layer such that the protection metal layer, the graphene layer, and the catalyst layer remain on the supporter; removing the catalyst layer from the supporter; and transferring the protection metal layer and the graphene layer from the supporter to a second substrate.
The graphene transfer method of claim 1, wherein a size of the protection metal layer is smaller than a size of the graphene layer, and an outer portion of the graphene layer is exposed by the protection metal layer.
The graphene transfer method of claim 1, wherein the protection metal layer includes at least one of Au, Cu, Ni, Ti, Fe, Ru, Pd, Al and combinations thereof. Page 2 Application No. 14/268,053 Attorney Docket No. 2557SI- 00 2043-US
The graphene transfer method of claim 1, wherein the forming of the protection metal layer includes performing an evaporation process.
The graphene transfer method of claim 1, further comprising: providing an insulating layer between the first substrate and the catalyst layer, wherein the separating of the first substrate includes separating the catalyst layer and the insulating layer from each other.
The graphene transfer method of claim 1, further comprising: providing an insulating layer between the first substrate and the catalyst layer, wherein the separating of the first substrate includes removing at least a portion of the insulating layer.
The graphene transfer method of claim 1, wherein a size of the supporter is greater than a size of the first substrate.
The graphene transfer method of claim 1, wherein the transferring of the protection metal layer and the graphene layer from the supporter to the second substrate includes, attaching the second substrate to the graphene layer; and removing the supporter from the protection metal layer.
The graphene transfer method of claim 1, wherein at least one of the first substrate and the second substrate is a wafer level substrate.
A method of manufacturing a graphene applied device, the SVG 14268053.04-23-2015.I₉₃₂₀₂DGPXXIFW4.CLM15374968.30.527.2217.1255.2271.svg 0.18 2.427 Graph Black and white transferring the graphene layer and the protection metal layer from the first substrate to the second substrate according to the method of claim 1; and forming the graphene applied device such that the graphene layer on the second substrate is incorporated into the graphene applied device.
A graphene transfer method, comprising: forming a thin film including a graphene layer on a first substrate; forming a protection layer having a size smaller than a size of the graphene layer on the thin film such that a portion of the thin film around the protection layer is exposed; attaching a supporter to the protection layer and the exposed portion of the thin film; separating the first substrate from the thin film such that the protection layer and the thin film remain on the supporter; and transferring the graphene layer from the supporter to a second substrate.
The graphene transfer method of claim 14, wherein the thin film further includes a catalyst layer provided between the first substrate and the graphene layer.
canceled
canceled
canceled
canceled of the graphene applied device includes forming layer. Page 4 Application No. 14/268,053 applied device includes a transistor. 20- 23.
Layer stacks claimed or described, ordered top of device to substrate.
graphene applied device (transistor)
Materials described outside the worked examples.
graphene layer
protection metal layer
catalyst layer
Additional fabrication and treatment steps described in the patent.
Measurements and analyses referenced in the patent, with their drawing references.
FIGS. 9 and 10 are scanning electron microscope (SEM) images of surfaces of graphene layers transferred according to a comparative example and example …
Related documents with shared materials, methods, properties, or citations.
Patent
Atlas literature
Patent
US 9,196,478Patent drawings and their descriptions. Click a drawing to enlarge it.
FIGS. 1 A through 1H are cross-sectional views for explaining a graphene transferring method, according to example embodiments; [39]
FIGS. 2A through 2 C are cross-sectional views for explaining a graphene transferring method, according to example embodiments; [40]
FIGS. 3A and 3B are cross-sectional views for explaining a graphene transferring method, according to example embodiments; [41]
FIGS. 4A and 4B are cross-sectional views for explaining a graphene transferring method, according to example embodiments; [42]
FIGS. 5A through 5 C are cross-sectional views for explaining a graphene transferring method, according to example embodiments; [43]
FIGS. 6A through 6E are cross-sectional views for explaining a graphene transferring method, according to example embodiments; [44]
FIG. 7 is a photo of a structure corresponding to an operation of
FIG. 8 is a photo of a structure corresponding to an operation of
FIGS. 9 and 10 are scanning electron microscope (SEM) images of surfaces of graphene layers transferred according to a comparative example and example …
FIG. 10; [48]
FIG. 11 is a graph illustrating a result obtained by measuring a Raman spectrum characteristic of the graphene layer of
FIG. 12 is a graph illustrating a result obtained by measuring electrical resistance of graphene layers transferred according to a comparative example and …
FIGS. 13A through 13E are cross-sectional views illustrating a method of manufacturing a graphene applied device by applying a graphene transferring method, …
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A graphene transfer method, comprising: forming a catalyst layer on a first substrate; forming a graphene layer on the catalyst layer; forming a protection metal layer on the graphene layer; attaching a supporter to the protection metal layer; separating the first substrate from the catalyst layer such that the protection metal layer, the graphene layer, and the catalyst layer remain on the supporter; removing the catalyst layer from the supporter; and transferring the protection metal layer and the graphene layer from the supporter to a second substrate.
The graphene transfer method of claim 1, wherein a size of the protection metal layer is smaller than a size of the graphene layer, and an outer portion of the graphene layer is exposed by the protection metal layer.
The graphene transfer method of claim 1, wherein the protection metal layer includes at least one of Au, Cu, Ni, Ti, Fe, Ru, Pd, Al and combinations thereof. Page 2 Application No. 14/268,053 Attorney Docket No. 2557SI- 00 2043-US
The graphene transfer method of claim 1, wherein the forming of the protection metal layer includes performing an evaporation process.
The graphene transfer method of claim 1, further comprising: providing an insulating layer between the first substrate and the catalyst layer, wherein the separating of the first substrate includes separating the catalyst layer and the insulating layer from each other.
The graphene transfer method of claim 1, further comprising: providing an insulating layer between the first substrate and the catalyst layer, wherein the separating of the first substrate includes removing at least a portion of the insulating layer.
The graphene transfer method of claim 1, wherein a size of the supporter is greater than a size of the first substrate.
The graphene transfer method of claim 1, wherein the transferring of the protection metal layer and the graphene layer from the supporter to the second substrate includes, attaching the second substrate to the graphene layer; and removing the supporter from the protection metal layer.
The graphene transfer method of claim 1, wherein at least one of the first substrate and the second substrate is a wafer level substrate.
A method of manufacturing a graphene applied device, the SVG 14268053.04-23-2015.I₉₃₂₀₂DGPXXIFW4.CLM15374968.30.527.2217.1255.2271.svg 0.18 2.427 Graph Black and white transferring the graphene layer and the protection metal layer from the first substrate to the second substrate according to the method of claim 1; and forming the graphene applied device such that the graphene layer on the second substrate is incorporated into the graphene applied device.
A graphene transfer method, comprising: forming a thin film including a graphene layer on a first substrate; forming a protection layer having a size smaller than a size of the graphene layer on the thin film such that a portion of the thin film around the protection layer is exposed; attaching a supporter to the protection layer and the exposed portion of the thin film; separating the first substrate from the thin film such that the protection layer and the thin film remain on the supporter; and transferring the graphene layer from the supporter to a second substrate.
The graphene transfer method of claim 14, wherein the thin film further includes a catalyst layer provided between the first substrate and the graphene layer.
canceled
canceled
canceled
canceled of the graphene applied device includes forming layer. Page 4 Application No. 14/268,053 applied device includes a transistor. 20- 23.
Layer stacks claimed or described, ordered top of device to substrate.
graphene applied device (transistor)
Materials described outside the worked examples.
graphene layer
protection metal layer
catalyst layer
Additional fabrication and treatment steps described in the patent.
Measurements and analyses referenced in the patent, with their drawing references.
FIGS. 9 and 10 are scanning electron microscope (SEM) images of surfaces of graphene layers transferred according to a comparative example and example …
Related documents with shared materials, methods, properties, or citations.
Au
Cu
Ni
Ti
Fe
Ru
Pd
Al
insulating layer
deionized water
H₂O
protection layer
FIG. 11 is a graph illustrating a result obtained by measuring a Raman spectrum characteristic of the graphene layer of
FIG. 11 is a graph illustrating a result obtained by measuring a Raman spectrum characteristic of the graphene layer of
FIG. 12 is a graph illustrating a result obtained by measuring electrical resistance of graphene layers transferred according to a comparative example and …
FIG. 12 is a graph illustrating a result obtained by measuring electrical resistance of graphene layers transferred according to a comparative example and …
Au
Cu
Ni
Ti
Fe
Ru
Pd
Al
insulating layer
deionized water
H₂O
protection layer
FIG. 11 is a graph illustrating a result obtained by measuring a Raman spectrum characteristic of the graphene layer of
FIG. 11 is a graph illustrating a result obtained by measuring a Raman spectrum characteristic of the graphene layer of
FIG. 12 is a graph illustrating a result obtained by measuring electrical resistance of graphene layers transferred according to a comparative example and …
FIG. 12 is a graph illustrating a result obtained by measuring electrical resistance of graphene layers transferred according to a comparative example and …
Au
Cu
Ni
Ti
Fe
Ru
Pd
Al
insulating layer
deionized water
H₂O
protection layer
FIG. 11 is a graph illustrating a result obtained by measuring a Raman spectrum characteristic of the graphene layer of
FIG. 11 is a graph illustrating a result obtained by measuring a Raman spectrum characteristic of the graphene layer of
FIG. 12 is a graph illustrating a result obtained by measuring electrical resistance of graphene layers transferred according to a comparative example and …
FIG. 12 is a graph illustrating a result obtained by measuring electrical resistance of graphene layers transferred according to a comparative example and …
Au
Cu
Ni
Ti
Fe
Ru
Pd
Al
insulating layer
deionized water
H₂O
protection layer
FIG. 11 is a graph illustrating a result obtained by measuring a Raman spectrum characteristic of the graphene layer of
FIG. 11 is a graph illustrating a result obtained by measuring a Raman spectrum characteristic of the graphene layer of
FIG. 12 is a graph illustrating a result obtained by measuring electrical resistance of graphene layers transferred according to a comparative example and …
FIG. 12 is a graph illustrating a result obtained by measuring electrical resistance of graphene layers transferred according to a comparative example and …